Schottky emission

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CPC
H01J2237/06316

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/06316Schottky emission

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for Schottky TFE inspection
- Patent number 12,165,834
- Issue date Dec 10, 2024
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Emitter, electron gun in which same is used, electronic device in w...
- Patent number 11,984,294
- Issue date May 14, 2024
- National Institute for Materials Science
- Jie Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun and charged particle beam device equipped with electro...
- Patent number 11,978,609
- Issue date May 7, 2024
- HITACHI HIGH-TECH CORPORATION
- Minoru Kaneda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Filament-less electron source
- Patent number 11,887,805
- Issue date Jan 30, 2024
- FEI Company
- John Stiller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron emitter and method of fabricating same
- Patent number 11,688,579
- Issue date Jun 27, 2023
- ASML Netherlands B.V.
- Juying Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for Schottky TFE inspection
- Patent number 11,640,896
- Issue date May 2, 2023
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source, method for manufacturing the same, and electron be...
- Patent number 11,322,329
- Issue date May 3, 2022
- HITACHI HIGH-TECH CORPORATION
- Toshiaki Kusunoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection tool, lithographic apparatus, electron beam source and a...
- Patent number 11,243,179
- Issue date Feb 8, 2022
- ASML Netherlands B.V.
- Erwin Paul Smakman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron emitter and method of fabricating same
- Patent number 11,201,032
- Issue date Dec 14, 2021
- ASML Netherlands B.V.
- Juying Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron emitter and method of fabricating same
- Patent number 10,784,071
- Issue date Sep 22, 2020
- ASML Netherlands B.V.
- Juying Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gun lens design in a charged particle microscope
- Patent number 10,410,827
- Issue date Sep 10, 2019
- FEI Company
- Ali Mohammadi-Gheidari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing electron source
- Patent number 10,074,506
- Issue date Sep 11, 2018
- Hitachi High-Technologies Corporation
- Takashi Ichimura
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Extractor electrode for electron source
- Patent number 9,934,933
- Issue date Apr 3, 2018
- KLA-Tencor Corporation
- Laurence S. Hordon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode material with low work function and high chemical stability
- Patent number 9,812,279
- Issue date Nov 7, 2017
- Jian Xin Yan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Array of carbon nanotube micro-tip structures
- Patent number 9,734,976
- Issue date Aug 15, 2017
- Tsinghua University
- Yang Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Emitter structure, gas ion source and focused ion beam system
- Patent number 9,640,361
- Issue date May 2, 2017
- Hitachi High-Tech Science Corporation
- Anto Yasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon nanotube based micro-tip structure and method for making the...
- Patent number 9,437,391
- Issue date Sep 6, 2016
- Tsinghua University
- Yang Wei
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Electron gun and charged particle beam device having an aperture wi...
- Patent number 9,293,293
- Issue date Mar 22, 2016
- Hitachi High-Technologies Corporation
- Shun-ichi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam control method, electron beam generating apparatus, a...
- Patent number 9,257,257
- Issue date Feb 9, 2016
- Shimadzu Corporation
- Shin Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Emitter structure, gas ion source and focused ion beam system
- Patent number 9,129,771
- Issue date Sep 8, 2015
- Hitachi High-Tech Science Corporation
- Anto Yasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun emitting under high voltage, in particular for electro...
- Patent number 9,048,057
- Issue date Jun 2, 2015
- Centre National de la Recherche Scientifique (Cnrs)
- Marc Monthioux
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Filament for electron source
- Patent number 8,896,195
- Issue date Nov 25, 2014
- Hermes Microvision, Inc.
- Juying Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of pretreatment of an electron gun chamber
- Patent number 8,878,148
- Issue date Nov 4, 2014
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electric field discharge-type electron source
- Patent number 8,866,371
- Issue date Oct 21, 2014
- Hitachi High-Technologies Corporation
- Souichi Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Determination of emission parameters from field emission sources
- Patent number 8,779,376
- Issue date Jul 15, 2014
- FEI Company
- Lynwood W. Swanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun
- Patent number 8,669,535
- Issue date Mar 11, 2014
- Hitachi High-Technologies Corporation
- Mikio Ichihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source having a tungsten single crystal electrode
- Patent number 8,593,048
- Issue date Nov 26, 2013
- Denki Kagaku Kogyo Kabushiki Kaisha
- Ryozo Nonogaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source and electron beam apparatus
- Patent number 8,519,608
- Issue date Aug 27, 2013
- Denki Kagaku Kogyo Kabushiki Kaisha
- Ryozo Nonogaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Fabrication of super ion—electron source and nanoprobe by local ele...
- Patent number 8,460,049
- Issue date Jun 11, 2013
- Khalifa University of Science and Technology & Research (Kustar)
- Moh'd Rezeq
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device and electron beam application device using the...
- Patent number 8,450,699
- Issue date May 28, 2013
- Hitachi High-Technologies Corporation
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Charged Particle Gun and Charged Particle Beam Apparatus
