Separate detection of dark field and bright field

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CPC
G01N2021/8825

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GPHYSICS G01Measuring instruments G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

Current Industry

G01N2021/8825Separate detection of dark field and bright field

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Integrated measurement system
- Patent number 11,994,374
- Issue date May 28, 2024
- Nova Ltd.
- Elad Dotan
- G01 - MEASURING TESTING
Information Patent Grant
Modular optical inspection station
- Patent number 11,989,872
- Issue date May 21, 2024
- Instrumental, Inc.
- Samuel Bruce Weiss
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor wafer evaluation method and semiconductor wafer manuf...
- Patent number 11,955,390
- Issue date Apr 9, 2024
- Sumco Corporation
- Takahiro Nagasawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor inspection tool system and method for wafer edge insp...
- Patent number 11,828,713
- Issue date Nov 28, 2023
- Camtek Ltd.
- Carmel Yehuda Drillman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Information processing apparatus, determination method, imprint app...
- Patent number 11,721,013
- Issue date Aug 8, 2023
- Canon Kabushiki Kaisha
- Shinichiro Koga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Die bonding apparatus and manufacturing method for semiconductor de...
- Patent number 11,692,947
- Issue date Jul 4, 2023
- FASFORD TECHNOLOGY CO., LTD.
- Yuta Ono
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and device for recognising and analysing surface defects in...
- Patent number 11,674,907
- Issue date Jun 13, 2023
- Dhruv Kasavala
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods of defect inspection
- Patent number 11,624,985
- Issue date Apr 11, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ta-Ching Yu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automatic optical inspection device and method
- Patent number 11,549,891
- Issue date Jan 10, 2023
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Hailiang Lu
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for checking the coverslipping quality of samples for mic...
- Patent number 11,519,863
- Issue date Dec 6, 2022
- Leica Biosystems Nussloch GmbH
- Bernhard Neef
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for automated in-line inspection of optically...
- Patent number 11,415,528
- Issue date Aug 16, 2022
- WDI WISE DEVICE INC.
- Adam Weiss
- G01 - MEASURING TESTING
Information Patent Grant
Simultaneous multi-directional laser wafer inspection
- Patent number 11,366,069
- Issue date Jun 21, 2022
- KLA-Tencor Corporation
- Guoheng Zhao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and device for locating the origin of a defect affecting a s...
- Patent number 11,352,691
- Issue date Jun 7, 2022
- Saint-Gobain Glass France
- Bernard Nghiem
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for checking a printing cylinder and a corresponding arrange...
- Patent number 11,340,175
- Issue date May 24, 2022
- MATTHEWS INTERNATIONAL GMBH
- Konrad Klimmey
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Modular optical inspection station
- Patent number 11,321,824
- Issue date May 3, 2022
- Instrumental, Inc.
- Samuel Bruce Weiss
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for detecting lens cleanliness using spectral differential f...
- Patent number 11,300,527
- Issue date Apr 12, 2022
- MLOptic Corp.
- Jiang He
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of detecting lens cleanliness using out-of-focus differentia...
- Patent number 11,255,798
- Issue date Feb 22, 2022
- MLOptic Corp.
- Jiang He
- G01 - MEASURING TESTING
Information Patent Grant
Adaptive diffuse illumination systems and methods
- Patent number 11,181,483
- Issue date Nov 23, 2021
- Radiant Vision Systems, LLC
- Mark Michniewicz
- F21 - LIGHTING
Information Patent Grant
System, method and non-transitory computer readable medium for tuni...
- Patent number 11,139,216
- Issue date Oct 5, 2021
- KLA-Tencor Corporation
- David Craig Oram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface inspection system and surface inspection method
