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G02B17/0892
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Parent Industries
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PHYSICS
G02
Optics
G02B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
G02B17/00
Systems with reflecting surfaces, with or without refracting elements
Current Industry
G02B17/0892
specially adapted for the UV
Industries
Overview
Organizations
People
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Patents Grants
last 30 patents
Information
Patent Grant
Illumination apparatus
Patent number
12,066,611
Issue date
Aug 20, 2024
Optovate Limited
Graham J. Woodgate
F21 - LIGHTING
Information
Patent Grant
Catadioptric lens and optical system comprising such a lens
Patent number
11,561,381
Issue date
Jan 24, 2023
Carl Zeiss SMT GmbH
Konstantin Forcht
G02 - OPTICS
Information
Patent Grant
EUV lithography system with diffraction optics
Patent number
11,520,235
Issue date
Dec 6, 2022
Kenneth Carlisle Johnson
G02 - OPTICS
Information
Patent Grant
Catadioptric lens and optical system comprising such a lens
Patent number
11,520,130
Issue date
Dec 6, 2022
Carl Zeiss SMT GmbH
Konstantin Forcht
G02 - OPTICS
Information
Patent Grant
Illumination apparatus
Patent number
11,422,344
Issue date
Aug 23, 2022
Optovate Limited
Graham J. Woodgate
F21 - LIGHTING
Information
Patent Grant
Optical arrangement for EUV lithography
Patent number
11,372,335
Issue date
Jun 28, 2022
Carl Zeiss SMT GmbH
Anastasia Gonchar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Catadioptric projection lens and method for producing same
Patent number
11,360,293
Issue date
Jun 14, 2022
Carl Zeiss SMT GmbH
Martin Rocktaeschel
G02 - OPTICS
Information
Patent Grant
Magnification compensation and/or beam steering in optical systems
Patent number
11,209,635
Issue date
Dec 28, 2021
SUSS MICROTEC PHOTONIC SYSTEMS INC.
Yanrong Yuan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical distortion reduction in projection systems
Patent number
11,175,487
Issue date
Nov 16, 2021
SUSS MICROTEC PHOTONIC SYSTEMS INC.
Paul Ferrari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical lithography system for patterning semiconductor devices and...
Patent number
11,143,965
Issue date
Oct 12, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Jui Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Catadioptric medical imaging system for observing the inside wall o...
Patent number
11,042,014
Issue date
Jun 22, 2021
Leica Instruments (Singapore) Pte. Ltd.
George Themelis
G02 - OPTICS
Information
Patent Grant
Plasma source with lamp house correction
Patent number
10,823,943
Issue date
Nov 3, 2020
KLA Corporation
Shiyu Zhang
G01 - MEASURING TESTING
Information
Patent Grant
Wafer defect inspection and review systems
Patent number
10,656,098
Issue date
May 19, 2020
KLA-Tencor Corporation
Shiyu Zhang
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective including a reflective optical co...
Patent number
10,578,976
Issue date
Mar 3, 2020
Carl Zeiss SMT GmbH
Sascha Bleidistel
G02 - OPTICS
Information
Patent Grant
Magnification compensation and/or beam steering in optical systems
Patent number
10,539,770
Issue date
Jan 21, 2020
SUSS MICROTEC PHOTONIC SYSTEMS INC.
Yanrong Yuan
G02 - OPTICS
Information
Patent Grant
Catadioptric imaging systems for digital scanner
Patent number
10,488,638
Issue date
Nov 26, 2019
Nikon Corporation
David M. Williamson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
193nm laser and inspection system
Patent number
10,439,355
Issue date
Oct 8, 2019
KLA-Tencor Corporation
Yung-Ho Chuang
G01 - MEASURING TESTING
Information
Patent Grant
Hollow light integrator for light emitting diode digital micromirro...
Patent number
10,409,045
Issue date
Sep 10, 2019
Innovations In Optics, Inc.
Thomas John Brukilacchio
B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information
Patent Grant
Wavefront correction element for use in an optical system
Patent number
10,151,922
Issue date
Dec 11, 2018
Carl Zeiss SMT GmbH
Matus Banyay
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective including a reflective optical co...