- Publication number 20240212966
- Publication date Jun 27, 2024
- HITACHI HIGH-TECH CORPORATION
- Tomoya IGARI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMITTER, ELECTRON GUN IN WHICH SAME IS USED, ELECTRONIC DEVICE IN W...
- Publication number 20240079198
- Publication date Mar 7, 2024
- NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Jie TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Source, Method of Manufacturing the Same, And Electron Bea...
- Publication number 20230317401
- Publication date Oct 5, 2023
- Hitachi High-Tech Corporation
- Toshiaki KUSUNOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION
- Publication number 20230253178
- Publication date Aug 10, 2023
- NUFLARE TECHNOLOGY, INC.
- Victor KATSAP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILAMENT-LESS ELECTRON SOURCE
- Publication number 20230101787
- Publication date Mar 30, 2023
- FEI Company
- John Stiller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Source, Electron Beam Device, and Method for Manufacturing...
- Publication number 20220415603
- Publication date Dec 29, 2022
- Hitachi High-Tech Corporation
- Toshiaki KUSUNOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION
- Publication number 20220367145
- Publication date Nov 17, 2022
- NUFLARE TECHNOLOGY, INC.
- Victor KATSAP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Gun and Charged Particle Beam Device Equipped With Electro...
- Publication number 20220230835
- Publication date Jul 21, 2022
- Hitachi High-Tech Corporation
- Minoru KANEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE, METHOD FOR MANUFACTURING THE SAME, AND ELECTRON BE...
- Publication number 20210327674
- Publication date Oct 21, 2021
- HITACHI HIGH-TECH CORPORATION
- Toshiaki KUSUNOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION TOOL, LITHOGRAPHIC APPARATUS, ELECTRON BEAM SOURCE AND A...
- Publication number 20200249181
- Publication date Aug 6, 2020
- ASML NETHERLANDS B.V.
- Erwin Paul SMAKMAN
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON EMITTER AND METHOD OF FABRICATING SAME
- Publication number 20190172674
- Publication date Jun 6, 2019
- ASML Netherlands B.V.
- Juying DOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMITTER STRUCTURE, GAS ION SOURCE AND FOCUSED ION BEAM SYSTEM
- Publication number 20140291542
- Publication date Oct 2, 2014
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Anto YASAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRIC FIELD DISCHARGE-TYPE ELECTRON SOURCE
- Publication number 20140197725
- Publication date Jul 17, 2014
- Souichi Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20140197336
- Publication date Jul 17, 2014
- Hitachi High-Technologies Corporation
- Shun-ichi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN EMITTING UNDER HIGH VOLTAGE, IN PARTICULAR FOR ELECTRO...
- Publication number 20130234025
- Publication date Sep 12, 2013
- Centre National De La Recherche Scientifique (CNRS)
- Marc Monthioux
- B82 - NANO-TECHNOLOGY
Information Patent Application
CARBON NANOTUBE BASED MICRO-TIP STRUCTURE AND METHOD FOR MAKING THE...
- Publication number 20130224429
- Publication date Aug 29, 2013
- HON HAI Precision Industry CO., LTD.
- YANG WEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Determination of Emission Parameters from Field Emission Sources
- Publication number 20130187058
- Publication date Jul 25, 2013
- FEI Company
- Lynwood W. Swanson
- G01 - MEASURING TESTING
Information Patent Application
FABRICATION OF SUPER ION - ELECTRON SOURCE AND NANOPROBE BY LOCAL E...
- Publication number 20130122774
- Publication date May 16, 2013
- Moh'd Rezeq
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE
- Publication number 20130049568
- Publication date Feb 28, 2013
- DENKI KAGAKU KOGYO KABUSHIKI KAISHA
- Ryozo Nonogaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPARATUS AND A DEVICE MANUFACTURING METHOD BY USING...
- Publication number 20130032716
- Publication date Feb 7, 2013
- EBARA CORPORATION
- Mamoru Nakasuji
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTRON-SOURCE ROD, ELECTRON SOURCE AND ELECTRONIC DEVICE
- Publication number 20120169210
- Publication date Jul 5, 2012
- DENKI KAGAKU KOGYO KABUSHIKI KAISHA
- Toshiyuki Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM SOURCE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20120131785
- Publication date May 31, 2012
- NANOTOOLS GMBH
- Volker Drexel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE GUN AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20120104272
- Publication date May 3, 2012
- Hitachi High-Technologies Corporation
- Boklae Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Filament for Electron Source
- Publication number 20120098409
- Publication date Apr 26, 2012
- Hermes Microvision, Inc.
- Juying DOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE RADIATION DEVICE
- Publication number 20120085925
- Publication date Apr 12, 2012
- Hitachi High-Technologies Corporation
- Keigo Kasuya
- B82 - NANO-TECHNOLOGY
Information Patent Application
ELECTRON GUN
- Publication number 20120062094
- Publication date Mar 15, 2012
- Mikio Ichihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING ARTICL...
- Publication number 20110294071
- Publication date Dec 1, 2011
- Canon Kabushiki Kaisha
- Nobuo Imaoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM DEVICE AND ELECTRON BEAM APPLICATION DEVICE USING THE...
- Publication number 20110240855
- Publication date Oct 6, 2011
- Hitachi High-Technologies Corporation
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE, ELECTRON GUN, AND ELECTRON MICROSCOPE DEVICE AND E...
- Publication number 20110186735
- Publication date Aug 4, 2011
- Hitachi, Ltd.
- Tadashi FUJIEDA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Cold Field Emitter
- Publication number 20110101238
- Publication date May 5, 2011
- FEI Company
- Theodore Carl Tessner, II
- H01 - BASIC ELECTRIC ELEMENTS

