Semiconductor detectors

Industry

CPC
H01J2237/2441

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2441Semiconductor detectors

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Charged particle detector with gain element
- Patent number 12,230,470
- Issue date Feb 18, 2025
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor charged particle detector for microscopy
- Patent number 12,205,792
- Issue date Jan 21, 2025
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stroboscopic illumination synchronized electron detection and imaging
- Patent number 12,165,835
- Issue date Dec 10, 2024
- FEI Company
- Bart Jozef Janssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High resolution light valve detector for detecting x-ray
- Patent number 12,130,392
- Issue date Oct 29, 2024
- Carl Zeiss X-ray Microscopy Inc.
- Xiaochao Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optically-addressed phase modulator for electron beams
- Patent number 12,033,829
- Issue date Jul 9, 2024
- The Board of Trustees of the Leland Stanford Junior University
- Stewart A. Koppell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor detector and method of fabricating same
- Patent number 11,843,069
- Issue date Dec 12, 2023
- ASML Netherlands B.V.
- Gianpaolo Lorito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-cell detector for charged particles
- Patent number 11,784,024
- Issue date Oct 10, 2023
- ASML Netherlands B.V.
- Joe Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,676,796
- Issue date Jun 13, 2023
- Jeol Ltd.
- Kazuki Yagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor module for scanning electron microscopy applications
- Patent number 11,610,757
- Issue date Mar 21, 2023
- KLA Corporation
- Marcel Trimpl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pixel shape and section shape selection for large active area high...
- Patent number 11,594,395
- Issue date Feb 28, 2023
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Time-gated detection, dual-layer SPAD-based electron detection
- Patent number 11,551,906
- Issue date Jan 10, 2023
- FEI Company
- Bart Jozef Janssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor charged particle detector for microscopy
- Patent number 11,508,547
- Issue date Nov 22, 2022
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-cell detector for charged particles
- Patent number 11,222,766
- Issue date Jan 11, 2022
- ASML Netherlands B.V.
- Joe Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample inspection method and system
- Patent number 11,189,456
- Issue date Nov 30, 2021
- Universiteit Maastricht
- Paul Van Schayck
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam detection element, electron microscope, and transmiss...
- Patent number 11,164,718
- Issue date Nov 2, 2021
- Canon Kabushiki Kaisha
- Yukihiro Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope with composite detection system and sp...
- Patent number 11,145,487
- Issue date Oct 12, 2021
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for charged particle beam modulation
- Patent number 11,049,689
- Issue date Jun 29, 2021
- ASML Netherlands B.V.
- Ehud Shaked
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detector for detecting incident electron beam
- Patent number 10,991,541
- Issue date Apr 27, 2021
- Canon Kabushiki Kaisha
- Hajime Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and method for determining crystal ori...
- Patent number 10,935,505
- Issue date Mar 2, 2021
- Jeol Ltd.
- Takeshi Otsuka
- G01 - MEASURING TESTING
Information Patent Grant
Multi-beam electron microscope
- Patent number 10,937,627
- Issue date Mar 2, 2021
- FEI Company
- Pavel Stejskal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ real-time plasma chamber condition monitoring
- Patent number 10,854,433
- Issue date Dec 1, 2020
- Applied Materials, Inc.
- Tzu-Yen Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for stability monitoring and improvements to plasma sources...
- Patent number 10,818,482
- Issue date Oct 27, 2020
- Tokyo Electron Limited
- Yusuke Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron sensor for electron microscopy
- Patent number 10,811,220
- Issue date Oct 20, 2020
- Consejo Superior de Investigaciones Cientificas (CSIC)
- Ricardo Carmona Galán
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam microscope
- Patent number 10,615,000
- Issue date Apr 7, 2020
- Carl Zeiss Microscopy GmbH
- Luyang Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and methods of inspecting and reviewin...
- Patent number 10,466,212
- Issue date Nov 5, 2019
- KLA-Tencor Corporation
- David L. Brown
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Emission noise correction of a charged particle source
- Patent number 10,453,647
- Issue date Oct 22, 2019
- FEI Company
- Ali Mohammadi-Gheidari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for high-speed imaging sensor data transfer
- Patent number 10,429,321
- Issue date Oct 1, 2019
- KLA-Tencor Corporation
- Steve Zamek
- G01 - MEASURING TESTING
Information Patent Grant
Detection unit, scanning charged particle beam device and a method
- Patent number 10,388,490
- Issue date Aug 20, 2019
- Applied Materials Israel Ltd.
- Pavel Margulis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray analysis in air
- Patent number 10,354,834
- Issue date Jul 16, 2019
- Oxford Instruments Nanotechnology Tools Limited
- Peter J. Statham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quantitative secondary electron detection
- Patent number 10,256,071
- Issue date Apr 9, 2019
- Science Tomorrow LLC
