silicon in uncombined form

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H01L21/02238

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02238silicon in uncombined form

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device and method
- Patent number 12,165,929
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Han Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device including isolation st...
- Patent number 12,154,821
- Issue date Nov 26, 2024
- NANYA TECHNOLOGY CORPORATION
- Ying-Cheng Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for fabricating the same
- Patent number 12,107,151
- Issue date Oct 1, 2024
- United Microelectronics Corp.
- Fu-Jung Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method
- Patent number 12,068,162
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ya-Lan Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and method for manufacturing semiconductor...
- Patent number 12,046,478
- Issue date Jul 23, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Luguang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,033,852
- Issue date Jul 9, 2024
- Kokusai Electric Corporation
- Takayuki Waseda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor integrated circuit
- Patent number 12,027,424
- Issue date Jul 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuo-Sheng Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for hydrogen assisted atmospheric radical oxidation
- Patent number 12,014,920
- Issue date Jun 18, 2024
- Mattson Technology, Inc.
- Michael X. Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for preparing a support for a semiconductor structure
- Patent number 12,009,209
- Issue date Jun 11, 2024
- Soitec
- Young-Pil Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective oxidation on rapid thermal processing (RTP) chamber with...
- Patent number 11,996,305
- Issue date May 28, 2024
- Applied Materials, Inc.
- Chaitanya Anjaneyalu Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with carbon-density-decreasing region
- Patent number 11,996,449
- Issue date May 28, 2024
- Rohm Co., Ltd.
- Tsunenobu Kimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 11,973,117
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hsien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isolation structures in multi-gate semiconductor devices and method...
- Patent number 11,948,998
- Issue date Apr 2, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Xusheng Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate all around I/O engineering
- Patent number 11,923,441
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Steven C. H. Hung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon-on-insulator with crystalline silicon oxide
- Patent number 11,923,236
- Issue date Mar 5, 2024
- TURUN YLIOPISTO
- Pekka Laukkanen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, and recording medium
- Patent number 11,905,596
- Issue date Feb 20, 2024
- Kokusai Electric Corporation
- Teruo Yoshino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light irradiation type heat treatment method and heat treatment app...
- Patent number 11,901,200
- Issue date Feb 13, 2024
- SCREEN Holdings Co., Ltd.
- Akitsugu Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor memory device and method for fabricating the semicond...
- Patent number 11,903,200
- Issue date Feb 13, 2024
- SK hynix Inc.
- Yu Jeong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 11,894,446
- Issue date Feb 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ling-Yen Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing three-dimensional structure, method for produc...
- Patent number 11,887,845
- Issue date Jan 30, 2024
- Globalwafers Japan Co., Ltd
- Kazutaka Kamijo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming semiconductor memory device having saddle portion
- Patent number 11,882,683
- Issue date Jan 23, 2024
- United Microelectronics Corp.
- Chien-Ming Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanowire transistor structure and method of shaping
- Patent number 11,869,973
- Issue date Jan 9, 2024
- Intel Corporation
- Erica J. Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device including trench isolation layer and method of...
- Patent number 11,854,864
- Issue date Dec 26, 2023
- Samsung Electronics Co., Ltd.
- Juyeon Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
DC bias in plasma process
- Patent number 11,854,766
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Sheng-Liang Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor method and device
- Patent number 11,854,901
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng-Hsiung Yen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming thin semiconductor-on-insulator (SOI) substrates
- Patent number 11,855,159
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng-Ta Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Circuit devices with gate seals
- Patent number 11,830,930
- Issue date Nov 28, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Sheng-Chou Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for radical and thermal processing of substrates
- Patent number 11,823,901
- Issue date Nov 21, 2023
- Applied Materials Inc.
- Xinming Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating memory device
- Patent number 11,777,007
- Issue date Oct 3, 2023
- United Microelectronics Corp.
- Chin-Chin Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Staggered stacked vertical crystalline semiconducting channels
- Patent number 11,756,961
- Issue date Sep 12, 2023
- International Business Machines Corporation
