Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself

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G01Q10/045

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GPHYSICS G01Measuring instruments G01QSCANNING-PROBE TECHNIQUES OR APPARATUS APPLICATIONS OF SCANNING-PROBE TECHNIQUES G01Q10/00Scanning or positioning arrangements

Current Industry

G01Q10/045Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Micro-optomechanical system and method for the production thereof
- Patent number 12,282,040
- Issue date Apr 22, 2025
- Karlsruher Institut für Technologie
- Philipp-Immanuel Dietrich
- G01 - MEASURING TESTING
Information Patent Grant
Scattering-type scanning near-field optical microscopy with Akiyama...
- Patent number 12,247,998
- Issue date Mar 11, 2025
- The Research Foundation for the State University of New York
- Michael Dapolito
- G01 - MEASURING TESTING
Information Patent Grant
Coated active cantilever probes for use in topography imaging in op...
- Patent number 11,906,546
- Issue date Feb 20, 2024
- Massachusetts Institute of Technology
- Fangzhou Xia
- G01 - MEASURING TESTING
Information Patent Grant
Cantilever with a collocated piezoelectric actuator-sensor pair
- Patent number 11,852,654
- Issue date Dec 26, 2023
- Board of Regents, The University of Texas System
- Seyed Omid Reza Moheimani
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for a scanning probe microscope
- Patent number 11,796,563
- Issue date Oct 24, 2023
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Grant
Integrated dual-probe rapid in-situ switching measurement method an...
- Patent number 11,789,037
- Issue date Oct 17, 2023
- Shenyang Institute of Automation, Chinese Academy of Sciences
- Lianqing Liu
- G01 - MEASURING TESTING
Information Patent Grant
Method of imaging a surface using a scanning probe microscope
- Patent number 11,733,265
- Issue date Aug 22, 2023
- INFINITESIMA LIMITED
- Andrew Humphris
- G01 - MEASURING TESTING
Information Patent Grant
Cantilever, scanning probe microscope, and measurement method using...
- Patent number 11,733,264
- Issue date Aug 22, 2023
- HITACHI HIGH-TECH CORPORATION
- Kaifeng Zhang
- G01 - MEASURING TESTING
Information Patent Grant
AFM imaging with creep correction
- Patent number 11,714,104
- Issue date Aug 1, 2023
- Bruker Nano, Inc.
- Jason Osborne
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope, scan head and method
- Patent number 11,592,460
- Issue date Feb 28, 2023
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Roelof Willem Herfst
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for a scanning probe microscope
- Patent number 11,237,185
- Issue date Feb 1, 2022
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Grant
Measuring device for a scanning probe microscope and method for sca...
- Patent number 11,156,632
- Issue date Oct 26, 2021
- Bruker Nano GmbH
- Detlef Knebel
- G01 - MEASURING TESTING
Information Patent Grant
Method and device of using a scanning probe microscope
- Patent number 11,112,426
- Issue date Sep 7, 2021
- Ecole Polytechnique Federale de Lausanne (EPFL)
- Georg Ernest Fantner
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope and method for increasing a scan speed of...
- Patent number 11,054,439
- Issue date Jul 6, 2021
- Carl Zeiss SMT GmbH
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Grant
Method for producing a probe suitable for scanning probe microscopy
- Patent number 11,035,880
- Issue date Jun 15, 2021
- Imec VZW
- Thomas Hantschel
- G01 - MEASURING TESTING
Information Patent Grant
Surface analyzer
- Patent number 10,996,238
- Issue date May 4, 2021
- Shimadzu Corporation
- Keita Fujino
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope
- Patent number 10,928,418
- Issue date Feb 23, 2021
- INFINITESIMA LIMITED
- Andrew Humphris
- G01 - MEASURING TESTING
Information Patent Grant
Multiple integrated tips scanning probe microscope
- Patent number 10,895,585
- Issue date Jan 19, 2021
- Xallent, LLC
- Kwame Amponsah
- G01 - MEASURING TESTING
Information Patent Grant
Nozzle inspection method and apparatus
- Patent number 10,890,427
- Issue date Jan 12, 2021
- SUGINO MACHINE LIMITED
- Hiroki Haremaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Multi-axis positioning device
- Patent number 10,866,262
- Issue date Dec 15, 2020
- GETEC MICROSCOPY GMBH
