Sealing means

Industry

CPC
H01J2237/166

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/166Sealing means

Industries

Patents Grantslast 30 patents

Information Patent Grant
Refillable ion chamber with automated purging system
- Patent number 12,106,929
- Issue date Oct 1, 2024
- Varian Medical Systems, Inc.
- Amir Shojaei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of driving relay member
- Patent number 12,027,346
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Nobutaka Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Refillable ion chamber with automated purging system
- Patent number 11,651,931
- Issue date May 16, 2023
- Varian Medical Systems, Inc.
- Amir Shojaei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pedestal support design for precise chamber matching and process co...
- Patent number 11,501,957
- Issue date Nov 15, 2022
- Applied Materials, Inc.
- Gopu Krishna
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,380,515
- Issue date Jul 5, 2022
- HITACHI HIGH-TECH CORPORATION
- Keiichiro Hosobuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corrosion-resistant components and methods of making
- Patent number 11,376,822
- Issue date Jul 5, 2022
- Coorstek, Inc.
- Matthew Simpson
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Rotary module for an accelerator system
- Patent number 11,057,982
- Issue date Jul 6, 2021
- GSI Helmholtzzentrum Fuer Schwerionenforschung GmbH
- Chen Xiao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Sample chamber device for electron microscope, and electron microsc...
- Patent number 10,312,049
- Issue date Jun 4, 2019
- Korea Research Institute of Standards and Science
- Bok Lae Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray tube including support for latitude supply wires
- Patent number 10,181,390
- Issue date Jan 15, 2019
- Toshiba Electron Tubes & Devices Co., Ltd.
- Naoki Takahashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Inspection device
- Patent number 10,157,722
- Issue date Dec 18, 2018
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enclosure for a target processing machine
- Patent number 10,144,134
- Issue date Dec 4, 2018
- Mapper Lithography IP B.V.
- Joep Gerard Vijverberg
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
System and method for protection of vacuum seals in plasma processi...
- Patent number 10,049,858
- Issue date Aug 14, 2018
- Mattson Technology, Inc.
- Vladimir Nagorny
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for assembling an electron exit window and an electron exit...
- Patent number 10,032,596
- Issue date Jul 24, 2018
- Tetra Laval Holdings & Finance S.A.
- Luca Poppi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Charged particle beam device, method for adjusting charged particle...
- Patent number 9,673,020
- Issue date Jun 6, 2017
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus
- Patent number 9,601,302
- Issue date Mar 21, 2017
- Ebara Corporation
- Shoji Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection or observation apparatus and sample inspection or observ...
- Patent number 9,236,217
- Issue date Jan 12, 2016
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device, method for adjusting charged particle...
- Patent number 9,165,741
- Issue date Oct 20, 2015
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus
- Patent number 9,134,261
- Issue date Sep 15, 2015
- Ebara Corporation
- Shoji Yoshikawa
- G01 - MEASURING TESTING
Information Patent Grant
Inspection or observation apparatus and sample inspection or observ...
- Patent number 8,933,400
- Issue date Jan 13, 2015
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron sputtering apparatus
- Patent number 8,808,514
- Issue date Aug 19, 2014
- Beijing BOE Optoelectronics Technology Co., Ltd
- Zhenyu Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for discretized processing and process sequence integration...
- Patent number 8,697,606
- Issue date Apr 15, 2014
- Intermolecular, Inc.
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated rotary seal and bearing for chilled ion implantation system
- Patent number 8,692,215
- Issue date Apr 8, 2014
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle lithography apparatus and method of generating vac...
- Patent number 8,690,005
- Issue date Apr 8, 2014
- Mapper Lithography IP B.V.
- Sander Baltussen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for discretized processing and process sequence integration...
- Patent number 8,610,121
- Issue date Dec 17, 2013
- Intermolecular, Inc.
- Thomas R. Boussie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Slider bearing for use with an apparatus comprising a vacuum chamber
- Patent number 8,598,524
- Issue date Dec 3, 2013
- FEI Company
- Johannes Antonius Hendricus Wilhelmus Gerardus Persoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gasket with positioning feature for clamped monolithic showerhead e...
- Patent number 8,536,071
- Issue date Sep 17, 2013
- Lam Research Corporation
- Gregory R. Bettencourt
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Inspection device
- Patent number 8,497,476
- Issue date Jul 30, 2013
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Grant
Effective algorithm for warming a twist axis for cold ion implantat...
- Patent number 8,481,969
- Issue date Jul 9, 2013
- Axcelis Technologies, Inc.
- Kan Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for discretized processing and process sequence integration...
- Patent number 8,389,445
- Issue date Mar 5, 2013
- Intermolecular, Inc.
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for discretized processing and process sequence integration...
- Patent number 8,367,587
- Issue date Feb 5, 2013
- Intermolecular, Inc.