- Patent number 11,022,553
- Issue date Jun 1, 2021
- BOBST MEX SA
- Matthieu Richard
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection device, pattern chip, and defect inspection method
- Patent number 10,948,424
- Issue date Mar 16, 2021
- HITACHI HIGH-TECH CORPORATION
- Yuta Urano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical inspection system
- Patent number 10,887,500
- Issue date Jan 5, 2021
- Hong Kong Applied Science and Technology Research Institute Co., Ltd.
- Changli Wu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for inspecting a wafer
- Patent number 10,876,975
- Issue date Dec 29, 2020
- SEMICONDUCTOR TECHNOLOGIES & INSTRUMENTS PTE. LTD.
- Ajharali Amanullah
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods of defect inspection
- Patent number 10,795,270
- Issue date Oct 6, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ta-Ching Yu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Modular optical inspection station
- Patent number 10,783,624
- Issue date Sep 22, 2020
- Instrumental, Inc.
- Samuel Bruce Weiss
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Simultaneous multi-directional laser wafer inspection
- Patent number 10,739,275
- Issue date Aug 11, 2020
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Scanning differential interference contrast in an imaging system de...
- Patent number 10,705,026
- Issue date Jul 7, 2020
- KLA Corporation
- Andrew Zeng
- G02 - OPTICS
Information Patent Grant
System, method and non-transitory computer readable medium for tuni...
- Patent number 10,679,909
- Issue date Jun 9, 2020
- KLA-Tencor Corporation
- David Craig Oram
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for defect material classification
- Patent number 10,670,537
- Issue date Jun 2, 2020
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and a method for inspecting a light transmissible optical...
- Patent number 10,634,618
- Issue date Apr 28, 2020
- Hong Kong Applied Science and Technology Research Institute Company Limited
- Vladislav Nikitin
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and Method for Automatic Monitoring of Lids of Beverage a...
- Publication number 20240369496
- Publication date Nov 7, 2024
- QUISS QUALITÄTS-INSPEKTIONSSYSTEME UND SERVICE GMBH
- Bernhard Gruber
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
OPTICAL INSPECTION METHOD AND STORAGE MEDIUM, AND OPTICAL INSPECTIO...
- Publication number 20240319111
- Publication date Sep 26, 2024
- Kabushiki Kaisha Toshiba
- Hiroshi OHNO
- G01 - MEASURING TESTING
Information Patent Application
MODULAR OPTICAL INSPECTION STATION
- Publication number 20240265518
- Publication date Aug 8, 2024
- Instrumental, Inc.
- Samuel Bruce Weiss
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR INSPECTION TOOL SYSTEM AND METHOD FOR WAFER EDGE INSP...
- Publication number 20240003826
- Publication date Jan 4, 2024
- CAMTEK LTD
- Carmel Yehuda DRILLMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD
- Publication number 20230060883
- Publication date Mar 2, 2023
- HITACHI HIGH-TECH CORPORATION
- Takeru UTSUGI
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DETECTING LENS CLEANLINESS USING SPECTRAL DIFFERENTIAL F...
- Publication number 20220099595
- Publication date Mar 31, 2022
- MLOptic Corp
- Jiang He
- G01 - MEASURING TESTING
Information Patent Application
Die Bonding Apparatus and Manufacturing Method for Semiconductor De...
- Publication number 20220034823
- Publication date Feb 3, 2022
- Fasford Technology Co., Ltd.
- Yuta ONO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR AUTOMATED IN-LINE INSPECTION OF OPTICALLY...
- Publication number 20210372945
- Publication date Dec 2, 2021
- WDI Wise Device Inc.
- Adam WEISS
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR CHECKING A PRINTING CYLINDER AND A CORRESPONDING ARRANGE...
- Publication number 20210333221
- Publication date Oct 28, 2021
- MATTHEWS INTERNATIONAL GMBH
- Konrad KLIMMEY
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND DEVICE FOR RECOGNISING AND ANALYSING SURFACE DEFECTS IN...
- Publication number 20210325313