Patent number
10,146,137
Issue date
Dec 4, 2018
Carl Zeiss SMT GmbH
Sascha Bleidistel
G02 - OPTICS
Information
Patent Grant
Broadband catadioptric microscope objective with small central obsc...
Patent number
10,139,610
Issue date
Nov 27, 2018
Nikon Corporation
David M. Williamson
G02 - OPTICS
Information
Patent Grant
Catadioptric projection objective comprising deflection mirrors and...
Patent number
10,120,176
Issue date
Nov 6, 2018
Carl Zeiss SMT GmbH
Thomas Schicketanz
G02 - OPTICS
Information
Patent Grant
Chromatically corrected objective with specifically structured and...
Patent number
10,101,668
Issue date
Oct 16, 2018
Carl Zeiss SMT GmbH
Alexander Epple
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Catadioptric projection objective
Patent number
10,042,146
Issue date
Aug 7, 2018
Carl Zeiss SMT GmbH
Alexander Epple
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection lens for EUV microlithography, film element and method f...
Patent number
10,001,631
Issue date
Jun 19, 2018
Carl Zeiss SMT GmbH
Boris Bittner
G02 - OPTICS
Information
Patent Grant
Light emitting diode digital micromirror device illuminator
Patent number
9,971,135
Issue date
May 15, 2018
Innovations In Optics, Inc.
Thomas John Brukilacchio
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Illumination system of a microlithographic projection exposure appa...
Patent number
9,933,706
Issue date
Apr 3, 2018
Carl Zeiss SMT GmbH
Markus Deguenther
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
193nm laser and inspection system
Patent number
9,935,421
Issue date
Apr 3, 2018
KLA-Tencor Corporation
Yung-Ho Chuang
G02 - OPTICS
Information
Patent Grant
Optical component
Patent number
9,915,872
Issue date
Mar 13, 2018
Carl Zeiss SMT GmbH
Johannes Eisenmenger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection optical system, exposure apparatus, and exposure method
Patent number
9,891,539
Issue date
Feb 13, 2018
Nikon Corporation
Yasuhiro Omura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
EUV ILLUMINATION DEVICE AND METHOD FOR OPERATING A MICROLITHOGRAPHI...
Publication number
20240248410
Publication date
Jul 25, 2024
Carl Zeiss SMT GMBH
Michael Patra
G02 - OPTICS
Information
Patent Application
Illumination apparatus
Publication number
20230003985
Publication date
Jan 5, 2023
Optovate Limited
Graham J. WOODGATE
F21 - LIGHTING
Information
Patent Application
EUV Lithography System with Diffraction Optics
Publication number
20220107568
Publication date
Apr 7, 2022
Kenneth Carlisle Johnson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ARRANGEMENT FOR EUV LITHOGRAPHY
Publication number
20210003926
Publication date
Jan 7, 2021
Carl Zeiss SMT GMBH
Anastasia GONCHAR
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION APPARATUS
Publication number
20200355896
Publication date
Nov 12, 2020
OPTOVATE LIMITED
Graham J. WOODGATE
G02 - OPTICS
Information
Patent Application
Optical Lithography System for Patterning Semiconductor Devices and...
Publication number
20200348601
Publication date
Nov 5, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Jui Kuo
G02 - OPTICS
Information
Patent Application
OPTICAL DISTORTION REDUCTION IN PROJECTION SYSTEMS
Publication number
20200225454
Publication date
Jul 16, 2020
SUSS MicroTec Photonic Systems Inc.
Paul Ferrari
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MAGNIFICATION COMPENSATION AND/OR BEAM STEERING IN OPTICAL SYSTEMS
Publication number
20200150409
Publication date
May 14, 2020
SUSS MicroTec Photonic Systems Inc.
Yanrong Yuan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Plasma Source with Lamp House Correction
Publication number
20200041774
Publication date
Feb 6, 2020
KLA-Tencor Corporation
Shiyu Zhang
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC LENS AND OPTICAL SYSTEM COMPRISING SUCH A LENS
Publication number
20190369374
Publication date
Dec 5, 2019
Carl Zeiss SMT GMBH
Konstantin Forcht
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC MEDICAL IMAGING SYSTEM FOR OBSERVING THE INSIDE WALL O...
