Sealing means

Industry

CPC
H01J37/32513

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/32513Sealing means

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and electrostatic chuck
- Patent number 12,217,943
- Issue date Feb 4, 2025
- Tokyo Electron Limited
- Kohei Otsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isolated volume seals and method of forming an isolated volume with...
- Patent number 12,217,982
- Issue date Feb 4, 2025
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for plasma generation
- Patent number 12,159,765
- Issue date Dec 3, 2024
- MKS Instruments, Inc.
- Ron Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlling exhaust gas pressure of a plasma reactor for plasma sta...
- Patent number 12,159,768
- Issue date Dec 3, 2024
- Recarbon, Inc.
- George Stephen Leonard
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 12,125,698
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Turbomolecular pump and cathode assembly for etching reactor
- Patent number 12,106,946
- Issue date Oct 1, 2024
- Lam Research Corporation
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing devices having multi-port valve assemblies
- Patent number 12,100,575
- Issue date Sep 24, 2024
- Lam Research Corporation
- Daniel A. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Asymmetrical sealing and gas flow control device
- Patent number 12,094,730
- Issue date Sep 17, 2024
- Samsung Electronics Co., Ltd.
- June Hee Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing apparatus and method for controlling vacuum proce...
- Patent number 12,080,523
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Kiyoshi Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing chamber
- Patent number 12,080,524
- Issue date Sep 3, 2024
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yan Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preclean chamber upper shield with showerhead
- Patent number 12,080,522
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Sarath Babu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Permanent secondary erosion containment for electrostatic chuck bonds
- Patent number 12,074,049
- Issue date Aug 27, 2024
- Lam Research Corporation
- Eric A. Pape
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 12,068,139
- Issue date Aug 20, 2024
- Tokyo Electron Limited
- Shin Matsuura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxygen reduction device in ion source region of inductively coupled...
- Patent number 12,057,291
- Issue date Aug 6, 2024
- China University of Geosciences
- Yongsheng Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Connect structure for semiconductor processing equipment
- Patent number 12,040,163
- Issue date Jul 16, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Ming-Sze Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular microwave source with multiple metal housings
- Patent number 12,033,835
- Issue date Jul 9, 2024
- Applied Materials, Inc.
- Philip Allan Kraus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of driving relay member
- Patent number 12,027,346
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Nobutaka Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Faceplate with localized flow control
- Patent number 12,020,907
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Arun Thottappayil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical system for monitoring plasma reactions and reactors
- Patent number 12,014,900
- Issue date Jun 18, 2024
- Recarbon, Inc.
- Curtis Peter Tom
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma shutter and substrate processing apparatus including the same
- Patent number 12,009,187
- Issue date Jun 11, 2024
- Samsung Electronics Co., Ltd.
- Hyungsik Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light emitting sealed body, light emitting unit, and light source d...
- Patent number 11,972,931
- Issue date Apr 30, 2024
- Hamamatsu Photonics K.K.
- Akio Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isolated volume seals and method of forming an isolated volume with...
- Patent number 11,955,355
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sealing article comprising metal coating, method of making and meth...
- Patent number 11,920,238
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Peng-Cheng Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,923,177
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Keiji Tabuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and method of cleaning vacuum processin...
- Patent number 11,901,162
- Issue date Feb 13, 2024
- ULVAC, Inc.
- Takehisa Miyaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing apparatus
- Patent number 11,891,685
- Issue date Feb 6, 2024
- ULVAC, Inc.
- Yukihito Tashiro
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Smart seals for monitoring and analysis of seal properties useful i...
- Patent number 11,860,059
- Issue date Jan 2, 2024
- Carmen J. Quartapella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular reactor for microwave plasma-assisted deposition
- Patent number 11,859,279
- Issue date Jan 2, 2024
- DIAM CONCEPT
- Alix Gicquel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,854,772
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Masaki Hirayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sealing article comprising metal coating, method of making and meth...
- Patent number 11,851,754
