Silicides

Industry

CPC
C23C16/42

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/42Silicides

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Method of depositing epitaxial material, structure formed using the...
- Patent number 12,173,404
- Issue date Dec 24, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Arene molybdenum (0) precursors for deposition of molybdenum films
- Patent number 12,116,376
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhancing gapfill performance of dram word line
- Patent number 12,114,488
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Yong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 12,104,243
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Annamalai Lakshmanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of simultaneous silicidation on source and drain of NMOS and...
- Patent number 12,062,579
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Xuebin Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and cleaning processing method
- Patent number 12,017,261
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Tomoya Hasegawa
- B08 - CLEANING
Information Patent Grant
Methods of forming structures including silicon germanium and silic...
- Patent number 11,996,289
- Issue date May 28, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic plasma processing
- Patent number 11,961,735
- Issue date Apr 16, 2024
- Tokyo Electron Limited
- Yun Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of iridium containing films
- Patent number 11,946,135
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-region diffusion barrier containing titanium, silicon and nit...
- Patent number 11,942,365
- Issue date Mar 26, 2024
- Eugenus, Inc.
- Vinayak Veer Vats
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 11,887,855
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Homoleptic lanthanide deposition precursors
- Patent number 11,866,824
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Thomas Knisley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming nucleation layers with halogenated silanes
- Patent number 11,702,742
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition on two sides of a web
- Patent number 11,695,125
- Issue date Jul 4, 2023
- AMPRIUS TECHNOLOGIES, INC.
- Ronald J. Mosso
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electrode structure comprising potential sheath for secondary batte...
- Patent number 11,688,856
- Issue date Jun 27, 2023
- Industry-University Cooperation Foundation Hanyang University
- Won II Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of iridium containing films
- Patent number 11,643,721
- Issue date May 9, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Arene molybdenum (0) precursors for deposition of molybdenum films
- Patent number 11,584,768
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cycloheptatriene molybdenum (0) precursors for deposition of molybd...
- Patent number 11,530,477
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Homoleptic lanthanide deposition precursors
- Patent number 11,473,198
- Issue date Oct 18, 2022
- Applied Materials, Inc.
- Thomas Knisley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Volumetric expansion of metal-containing films by silicidation
- Patent number 11,462,438
- Issue date Oct 4, 2022
- Applied Materials, Inc.
- Susmit Singha Roy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for enhancing selectivity of titanium and tit...
- Patent number 11,430,661
- Issue date Aug 30, 2022
- Applied Materials, Inc.
- Takashi Kuratomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of producing a silicon compound material and apparatus for p...
- Patent number 11,229,893
- Issue date Jan 25, 2022
- IHI Corporation
- Yasuyuki Fukushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiC composite substrate and method for manufacturing same
- Patent number 11,208,719
- Issue date Dec 28, 2021
- Shin-Etsu Chemical Co., Ltd.
- Yoshihiro Kubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing tungsten on halosilane based metal silicide...
- Patent number 11,174,551
- Issue date Nov 16, 2021
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiC epitaxial wafer and method for producing same
- Patent number 11,107,892
- Issue date Aug 31, 2021
- Showa Denko K.K.
- Keisuke Fukada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polymer substrate with hardcoat layer, and manufacturing method for...
- Patent number 11,028,284
- Issue date Jun 8, 2021
- Teijin Limited
- Tatsuya Ekinaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor wafer
- Patent number 11,011,630
- Issue date May 18, 2021
- Sumitomo Chemical Company, Limited
- Taiki Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing substrate and substrate processing apparatus
- Patent number 10,998,204
- Issue date May 4, 2021
- Tokyo Electron Limited
- Takashi Mochizuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 10,985,023
- Issue date Apr 20, 2021
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of metal silicide layers on substrates and chamber compo...
- Patent number 10,950,445
- Issue date Mar 16, 2021
- Applied Materials, Inc.
- Prashant Kumar Kulshreshtha
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SELECTIVE METAL CAPPING PROCESSES FOR A JUNCTION SILICIDE
- Publication number 20250054767