- Tony P. Chiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEAL ASSEMBLY WITH A RETAINING MECHANISM
- Publication number 20250075795
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Jonathan SIMMONS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In-Vacuum Rotatable RF Component
- Publication number 20250079116
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Michael Mason Carrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical Apparatus and Charged Particle Beam Apparatus
- Publication number 20250046566
- Publication date Feb 6, 2025
- HITACHI HIGH-TECH CORPORATION
- Masao YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICES AND MEMBRANE ASSEMBLIES USEFUL THEREIN
- Publication number 20240412940
- Publication date Dec 12, 2024
- AIRSEM TECHNOLOGIES LTD.
- Jenny SHKLOVSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSED ION BEAM SYSTEM
- Publication number 20240371598
- Publication date Nov 7, 2024
- V TECHNOLOGY CO., LTD.
- Michinobu MIZUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS
- Publication number 20240347321
- Publication date Oct 17, 2024
- TOKYO ELECTRON LIMITED
- Tamihiro KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, A...
- Publication number 20240162014
- Publication date May 16, 2024
- Samsung Electronics Co., Ltd.
- Heewon Min
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20230317480
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Masahiro DOGOME
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS RESERVOIR, GAS SUPPLY DEVICE HAVING A GAS RESERVOIR, AND PARTIC...
- Publication number 20230282442
- Publication date Sep 7, 2023
- CARL ZEISS MICROSCOPY GMBH
- Andreas Schmaunz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REFILLABLE ION CHAMBER WITH AUTOMATED PURGING SYSTEM
- Publication number 20230260738
- Publication date Aug 17, 2023
- Varian Medical Systems, Inc.
- Amir Shojaei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND LID MEMBER
- Publication number 20230058928
- Publication date Feb 23, 2023
- TOKYO ELECTRON LIMITED
- Hiroshi KONDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REFILLABLE ION CHAMBER WITH AUTOMATED PURGING SYSTEM
- Publication number 20220285122
- Publication date Sep 8, 2022
- Varian Medical Systems, Inc.
- Amir Shojaei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pedestal Support Design for Precise Chamber Matching and Process Co...
- Publication number 20220068608
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Gopu Krishna
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRINTED CIRCUIT BOARD FOR SEALING VACUUM SYSTEM
- Publication number 20220059311
- Publication date Feb 24, 2022
- ASML NETHERLANDS B.V.
- Yongxin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CORROSION-RESISTANT COMPONENTS
- Publication number 20220013335
- Publication date Jan 13, 2022
- CoorsTek, Inc.
- Matthew Simpson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20210066025
- Publication date Mar 4, 2021
- HITACHI HIGH-TECH CORPORATION
- Keiichiro HOSOBUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHUTTER MECHANISM AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210027994
- Publication date Jan 28, 2021
- TOKYO ELECTRON LIMITED
- Suguru MOTEGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBER OPENING SYSTEM
- Publication number 20200194234
- Publication date Jun 18, 2020
- LAM RESEARCH CORPORATION
- Leonid BELAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTA...
- Publication number 20200152425
- Publication date May 14, 2020
- Applied Materials, Inc.
- Vahid FIROUZDOR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE CHAMBER DEVICE FOR ELECTRON MICROSCOPE, AND ELECTRON MICROSC...
- Publication number 20180158645
- Publication date Jun 7, 2018
- Korea Research Institute of Standards and Science
- Bok Lae CHO
- G02 - OPTICS
Information Patent Application
SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTA...
- Publication number 20180019104
- Publication date Jan 18, 2018
- Applied Materials, Inc.
- Vahid FIROUZDOR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CORROSION-RESISTANT COMPONENTS AND METHODS OF MAKING
- Publication number 20170140902
- Publication date May 18, 2017
- CoorsTek, Inc.
- Matthew Simpson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and Method for Protection of Vacuum Seals in Plasma Processi...
- Publication number 20160013025
- Publication date Jan 14, 2016
- Mattson Technology, Inc.
- Vladimir Nagorny
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for Discretized Processing and Process Sequence Integration...
- Publication number 20150287616
- Publication date Oct 8, 2015
- Intermolecular, Inc.
- Thomas R. Boussie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEALING GROOVE METHODS FOR SEMICONDUCTOR EQUIPMENT
- Publication number 20150047786
- Publication date Feb 19, 2015
- Applied Materials, Inc.
- Dmitry LUBOMIRSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS
- Publication number 20140312227
- Publication date Oct 23, 2014
- EBARA CORPORATION
- Shoji YOSHIKAWA
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION OR OBSERVATION APPARATUS AND SAMPLE INSPECTION OR OBSERV...
- Publication number 20140246583
- Publication date Sep 4, 2014
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE, METHOD FOR ADJUSTING CHARGED PARTICLE...
- Publication number 20140151553
- Publication date Jun 5, 2014
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for Discretized Processing and Process Sequence Integration...
- Publication number 20140070213
- Publication date Mar 13, 2014
- Intermolecular, Inc.
- Thomas R. Boussie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INSPECTION DEVICE
- Publication number 20140014848
- Publication date Jan 16, 2014
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING

Sealing means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Refillable ion chamber with automated purging system

Substrate processing apparatus and method of driving relay member

Refillable ion chamber with automated purging system

Pedestal support design for precise chamber matching and process co...

Charged particle beam device

Corrosion-resistant components and methods of making

Rotary module for an accelerator system

Sample chamber device for electron microscope, and electron microsc...

X-ray tube including support for latitude supply wires

Inspection device

Enclosure for a target processing machine

System and method for protection of vacuum seals in plasma processi...

Method for assembling an electron exit window and an electron exit...

Charged particle beam device, method for adjusting charged particle...

Inspection apparatus

Inspection or observation apparatus and sample inspection or observ...

Charged particle beam device, method for adjusting charged particle...

Inspection apparatus

Inspection or observation apparatus and sample inspection or observ...

Magnetron sputtering apparatus

Methods for discretized processing and process sequence integration...

Heated rotary seal and bearing for chilled ion implantation system

Charged particle lithography apparatus and method of generating vac...

Methods for discretized processing and process sequence integration...

Slider bearing for use with an apparatus comprising a vacuum chamber

Gasket with positioning feature for clamped monolithic showerhead e...

Inspection device

Effective algorithm for warming a twist axis for cold ion implantat...

Methods for discretized processing and process sequence integration...

Methods for discretized processing and process sequence integration...

Patents Applicationslast 30 patents

SEAL ASSEMBLY WITH A RETAINING MECHANISM

In-Vacuum Rotatable RF Component

Optical Apparatus and Charged Particle Beam Apparatus

CHARGED PARTICLE BEAM DEVICES AND MEMBRANE ASSEMBLIES USEFUL THEREIN

FOCUSED ION BEAM SYSTEM

PROCESSING APPARATUS

PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, A...

GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS

GAS RESERVOIR, GAS SUPPLY DEVICE HAVING A GAS RESERVOIR, AND PARTIC...

REFILLABLE ION CHAMBER WITH AUTOMATED PURGING SYSTEM

PLASMA PROCESSING APPARATUS AND LID MEMBER

REFILLABLE ION CHAMBER WITH AUTOMATED PURGING SYSTEM

Pedestal Support Design for Precise Chamber Matching and Process Co...

PRINTED CIRCUIT BOARD FOR SEALING VACUUM SYSTEM

CORROSION-RESISTANT COMPONENTS

Charged Particle Beam Device

SHUTTER MECHANISM AND SUBSTRATE PROCESSING APPARATUS

VACUUM CHAMBER OPENING SYSTEM

SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTA...

SAMPLE CHAMBER DEVICE FOR ELECTRON MICROSCOPE, AND ELECTRON MICROSC...

SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTA...

CORROSION-RESISTANT COMPONENTS AND METHODS OF MAKING

System and Method for Protection of Vacuum Seals in Plasma Processi...

Methods for Discretized Processing and Process Sequence Integration...

SEALING GROOVE METHODS FOR SEMICONDUCTOR EQUIPMENT

INSPECTION APPARATUS

INSPECTION OR OBSERVATION APPARATUS AND SAMPLE INSPECTION OR OBSERV...

CHARGED PARTICLE BEAM DEVICE, METHOD FOR ADJUSTING CHARGED PARTICLE...

Methods for Discretized Processing and Process Sequence Integration...

INSPECTION DEVICE