Publication number
20190278069
Publication date
Sep 12, 2019
LEICA INSTRUMENTS (SINGAPORE) PTE. LTD.
George THEMELIS
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE INCLUDING A REFLECTIVE OPTICAL CO...
Publication number
20190101832
Publication date
Apr 4, 2019
Carl Zeiss SMT GmbH
Sascha Bleidistel
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE COMPRISING DEFLECTION MIRRORS AND...
Publication number
20190056576
Publication date
Feb 21, 2019
Carl Zeiss SMT GmbH
Thomas Schicketanz
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20180373006
Publication date
Dec 27, 2018
Carl Zeiss SMT GMBH
Alexander EPPLE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MAGNIFICATION COMPENSATION AND/OR BEAM STEERING IN OPTICAL SYSTEMS
Publication number
20180364463
Publication date
Dec 20, 2018
SUSS Micro Tec Photonic Systems Inc.
Yanrong Yuan
G02 - OPTICS
Information
Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
Publication number
20180314165
Publication date
Nov 1, 2018
Carl Zeiss SMT GMBH
Markus Deguenther
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BROADBAND CATADIOPTRIC MICROSCOPE OBJECTIVE WITH SMALL CENTRAL OBSC...
Publication number
20180275387
Publication date
Sep 27, 2018
Nikon Corporation
David M. Williamson
G02 - OPTICS
Information
Patent Application
HOLLOW LIGHT INTEGRATOR FOR LIGHT EMITTING DIODE DIGITAL MICROMIRRO...
Publication number
20180239120
Publication date
Aug 23, 2018
INNOVATIONS IN OPTICS, INC.
Thomas John Brukilacchio
B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE COMPRISING DEFLECTION MIRRORS AND...
Publication number
20180095259
Publication date
Apr 5, 2018
Carl Zeiss SMT GMBH
Thomas Schicketanz
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20180095258
Publication date
Apr 5, 2018
Carl Zeiss SMT GMBH
Alexander EPPLE
G02 - OPTICS
Information
Patent Application
WAVEFRONT CORRECTION ELEMENT FOR USE IN AN OPTICAL SYSTEM
Publication number
20180059413
Publication date
Mar 1, 2018
Carl Zeiss SMT GMBH
Matus BANYAY
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE WITH PARALLEL, OFFSET OPTICAL AXES
Publication number
20180031815
Publication date
Feb 1, 2018
Carl Zeiss SMT GMBH
David Shafer
G02 - OPTICS
Information
Patent Application
Catadioptric Projection Objective With Intermediate Images
Publication number
20170363963
Publication date
Dec 21, 2017
Carl Zeiss SMT GMBH
Aurelian Dodoc
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC IMAGING SYSTEMS FOR DIGITAL SCANNER
Publication number
20170307863
Publication date
Oct 26, 2017
Nikon Corporation
David M. Williamson
G02 - OPTICS
Information
Patent Application
Projection Lens for EUV Microlithography, Film Element and Method f...
Publication number
20170261730
Publication date
Sep 14, 2017
Carl Zeiss SMT GMBH
Boris Bittner
G02 - OPTICS
Information
Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
Publication number
20170261861
Publication date
Sep 14, 2017
Carl Zeiss SMT GMBH
Markus Deguenther
G02 - OPTICS
Information
Patent Application
LIGHT EMITTING DIODE DIGITAL MICROMIRROR DEVICE ILLUMINATOR
Publication number
20170131531
Publication date
May 11, 2017
INNOVATIONS IN OPTICS, INC.
Thomas John Brukilacchio
B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE COMPRISING DEFLECTION MIRRORS AND...
Publication number
20170052355
Publication date
Feb 23, 2017
Carl Zeiss SMT GMBH
Thomas Schicketanz
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE
Publication number
20160231546
Publication date
Aug 11, 2016
Carl Zeiss SMT GMBH
Alexander EPPLE
G02 - OPTICS
Information
Patent Application
CATADIOPTRIC PROJECTION OBJECTIVE COMPRISING DEFLECTION MIRRORS AND...
Publication number
20160154228
Publication date
Jun 2, 2016
Carl Zeiss SMT GMBH
Thomas Schicketanz
G02 - OPTICS