Silicon Carbide layers

Industry

CPC
H01L21/3148

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/3148Silicon Carbide layers

Industries

Patents Grantslast 30 patents

Information Patent Grant
Patternable dielectric film structure with improved lithography and...
- Patent number 9,484,248
- Issue date Nov 1, 2016
- GLOBALFOUNDRIES Inc.
- Qinghuang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming semiconductor device using remote plasma treatment
- Patent number 9,269,614
- Issue date Feb 23, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Cheng Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CVD precursors
- Patent number 9,117,664
- Issue date Aug 25, 2015
- Dow Corning Corporation
- Xiaobing Zhou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Memory with carbon-containing silicon channel
- Patent number 9,111,798
- Issue date Aug 18, 2015
- Micron Technology, Inc.
- Chandra Mouli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device with processes carri...
- Patent number 8,993,440
- Issue date Mar 31, 2015
- Kabushiki Kaisha Toshiba
- Hideaki Masuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Antireflective coatings for photovoltaic applications
- Patent number 8,987,039
- Issue date Mar 24, 2015
- Air Products and Chemicals, Inc.
- Patrick Timothy Hurley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric barrier deposition using nitrogen containing precursor
- Patent number 8,889,235
- Issue date Nov 18, 2014
- Air Products and Chemicals, Inc.
- Anupama Mallikarjunan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardmask materials
- Patent number 8,846,525
- Issue date Sep 30, 2014
- Novellus Systems, Inc.
- Vishwanathan Rangarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD precursors
- Patent number 8,772,524
- Issue date Jul 8, 2014
- Dow Corning Corporation
- Xiaobing Zhou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Formulations for voltage switchable dielectric materials having a s...
- Patent number 8,723,153
- Issue date May 13, 2014
- Littelfuse, Inc.
- Lex Kosowsky
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Airgap-containing interconnect structure with improved patternable...
- Patent number 8,659,115
- Issue date Feb 25, 2014
- International Business Machines Corporation
- Qinghuang Lin
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Semiconductor device having silicon-diffused metal wiring layer and...
- Patent number 8,642,467
- Issue date Feb 4, 2014
- Renesas Electronics Corporation
- Koichi Ohto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Patternable dielectric film structure with improved lithography and...
- Patent number 8,618,663
- Issue date Dec 31, 2013
- International Business Machines Corporation
- Qinghuang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formation of a masking layer on a dielectric region to facilitate f...
- Patent number 8,575,036
- Issue date Nov 5, 2013
- Intermolecular, Inc.
- David E. Lazovsky
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods of modifying interlayer adhesion
- Patent number 8,569,166
- Issue date Oct 29, 2013
- Applied Materials, Inc.
- Francimar Campana Schmitt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardmask materials
- Patent number 8,536,073
- Issue date Sep 17, 2013
- Novellus Systems, Inc.
- Vishwanathan Rangarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for preparing thin layers of nanoporous dielectric materials
- Patent number 8,524,332
- Issue date Sep 3, 2013
- Commissariat a l'Energie Atomique
- Vincent Jousseaume
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Insulating film material, method of film formation using insulating...
- Patent number 8,497,391
- Issue date Jul 30, 2013
- National Institute for Materials Science
- Takahisa Ohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Patternable low-K dielectric interconnect structure with a graded c...
- Patent number 8,461,039
- Issue date Jun 11, 2013
- International Business Machines Corporation
- Qinghuang Lin
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Film forming method for a semiconductor
- Patent number 8,435,882
- Issue date May 7, 2013
- Tokyo Electron Limited
- Takaaki Matsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for manufacturing permeable dielectric films
- Patent number 8,404,315
- Issue date Mar 26, 2013
- Commissariat a l'Energie Atomique
- Vincent Jousseaume
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating stacked non-volatile memory with silicon car...
- Patent number 8,404,536
- Issue date Mar 26, 2013
- Micron Technology, Inc.
- Chandra Mouli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of fabricating the same
- Patent number 8,384,208
- Issue date Feb 26, 2013
- Sanyo Electric Co., LTD
- Yoshinori Shishida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 8,349,679
- Issue date Jan 8, 2013
- Fujitsu Semiconductor Limited
- Wensheng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formation of a masking layer on a dielectric region to facilitate f...
- Patent number 8,343,866
- Issue date Jan 1, 2013
- Intermolecular, Inc.
- David E. Lazovsky
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Semiconductor device and manufacturing method therefor
- Patent number 8,334,204
- Issue date Dec 18, 2012
- Tokyo Electron Limited
- Takaaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hardmask materials
- Patent number 8,247,332
- Issue date Aug 21, 2012
- Novellus Systems, Inc.
- Vishwanathan Rangarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultra-thin film formation using gas cluster ion beam processing
- Patent number 8,226,835
- Issue date Jul 24, 2012
- TEL Epion Inc.
- John J. Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a dielectric cap layer for a copper metallization...
- Patent number 8,211,795
- Issue date Jul 3, 2012
- Advanced Micro Devices, Inc.
- Joerg Hohage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Patternable low-k dielectric interconnect structure with a graded c...
- Patent number 8,202,783
- Issue date Jun 19, 2012
- International Business Machines Corporation
- Qinghuang Lin
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