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Qihao ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE MOLYBDENUM DEPOSITION ASSISTED BY SILICON-CONTAININ...
- Publication number 20250038003
- Publication date Jan 30, 2025
- LAM RESEARCH CORPORATION
- David Joseph Mandia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SIMULTANEOUS SILICIDATION ON SOURCE AND DRAIN OF NMOS AND...
- Publication number 20240387290
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- Xuebin LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240290609
- Publication date Aug 29, 2024
- Tokyo Electron Limited
- Tadahiro ISHIZAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FORMING STRUCTURES INCLUDING SILICON GERMANIUM AND SILIC...
- Publication number 20240274437
- Publication date Aug 15, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fluorinated Aluminum Coated Component for a Substrate Processing Ap...
- Publication number 20240247376
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Douglas LONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING MOLYBDENUM SILICIDE
- Publication number 20240218505
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Jiyeon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS
- Publication number 20240200188
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Selective Metal Deposition Using Separated Reactant Activ...
- Publication number 20240191354
- Publication date Jun 13, 2024
- Ying-Bing JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SELECTIVE DEPOSITION OF PRECURSOR MATERIALS AND RELATED...
- Publication number 20240170290
- Publication date May 23, 2024
- Entegris, Inc.
- Philip S. H. Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20230377892
- Publication date Nov 23, 2023
- Yiyang WAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE STRUCTURE COMPRISING POTENTIAL SHEATH FOR SECONDARY BATTE...
- Publication number 20230361310
- Publication date Nov 9, 2023
- Industry-University Cooperation Foundation Hanyang University
- Won Il PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS
- Publication number 20230227968
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERMEDIATE COATING FOR HIGH TEMPERATURE ENVIRONMENTS
- Publication number 20230192554
- Publication date Jun 22, 2023
- Rolls-Royce Corporation
- Taylor K. Blair
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARENE MOLYBDENUM (0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS
- Publication number 20230151038
- Publication date May 18, 2023
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLOHEPTATRIENE MOLYBDENUM (0) PRECURSORS FOR DEPOSITION OF MOLYBD...
- Publication number 20230129073
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND CLEANING PROCESSING METHOD
- Publication number 20230124143
- Publication date Apr 20, 2023
- TOKYO ELECTRON LIMITED
- Tomoya HASEGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE,...
- Publication number 20230076867
- Publication date Mar 9, 2023
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOMOLEPTIC LANTHANIDE DEPOSITION PRECURSORS
- Publication number 20230027560
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Thomas Joseph Knisley
- C07 - ORGANIC CHEMISTRY
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220403505
- Publication date Dec 22, 2022
- Annamalai LAKSHMANAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLIC PLASMA PROCESSING
- Publication number 20220392765
- Publication date Dec 8, 2022
- TOKYO ELECTRON LIMITED
- Yun Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING
- Publication number 20220367194
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Min-Hsuan LU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCING GAPFILL PERFORMANCE OF DRAM WORD LINE
- Publication number 20220359532
- Publication date Nov 10, 2022
- Applied Materials, Inc.
- Yong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR ENHANCING SELECTIVITY OF TITANIUM AND TIT...
- Publication number 20220359209
- Publication date Nov 10, 2022
- Applied Materials, Inc.
- TAKASHI KURATOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON COMPOUNDS AND METHODS FOR DEPOSITING FILMS USING SAME
- Publication number 20220293417
- Publication date Sep 15, 2022
- VERSUM MATERIALS US, LLC
- RAYMOND NICHOLAS VRTIS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARENE MOLYBDENUM (0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS
- Publication number 20220220140
- Publication date Jul 14, 2022
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLOHEPTATRIENE MOLYBDENUM (0) PRECURSORS FOR DEPOSITION OF MOLYBD...
- Publication number 20220220607
- Publication date Jul 14, 2022
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SIMULTANEOUS SILICIDATION ON SOURCE AND DRAIN OF NMOS AND...
- Publication number 20220139784
- Publication date May 5, 2022
- Applied Materials, Inc.
- Xuebin LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Halogen-Containing Silane-Based Metal Silicide As Nucleation Layer...
- Publication number 20220074050
- Publication date Mar 10, 2022
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICIDE FILM NUCLEATION
- Publication number 20220033970
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Xuebi LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of depositing epitaxial material, structure formed using the...

