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Semiconductor equipment communication standard SECS
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G05B2219/31202
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PHYSICS
G05
Controlling systems
G05B
CONTROL OR REGULATING SYSTEMS IN GENERAL FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
G05B2219/00
Program-control systems
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G05B2219/31202
Semiconductor equipment communication standard SECS
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor equipment management method, electronic device, and n...
Patent number
11,754,989
Issue date
Sep 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Sing-Tsung Li
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Semiconductor equipment management method, electronic device, and n...
Patent number
10,852,704
Issue date
Dec 1, 2020
Taiwan Semiconductor Manufacturing Company, Ltd
Sing-Tsung Li
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Relay device and manufacturing system
Patent number
10,663,951
Issue date
May 26, 2020
FUJI CORPORATION
Koji Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mobile connectivity and control of semiconductor manufacturing equi...
Patent number
9,927,798
Issue date
Mar 27, 2018
Lam Research Corporation
Roger Patrick
G05 - CONTROLLING REGULATING
Information
Patent Grant
Arrangement for identifying uncontrolled events at the process modu...
Patent number
8,983,631
Issue date
Mar 17, 2015
Lam Research Corporation
Chung Ho Huang
G05 - CONTROLLING REGULATING
Information
Patent Grant
Arrangement for identifying uncontrolled events at the process modu...
Patent number
8,618,807
Issue date
Dec 31, 2013
Lam Research Corporation
Luc Albarede
G05 - CONTROLLING REGULATING
Information
Patent Grant
Computer integrated manufacturing techniques
Patent number
7,174,230
Issue date
Feb 6, 2007
Applied Materials, Inc.
John F. Arackaparambil
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Computer integrated manufacturing techniques
Patent number
7,069,101
Issue date
Jun 27, 2006
Applied Materials, Inc.
John F. Arackaparambil
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
System and method for automatically generating semiconductor equipm...
Patent number
6,721,618
Issue date
Apr 13, 2004
Miracom, Inc.
Wonin Baek
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Supervisory parallel switching device for computer integrated manuf...
Patent number
6,694,201
Issue date
Feb 17, 2004
Industrial Technology Research Institute
Wen-Yo Lee
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR EQUIPMENT MANAGEMENT METHOD, ELECTRONIC DEVICE, AND N...
Publication number
20210063984
Publication date
Mar 4, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Sing-Tsung Li
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SEMICONDUCTOR EQUIPMENT MANAGEMENT METHOD, ELECTRONIC DEVICE, AND N...
Publication number
20190163149
Publication date
May 30, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Sing-Tsung Li
G05 - CONTROLLING REGULATING
Information
Patent Application
RELAY DEVICE AND MANUFACTURING SYSTEM
Publication number
20180164786
Publication date
Jun 14, 2018
FUJI MACHINE MFG. CO., LTD.
Koji SHIMIZU
G05 - CONTROLLING REGULATING
Information
Patent Application
MOBILE CONNECTIVITY AND CONTROL OF SEMICONDUCTOR MANUFACTURING EQUI...
Publication number
20160103445
Publication date
Apr 14, 2016
LAM RESEARCH CORPORATION
Roger Patrick
G05 - CONTROLLING REGULATING
Information
Patent Application
COMPONENT PREPARATION INSTRUCTION SYSTEM, COMPONENT PREPARATION INS...
Publication number
20160086790
Publication date
Mar 24, 2016
Panasonic Intellectual Property Management Co., Ltd.
Yasuhiro MAENISHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARRANGEMENT FOR IDENTIFYING UNCONTROLLED EVENTS AT THE PROCESS MODU...
Publication number
20100332012
Publication date
Dec 30, 2010
Chung-Ho Huang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ARRANGEMENT FOR IDENTIFYING UNCONTROLLED EVENTS AT THE PROCESS MODU...
Publication number
20100332014
Publication date
Dec 30, 2010
Luc Albarede
G05 - CONTROLLING REGULATING
Information
Patent Application
System and method for automatically generating semiconductor equipm...
Publication number
20030004601
Publication date
Jan 2, 2003
Wonin Baek
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Computer integrated manufacturing techniques
Publication number
20020156548
Publication date
Oct 24, 2002
APPLIED MATERIALS, INC.
John F. Arackaparambil
G05 - CONTROLLING REGULATING