Seal mechanisms

Industry

CPC
H01J2237/2005

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2005Seal mechanisms

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck with seal surface
- Patent number 12,142,509
- Issue date Nov 12, 2024
- Lam Research Corporation
- Patrick G. Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cryotransfer holder and workstation
- Patent number 11,908,655
- Issue date Feb 20, 2024
- Gatan, Inc.
- Alexander Jozef Gubbens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam etching system
- Patent number 11,373,842
- Issue date Jun 28, 2022
- JIANGSU LEUVEN INSTRUMENTS CO. LTD
- Na Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Specimen holder
- Patent number 10,242,841
- Issue date Mar 26, 2019
- Mel-Build Corporation
- Hiroya Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micro-chamber for inspecting sample material
- Patent number 9,741,529
- Issue date Aug 22, 2017
- FEI Company
- Luigi Mele
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Linkage conduit for vacuum chamber applications
- Patent number 9,484,183
- Issue date Nov 1, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Eric D. Hermanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece support structure with four degree of freedom air bearing...
- Patent number 9,337,076
- Issue date May 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- James P. Buonodono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support structure, clamp preparation unit, and lithograph...
- Patent number 8,991,330
- Issue date Mar 31, 2015
- Mapper Lithography IP B.V.
- Hendrik Jan De Jong
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Effective algorithm for warming a twist axis for cold ion implantat...
- Patent number 8,481,969
- Issue date Jul 9, 2013
- Axcelis Technologies, Inc.
- Kan Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Table guided by aerostatic bearing elements for vacuum application
- Patent number 8,267,582
- Issue date Sep 18, 2012
- Vistec Electron Beam GmbH
- Gerhard Schubert
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method of temperature control during cleaving process...
- Patent number 8,222,119
- Issue date Jul 17, 2012
- Silicon Genesis Corporation
- Francois J. Henley
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Grant
Conductive seal ring electrostatic chuck
- Patent number 8,139,340
- Issue date Mar 20, 2012
- Plasma-Therm LLC
- Glyn J. Reynolds
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of use of reusable sample holding device permitting ready lo...
- Patent number 8,102,523
- Issue date Jan 24, 2012
- The United States of America as represented by the Secretary of the Army
- Charles P. Marsh
- G02 - OPTICS
Information Patent Grant
Hermetic sample holder and method for performing microanalysis unde...
- Patent number 8,087,309
- Issue date Jan 3, 2012
- Sion Power Corporation
- Tracy Earl Kelley
- G01 - MEASURING TESTING
Information Patent Grant
Reusable sample holding device permitting ready loading of very sma...
- Patent number 8,059,271
- Issue date Nov 15, 2011
- The United States of America as represented by the Secretary of the Army
- Charles P. Marsh
- G02 - OPTICS
Information Patent Grant
Ion implantation apparatus
- Patent number 8,044,374
- Issue date Oct 25, 2011
- Twin Creeks Technologies, Inc.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample holder, method for observation and inspection, and apparatus...
- Patent number 7,928,380
- Issue date Apr 19, 2011
- Jeol Ltd.
- Mitsuo Suga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for differentially pumping endblock seal cavity
- Patent number 7,513,141
- Issue date Apr 7, 2009
- Applied Films Corporation
- James G. Rietzel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for in-situ probe tip replacement inside a cha...
- Patent number 7,381,971
- Issue date Jun 3, 2008
- Omniprobe, Inc.
- Thomas M. Moore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-mass and compact stage devices exhibiting six degrees of freedo...
- Patent number 6,867,534
- Issue date Mar 15, 2005
- Nikon Corporation
- Keiichi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Holder driving unit
- Patent number 6,805,487
- Issue date Oct 19, 2004
- Nissin Electric Co., Ltd.
- Satoru Yuasa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Dissolution stage for an environmental scanning electron microscope
- Patent number 6,444,982
- Issue date Sep 3, 2002
- Euro-Celtique, S.A.
- James A. Mitchell
- G01 - MEASURING TESTING
Information Patent Grant
Dissolution stage for an environmental scanning electron microscope
- Patent number 6,130,434
- Issue date Oct 10, 2000
- Euro-Celtique, S.A.
- James A. Mitchell
- G01 - MEASURING TESTING
Information Patent Grant
Charged beam apparatus
- Patent number 5,493,125
- Issue date Feb 20, 1996
- Agency of Industrial Science and Technology
- Shigeo Okayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process and apparatus, for electron beam welding of a member partia...
- Patent number 5,170,028
- Issue date Dec 8, 1992
- Hitachi, Ltd.
- Takeshi Wada
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK WITH SEAL SURFACE
- Publication number 20250062150
- Publication date Feb 20, 2025
- LAM RESEARCH CORPORATION
- Patrick Girard Breiling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE HOLDER AND ELECTRON MICROSCOPE
- Publication number 20240404781
- Publication date Dec 5, 2024
- Hitachi Ltd.