Arene molybdenum (0) precursors for deposition of molybdenum films

Enhancing gapfill performance of dram word line

Methods and apparatus for processing a substrate

Method of simultaneous silicidation on source and drain of NMOS and...

Processing apparatus and cleaning processing method

Methods of forming structures including silicon germanium and silic...

Cyclic plasma processing

Low temperature deposition of iridium containing films

Multi-region diffusion barrier containing titanium, silicon and nit...

Methods for depositing fluorine/carbon-free conformal tungsten

Homoleptic lanthanide deposition precursors

Methods of forming nucleation layers with halogenated silanes

Deposition on two sides of a web

Electrode structure comprising potential sheath for secondary batte...

Low temperature deposition of iridium containing films

Arene molybdenum (0) precursors for deposition of molybdenum films

Cycloheptatriene molybdenum (0) precursors for deposition of molybd...

Homoleptic lanthanide deposition precursors

Volumetric expansion of metal-containing films by silicidation

Methods and apparatus for enhancing selectivity of titanium and tit...

Method of producing a silicon compound material and apparatus for p...

SiC composite substrate and method for manufacturing same

Methods for depositing tungsten on halosilane based metal silicide...

SiC epitaxial wafer and method for producing same

Polymer substrate with hardcoat layer, and manufacturing method for...

Semiconductor wafer

Method of processing substrate and substrate processing apparatus

Methods for depositing fluorine/carbon-free conformal tungsten

Deposition of metal silicide layers on substrates and chamber compo...

Patents Applicationslast 30 patents

SELECTIVE METAL CAPPING PROCESSES FOR A JUNCTION SILICIDE

LOW TEMPERATURE MOLYBDENUM DEPOSITION ASSISTED BY SILICON-CONTAININ...

METHOD OF SIMULTANEOUS SILICIDATION ON SOURCE AND DRAIN OF NMOS AND...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHODS OF FORMING STRUCTURES INCLUDING SILICON GERMANIUM AND SILIC...

Fluorinated Aluminum Coated Component for a Substrate Processing Ap...

METHOD OF FORMING MOLYBDENUM SILICIDE

LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS

Method of Selective Metal Deposition Using Separated Reactant Activ...

METHODS FOR SELECTIVE DEPOSITION OF PRECURSOR MATERIALS AND RELATED...

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

ELECTRODE STRUCTURE COMPRISING POTENTIAL SHEATH FOR SECONDARY BATTE...

LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS

INTERMEDIATE COATING FOR HIGH TEMPERATURE ENVIRONMENTS

ARENE MOLYBDENUM (0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS

CYCLOHEPTATRIENE MOLYBDENUM (0) PRECURSORS FOR DEPOSITION OF MOLYBD...

PROCESSING APPARATUS AND CLEANING PROCESSING METHOD

FILM FORMING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE,...

HOMOLEPTIC LANTHANIDE DEPOSITION PRECURSORS

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

CYCLIC PLASMA PROCESSING

SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING

ENHANCING GAPFILL PERFORMANCE OF DRAM WORD LINE

METHODS AND APPARATUS FOR ENHANCING SELECTIVITY OF TITANIUM AND TIT...

SILICON COMPOUNDS AND METHODS FOR DEPOSITING FILMS USING SAME

ARENE MOLYBDENUM (0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS

CYCLOHEPTATRIENE MOLYBDENUM (0) PRECURSORS FOR DEPOSITION OF MOLYBD...

METHOD OF SIMULTANEOUS SILICIDATION ON SOURCE AND DRAIN OF NMOS AND...

Halogen-Containing Silane-Based Metal Silicide As Nucleation Layer...

SILICIDE FILM NUCLEATION