Patents Applicationslast 30 patents

Information Patent Application
MEMORY WITH CARBON-CONTAINING SILICON CHANNEL
- Publication number 20140339572
- Publication date Nov 20, 2014
- Micron Technology, Inc.
- Chandra Mouli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CVD PRECURSORS
- Publication number 20140256159
- Publication date Sep 11, 2014
- Dow Corning Corporation
- XIAOBING ZHOU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
HARDMASK MATERIALS
- Publication number 20130330932
- Publication date Dec 12, 2013
- Novellus Systems, Inc.
- Vishwanathan Rangarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20130309866
- Publication date Nov 21, 2013
- Hideaki Masuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERCONNECT STRUCTURE AND METHOD FOR FORMING THE SAME
- Publication number 20130256888
- Publication date Oct 3, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Cheng SHIH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADHESION IMPROVEMENT FOR LOW K DIELECTRICS TO CONDUCTIVE MATERIALS
- Publication number 20130230986
- Publication date Sep 5, 2013
- Applied Materials, Inc.
- NAGARAJAN RAJAGOPALAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STACKED NON-VOLATILE MEMORY WITH SILICON CARBIDE-BASED AMORPHOUS SI...
- Publication number 20130224923
- Publication date Aug 29, 2013
- Micron Technology, Inc.
- Chandra Mouli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Formation of a Masking Layer on a Dielectric Region to Facilitate F...
- Publication number 20130072026
- Publication date Mar 21, 2013
- Intermolecular, Inc.
- David E. Lazovsky
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF PE-ALD OF SiNxCy AND INTEGRATION OF LINER MATERIALS ON PO...
- Publication number 20120301706
- Publication date Nov 29, 2012
- International Business Machines Corporation
- Andrew J. Kellock
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDMASK MATERIALS
- Publication number 20120276752
- Publication date Nov 1, 2012
- Vishwanathan Rangarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR-ON-DIAMOND DEVICES AND METHODS OF FORMING
- Publication number 20120273775
- Publication date Nov 1, 2012
- Chien-Min Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Formation of a Masking Layer on a Dielectric Region to Facilitate F...
- Publication number 20120258595
- Publication date Oct 11, 2012
- Intermolecular, Inc.
- David E. Lazovsky
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERNABLE LOW-K DIELECTRIC INTERCONNECT STRUCTURE WITH A GRADED C...
- Publication number 20120252204
- Publication date Oct 4, 2012
- International Business Machines Corporation
- Qinghuang Lin
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
FORMULATIONS FOR VOLTAGE SWITCHABLE DIELECTRIC MATERIALS HAVING A S...
- Publication number 20120202930
- Publication date Aug 9, 2012
- Lex Kosowsky
- B82 - NANO-TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE HAVING SILICON-DIFFUSED METAL WIRING LAYER AND...
- Publication number 20120108060
- Publication date May 3, 2012
- NEC ELECTRONICS CORPORATION
- Koichi Ohto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20120077288
- Publication date Mar 29, 2012
- FUJITSU SEMICONDUCTOR LIMITED
- Wensheng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATING FILM MATERIAL, AND FILM FORMATION METHOD UTILIZING THE M...
- Publication number 20110313184
- Publication date Dec 22, 2011
- Nobuo Tajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PATTERNABLE DIELECTRIC FILM STRUCTURE WITH IMPROVED LITHOGRAPHY AND...
- Publication number 20110312177
- Publication date Dec 22, 2011
- International Business Machines Corporation
- Qinghuang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20110291280
- Publication date Dec 1, 2011
- Renesas Electronics Corporation
- Kazutoshi OHMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STACKED NON-VOLATILE MEMORY WITH SILICON CARBIDE-BASED AMORPHOUS SI...
- Publication number 20110275182
- Publication date Nov 10, 2011
- Micron Technology, Inc.
- Chandra Mouli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING A DIELECTRIC FILM AND NOVEL PRECURSORS FOR IMPLE...
- Publication number 20110275507
- Publication date Nov 10, 2011
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF MODIFYING INTERLAYER ADHESION
- Publication number 20110237085
- Publication date Sep 29, 2011
- FRANCIMAR CAMPANA SCHMITT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD Precursors
- Publication number 20110195582
- Publication date Aug 11, 2011
- Xiaobing Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR-ON-DIAMOND DEVICES AND METHODS OF FORMING
- Publication number 20110163312
- Publication date Jul 7, 2011
- Chien-Min Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND ARRANGEMENT FOR PRODUCING A FUNCTIONAL LAYER ON A SEMICO...
- Publication number 20110165726
- Publication date Jul 7, 2011
- SCHOTT Solar AG
- Knut Vaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HARDMASK MATERIALS
- Publication number 20110135557
- Publication date Jun 9, 2011
- Vishwanathan Rangarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDMASK MATERIALS
- Publication number 20110133313
- Publication date Jun 9, 2011
- Vishwanathan Rangarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INSULATING FILM MATERIAL, METHOD OF FILM FORMATION USING INSULATING...
- Publication number 20110130584
- Publication date Jun 2, 2011
- Takahisa Ohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PATTERNABLE LOW-K DIELECTRIC INTERCONNECT STRUCTURE WITH A GRADED C...
- Publication number 20110074044
- Publication date Mar 31, 2011
- International Business Machines Corporation
- Qinghuang Lin
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Formulations for Voltage Switchable Dielectric Materials Having a S...
- Publication number 20110062388
- Publication date Mar 17, 2011
- Lex Kosowsky
- B82 - NANO-TECHNOLOGY

