Sputtering targets therefor

Industry

CPC
H01F41/183

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Parent Industries

HELECTRICITY H01Electric elements H01FMAGNETS INDUCTANCES TRANSFORMERS SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties

Current Industry

H01F41/183Sputtering targets therefor

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Sputtering target and magnetic film
- Patent number 11,894,221
- Issue date Feb 6, 2024
- JX Metals Corporation
- Yasuyuki Iwabuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target and method of producing sputtering target
- Patent number 11,421,315
- Issue date Aug 23, 2022
- Ulvac, Inc.
- Xiaoli Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target material
- Patent number 11,377,726
- Issue date Jul 5, 2022
- Sanyo Special Steel Co., Ltd.
- Hiroyuki Hasegawa
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Stage device and processing apparatus
- Patent number 11,293,092
- Issue date Apr 5, 2022
- Tokyo Electron Limited
- Manabu Nakagawasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fe—Pt based magnetic material sintered compact
- Patent number 10,937,455
- Issue date Mar 2, 2021
- JX Nippon Mining & Metals Corporation
- Shin-ichi Ogino
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Sputtering target material
- Patent number 10,844,476
- Issue date Nov 24, 2020
- Sanyo Special Steel Co., Ltd.
- Hiroyuki Hasegawa
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Fe-Pt based magnetic material sintered compact
- Patent number 10,755,737
- Issue date Aug 25, 2020
- JX Nippon Mining & Metals Corporation
- Shin-ichi Ogino
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Magnetic material sputtering target and method for producing same
- Patent number 10,724,134
- Issue date Jul 28, 2020
- JX Nippon Mining & Metals Corporation
- Atsutoshi Arakawa
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Magnetic material sputtering target and method for producing same
- Patent number 10,644,230
- Issue date May 5, 2020
- JX Nippon Mining & Metals Corporation
- Atsutoshi Arakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic thin film deposition chamber and thin film deposition appa...
- Patent number 10,622,145
- Issue date Apr 14, 2020
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yujie Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target for forming magnetic recording film and method fo...
- Patent number 10,600,440
- Issue date Mar 24, 2020
- JX Nippon Mining & Metals Corporation
- Shin-ichi Ogino
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method of forming a stack of layers using a sacrificial layer
- Patent number 10,333,059
- Issue date Jun 25, 2019
- Imec VZW
- Johan Swerts
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron sputtering target and process for producing the same
- Patent number 9,928,996
- Issue date Mar 27, 2018
- Tanaka Kikinzoku Kogyo K.K.
- Takanobu Miyashita
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Fe-Co-based alloy sputtering target material, and method of produci...
- Patent number 9,773,654
- Issue date Sep 26, 2017
- Hitachi Metals, Ltd.
- Jun Fukuoka
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Sputtering target for magnetic recording film and process for produ...
- Patent number 9,605,339
- Issue date Mar 28, 2017
- JX Nippon Mining & Metals Corporation
- Shin-ichi Ogino
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Sputtering target for magnetic recording film
- Patent number 9,540,724
- Issue date Jan 10, 2017
- JX Nippon Mining & Metals Corporation
- Shini-ichi Ogino
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Magnetron sputtering target and method for manufacturing the same
- Patent number 9,502,224
- Issue date Nov 22, 2016
- Tanaka Kikinzoku Kogyo K.K.
- Takanobu Miyashita
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Fe—Pt-based ferromagnetic material sputtering target
- Patent number 9,328,412
- Issue date May 3, 2016
- JX Nippon Mining & Metals Corporation
- Shin-ichi Ogino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target of magnetic material
- Patent number 9,269,389
- Issue date Feb 23, 2016
- JX Nippon Mining & Metals Corporation
- Atsutoshi Arakawa
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Ferromagnetic material sputtering target
- Patent number 9,228,251
- Issue date Jan 5, 2016
- JX Nippon Mining & Metals Corporation
- Atsushi Sato
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Nonmagnetic material particle-dispersed ferromagnetic material sput...
- Patent number 9,103,023
- Issue date Aug 11, 2015
- JX Nippon Mining & Metals Corporation
- Atsushi Sato
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Magnetron sputtering target and process for producing the same
- Patent number 9,053,910
- Issue date Jun 9, 2015
- Tanaka Kikinzoku Kogyo K.K.
- Takanobu Miyashita
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Nonmagnetic material particle dispersed ferromagnetic material sput...
- Patent number 9,034,153
- Issue date May 19, 2015
- JX Nippon Mining & Metals Corporation
- Kazuyuki Satoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target
- Patent number 9,011,653
- Issue date Apr 21, 2015
- Mitsui Mining & Smelting Co., Ltd.
- Makoto Ikeda
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Sputtering target of nonmagnetic-particle-dispersed ferromagnetic m...
- Patent number 8,936,707
- Issue date Jan 20, 2015
- JX Nippon Mining & Metals Corporation
- Atsushi Sato
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Sputtering target of nonmagnetic-particle-dispersed ferromagnetic m...
- Patent number 8,932,444
- Issue date Jan 13, 2015
- JX Nippon Mining & Metals Corporation
- Atsushi Sato
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Sputtering target of ferromagnetic material with low generation of...
- Patent number 8,679,268
- Issue date Mar 25, 2014
- JX Nippon Mining & Metals Corporation
- Shin-ichi Ogino
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Sputtering target of nonmagnetic-particle-dispersed ferromagnetic m...
- Patent number 8,568,576
- Issue date Oct 29, 2013
- JX Nippon Mining & Metals Corporation
- Atsushi Sato
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
FePtP-alloy magnetic thin film
- Patent number 8,158,276
- Issue date Apr 17, 2012
- Ishifuku Metal Industry Co., Ltd.
- Koichi Hasegawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Co-Cr-Pt-B alloy sputtering target
- Patent number 7,927,434
- Issue date Apr 19, 2011
- JX Nippon Mining & Metals Corporation
- Yuichiro Nakamura
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...