- Tsung-Sheng Kang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
- Publication number 20240421213
- Publication date Dec 19, 2024
- UNITED MICROELECTRONICS CORP.
- Fu-Jung Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NESTED-LOOP PLASMA ENHANCED ATOMIC LAYER DEPOSITION
- Publication number 20240420952
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Bhaskar Soman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DENSIFIED SEAM-FREE SILICON-CONTAINING MATERIAL GAP FILL PROCESSES
- Publication number 20240420950
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Xiang Ji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
- Publication number 20240395874
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hsien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICES
- Publication number 20240379459
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Han Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENTS TO ENHANCE MATERIAL STRUCTURES
- Publication number 20240379349
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Steven C. H. HUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR INTEGRATED CIRCUIT
- Publication number 20240347388
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuo-Sheng CHUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORTS FOR SEMICONDUCTOR STRUCTURES
- Publication number 20240290615
- Publication date Aug 29, 2024
- SOITEC
- Young-Pil Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
- Publication number 20240282579
- Publication date Aug 22, 2024
- Powerchip Semiconductor Manufacturing Corporation
- Mao-Teng Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF SELECTIVE OXIDATION ON RAPID THERMAL PROCESSING (RTP) CH...
- Publication number 20240282601
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Chaitanya Anjaneyalu Prasad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING THERMAL OXIDE FILM ON SEMICONDUCTOR SUBSTRATE AN...
- Publication number 20240274477
- Publication date Aug 15, 2024
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi OHTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE WITH CARBON-DENSITY-DECREASING REGION
- Publication number 20240258380
- Publication date Aug 1, 2024
- ROHM CO., LTD.
- Tsunenobu KIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ISOLATION STRUCTURES IN MULTI-GATE SEMICONDUCTOR DEVICES AND METHOD...
- Publication number 20240250152
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Xusheng Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR REDUCING MICRO AND MACRO SCALLOPING ON SEMICONDUCTOR DE...
- Publication number 20240249936
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Mang-Mang LING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENTS TO ENHANCE MATERIAL STRUCTURES
- Publication number 20240234133
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Steven C. H. HUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240234499
- Publication date Jul 11, 2024
- DB HITEK CO., LTD.
- Kyu Ok LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING THE SEMICONDUCTOR MEMORY DEVICE
- Publication number 20240188298
- Publication date Jun 6, 2024
- SK HYNIX INC.
- Yu Jeong LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING
- Publication number 20240177990
- Publication date May 30, 2024
- Applied Materials, Inc.
- Hansel LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240158917
- Publication date May 16, 2024
- Kokusai Electric Corporation
- Teruo YOSHINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STACKED SUBSTRATE MANUFACTURING METHOD AND SUBSTRATE PROCESSING APP...
- Publication number 20240162081
- Publication date May 16, 2024
- TOKYO ELECTRON LIMITED
- Yohei YAMASHITA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE
- Publication number 20240153779
- Publication date May 9, 2024
- SCREEN Holdings Co., Ltd.
- Kana TAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE
- Publication number 20240153780
- Publication date May 9, 2024
- SCREEN Holdings Co., Ltd.
- Takayoshi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD AND HEAT TREATMENT APP...
- Publication number 20240128096
- Publication date Apr 18, 2024
- SCREEN Holdings Co., Ltd.
- Akitsugu UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NANOWIRE TRANSISTOR STRUCTURE AND METHOD OF SHAPING
- Publication number 20240088296
- Publication date Mar 14, 2024
- Intel Corporation
- Erica J. Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR RADICAL AND THERMAL PROCESSING OF SUBSTRATES
- Publication number 20240087889
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Xinming ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DC Bias in Plasma Process
- Publication number 20240071722
- Publication date Feb 29, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sheng-Liang Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
- Publication number 20230387221
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hsien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CIRCUIT DEVICES WITH GATE SEALS
- Publication number 20230387256
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- Sheng-Chou Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW TEMPERATURE SILICON OXIDE GAP FILL
- Publication number 20230386829
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Soham Asrani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND A METHOD FOR MANUFACTURING A SEMICONDUCTOR...
- Publication number 20230369140
- Publication date Nov 16, 2023
- NEXPERIA B.V.
- Steven Peake
- H01 - BASIC ELECTRIC ELEMENTS

silicon in uncombined form

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor device and method

Method of manufacturing semiconductor device including isolation st...