Schottky emission

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and apparatus for Schottky TFE inspection

Emitter, electron gun in which same is used, electronic device in w...

Electron gun and charged particle beam device equipped with electro...

Filament-less electron source

Electron emitter and method of fabricating same

Method and apparatus for Schottky TFE inspection

Electron source, method for manufacturing the same, and electron be...

Inspection tool, lithographic apparatus, electron beam source and a...

Electron emitter and method of fabricating same

Electron emitter and method of fabricating same

Gun lens design in a charged particle microscope

Method for manufacturing electron source

Extractor electrode for electron source

Electrode material with low work function and high chemical stability

Array of carbon nanotube micro-tip structures

Emitter structure, gas ion source and focused ion beam system

Carbon nanotube based micro-tip structure and method for making the...

Electron gun and charged particle beam device having an aperture wi...

Electron beam control method, electron beam generating apparatus, a...

Emitter structure, gas ion source and focused ion beam system

Electron gun emitting under high voltage, in particular for electro...

Filament for electron source

Method and apparatus of pretreatment of an electron gun chamber

Electric field discharge-type electron source

Determination of emission parameters from field emission sources

Electron gun

Electron source having a tungsten single crystal electrode

Electron source and electron beam apparatus

Fabrication of super ion—electron source and nanoprobe by local ele...

Electron beam device and electron beam application device using the...

Patents Applicationslast 30 patents

Charged Particle Gun and Charged Particle Beam Apparatus

EMITTER, ELECTRON GUN IN WHICH SAME IS USED, ELECTRONIC DEVICE IN W...

Electron Source, Method of Manufacturing the Same, And Electron Bea...

METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION

FILAMENT-LESS ELECTRON SOURCE

Electron Source, Electron Beam Device, and Method for Manufacturing...

METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION

Electron Gun and Charged Particle Beam Device Equipped With Electro...

ELECTRON SOURCE, METHOD FOR MANUFACTURING THE SAME, AND ELECTRON BE...

INSPECTION TOOL, LITHOGRAPHIC APPARATUS, ELECTRON BEAM SOURCE AND A...

ELECTRON EMITTER AND METHOD OF FABRICATING SAME

EMITTER STRUCTURE, GAS ION SOURCE AND FOCUSED ION BEAM SYSTEM

ELECTRIC FIELD DISCHARGE-TYPE ELECTRON SOURCE

ELECTRON GUN AND CHARGED PARTICLE BEAM DEVICE

ELECTRON GUN EMITTING UNDER HIGH VOLTAGE, IN PARTICULAR FOR ELECTRO...

CARBON NANOTUBE BASED MICRO-TIP STRUCTURE AND METHOD FOR MAKING THE...

Determination of Emission Parameters from Field Emission Sources

FABRICATION OF SUPER ION - ELECTRON SOURCE AND NANOPROBE BY LOCAL E...

ELECTRON SOURCE

ELECTRON BEAM APPARATUS AND A DEVICE MANUFACTURING METHOD BY USING...

ELECTRON-SOURCE ROD, ELECTRON SOURCE AND ELECTRONIC DEVICE

ELECTRON BEAM SOURCE AND METHOD OF MANUFACTURING THE SAME

CHARGED PARTICLE GUN AND CHARGED PARTICLE BEAM DEVICE

Filament for Electron Source

CHARGED PARTICLE RADIATION DEVICE

ELECTRON GUN

ELECTRON GUN, LITHOGRAPHY APPARATUS, METHOD OF MANUFACTURING ARTICL...

ELECTRON BEAM DEVICE AND ELECTRON BEAM APPLICATION DEVICE USING THE...

ELECTRON SOURCE, ELECTRON GUN, AND ELECTRON MICROSCOPE DEVICE AND E...

Cold Field Emitter