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Peng-Cheng Hong
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20250046596
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING DEVICE
- Publication number 20250037971
- Publication date Jan 30, 2025
- Advanced Micro-Fabrication Equipment Inc. China
- Tuqiang NI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shield Ring Mounting Using Compliant Hardware
- Publication number 20250014870
- Publication date Jan 9, 2025
- Applied Materials, Inc.
- Jordan B. Tye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANIFOLD FOR SUPPLYING COOLANT TO COMPONENTS OF SUBSTRATE PROCESSIN...
- Publication number 20250006469
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Miguel Benjamin VASQUEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALING MEMBER, FLUID SUPPLYING DEVICE INCLUDING SEALING MEMBER, AN...
- Publication number 20250003536
- Publication date Jan 2, 2025
- SEMES CO., LTD.
- Joon Hee LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT
- Publication number 20240395514
- Publication date Nov 28, 2024
- Prashant AGARWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH-THROUGHPUT PLASMA LID FOR SEMICONDUCTOR MANUFACTURING PROCESSI...
- Publication number 20240371613
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240371609
- Publication date Nov 7, 2024
- TOKYO ELECTRON LIMITED
- Shin MATSUURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRESSURE SEAL METHOD AND APPARATUS
- Publication number 20240371607
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TURBOMOLECULAR PUMP AND CATHODE ASSEMBLY FOR ETCHING REACTOR
- Publication number 20240355596
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONNECT STRUCTURE FOR SEMICONDUCTOR PROCESSING EQUIPMENT
- Publication number 20240355591
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Ming-Sze Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS
- Publication number 20240347321
- Publication date Oct 17, 2024
- TOKYO ELECTRON LIMITED
- Tamihiro KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ISOLATED VOLUME SEALS AND METHOD OF FORMING AN ISOLATED VOLUME WITH...
- Publication number 20240332046
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PLASMA SURFACE TREATMENT
- Publication number 20240331983
- Publication date Oct 3, 2024
- PLASMAPP CO., LTD.
- You Bong LIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240321558
- Publication date Sep 26, 2024
- Kokusai Electric Corporation
- Takeshi YASUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC FIBERS FOR SHIELDING IN VACUUM CHAMBER SYSTEMS AND METHODS...
- Publication number 20240304424
- Publication date Sep 12, 2024
- Helion Energy, Inc.
- Brian Campbell
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Plasma Measuring Method and Plasma Processing Apparatus
- Publication number 20240290589
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Mitsutoshi Ashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR ALIGNING DIELECTRIC...
- Publication number 20240274411
- Publication date Aug 15, 2024
- PSK INC.
- Kwang Sung YOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20240266150
- Publication date Aug 8, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yan LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT BODY
- Publication number 20240266154
- Publication date Aug 8, 2024
- TOKYO ELECTRON LIMITED
- Daiki HARIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Smart Seals for Monitoring and Analysis of Seal Properties Useful i...
- Publication number 20240255378
- Publication date Aug 1, 2024
- Greene, Tweed Technologies, Inc.
- Carmen J. Quartapella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT EMITTING SEALED BODY, LIGHT EMITTING UNIT, AND LIGHT SOURCE D...
- Publication number 20240242941
- Publication date Jul 18, 2024
- HAMAMATSU PHOTONICS K. K.
- Akio Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Workpiece Processing Apparatus with Contact Temperature Sensor
- Publication number 20240222094
- Publication date Jul 4, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Zhaotong Yang
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING DEVICE
- Publication number 20240203700
- Publication date Jun 20, 2024
- Jusung Engineering Co., Ltd.
- Ho Boem HER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING PLATE AND PLASMA PROCESSING CHAMBER INCLUDING THE SAME
- Publication number 20240177975
- Publication date May 30, 2024
- SEMES CO., LTD.
- Yong Jun BAE
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, A...
- Publication number 20240162014
- Publication date May 16, 2024
- Samsung Electronics Co., Ltd.
- Heewon Min
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240153746
- Publication date May 9, 2024
- ASM IP HOLDING B.V.
- WonKi Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SHUTTER
- Publication number 20240128058
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Takashi ARAMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SHUTTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20240096606
- Publication date Mar 21, 2024
- Samsung Electronics Co., Ltd.
- Hyungsik KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALING ARTICLE COMPRISING METAL COATING, METHOD OF MAKING AND METH...
- Publication number 20240084447
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Peng-Cheng Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Sealing means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus and electrostatic chuck