Semiconductor device and method for fabricating the same

Semiconductor device and method

Semiconductor structure and method for manufacturing semiconductor...

Method of processing substrate, method of manufacturing semiconduct...

Semiconductor integrated circuit

Apparatus for hydrogen assisted atmospheric radical oxidation

Process for preparing a support for a semiconductor structure

Selective oxidation on rapid thermal processing (RTP) chamber with...

Semiconductor device with carbon-density-decreasing region

Semiconductor device

Isolation structures in multi-gate semiconductor devices and method...

Gate all around I/O engineering

Silicon-on-insulator with crystalline silicon oxide

Method of manufacturing semiconductor device, and recording medium

Light irradiation type heat treatment method and heat treatment app...

Semiconductor memory device and method for fabricating the semicond...

Method of manufacturing a semiconductor device

Method for producing three-dimensional structure, method for produc...

Method of forming semiconductor memory device having saddle portion

Nanowire transistor structure and method of shaping

Semiconductor device including trench isolation layer and method of...

DC bias in plasma process

Semiconductor method and device

Method for forming thin semiconductor-on-insulator (SOI) substrates

Circuit devices with gate seals

System and method for radical and thermal processing of substrates

Method for fabricating memory device

Staggered stacked vertical crystalline semiconducting channels

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME

NESTED-LOOP PLASMA ENHANCED ATOMIC LAYER DEPOSITION

DENSIFIED SEAM-FREE SILICON-CONTAINING MATERIAL GAP FILL PROCESSES

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

SEMICONDUCTOR DEVICES

TREATMENTS TO ENHANCE MATERIAL STRUCTURES

SEMICONDUCTOR INTEGRATED CIRCUIT

SUPPORTS FOR SEMICONDUCTOR STRUCTURES

MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE

METHODS OF SELECTIVE OXIDATION ON RAPID THERMAL PROCESSING (RTP) CH...

METHOD FOR FORMING THERMAL OXIDE FILM ON SEMICONDUCTOR SUBSTRATE AN...

SEMICONDUCTOR DEVICE WITH CARBON-DENSITY-DECREASING REGION

ISOLATION STRUCTURES IN MULTI-GATE SEMICONDUCTOR DEVICES AND METHOD...

METHODS FOR REDUCING MICRO AND MACRO SCALLOPING ON SEMICONDUCTOR DE...

TREATMENTS TO ENHANCE MATERIAL STRUCTURES

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

METHOD FOR FABRICATING THE SEMICONDUCTOR MEMORY DEVICE

OXIDATION CONFORMALITY IMPROVEMENT WITH IN-SITU INTEGRATED PROCESSING

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

STACKED SUBSTRATE MANUFACTURING METHOD AND SUBSTRATE PROCESSING APP...

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT DEVICE

LIGHT IRRADIATION TYPE HEAT TREATMENT METHOD AND HEAT TREATMENT APP...

NANOWIRE TRANSISTOR STRUCTURE AND METHOD OF SHAPING

SYSTEM AND METHOD FOR RADICAL AND THERMAL PROCESSING OF SUBSTRATES

DC Bias in Plasma Process

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

CIRCUIT DEVICES WITH GATE SEALS

LOW TEMPERATURE SILICON OXIDE GAP FILL

SEMICONDUCTOR DEVICE AND A METHOD FOR MANUFACTURING A SEMICONDUCTOR...