- Publication date Oct 21, 2021
- Dhruv Kasavala
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INFORMATION PROCESSING APPARATUS, DETERMINATION METHOD, IMPRINT APP...
- Publication number 20210097675
- Publication date Apr 1, 2021
- Canon Kabushiki Kaisha
- Shinichiro Koga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS OF DEFECT INSPECTION
- Publication number 20210018848
- Publication date Jan 21, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ta-Ching YU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR WAFER EVALUATION METHOD AND SEMICONDUCTOR WAFER MANUF...
- Publication number 20200411391
- Publication date Dec 31, 2020
- SUMCO CORPORATION
- Takahiro NAGASAWA
- G01 - MEASURING TESTING
Information Patent Application
SIMULTANEOUS MULTI-DIRECTIONAL LASER WAFER INSPECTION
- Publication number 20200333262
- Publication date Oct 22, 2020
- KLA-Tencor Corporation
- Guoheng Zhao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM, METHOD AND NON-TRANSITORY COMPUTER READABLE MEDIUM FOR TUNI...
- Publication number 20200258792
- Publication date Aug 13, 2020
- KLA-Tencor Corporation
- David Craig Oram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DE...
- Publication number 20200132608
- Publication date Apr 30, 2020
- KLA Corporation
- Raymond Chu
- G02 - OPTICS
Information Patent Application
ADAPTIVE DIFFUSE ILLUMINATION SYSTEMS AND METHODS
- Publication number 20200103352
- Publication date Apr 2, 2020
- Radiant Vision Systems
- Mark Michniewicz
- G01 - MEASURING TESTING
Information Patent Application
AUTOMATIC OPTICAL INSPECTION DEVICE AND METHOD
- Publication number 20190293566
- Publication date Sep 26, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Hailiang LU
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and A Method For Inspecting A Light Transmissible Optical...
- Publication number 20190226997
- Publication date Jul 25, 2019
- Hong Kong Applied Science and Technology Research Institute Co. Ltd.
- Vladislav Nitikin
- G01 - MEASURING TESTING
Information Patent Application
Systems and Methods for Defect Material Classification
- Publication number 20190212277
- Publication date Jul 11, 2019
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
ADAPTIVE DIFFUSE ILLUMINATION SYSTEMS AND METHODS
- Publication number 20190204236
- Publication date Jul 4, 2019
- Radiant Vision Systems, LLC
- Mark Michniewicz
- F21 - LIGHTING
Information Patent Application
OPTICAL INSPECTION SYSTEM AND IMAGE PROCESSING METHOD THEREOF
- Publication number 20190162673
- Publication date May 30, 2019
- Creative Sensor Inc.
- Li-Cheng HSU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS OF DEFECT INSPECTION
- Publication number 20190064675
- Publication date Feb 28, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ta-Ching YU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR INSPECTING A WAFER
- Publication number 20190033233
- Publication date Jan 31, 2019
- Semiconductor Technologies & Instruments Pte Ltd
- Ajharali AMANULLAH
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM, METHOD AND NON-TRANSITORY COMPUTER READABLE MEDIUM FOR TUNI...
- Publication number 20180144996
- Publication date May 24, 2018
- KLA-Tencor Corporation
- David Craig Oram
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIMULTANEOUS MULTI-DIRECTIONAL LASER WAFER INSPECTION
- Publication number 20180073993
- Publication date Mar 15, 2018
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR SURFACE INSPECTION
- Publication number 20180017501
- Publication date Jan 18, 2018
- SIGHTLINE INNOVATION INC.
- Wallace TRENHOLM
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOT...
- Publication number 20180003648
- Publication date Jan 4, 2018
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL METHOD AND SYSTEM FOR DEFECTS DETECTION IN THREE-DIMENSIONA...
- Publication number 20170138868
- Publication date May 18, 2017
- NOVA MEASURING INSTRUMENTS LTD.
- Gilad Barak
- G01 - MEASURING TESTING
Information Patent Application
DEFECT OBSERVATION METHOD AND DEVICE AND DEFECT DETECTION DEVICE
- Publication number 20170108444
- Publication date Apr 20, 2017
- Hitachi High-Technologies Corporation
- Yuko OTANI
- G02 - OPTICS