Isolated volume seals and method of forming an isolated volume with...

Method and apparatus for plasma generation

Controlling exhaust gas pressure of a plasma reactor for plasma sta...

Integrated epitaxy and preclean system

Turbomolecular pump and cathode assembly for etching reactor

Plasma processing devices having multi-port valve assemblies

Asymmetrical sealing and gas flow control device

Vacuum processing apparatus and method for controlling vacuum proce...

Semiconductor processing chamber

Preclean chamber upper shield with showerhead

Permanent secondary erosion containment for electrostatic chuck bonds

Plasma processing apparatus

Oxygen reduction device in ion source region of inductively coupled...

Connect structure for semiconductor processing equipment

Modular microwave source with multiple metal housings

Substrate processing apparatus and method of driving relay member

Faceplate with localized flow control

Optical system for monitoring plasma reactions and reactors

Plasma shutter and substrate processing apparatus including the same

Light emitting sealed body, light emitting unit, and light source d...

Isolated volume seals and method of forming an isolated volume with...

Sealing article comprising metal coating, method of making and meth...

Plasma processing apparatus and plasma processing method

Vacuum processing apparatus and method of cleaning vacuum processin...

Vacuum processing apparatus

Smart seals for monitoring and analysis of seal properties useful i...

Modular reactor for microwave plasma-assisted deposition

Plasma processing apparatus and plasma processing method

Sealing article comprising metal coating, method of making and meth...

Patents Applicationslast 30 patents

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

PLASMA PROCESSING DEVICE

Shield Ring Mounting Using Compliant Hardware

MANIFOLD FOR SUPPLYING COOLANT TO COMPONENTS OF SUBSTRATE PROCESSIN...

SEALING MEMBER, FLUID SUPPLYING DEVICE INCLUDING SEALING MEMBER, AN...

MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT

HIGH-THROUGHPUT PLASMA LID FOR SEMICONDUCTOR MANUFACTURING PROCESSI...

PLASMA PROCESSING APPARATUS

PRESSURE SEAL METHOD AND APPARATUS

TURBOMOLECULAR PUMP AND CATHODE ASSEMBLY FOR ETCHING REACTOR

CONNECT STRUCTURE FOR SEMICONDUCTOR PROCESSING EQUIPMENT

PROCESSING APPARATUS

ISOLATED VOLUME SEALS AND METHOD OF FORMING AN ISOLATED VOLUME WITH...

APPARATUS FOR PLASMA SURFACE TREATMENT

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

CERAMIC FIBERS FOR SHIELDING IN VACUUM CHAMBER SYSTEMS AND METHODS...

Plasma Measuring Method and Plasma Processing Apparatus

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR ALIGNING DIELECTRIC...

SEMICONDUCTOR PROCESSING CHAMBER

PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT BODY

Smart Seals for Monitoring and Analysis of Seal Properties Useful i...

LIGHT EMITTING SEALED BODY, LIGHT EMITTING UNIT, AND LIGHT SOURCE D...

Workpiece Processing Apparatus with Contact Temperature Sensor

SUBSTRATE PROCESSING DEVICE

COOLING PLATE AND PLASMA PROCESSING CHAMBER INCLUDING THE SAME

PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, A...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SHUTTER

PLASMA SHUTTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

SEALING ARTICLE COMPRISING METAL COATING, METHOD OF MAKING AND METH...