- Toshiaki TANIGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240321558
- Publication date Sep 26, 2024
- Kokusai Electric Corporation
- Takeshi YASUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR ALIGNING DIELECTRIC...
- Publication number 20240274411
- Publication date Aug 15, 2024
- PSK INC.
- Kwang Sung YOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT BODY
- Publication number 20240266154
- Publication date Aug 8, 2024
- TOKYO ELECTRON LIMITED
- Daiki HARIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER AND SEMICONDUCTOR PROCESS DEVICE
- Publication number 20230402265
- Publication date Dec 14, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yancheng LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20230212735
- Publication date Jul 6, 2023
- Applied Materials, Inc.
- Nagabhushana NANJUNDAPPA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20230207288
- Publication date Jun 29, 2023
- SEMES CO. LTD.
- Sang-Kee LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PLACEMENT TABLE
- Publication number 20230116574
- Publication date Apr 13, 2023
- NGK Insulators, Ltd.
- Tatsuya KUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR SUPPORTING SUBSTRATE HAVING THERMAL EXPANSION COEFFICIENT
- Publication number 20210305077
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Daisuke HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SUPPORT UNIT AND WAFER TREATMENT SYSTEM INCLUDING THE SAME
- Publication number 20210020488
- Publication date Jan 21, 2021
- SEMES CO., LTD.
- So Hyung Jiong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH SEAL SURFACE
- Publication number 20210013080
- Publication date Jan 14, 2021
- LAM RESEARCH CORPORATION
- Patrick G. Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM ETCHING SYSTEM
- Publication number 20200161088
- Publication date May 21, 2020
- JIANGSU LEUVEN INSTRUMENTS CO. LTD
- Na LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPECIMEN HOLDER
- Publication number 20180096817
- Publication date Apr 5, 2018
- Mel-Build Corporation
- Hiroya Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE SUPPORT STRUCTURE WITH FOUR DEGREE OF FREEDOM AIR BEARING...
- Publication number 20140265093
- Publication date Sep 18, 2014
- Varian Semiconductor Equipment Associates, Inc.
- James P. Buonodono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE SUPPORT STRUCTURE WITH FOUR DEGREE OF FREEDOM AIR BEARING...
- Publication number 20140264069
- Publication date Sep 18, 2014
- Varian Semiconductor Equipment Associates, Inc.
- James P. Buonodono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF TEMPERATURE CONTROL DURING CLEAVING PROCESS...
- Publication number 20120077289
- Publication date Mar 29, 2012
- Silicon Genesis Corporation
- Francois J. Henley
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Application
METHOD OF USE OF REUSABLE SAMPLE HOLDING DEVICE PERMITTING READY LO...
- Publication number 20120017415
- Publication date Jan 26, 2012
- CHARLES P. MARSH
- G02 - OPTICS
Information Patent Application
EFFECTIVE ALGORITHM FOR WARMING A TWIST AXIS FOR COLD ION IMPLANTAT...
- Publication number 20110297845
- Publication date Dec 8, 2011
- Axcelis Technologies, Inc.
- Kan Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Conductive Seal Ring Electrostatic Chuck
- Publication number 20110026187
- Publication date Feb 3, 2011
- Glyn J. Reynolds
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS
- Publication number 20100327181
- Publication date Dec 30, 2010
- TWIN CREEKS TECHNOLOGIES, INC.
- Geoffrey Ryding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HERMETIC SAMPLE HOLDER AND METHOD FOR PERFORMING MICROANALYSIS UNDE...
- Publication number 20100294049
- Publication date Nov 25, 2010
- Sion Power Corporation
- Tracy Earl Kelley
- G01 - MEASURING TESTING
Information Patent Application
Substrate Support Structure, Clamp Preparation Unit, and Lithograph...
- Publication number 20100236476
- Publication date Sep 23, 2010
- MAPPER LITHOGRAPHY IP BV
- Hendrik Jan DE JONG
- B82 - NANO-TECHNOLOGY
Information Patent Application
REUSABLE SAMPLE HOLDING DEVICE PERMITTING READY LOADING OF VERY SMA...
- Publication number 20100193398
- Publication date Aug 5, 2010
- CHARLES P. MARSH
- G02 - OPTICS
Information Patent Application
TABLE GUIDED BY AEROSTATIC BEARING ELEMENTS FOR VACUUM APPLICATION
- Publication number 20090255447
- Publication date Oct 15, 2009
- VISTEC ELECTRON BEAM GMBH
- Gerhard Schubert
- B82 - NANO-TECHNOLOGY
Information Patent Application
Sample Holder, Method for Observation and Inspection, and Apparatus...
- Publication number 20090166536
- Publication date Jul 2, 2009
- JEOL Ltd.
- Mitsuo Suga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Differentially Pumping Endblock Seal Cavity
- Publication number 20090095055
- Publication date Apr 16, 2009
- James G. Rietzel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF TEMPERATURE CONROL DURING CLEAVING PROCESSE...
- Publication number 20080188011
- Publication date Aug 7, 2008
- Silicon Genesis Corporation
- Francois J. Henley
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Application
Plasma resistant seal assembly with replaceable barrier shield
- Publication number 20060273277
- Publication date Dec 7, 2006
- Mark James Heller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060075972
- Publication date Apr 13, 2006
- Hitachi Kokusai Electric Inc.
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Seal mechanisms