Patents Applicationslast 30 patents

Information Patent Application
SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...
- Publication number 20240186064
- Publication date Jun 6, 2024
- Evatec AG
- Claudiu Valentin FALUB
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
METHOD OF DEPOSITING A MATERIAL
- Publication number 20230220539
- Publication date Jul 13, 2023
- Dyson Technology Limited
- Michael Edward RENDALL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sputtering Target Material and Method of Producing the Same
- Publication number 20230076444
- Publication date Mar 9, 2023
- SANYO SPECIAL STEEL CO., LTD.
- Noriaki Matsubara
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Sputtering Target, Method for Producing Laminated Film, Laminated F...
- Publication number 20220005505
- Publication date Jan 6, 2022
- JX NIPPON MINING & METALS CORPORATION
- Masayoshi Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET AND METHOD OF PRODUCING SPUTTERING TARGET
- Publication number 20210172056
- Publication date Jun 10, 2021
- Xiaoli LU
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Sputtering Target Material
- Publication number 20200362451
- Publication date Nov 19, 2020
- SANYO SPECIAL STEEL CO., LTD.
- Hiroyuki Hasegawa
- B22 - CASTING POWDER METALLURGY
Information Patent Application
Fe-Pt Based Magnetic Material Sintered Compact
- Publication number 20200357433
- Publication date Nov 12, 2020
- JX NIPPON MINING & METALS CORPORATION
- Shin-ichi Ogino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...
- Publication number 20200203071
- Publication date Jun 25, 2020
- Evatec AG
- Claudiu Valentin FALUB
- B32 - LAYERED PRODUCTS
Information Patent Application
STAGE DEVICE AND PROCESSING APPARATUS
- Publication number 20200131625
- Publication date Apr 30, 2020
- TOKYO ELECTRON LIMITED
- Manabu NAKAGAWASAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering Target, Method for Producing Laminated Film, Laminated F...
- Publication number 20200051589
- Publication date Feb 13, 2020
- JX NIPPON MINING & METALS CORPORATION
- Masayoshi Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC THIN FILM DEPOSITION CHAMBER AND THIN FILM DEPOSITION APPA...
- Publication number 20190244754
- Publication date Aug 8, 2019
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yujie YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC MATERIAL SPUTTERING TARGET AND METHOD FOR PRODUCING SAME
- Publication number 20180019389
- Publication date Jan 18, 2018
- JX NIPPON MINING & METALS CORPORATION
- Atsutoshi Arakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering Target for Forming Magnetic Recording Film and Method fo...
- Publication number 20170294203
- Publication date Oct 12, 2017
- JX NIPPON MINING & METALS CORPORATION
- Shin-ichi Ogino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Engineering Single Phase Magnetoelectric Hexaferrite Films
- Publication number 20170169946
- Publication date Jun 15, 2017
- Northeastern University
- Carmine VITTORIA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC MATERIAL SPUTTERING TARGET AND METHOD FOR PRODUCING SAME
- Publication number 20160237552
- Publication date Aug 18, 2016
- JX NIPPON MINING & METALS CORPORATION
- Atsutoshi Arakawa
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Fe-Co-BASED ALLOY SPUTTERING TARGET MATERIAL, AND METHOD OF PRODUCI...
- Publication number 20160141158
- Publication date May 19, 2016
- Hitachi Metals, Ltd.
- Jun FUKUOKA
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Sputtering Target for Rare-Earth Magnet and Production Method Therefor
- Publication number 20150262752
- Publication date Sep 17, 2015
- JX NIPPON MINING & METALS CORPORATION
- Hironobu Sawatari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sputtering Target for Magnetic Recording Film
- Publication number 20140346039
- Publication date Nov 27, 2014
- Shini-ichi Ogino
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
MAGNETRON SPUTTERING TARGET AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20140311901
- Publication date Oct 23, 2014
- Takanobu MIYASHITA
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
MAGNETRON SPUTTERING TARGET AND PROCESS FOR PRODUCING THE SAME
- Publication number 20140306144
- Publication date Oct 16, 2014
- Takanobu MIYASHITA
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Fe-Al Based Alloy Sputtering Target
- Publication number 20140166481
- Publication date Jun 19, 2014
- JX NIPPON MINING & METALS CORPORATION
- Kentaro Harada
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Alloy and Sputtering Target Material for Soft-Magnetic Film Layer i...
- Publication number 20140154127
- Publication date Jun 5, 2014
- SANYO SPECIAL STEEL CO., LTD.
- Toshiyuki Sawada
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
SPUTTERING TARGET FOR FORMING MAGNETIC RECORDING MEDIUM FILM AND ME...
- Publication number 20130306471
- Publication date Nov 21, 2013
- Kouichi Ishiyama
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
FE-PT-Based Ferromagnetic Sputtering Target and Method for Producin...
- Publication number 20130292245
- Publication date Nov 7, 2013
- JX NIPPON MINING & METALS CORPORATION
- Yuki Ikeda
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Sputtering Target for Magnetic Recording Film and Process for Produ...
- Publication number 20130248362
- Publication date Sep 26, 2013
- JX NIPPON MINING & METALS CORPORATION
- Shin-ichi Ogino
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Sputtering Target
- Publication number 20130240352
- Publication date Sep 19, 2013
- Mitsui Mining and Smelting Co., Ltd.
- Makoto Ikeda
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Ferromagnetic Material Sputtering Target
- Publication number 20130220804
- Publication date Aug 29, 2013
- JX NIPPON MINING & METALS CORPORATION
- Atsutoshi Arakawa
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
FERROMAGNETIC MATERIAL SPUTTERING TARGET
- Publication number 20130213804
- Publication date Aug 22, 2013
- JX NIPPON MINING & METALS CORPORATION
- Atsutoshi Arakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering Target for Magnetic Recording Film and Method for Produc...
- Publication number 20130206591
- Publication date Aug 15, 2013
- JX NIPPON MINING & METALS CORPORATION
- Hideo Takami
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
FERROMAGNETIC MATERIAL SPUTTERING TARGET
- Publication number 20130206593
- Publication date Aug 15, 2013
- JX NIPPON MINING & METALS CORPORATION
- Atsutoshi Arakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Sputtering targets therefor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Sputtering target and magnetic film

