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H01L21/02656

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02656Special treatments

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Thin substrate handling via edge clamping
- Patent number 11,996,315
- Issue date May 28, 2024
- Applied Materials, Inc.
- Abhishek Chowdhury
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Purge ring for pedestal assembly
- Patent number 11,976,363
- Issue date May 7, 2024
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Strain relief trenches for epitaxial growth
- Patent number 11,804,374
- Issue date Oct 31, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chuan Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for filling recessed features in semiconductor devices with...
- Patent number 11,621,190
- Issue date Apr 4, 2023
- Tokyo Electron Limited
- Kai-Hung Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manipulating deposition rates of poly-silicon and method...
- Patent number 11,393,684
- Issue date Jul 19, 2022
- Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Zhenqi Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of filling recess
- Patent number 11,177,133
- Issue date Nov 16, 2021
- Tokyo Electron Limited
- Satoshi Takagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming aluminum nitride film and method of manufacturing...
- Patent number 10,995,403
- Issue date May 4, 2021
- Nichia Corporation
- Yojiro Ichiraku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiGe p-channel tri-gate transistor based on bulk silicon and fabric...
- Patent number 10,714,477
- Issue date Jul 14, 2020
- Gachon University of Industry-Academic cooperation Foundation
- Seongjae Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for depositing a semiconductor structure on a surface of a s...
- Patent number 10,535,516
- Issue date Jan 14, 2020
- ASM IP Holdings B.V.
- David Kohen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of preparing diamond substrates for CVD nanometric delta doping
- Patent number 10,468,246
- Issue date Nov 5, 2019
- Euclid Techlabs, LLC
- James E Butler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for reducing threshold voltage mismatch in an...
- Patent number 10,276,390
- Issue date Apr 30, 2019
- GLOBALFOUNDRIES Inc.
- Min-hwa Chi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing integrated circuit device
- Patent number 10,176,989
- Issue date Jan 8, 2019
- Samsung Electronics Co., Ltd.
- Yong-suk Tak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing gas generating apparatus, processing gas generating meth...
- Patent number 10,141,209
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Masashi Itonaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of doped germanium formation
- Patent number 9,966,438
- Issue date May 8, 2018
- Applied Materials, Inc.
- Yi-Chiau Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CVD reactor and method for nanometric delta doping of diamond
- Patent number 9,922,823
- Issue date Mar 20, 2018
- Euclid Techlabs, LLC
- James E Butler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,893,195
- Issue date Feb 13, 2018
- Semiconductor Energy Laboratory Co., Ltd.
- Kosei Noda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Production of graphene and nanoparticle catalysts supported on grap...
- Patent number 9,768,355
- Issue date Sep 19, 2017
- Virginia Commonwealth University
- M. Samy El-Shall
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Manufacturing a submicron structure using a liquid precursor
- Patent number 9,620,625
- Issue date Apr 11, 2017
- Technische Universiteit Delft
- Ryoichi Ishihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Cyclic epitaxial deposition and etch processes
- Patent number 9,564,321
- Issue date Feb 7, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating an optoelectronic device with a hollow compon...
- Patent number 9,520,281
- Issue date Dec 13, 2016
- Epistar Corporation
- Ai-Sen Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for adjusting post-spacer height in production of...
- Patent number 9,381,682
- Issue date Jul 5, 2016
- Beijing BOE Optoelectronics Technology Co., Ltd
- Chengtan Zhao
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Apparatus and method for fabricating wafer
- Patent number 9,281,188
- Issue date Mar 8, 2016
- LG Innotek Co., Ltd
- Seok Min Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for manufacturing a light-emitting device usin...
- Patent number 9,275,859
- Issue date Mar 1, 2016
- Korea Basic Science Institute
- Suk Jae Yoo
- C30 - CRYSTAL GROWTH
Information Patent Grant
Silicon carbide semiconductor substrate and method for manufacturin...
- Patent number 9,269,576
- Issue date Feb 23, 2016
- Denso Corporation
- Shouichi Yamauchi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor device, semiconductor substrate, method for manufactu...
- Patent number 9,263,532
- Issue date Feb 16, 2016
- Renesas Electronics Corporation
- Nobuyuki Ikarashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formation of a graphene layer on a large substrate
- Patent number 9,236,250
- Issue date Jan 12, 2016
- GLOBALFOUNDRIES Inc.
- Jack O. Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Graphene-layered structure, method of preparing the same, and trans...
- Patent number 9,193,133
- Issue date Nov 24, 2015
- Samsung Electronics Co., Ltd.
- Hyeon-jin Shin
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods for producing complex films, and films produced thereby
- Patent number 9,196,760
- Issue date Nov 24, 2015
- UT-Battelle, LLC
- Chad E. Duty
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Inorganic nanostructure reactive direct-write and growth
- Patent number 9,153,437
- Issue date Oct 6, 2015
- University of Washington through its Center for Commercialization
- Marco Rolandi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Horizontally and vertically aligned graphite nanofibers thermal int...
- Patent number 9,111,899
- Issue date Aug 18, 2015
- Lenovo
- Gerald K. Bartley
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
STRAIN RELIEF TRENCHES FOR EPITAXIAL GROWTH
- Publication number 20230377881
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Chuan LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ADJUSTING THERMAL FIELD OF SILICON CARBIDE SINGLE CRYSTA...
- Publication number 20230227998
- Publication date Jul 20, 2023
- NATIONAL CHUNG-SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY
- HSUEH-I CHEN
- C30 - CRYSTAL GROWTH
Information Patent Application
PURGE RING FOR PEDESTAL ASSEMBLY
- Publication number 20230059232
- Publication date Feb 23, 2023
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manipulating Deposition Ratges of Poly-Silicon and Method...
- Publication number 20220172950
- Publication date Jun 2, 2022
- Shanghai Huahong Grace Semiconductor Manufacturing Corporation
- Zhenqi LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN SUBSTRATE HANDLING VIA EDGE CLAMPING
- Publication number 20220157635
- Publication date May 19, 2022
- Applied Materials, Inc.
- Abhishek CHOWDHURY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRAIN RELIEF TRENCHES FOR EPITAXIAL GROWTH
- Publication number 20220130670
- Publication date Apr 28, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Chuan LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Filling Recess
- Publication number 20200161135
- Publication date May 21, 2020
- TOKYO ELECTRON LIMITED
- Satoshi TAKAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SiGe P-CHANNEL TRI-GATE TRANSISTOR BASED ON BULK SILICON AND FABRIC...
- Publication number 20190267378
- Publication date Aug 29, 2019
- Gachon University of Industry-Academic Cooperation Foundation
- Seongjae Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DEPOSITING A SEMICONDUCTOR STRUCTURE ON A SURFACE OF A S...
- Publication number 20190237327
- Publication date Aug 1, 2019
- ASM IP HOLDING B.V.
- David Kohen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE
- Publication number 20180286676
- Publication date Oct 4, 2018
- Samsung Electronics Co., Ltd.
- Yong-suk TAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PREPARING DIAMOND SUBSTRATES FOR CVD NANOMETRIC DELTA DOPING
- Publication number 20180174834
- Publication date Jun 21, 2018
- Euclid TechLabs, LLC
- James E Butler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CVD REACTOR AND METHOD FOR NANOMETRIC DELTA DOPING OF DIAMOND
- Publication number 20180068850
- Publication date Mar 8, 2018
- Euclid TechLabs, LLC
- James E Butler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SiGe P-CHANNEL TRI-GATE TRANSISTOR BASED ON BULK SILICON AND FABRIC...
- Publication number 20180047729
- Publication date Feb 15, 2018
- Gachon University of Industry-Academic Cooperation Foundation
- Seongjae Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR REDUCING THRESHOLD VOLTAGE MISMATCH IN AN...
- Publication number 20170301544
- Publication date Oct 19, 2017
- GLOBALFOUNDRIES INC.
- Min-hwa CHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON CARBIDE SEMICONDUCTOR SUBSTRATE AND METHOD FOR MANUFACTURIN...
- Publication number 20150228482
- Publication date Aug 13, 2015
- Denso Corporation
- Shouichi Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR ADJUSTING POST-SPACER HEIGHT IN PRODUCTION OF...
- Publication number 20150108672
- Publication date Apr 23, 2015
- BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Chengtan Zhao
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
OPTOELECTRONIC DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20140264390
- Publication date Sep 18, 2014
- EPISTAR CORPORATION
- Ai-Sen LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CYCLIC EPITAXIAL DEPOSITION AND ETCH PROCESSES
- Publication number 20140256119
- Publication date Sep 11, 2014
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun Hsiung TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PRODUCING COMPLEX FILMS, AND FILMS PRODUCED THEREBY
- Publication number 20140220724
- Publication date Aug 7, 2014
- UT-Battelle, LLC
- Chad E. Duty
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
APPARATUS AND METHOD FOR FABRICATING WAFER
- Publication number 20140170838
- Publication date Jun 19, 2014
- LG Innotek Co., Ltd.
- Seok Min Kang
- C30 - CRYSTAL GROWTH
Information Patent Application
INORGANIC NANOSTRUCTURE REACTIVE DIRECT-WRITE AND GROWTH
- Publication number 20140162436
- Publication date Jun 12, 2014
- University of Washington through its Center for Commercialization
- Marco Rolandi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
GRAPHENE-LAYERED STRUCTURE, METHOD OF PREPARING THE SAME, AND TRANS...
- Publication number 20140141265
- Publication date May 22, 2014
- Samsung Electronics Co., Ltd.
- Hyeon-jin SHIN
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHODS OF PREPARING GRAPHENE AND DEVICE INCLUDING GRAPHENE
- Publication number 20140141600
- Publication date May 22, 2014
- Dong Wook LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HORIZONTALLY AND VERTICALLY ALIGNED GRAPHITE NANOFIBERS THERMAL INT...
- Publication number 20140070393
- Publication date Mar 13, 2014
- International Business Machines Corporation
- Gerald K. Bartley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTIVE MICRO- AND NANO-WIRE ARRAY MANUFACTURING
- Publication number 20140057416
- Publication date Feb 27, 2014
- Emily L. Warren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR MANUFACTURING A LIGHT-EMITTING DEVICE USIN...
- Publication number 20140017827
- Publication date Jan 16, 2014
- KOREA BASIC SCIENCE INSTITUTE [KR/KR]
- Suk Jae Yoo
- C30 - CRYSTAL GROWTH
Information Patent Application
Radiation Hardened Transistors Based on Graphene and Carbon Nanotubes
- Publication number 20130320303
- Publication date Dec 5, 2013
- International Business Machines Corporation
- Yu-Ming Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMATION OF A GRAPHENE LAYER ON A LARGE SUBSTRATE
- Publication number 20130285014
- Publication date Oct 31, 2013
- Jack O. Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING GRAPHENE SUBSTRATE, AND GRAPHENE SUBSTRATE
- Publication number 20130272951
- Publication date Oct 17, 2013
- NEC Corporation
- Hidefumi Hiura
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A THIN FILM TRANSISTOR ARRAY PANEL
- Publication number 20130260497
- Publication date Oct 3, 2013
- Samsung Displays Co., Ltd.
- Byung Du AHN
- H01 - BASIC ELECTRIC ELEMENTS

Special treatments

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Thin substrate handling via edge clamping

Purge ring for pedestal assembly

Strain relief trenches for epitaxial growth

Method for filling recessed features in semiconductor devices with...

Method of manipulating deposition rates of poly-silicon and method...

Method of filling recess

Method of forming aluminum nitride film and method of manufacturing...

SiGe p-channel tri-gate transistor based on bulk silicon and fabric...

Method for depositing a semiconductor structure on a surface of a s...

Method of preparing diamond substrates for CVD nanometric delta doping

Method and apparatus for reducing threshold voltage mismatch in an...

Method of manufacturing integrated circuit device

Processing gas generating apparatus, processing gas generating meth...

Method of doped germanium formation

CVD reactor and method for nanometric delta doping of diamond

Method of manufacturing semiconductor device

Production of graphene and nanoparticle catalysts supported on grap...

Manufacturing a submicron structure using a liquid precursor

Cyclic epitaxial deposition and etch processes

Method of fabricating an optoelectronic device with a hollow compon...

Device and method for adjusting post-spacer height in production of...

Apparatus and method for fabricating wafer

Apparatus and method for manufacturing a light-emitting device usin...

Silicon carbide semiconductor substrate and method for manufacturin...

Semiconductor device, semiconductor substrate, method for manufactu...

Formation of a graphene layer on a large substrate

Graphene-layered structure, method of preparing the same, and trans...

Methods for producing complex films, and films produced thereby

Inorganic nanostructure reactive direct-write and growth

Horizontally and vertically aligned graphite nanofibers thermal int...

Patents Applicationslast 30 patents

STRAIN RELIEF TRENCHES FOR EPITAXIAL GROWTH

METHOD FOR ADJUSTING THERMAL FIELD OF SILICON CARBIDE SINGLE CRYSTA...

PURGE RING FOR PEDESTAL ASSEMBLY

Method of Manipulating Deposition Ratges of Poly-Silicon and Method...

THIN SUBSTRATE HANDLING VIA EDGE CLAMPING

STRAIN RELIEF TRENCHES FOR EPITAXIAL GROWTH

Method of Filling Recess

SiGe P-CHANNEL TRI-GATE TRANSISTOR BASED ON BULK SILICON AND FABRIC...

METHOD FOR DEPOSITING A SEMICONDUCTOR STRUCTURE ON A SURFACE OF A S...

METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE

METHOD OF PREPARING DIAMOND SUBSTRATES FOR CVD NANOMETRIC DELTA DOPING

CVD REACTOR AND METHOD FOR NANOMETRIC DELTA DOPING OF DIAMOND

SiGe P-CHANNEL TRI-GATE TRANSISTOR BASED ON BULK SILICON AND FABRIC...

METHOD AND APPARATUS FOR REDUCING THRESHOLD VOLTAGE MISMATCH IN AN...

SILICON CARBIDE SEMICONDUCTOR SUBSTRATE AND METHOD FOR MANUFACTURIN...

DEVICE AND METHOD FOR ADJUSTING POST-SPACER HEIGHT IN PRODUCTION OF...

OPTOELECTRONIC DEVICE AND METHOD FOR MANUFACTURING THE SAME

CYCLIC EPITAXIAL DEPOSITION AND ETCH PROCESSES

METHODS FOR PRODUCING COMPLEX FILMS, AND FILMS PRODUCED THEREBY

APPARATUS AND METHOD FOR FABRICATING WAFER

INORGANIC NANOSTRUCTURE REACTIVE DIRECT-WRITE AND GROWTH

GRAPHENE-LAYERED STRUCTURE, METHOD OF PREPARING THE SAME, AND TRANS...

METHODS OF PREPARING GRAPHENE AND DEVICE INCLUDING GRAPHENE

HORIZONTALLY AND VERTICALLY ALIGNED GRAPHITE NANOFIBERS THERMAL INT...

SEMICONDUCTIVE MICRO- AND NANO-WIRE ARRAY MANUFACTURING

APPARATUS AND METHOD FOR MANUFACTURING A LIGHT-EMITTING DEVICE USIN...

Radiation Hardened Transistors Based on Graphene and Carbon Nanotubes

FORMATION OF A GRAPHENE LAYER ON A LARGE SUBSTRATE

METHOD OF MANUFACTURING GRAPHENE SUBSTRATE, AND GRAPHENE SUBSTRATE

METHOD FOR MANUFACTURING A THIN FILM TRANSISTOR ARRAY PANEL