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electrostatic chuck with seal surface

Cryotransfer holder and workstation

Ion beam etching system

Specimen holder

Micro-chamber for inspecting sample material

Linkage conduit for vacuum chamber applications

Workpiece support structure with four degree of freedom air bearing...

Substrate support structure, clamp preparation unit, and lithograph...

Effective algorithm for warming a twist axis for cold ion implantat...

Table guided by aerostatic bearing elements for vacuum application

Apparatus and method of temperature control during cleaving process...

Conductive seal ring electrostatic chuck

Method of use of reusable sample holding device permitting ready lo...

Hermetic sample holder and method for performing microanalysis unde...

Reusable sample holding device permitting ready loading of very sma...

Ion implantation apparatus

Sample holder, method for observation and inspection, and apparatus...

Method for differentially pumping endblock seal cavity

Method and apparatus for in-situ probe tip replacement inside a cha...

Low-mass and compact stage devices exhibiting six degrees of freedo...

Holder driving unit

Dissolution stage for an environmental scanning electron microscope

Dissolution stage for an environmental scanning electron microscope

Charged beam apparatus

Process and apparatus, for electron beam welding of a member partia...

Patents Applicationslast 30 patents

ELECTROSTATIC CHUCK WITH SEAL SURFACE

SAMPLE HOLDER AND ELECTRON MICROSCOPE

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR ALIGNING DIELECTRIC...

PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT BODY

PROCESS CHAMBER AND SEMICONDUCTOR PROCESS DEVICE

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE TREATMENT APPARATUS

WAFER PLACEMENT TABLE

DEVICE FOR SUPPORTING SUBSTRATE HAVING THERMAL EXPANSION COEFFICIENT

WAFER SUPPORT UNIT AND WAFER TREATMENT SYSTEM INCLUDING THE SAME

ELECTROSTATIC CHUCK WITH SEAL SURFACE

ION BEAM ETCHING SYSTEM

SPECIMEN HOLDER

WORKPIECE SUPPORT STRUCTURE WITH FOUR DEGREE OF FREEDOM AIR BEARING...

WORKPIECE SUPPORT STRUCTURE WITH FOUR DEGREE OF FREEDOM AIR BEARING...

APPARATUS AND METHOD OF TEMPERATURE CONTROL DURING CLEAVING PROCESS...

METHOD OF USE OF REUSABLE SAMPLE HOLDING DEVICE PERMITTING READY LO...

EFFECTIVE ALGORITHM FOR WARMING A TWIST AXIS FOR COLD ION IMPLANTAT...

Conductive Seal Ring Electrostatic Chuck

ION IMPLANTATION APPARATUS

HERMETIC SAMPLE HOLDER AND METHOD FOR PERFORMING MICROANALYSIS UNDE...

Substrate Support Structure, Clamp Preparation Unit, and Lithograph...

REUSABLE SAMPLE HOLDING DEVICE PERMITTING READY LOADING OF VERY SMA...

TABLE GUIDED BY AEROSTATIC BEARING ELEMENTS FOR VACUUM APPLICATION

Sample Holder, Method for Observation and Inspection, and Apparatus...

Method for Differentially Pumping Endblock Seal Cavity

APPARATUS AND METHOD OF TEMPERATURE CONROL DURING CLEAVING PROCESSE...

Plasma resistant seal assembly with replaceable barrier shield

Substrate processing apparatus and substrate processing method