Silicon Carbide layers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Patternable dielectric film structure with improved lithography and...

Method of forming semiconductor device using remote plasma treatment

CVD precursors

Memory with carbon-containing silicon channel

Method of manufacturing a semiconductor device with processes carri...

Antireflective coatings for photovoltaic applications

Dielectric barrier deposition using nitrogen containing precursor

Hardmask materials

CVD precursors

Formulations for voltage switchable dielectric materials having a s...

Airgap-containing interconnect structure with improved patternable...

Semiconductor device having silicon-diffused metal wiring layer and...

Patternable dielectric film structure with improved lithography and...

Formation of a masking layer on a dielectric region to facilitate f...

Methods of modifying interlayer adhesion

Hardmask materials

Process for preparing thin layers of nanoporous dielectric materials

Insulating film material, method of film formation using insulating...

Patternable low-K dielectric interconnect structure with a graded c...

Film forming method for a semiconductor

Process for manufacturing permeable dielectric films

Method for fabricating stacked non-volatile memory with silicon car...

Semiconductor device and method of fabricating the same

Semiconductor device and method of manufacturing the same

Formation of a masking layer on a dielectric region to facilitate f...

Semiconductor device and manufacturing method therefor

Hardmask materials

Ultra-thin film formation using gas cluster ion beam processing

Method of forming a dielectric cap layer for a copper metallization...

Patternable low-k dielectric interconnect structure with a graded c...

Patents Applicationslast 30 patents

MEMORY WITH CARBON-CONTAINING SILICON CHANNEL

CVD PRECURSORS

HARDMASK MATERIALS

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

INTERCONNECT STRUCTURE AND METHOD FOR FORMING THE SAME

ADHESION IMPROVEMENT FOR LOW K DIELECTRICS TO CONDUCTIVE MATERIALS

STACKED NON-VOLATILE MEMORY WITH SILICON CARBIDE-BASED AMORPHOUS SI...

Formation of a Masking Layer on a Dielectric Region to Facilitate F...

METHOD OF PE-ALD OF SiNxCy AND INTEGRATION OF LINER MATERIALS ON PO...

HARDMASK MATERIALS

SEMICONDUCTOR-ON-DIAMOND DEVICES AND METHODS OF FORMING

Formation of a Masking Layer on a Dielectric Region to Facilitate F...

PATTERNABLE LOW-K DIELECTRIC INTERCONNECT STRUCTURE WITH A GRADED C...

FORMULATIONS FOR VOLTAGE SWITCHABLE DIELECTRIC MATERIALS HAVING A S...

SEMICONDUCTOR DEVICE HAVING SILICON-DIFFUSED METAL WIRING LAYER AND...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

INSULATING FILM MATERIAL, AND FILM FORMATION METHOD UTILIZING THE M...

PATTERNABLE DIELECTRIC FILM STRUCTURE WITH IMPROVED LITHOGRAPHY AND...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

STACKED NON-VOLATILE MEMORY WITH SILICON CARBIDE-BASED AMORPHOUS SI...

METHOD FOR FORMING A DIELECTRIC FILM AND NOVEL PRECURSORS FOR IMPLE...

METHODS OF MODIFYING INTERLAYER ADHESION

CVD Precursors

SEMICONDUCTOR-ON-DIAMOND DEVICES AND METHODS OF FORMING

METHOD AND ARRANGEMENT FOR PRODUCING A FUNCTIONAL LAYER ON A SEMICO...

HARDMASK MATERIALS

HARDMASK MATERIALS

INSULATING FILM MATERIAL, METHOD OF FILM FORMATION USING INSULATING...

PATTERNABLE LOW-K DIELECTRIC INTERCONNECT STRUCTURE WITH A GRADED C...

Formulations for Voltage Switchable Dielectric Materials Having a S...