- Peter Ziger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Scanning probe microscope and cantilever moving method
- Patent number 10,794,931
- Issue date Oct 6, 2020
- SHIMADZU CORPORATION
- Eiji Iida
- G01 - MEASURING TESTING
Information Patent Grant
Test mass compensation of mass measurement drift in a microcantilev...
- Patent number 10,782,240
- Issue date Sep 22, 2020
- APPLIED INVENTION, LLC
- W. Daniel Hillis
- G02 - OPTICS
Information Patent Grant
Testing device and method for measuring adhesion force between gas...
- Patent number 10,775,406
- Issue date Sep 15, 2020
- China University of Geosciences (Wuhan)
- Fulong Ning
- E21 - EARTH DRILLING MINING
Information Patent Grant
Microfluidic cell for atomic force microscopy
- Patent number 10,712,365
- Issue date Jul 14, 2020
- New Jersey Institute of Technology
- Wen Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Multiple integrated tips scanning probe microscope
- Patent number 10,613,115
- Issue date Apr 7, 2020
- Xallent, LLC
- Kwame Amponsah
- G01 - MEASURING TESTING
Information Patent Grant
Compact probe for atomic-force microscopy and atomic-force microsco...
- Patent number 10,527,645
- Issue date Jan 7, 2020
- VMICRO
- Benjamin Walter
- G01 - MEASURING TESTING
Information Patent Grant
Dynamic sweep-plow microcantilever device and methods of use
- Patent number 10,352,963
- Issue date Jul 16, 2019
- The Board of Trustees of the University of Alabama
- Ehsan Omidi
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope and scanning method thereof
- Patent number 10,345,335
- Issue date Jul 9, 2019
- Hitachi High-Tech Science Corporation
- Masatsugu Shigeno
- G01 - MEASURING TESTING
Information Patent Grant
Miniaturized and compact probe for atomic force microscopy
- Patent number 10,302,673
- Issue date May 28, 2019
- VMICRO
- Benjamin Walter
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope and method for examining a surface with a...
- Patent number 10,119,990
- Issue date Nov 6, 2018
- Carl Zeiss SMT GmbH
- Christof Baur
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SCANNING METHOD AND DEVICE FOR SCANNING PROBE MICROSCOPE BASED ON H...
- Publication number 20250076339
- Publication date Mar 6, 2025
- SHENYANG INSTITUTE OF AUTOMATION , CHINESE ACADEMY OF SCIENCES
- Lianqing LIU
- G01 - MEASURING TESTING
Information Patent Application
LIGHTING SYSTEM FOR MULTI-PROBE MICROSCOPE
- Publication number 20240369595
- Publication date Nov 7, 2024
- INFINITESIMA LIMITED
- Andrew Humphris
- G01 - MEASURING TESTING
Information Patent Application
SCATTERING-TYPE SCANNING NEAR-FIELD OPTICAL MICROSCOPY WITH AKIYAMA...
- Publication number 20240272196
- Publication date Aug 15, 2024
- The Research Foundation for the State University of New York
- Michael DAPOLITO
- G01 - MEASURING TESTING
Information Patent Application
Scanning Probe Microscope, Sample Observation Processing System, an...
- Publication number 20240168052
- Publication date May 23, 2024
- Hitachi High-Tech Corporation
- Toru AISO
- G01 - MEASURING TESTING
Information Patent Application
OPTOMECHANICAL TRANSDUCER
- Publication number 20240094240
- Publication date Mar 21, 2024
- Centre National de la Recherche Scientifique
- Cyprien LEMOUCHI
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHOD OF IMAGING A SURFACE USING A SCANNING PROBE MICROSCOPE
- Publication number 20230030991
- Publication date Feb 2, 2023
- INFINITESIMA LIMITED
- Andrew Humphris
- G01 - MEASURING TESTING
Information Patent Application
INTEGRATED DUAL-PROBE RAPID IN-SITU SWITCHING MEASUREMENT METHOD AN...
- Publication number 20230019239
- Publication date Jan 19, 2023
- Shenyang Institute of Automation, Chinese Academy of Sciences
- Lianqing LIU
- G01 - MEASURING TESTING
Information Patent Application
AFM Imaging with Creep Correction
- Publication number 20220381803
- Publication date Dec 1, 2022
- Bruker Nano, Inc.
- Jason Osborne
- B82 - NANO-TECHNOLOGY
Information Patent Application
CANTILEVER, SCANNING PROBE MICROSCOPE, AND MEASUREMENT METHOD USING...
- Publication number 20220260611
- Publication date Aug 18, 2022
- HITACHI HIGH-TECH CORPORATION
- Kaifeng ZHANG
- G01 - MEASURING TESTING
Information Patent Application
COATED ACTIVE CANTILEVER PROBES FOR USE IN TOPOGRAPHY IMAGING IN OP...
- Publication number 20220244288
- Publication date Aug 4, 2022
- Massachusetts Institute of Technology
- Fangzhou XIA
- G01 - MEASURING TESTING
Information Patent Application