- Jyoti Agrawal
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
High Resolution Light Valve Detector for Detecting X-Ray
- Publication number 20250020818
- Publication date Jan 16, 2025
- Carl Zeiss X-ray Microscopy, Inc.
- Xiaochao Xu
- G01 - MEASURING TESTING
Information Patent Application
Detectors For Microscopy
- Publication number 20240242929
- Publication date Jul 18, 2024
- FEI Company
- Luigi Mele
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANIPULATION OF CARRIER TRANSPORT BEHAVIOR IN DETECTOR
- Publication number 20240242930
- Publication date Jul 18, 2024
- ASML NETHERLANDS B.V.
- Jan BEX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME
- Publication number 20240234620
- Publication date Jul 11, 2024
- ASML NETHERLANDS B.V.
- Gianpaolo LORITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME
- Publication number 20240136462
- Publication date Apr 25, 2024
- ASML NETHERLANDS B.V.
- Gianpaolo LORITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY
- Publication number 20240096589
- Publication date Mar 21, 2024
- ASML NETHERLANDS B.V.
- Stoyan NIHTIANOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC DETECTOR
- Publication number 20240047173
- Publication date Feb 8, 2024
- ASML NETHERLANDS B.V.
- Matthias OBERST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSING ELEMENT LEVEL CIRCUITRY DESIGN FOR ELECTRON COUNTING DETECT...
- Publication number 20230335372
- Publication date Oct 19, 2023
- ASML NETHERLANDS B.V.
- Yongxin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR MODULE FOR SCANNING ELECTRON MICROSCOPY APPLICATIONS
- Publication number 20230230800
- Publication date Jul 20, 2023
- KLA Corporation
- Marcel Trimpl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED ARCHITECTURE FOR HIGH-PERFORMANCE DETECTION DEVICE
- Publication number 20230170179
- Publication date Jun 1, 2023
- ASML NETHERLANDS B.V.
- Yongxin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION
- Publication number 20230137186
- Publication date May 4, 2023
- ASML NETHERLANDS B.V.
- Weiming REN
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY
- Publication number 20230123152
- Publication date Apr 20, 2023
- ASML NETHERLANDS B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CELL DETECTOR FOR CHARGED PARTICLES
- Publication number 20220246391
- Publication date Aug 4, 2022
- ASML NETHERLANDS B.V.
- Joe WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STROBOSCOPIC ILLUMINATION SYNCHRONIZED ELECTRON DETECTION AND IMAGING
- Publication number 20220208510
- Publication date Jun 30, 2022
- FEI Company
- Bart Jozef Janssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20220084783
- Publication date Mar 17, 2022
- JEOL Ltd.
- Kazuki Yagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Resolution Light Valve Detector for Detecting X-Ray
- Publication number 20210311211
- Publication date Oct 7, 2021
- Carl Zeiss X-ray Microscopy, Inc.
- Xiaochao Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR MODULE FOR SCANNING ELECTRON MICROSCOPY APPLICATIONS
- Publication number 20210066035
- Publication date Mar 4, 2021
- KLA Corporation
- Marcel Trimpl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE WITH COMPOSITE DETECTION SYSTEM AND SP...
- Publication number 20210066031
- Publication date Mar 4, 2021
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIXEL SHAPE AND SECTION SHAPE SELECTION FOR LARGE ACTIVE AREA HIGH...
- Publication number 20210043416
- Publication date Feb 11, 2021
- ASML Netherlands B.V.
- Yongxin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE INSPECTION METHOD AND SYSTEM
- Publication number 20200402761
- Publication date Dec 24, 2020
- Universiteit Maastricht
- Paul VAN SCHAYCK
- G01 - MEASURING TESTING
Information Patent Application
MULTI-CELL DETECTOR FOR CHARGED PARTICLES
- Publication number 20200286708
- Publication date Sep 10, 2020
- ASML NETHERLANDS B.V.
- Joe WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE DETECTOR WITH GAIN ELEMENT
- Publication number 20200273664
- Publication date Aug 27, 2020
- ASML NETHERLANDS B.V.
- Yongxin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME
- Publication number 20200212246
- Publication date Jul 2, 2020
- ASML NETHERLANDS B.V.
- Gianpaolo LORITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTOR FOR DETECTING INCIDENT ELECTRON BEAM
- Publication number 20200194216
- Publication date Jun 18, 2020
- Canon Kabushiki Kaisha
- Hajime Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU REAL-TIME PLASMA CHAMBER CONDITION MONITORING
- Publication number 20200176233
- Publication date Jun 4, 2020
- Applied Materials, Inc.
- Tzu-Yen HSIEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR CHARGED PARTICLE BEAM MODULATION
- Publication number 20200176219
- Publication date Jun 4, 2020
- ASML NETHERLANDS B.V.
- Ehud Shaked
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR STABILITY MONITORING AND IMPROVEMENTS TO PLASMA SOURCES...
- Publication number 20200105510
- Publication date Apr 2, 2020
- TOKYO ELECTRON LIMITED
- Yusuke Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SENSOR FOR ELECTRON MICROSCOPY
- Publication number 20190393015
- Publication date Dec 26, 2019
- CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS
- Ricardo CARMONA GALÁN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM ELECTRON MICROSCOPE
- Publication number 20190378681
- Publication date Dec 12, 2019
- FEI Company
- Pavel Stejskal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY
- Publication number 20190378682
- Publication date Dec 12, 2019
- ASML Netherlands B.V.
- Yongxin Wang
- G01 - MEASURING TESTING