Separate detection of dark field and bright field

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Integrated measurement system

Modular optical inspection station

Semiconductor wafer evaluation method and semiconductor wafer manuf...

Semiconductor inspection tool system and method for wafer edge insp...

Information processing apparatus, determination method, imprint app...

Die bonding apparatus and manufacturing method for semiconductor de...

Method and device for recognising and analysing surface defects in...

Methods of defect inspection

Automatic optical inspection device and method

Apparatus for checking the coverslipping quality of samples for mic...

Method and apparatus for automated in-line inspection of optically...

Simultaneous multi-directional laser wafer inspection

Method and device for locating the origin of a defect affecting a s...

Method for checking a printing cylinder and a corresponding arrange...

Modular optical inspection station

Method for detecting lens cleanliness using spectral differential f...

Method of detecting lens cleanliness using out-of-focus differentia...

Adaptive diffuse illumination systems and methods

System, method and non-transitory computer readable medium for tuni...

Surface inspection system and surface inspection method

Defect inspection device, pattern chip, and defect inspection method

Optical inspection system

System and method for inspecting a wafer

Methods of defect inspection

Modular optical inspection station

Simultaneous multi-directional laser wafer inspection

Scanning differential interference contrast in an imaging system de...

System, method and non-transitory computer readable medium for tuni...

Systems and methods for defect material classification

Apparatus and a method for inspecting a light transmissible optical...

Patents Applicationslast 30 patents

Apparatus and Method for Automatic Monitoring of Lids of Beverage a...

OPTICAL INSPECTION METHOD AND STORAGE MEDIUM, AND OPTICAL INSPECTIO...

MODULAR OPTICAL INSPECTION STATION

SEMICONDUCTOR INSPECTION TOOL SYSTEM AND METHOD FOR WAFER EDGE INSP...

DEFECT INSPECTION APPARATUS AND DEFECT INSPECTION METHOD

METHOD FOR DETECTING LENS CLEANLINESS USING SPECTRAL DIFFERENTIAL F...

Die Bonding Apparatus and Manufacturing Method for Semiconductor De...

METHOD AND APPARATUS FOR AUTOMATED IN-LINE INSPECTION OF OPTICALLY...

METHOD FOR CHECKING A PRINTING CYLINDER AND A CORRESPONDING ARRANGE...

METHOD AND DEVICE FOR RECOGNISING AND ANALYSING SURFACE DEFECTS IN...

INFORMATION PROCESSING APPARATUS, DETERMINATION METHOD, IMPRINT APP...

METHODS OF DEFECT INSPECTION

SEMICONDUCTOR WAFER EVALUATION METHOD AND SEMICONDUCTOR WAFER MANUF...

SIMULTANEOUS MULTI-DIRECTIONAL LASER WAFER INSPECTION

SYSTEM, METHOD AND NON-TRANSITORY COMPUTER READABLE MEDIUM FOR TUNI...

SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DE...

ADAPTIVE DIFFUSE ILLUMINATION SYSTEMS AND METHODS

AUTOMATIC OPTICAL INSPECTION DEVICE AND METHOD

Apparatus and A Method For Inspecting A Light Transmissible Optical...

Systems and Methods for Defect Material Classification

ADAPTIVE DIFFUSE ILLUMINATION SYSTEMS AND METHODS

OPTICAL INSPECTION SYSTEM AND IMAGE PROCESSING METHOD THEREOF

METHODS OF DEFECT INSPECTION

SYSTEM AND METHOD FOR INSPECTING A WAFER

SYSTEM, METHOD AND NON-TRANSITORY COMPUTER READABLE MEDIUM FOR TUNI...

SIMULTANEOUS MULTI-DIRECTIONAL LASER WAFER INSPECTION

SYSTEM AND METHOD FOR SURFACE INSPECTION

APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOT...

OPTICAL METHOD AND SYSTEM FOR DEFECTS DETECTION IN THREE-DIMENSIONA...

DEFECT OBSERVATION METHOD AND DEVICE AND DEFECT DETECTION DEVICE