Arrangement Having a Measuring Apparatus for a Scanning Probe Micro...
- Publication number 20220244287
- Publication date Aug 4, 2022
- BRUKER NANO GMBH
- Torsten Jahnke
- G01 - MEASURING TESTING
Information Patent Application
SCANNING PROBE MICROSCOPE, SCAN HEAD AND METHOD
- Publication number 20220057430
- Publication date Feb 24, 2022
- NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Roelof Willem HERFST
- G01 - MEASURING TESTING
Information Patent Application
MICRO-OPTOMECHANICAL SYSTEM AND METHOD FOR THE PRODUCTION THEREOF
- Publication number 20210096152
- Publication date Apr 1, 2021
- Karlsruher Institut für Technologie
- Philipp-Immanuel Dietrich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Measuring Device for a Scanning Probe Microscope and Method for Sca...
- Publication number 20200400715
- Publication date Dec 24, 2020
- BRUKER NANO GMBH
- Detlef Knebel
- G01 - MEASURING TESTING
Information Patent Application
Surface Analyzer
- Publication number 20200319229
- Publication date Oct 8, 2020
- Shimadzu Corporation
- Keita FUJINO
- G01 - MEASURING TESTING
Information Patent Application
Method for Producing a Probe Suitable for Scanning Probe Microscopy
- Publication number 20200278379
- Publication date Sep 3, 2020
- IMEC vzw
- Thomas Hantschel
- G01 - MEASURING TESTING
Information Patent Application
TESTING DEVICE AND METHOD FOR MEASURING ADHESION FORCE BETWEEN GAS...
- Publication number 20200174037
- Publication date Jun 4, 2020
- China University of Geosciences (Wuhan)
- Fulong NING
- E21 - EARTH DRILLING MINING
Information Patent Application
SCANNING PROBE MICROSCOPE
- Publication number 20200141970
- Publication date May 7, 2020
- INFINITESIMA LIMITED
- Andrew HUMPHRIS
- G01 - MEASURING TESTING
Information Patent Application
MULTI-AXIS POSITIONING DEVICE
- Publication number 20200141971
- Publication date May 7, 2020
- GETEC MICROSCOPY GMBH
- Peter ZIGER
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE
- Publication number 20200025796
- Publication date Jan 23, 2020
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G01 - MEASURING TESTING
Information Patent Application
SCANNING PROBE MICROSCOPE AND CANTILEVER MOVING METHOD
- Publication number 20190317124
- Publication date Oct 17, 2019
- Shimadzu Corporation
- Eiji IIDA
- G01 - MEASURING TESTING
Information Patent Application
SCANNING PROBE MICROSCOPE AND METHOD FOR INCREASING A SCAN SPEED OF...
- Publication number 20190250185
- Publication date Aug 15, 2019
- Carl Zeiss SMT GMBH
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Application
NOZZLE INSPECTION METHOD AND APPARATUS
- Publication number 20190187173
- Publication date Jun 20, 2019
- SUGINO MACHINE LIMITED
- Hiroki HAREMAKI
- B08 - CLEANING
Information Patent Application
MICROFLUIDIC CELL FOR ATOMIC FORCE MICROSCOPY
- Publication number 20190072582
- Publication date Mar 7, 2019
- NEW JERSEY INSTITUTE OF TECHNOLOGY
- Wen Zhang
- G01 - MEASURING TESTING
Information Patent Application
Scanning Probe Microscope and Scanning Method Thereof
- Publication number 20180284151
- Publication date Oct 4, 2018
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Masatsugu Shigeno
- G01 - MEASURING TESTING
Information Patent Application
COMPACT PROBE FOR ATOMIC-FORCE MICROSCOPY AND ATOMIC-FORCE MICROSCO...
- Publication number 20180203037
- Publication date Jul 19, 2018
- CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Benjamin WALTER
- G01 - MEASURING TESTING
Information Patent Application
Method and Device of Using a Scanning Probe Microscope
- Publication number 20180106830
- Publication date Apr 19, 2018
- ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
- Georg Ernest Fantner
- G01 - MEASURING TESTING
Information Patent Application
SELF-SENSING ARRAY OF MICROCANTILEVERS FOR CHEMICAL DETECTION
- Publication number 20170299584
- Publication date Oct 19, 2017
- BOARD OF REGENTS OF THE NEVADA SYSTEM OF HIGHER EDUCATION, ON BEHALF OF THE U...
- Jesse D. Adams
- G01 - MEASURING TESTING
Information Patent Application
SCANNING PROBE MICROSCOPE AND METHOD FOR EXAMINING A SURFACE WITH A...
- Publication number 20170102407
- Publication date Apr 13, 2017
- Christof Baur
- G01 - MEASURING TESTING
Information Patent Application
PROBE SYSTEM WITH MULTIPLE ACTUATION LOCATIONS
- Publication number 20170016932
- Publication date Jan 19, 2017
- INFINITESIMA LIMITED
- Andrew Humphris
- G01 - MEASURING TESTING

Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micro-optomechanical system and method for the production thereof

Scattering-type scanning near-field optical microscopy with Akiyama...

Coated active cantilever probes for use in topography imaging in op...

Cantilever with a collocated piezoelectric actuator-sensor pair

Apparatus and method for a scanning probe microscope

Integrated dual-probe rapid in-situ switching measurement method an...

Method of imaging a surface using a scanning probe microscope

Cantilever, scanning probe microscope, and measurement method using...

AFM imaging with creep correction

Scanning probe microscope, scan head and method

Apparatus and method for a scanning probe microscope

Measuring device for a scanning probe microscope and method for sca...

Method and device of using a scanning probe microscope

Scanning probe microscope and method for increasing a scan speed of...

Method for producing a probe suitable for scanning probe microscopy

Surface analyzer

Scanning probe microscope

Multiple integrated tips scanning probe microscope

Nozzle inspection method and apparatus

Multi-axis positioning device

Scanning probe microscope and cantilever moving method

Test mass compensation of mass measurement drift in a microcantilev...

Testing device and method for measuring adhesion force between gas...

Microfluidic cell for atomic force microscopy

Multiple integrated tips scanning probe microscope

Compact probe for atomic-force microscopy and atomic-force microsco...

Dynamic sweep-plow microcantilever device and methods of use

Scanning probe microscope and scanning method thereof

Miniaturized and compact probe for atomic force microscopy

Scanning probe microscope and method for examining a surface with a...

Patents Applicationslast 30 patents

SCANNING METHOD AND DEVICE FOR SCANNING PROBE MICROSCOPE BASED ON H...

LIGHTING SYSTEM FOR MULTI-PROBE MICROSCOPE

SCATTERING-TYPE SCANNING NEAR-FIELD OPTICAL MICROSCOPY WITH AKIYAMA...

Scanning Probe Microscope, Sample Observation Processing System, an...

OPTOMECHANICAL TRANSDUCER

METHOD OF IMAGING A SURFACE USING A SCANNING PROBE MICROSCOPE

INTEGRATED DUAL-PROBE RAPID IN-SITU SWITCHING MEASUREMENT METHOD AN...

AFM Imaging with Creep Correction

CANTILEVER, SCANNING PROBE MICROSCOPE, AND MEASUREMENT METHOD USING...

COATED ACTIVE CANTILEVER PROBES FOR USE IN TOPOGRAPHY IMAGING IN OP...

Arrangement Having a Measuring Apparatus for a Scanning Probe Micro...

SCANNING PROBE MICROSCOPE, SCAN HEAD AND METHOD

MICRO-OPTOMECHANICAL SYSTEM AND METHOD FOR THE PRODUCTION THEREOF

Measuring Device for a Scanning Probe Microscope and Method for Sca...

Surface Analyzer

Method for Producing a Probe Suitable for Scanning Probe Microscopy

TESTING DEVICE AND METHOD FOR MEASURING ADHESION FORCE BETWEEN GAS...

SCANNING PROBE MICROSCOPE

MULTI-AXIS POSITIONING DEVICE

APPARATUS AND METHOD FOR A SCANNING PROBE MICROSCOPE

SCANNING PROBE MICROSCOPE AND CANTILEVER MOVING METHOD

SCANNING PROBE MICROSCOPE AND METHOD FOR INCREASING A SCAN SPEED OF...

NOZZLE INSPECTION METHOD AND APPARATUS

MICROFLUIDIC CELL FOR ATOMIC FORCE MICROSCOPY

Scanning Probe Microscope and Scanning Method Thereof

COMPACT PROBE FOR ATOMIC-FORCE MICROSCOPY AND ATOMIC-FORCE MICROSCO...

Method and Device of Using a Scanning Probe Microscope

SELF-SENSING ARRAY OF MICROCANTILEVERS FOR CHEMICAL DETECTION

SCANNING PROBE MICROSCOPE AND METHOD FOR EXAMINING A SURFACE WITH A...

PROBE SYSTEM WITH MULTIPLE ACTUATION LOCATIONS