Semiconductor detectors

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Charged particle detector with gain element

Semiconductor charged particle detector for microscopy

Stroboscopic illumination synchronized electron detection and imaging

High resolution light valve detector for detecting x-ray

Optically-addressed phase modulator for electron beams

Semiconductor detector and method of fabricating same

Multi-cell detector for charged particles

Charged particle beam device

Sensor module for scanning electron microscopy applications

Pixel shape and section shape selection for large active area high...

Time-gated detection, dual-layer SPAD-based electron detection

Semiconductor charged particle detector for microscopy

Multi-cell detector for charged particles

Sample inspection method and system

Electron beam detection element, electron microscope, and transmiss...

Scanning electron microscope with composite detection system and sp...

Systems and methods for charged particle beam modulation

Detector for detecting incident electron beam

Scanning electron microscope and method for determining crystal ori...

Multi-beam electron microscope

In-situ real-time plasma chamber condition monitoring

Methods for stability monitoring and improvements to plasma sources...

Electron sensor for electron microscopy

Electron beam microscope

Scanning electron microscope and methods of inspecting and reviewin...

Emission noise correction of a charged particle source

Apparatus for high-speed imaging sensor data transfer

Detection unit, scanning charged particle beam device and a method

X-ray analysis in air

Quantitative secondary electron detection

Patents Applicationslast 30 patents

High Resolution Light Valve Detector for Detecting X-Ray

Detectors For Microscopy

MANIPULATION OF CARRIER TRANSPORT BEHAVIOR IN DETECTOR

SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME

SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME

SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY

MONOLITHIC DETECTOR

SENSING ELEMENT LEVEL CIRCUITRY DESIGN FOR ELECTRON COUNTING DETECT...

SENSOR MODULE FOR SCANNING ELECTRON MICROSCOPY APPLICATIONS

ENHANCED ARCHITECTURE FOR HIGH-PERFORMANCE DETECTION DEVICE

SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION

SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY

MULTI-CELL DETECTOR FOR CHARGED PARTICLES

STROBOSCOPIC ILLUMINATION SYNCHRONIZED ELECTRON DETECTION AND IMAGING

Charged Particle Beam Device

High Resolution Light Valve Detector for Detecting X-Ray

SENSOR MODULE FOR SCANNING ELECTRON MICROSCOPY APPLICATIONS

SCANNING ELECTRON MICROSCOPE WITH COMPOSITE DETECTION SYSTEM AND SP...

PIXEL SHAPE AND SECTION SHAPE SELECTION FOR LARGE ACTIVE AREA HIGH...

SAMPLE INSPECTION METHOD AND SYSTEM

MULTI-CELL DETECTOR FOR CHARGED PARTICLES

CHARGED PARTICLE DETECTOR WITH GAIN ELEMENT

SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME

DETECTOR FOR DETECTING INCIDENT ELECTRON BEAM

IN-SITU REAL-TIME PLASMA CHAMBER CONDITION MONITORING

SYSTEMS AND METHODS FOR CHARGED PARTICLE BEAM MODULATION

METHODS FOR STABILITY MONITORING AND IMPROVEMENTS TO PLASMA SOURCES...

ELECTRON SENSOR FOR ELECTRON MICROSCOPY

MULTI-BEAM ELECTRON MICROSCOPE

SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY