specially adapted for making ternary or higher compositions

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CPC
C23C16/45531

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45531specially adapted for making ternary or higher compositions

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Patents Grantslast 30 patents

Information Patent Grant
Methods for depositing a conformal metal or metalloid silicon nitri...
- Patent number 12,163,224
- Issue date Dec 10, 2024
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transparent conductive film
- Patent number 12,120,896
- Issue date Oct 15, 2024
- BASF Coatings GmbH
- Boram Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of protective coatings for semiconductor pr...
- Patent number 12,104,246
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wave-absorbing material powder with oxidation resistance and salt f...
- Patent number 12,091,750
- Issue date Sep 17, 2024
- BattFlex (Wuhan) Technology Co., Ltd.
- Ming Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, substrate processing apparatus, rec...
- Patent number 12,094,708
- Issue date Sep 17, 2024
- Kokusai Electric Corporation
- Yoshitomo Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 12,074,224
- Issue date Aug 27, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Yoshinobu Asami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-layer plasma resistant coating by atomic layer deposition
- Patent number 12,002,657
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,967,500
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic deposition methods for forming metal-containing material and...
- Patent number 11,952,658
- Issue date Apr 9, 2024
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of stable lithium ion conductive interfacia...
- Patent number 11,894,546
- Issue date Feb 6, 2024
- The Board of Trustees of the Leland Stanford Junior University
- Yi Cui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal fluoride passivation coatings prepared by atomic layer deposi...
- Patent number 11,862,783
- Issue date Jan 2, 2024
- UChicago Argonne, LLC
- Anil U. Mane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a transition metal niobium nitride film on a su...
- Patent number 11,810,788
- Issue date Nov 7, 2023
- ASM IP Holding B.V.
- Jerry Peijun Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
MXene layers as substrates for growth of highly oriented perovskite...
- Patent number 11,773,480
- Issue date Oct 3, 2023
- Drexel University
- Zongquan Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stability of refractory materials in high temperature steam
- Patent number 11,753,717
- Issue date Sep 12, 2023
- The Regents of the University of Colorado
- Alan W. Weimer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of processing substrate and manufacturing semiconductor devi...
- Patent number 11,746,416
- Issue date Sep 5, 2023
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a conformal metal or metalloid silicon nitri...
- Patent number 11,732,351
- Issue date Aug 22, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Superconducting compounds and methods for making the same
- Patent number 11,683,997
- Issue date Jun 20, 2023
- Quantum Designed Materials Ltd.
- Refael Gatt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formulation for deposition of silicon doped hafnium oxide as ferroe...
- Patent number 11,631,580
- Issue date Apr 18, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method, materials and process for native oxide removal and regrowth...
- Patent number 11,598,000
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Ranga Rao Arnepalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lithium nickelate-based positive electrode active substance particl...
- Patent number 11,552,292
- Issue date Jan 10, 2023
- Toda Kogyo Corp.
- Hiroyasu Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for passivating dielectric films
- Patent number 11,549,177
- Issue date Jan 10, 2023
- ASM INTERNATIONAL, N.V.
- Tom E. Blomberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of charge trapping layers
- Patent number 11,532,757
- Issue date Dec 20, 2022
- ASM IP Holding B.V.
- Pauline Calka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic deposition methods for forming metal-containing material and...
- Patent number 11,499,222
- Issue date Nov 15, 2022
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inorganic TFEL display element and manufacturing
- Patent number 11,464,087
- Issue date Oct 4, 2022
- Lumineq Oy
- Heli Seppänen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
TiSiN coating method
- Patent number 11,401,607
- Issue date Aug 2, 2022
- Eugenus, Inc.
- Vinayak Veer Vats
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Managing network communication of an unmanned autonomous vehicle
- Patent number 11,398,954
- Issue date Jul 26, 2022
- QUALCOMM Incorporated
- Charles Wheeler Sweet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ALD process for NiO film with tunable carbon content
- Patent number 11,396,698
- Issue date Jul 26, 2022
- Applied Materials, Inc.
- Jeffrey W. Anthis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amorphous silicon doped yttrium oxide films and methods of formation
- Patent number 11,370,669
- Issue date Jun 28, 2022
- Applied Materials, Inc.
- Tatsuya E. Sato
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Apparatus for atomic layer deposition and method of forming thin fi...
- Patent number 11,339,473
- Issue date May 24, 2022
- Samsung Electronics Co., Ltd.
- Sang-Yub Ie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating of electrode materials for energy storage devices
- Patent number 11,342,556
- Issue date May 24, 2022
- Hunt Energy Enterprises, L.L.C.
- Jin-Myoung Lim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTRODE PROTECTIVE LAYER, AND PREPARATION METHOD THEREFOR AND USE...
- Publication number 20240322186
- Publication date Sep 26, 2024
- SHENZHEN YUANSU OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Weizhen WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GALLIUM PRECURSORS FOR DEPOSITION OF GALLIUM-CONTAINING OXIDE FILMS
- Publication number 20240287675
- Publication date Aug 29, 2024
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Bo PENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING SILICON-BASED MATERIAL AND PRECURSORS FOR THE...
- Publication number 20240203727
- Publication date Jun 20, 2024
- ASM IP HOLDING B.V.
- Tao Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LITHIUM PRECURSORS FOR DEPOSITION OF LITHIUM-CONTAINING LAYERS, ISL...
- Publication number 20240102161
- Publication date Mar 28, 2024
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STABILITY OF REFRACTORY MATERIALS IN HIGH TEMPERATURE STEAM
- Publication number 20240043996
- Publication date Feb 8, 2024
- The Regents of the University of Colorado, a Body Corporate
- Alan W. Weimer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR FORMING A TRANSITION METAL NIOBIUM NITRIDE FILM ON A SU...
- Publication number 20240030035
- Publication date Jan 25, 2024
- ASM IP HOLDING B.V.
- Jerry Peijun Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING MET...
- Publication number 20230357926
- Publication date Nov 9, 2023
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED METHOD AND SYSTEM FOR FORMING A SILICON OXYCARBIDE...
- Publication number 20230340663
- Publication date Oct 26, 2023
- ASM IP HOLDING B.V.
- Fanyong Ran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Production of LixSiyOz Coatings Using a Single Source fo...
- Publication number 20230343934
- Publication date Oct 26, 2023
- Bar Ilan University
- Malakhi NOKED
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Superconducting Compounds and Methods for Making the Same
- Publication number 20230345845
- Publication date Oct 26, 2023
- Quantum Designed Materials Ltd.
- Refael Gatt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TISIN COATING METHOD
- Publication number 20230151488
- Publication date May 18, 2023
- EUGENUS, INC.
- Vinayak Veer VATS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE THERMAL BARRIER COATING
- Publication number 20230139765
- Publication date May 4, 2023
- Raytheon Technologies Corporation
- Elisa M. Zaleski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INHERENTLY FERROELECTRIC HF-ZR CONTAINING FILMS
- Publication number 20230089523
- Publication date Mar 23, 2023
- Merck Patent GmbH
- Vijay Kris NARASIMHAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wave-absorbing material powder with oxidation resistance and salt f...
- Publication number 20230087932
- Publication date Mar 23, 2023
- BattFlex (Wuhan) Technology Co., Ltd.
- Ming Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...
- Publication number 20230067660
- Publication date Mar 2, 2023
- ASM IP HOLDING B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON PRECURSOR COMPOUNDS AND METHOD FOR FORMING SILICON-CONTAINI...
- Publication number 20220359192
- Publication date Nov 10, 2022
- Entegris, Inc.
- Sungsil Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD
- Publication number 20220259730
- Publication date Aug 18, 2022
- UNIVERSITETET I OSLO
- Henrik Hovde SØNSTEBY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION OF PROTECTIVE COATINGS FOR SEMICONDUCTOR PR...
- Publication number 20220235458
- Publication date Jul 28, 2022
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMULATION FOR DEPOSITION OF SILICON DOPED HAFNIUM OXIDE AS FERROE...
- Publication number 20220189767
- Publication date Jun 16, 2022
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LAYER PLASMA RESISTANT COATING BY ATOMIC LAYER DEPOSITION
- Publication number 20220157568
- Publication date May 19, 2022
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL FLUORIDE PASSIVATION COATINGS PREPARED BY ATOMIC LAYER DEPOSI...
- Publication number 20220085348
- Publication date Mar 17, 2022
- UChicago Argonne, LLC
- Anil U. Mane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS
- Publication number 20210399111
- Publication date Dec 23, 2021
- ASM IP HOLDING B.V.
- Suvi Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR MAKING SILICON AND NITROGEN CONTAINING FILMS
- Publication number 20210398796
- Publication date Dec 23, 2021
- VERSUM MATERIALS US, LLC
- XINJIAN LEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Depositing a Conformal Metal or Metalloid Silicon Nitri...
- Publication number 20210388489
- Publication date Dec 16, 2021
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPARENT CONDUCTIVE FILM
- Publication number 20210269917
- Publication date Sep 2, 2021
- BASF COATINGS GMBH
- Boram Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...
- Publication number 20210269914
- Publication date Sep 2, 2021
- ASM IP HOLDING B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANAGING NETWORK COMMUNICATION OF AN UNMANNED AUTONOMOUS VEHICLE
- Publication number 20210254215
- Publication date Aug 19, 2021
- QUALCOMM Incorporated
- Charles Wheeler SWEET
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING OF ELECTRODE MATERIALS FOR ENERGY STORAGE DEVICES
- Publication number 20210226201
- Publication date Jul 22, 2021
- HUNT ENERGY ENTERPRISES, LLC
- Jin-Myoung Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Superconducting Compounds and Methods for Making the Same
- Publication number 20210104656
- Publication date Apr 8, 2021
- Quantum Designed Materials Ltd.
- Refael Gatt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20200335328
- Publication date Oct 22, 2020
- Kokusai Electric Corporation
- Arito OGAWA
- H01 - BASIC ELECTRIC ELEMENTS

specially adapted for making ternary or higher compositions

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods for depositing a conformal metal or metalloid silicon nitri...

Transparent conductive film

Atomic layer deposition of protective coatings for semiconductor pr...

Wave-absorbing material powder with oxidation resistance and salt f...

Method of processing substrate, substrate processing apparatus, rec...

Semiconductor device and manufacturing method thereof

Multi-layer plasma resistant coating by atomic layer deposition

Method of manufacturing semiconductor device, substrate processing...

Cyclic deposition methods for forming metal-containing material and...

Atomic layer deposition of stable lithium ion conductive interfacia...

Metal fluoride passivation coatings prepared by atomic layer deposi...

Methods for forming a transition metal niobium nitride film on a su...

MXene layers as substrates for growth of highly oriented perovskite...

Stability of refractory materials in high temperature steam

Method of processing substrate and manufacturing semiconductor devi...

Methods for depositing a conformal metal or metalloid silicon nitri...

Superconducting compounds and methods for making the same

Formulation for deposition of silicon doped hafnium oxide as ferroe...

Method, materials and process for native oxide removal and regrowth...

Lithium nickelate-based positive electrode active substance particl...

Process for passivating dielectric films

Deposition of charge trapping layers

Cyclic deposition methods for forming metal-containing material and...

Inorganic TFEL display element and manufacturing

TiSiN coating method

Managing network communication of an unmanned autonomous vehicle

ALD process for NiO film with tunable carbon content

Amorphous silicon doped yttrium oxide films and methods of formation

Apparatus for atomic layer deposition and method of forming thin fi...

Coating of electrode materials for energy storage devices

Patents Applicationslast 30 patents

ELECTRODE PROTECTIVE LAYER, AND PREPARATION METHOD THEREFOR AND USE...

GALLIUM PRECURSORS FOR DEPOSITION OF GALLIUM-CONTAINING OXIDE FILMS

METHOD OF DEPOSITING SILICON-BASED MATERIAL AND PRECURSORS FOR THE...

LITHIUM PRECURSORS FOR DEPOSITION OF LITHIUM-CONTAINING LAYERS, ISL...

STABILITY OF REFRACTORY MATERIALS IN HIGH TEMPERATURE STEAM

METHODS FOR FORMING A TRANSITION METAL NIOBIUM NITRIDE FILM ON A SU...

SUBSTRATE PROCESSING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING MET...

PLASMA-ENHANCED METHOD AND SYSTEM FOR FORMING A SILICON OXYCARBIDE...

Method for Production of LixSiyOz Coatings Using a Single Source fo...

Superconducting Compounds and Methods for Making the Same

TISIN COATING METHOD

REACTIVE THERMAL BARRIER COATING

INHERENTLY FERROELECTRIC HF-ZR CONTAINING FILMS

Wave-absorbing material powder with oxidation resistance and salt f...

CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...

SILICON PRECURSOR COMPOUNDS AND METHOD FOR FORMING SILICON-CONTAINI...

METHOD

ATOMIC LAYER DEPOSITION OF PROTECTIVE COATINGS FOR SEMICONDUCTOR PR...

FORMULATION FOR DEPOSITION OF SILICON DOPED HAFNIUM OXIDE AS FERROE...

MULTI-LAYER PLASMA RESISTANT COATING BY ATOMIC LAYER DEPOSITION

METAL FLUORIDE PASSIVATION COATINGS PREPARED BY ATOMIC LAYER DEPOSI...

TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS

METHODS FOR MAKING SILICON AND NITROGEN CONTAINING FILMS

Methods for Depositing a Conformal Metal or Metalloid Silicon Nitri...

TRANSPARENT CONDUCTIVE FILM

CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...

MANAGING NETWORK COMMUNICATION OF AN UNMANNED AUTONOMOUS VEHICLE

COATING OF ELECTRODE MATERIALS FOR ENERGY STORAGE DEVICES

Superconducting Compounds and Methods for Making the Same

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...