Sputtering target and method of producing sputtering target

Sputtering target material

Stage device and processing apparatus

Fe—Pt based magnetic material sintered compact

Sputtering target material

Fe-Pt based magnetic material sintered compact

Magnetic material sputtering target and method for producing same

Magnetic material sputtering target and method for producing same

Magnetic thin film deposition chamber and thin film deposition appa...

Sputtering target for forming magnetic recording film and method fo...

Method of forming a stack of layers using a sacrificial layer

Magnetron sputtering target and process for producing the same

Fe-Co-based alloy sputtering target material, and method of produci...

Sputtering target for magnetic recording film and process for produ...

Sputtering target for magnetic recording film

Magnetron sputtering target and method for manufacturing the same

Fe—Pt-based ferromagnetic material sputtering target

Sputtering target of magnetic material

Ferromagnetic material sputtering target

Nonmagnetic material particle-dispersed ferromagnetic material sput...

Magnetron sputtering target and process for producing the same

Nonmagnetic material particle dispersed ferromagnetic material sput...

Sputtering target

Sputtering target of nonmagnetic-particle-dispersed ferromagnetic m...

Sputtering target of nonmagnetic-particle-dispersed ferromagnetic m...

Sputtering target of ferromagnetic material with low generation of...

Sputtering target of nonmagnetic-particle-dispersed ferromagnetic m...

FePtP-alloy magnetic thin film

Co-Cr-Pt-B alloy sputtering target

Patents Applicationslast 30 patents

SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...

METHOD OF DEPOSITING A MATERIAL

Sputtering Target Material and Method of Producing the Same

Sputtering Target, Method for Producing Laminated Film, Laminated F...

SPUTTERING TARGET AND METHOD OF PRODUCING SPUTTERING TARGET

Sputtering Target Material

Fe-Pt Based Magnetic Material Sintered Compact

SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...

STAGE DEVICE AND PROCESSING APPARATUS

Sputtering Target, Method for Producing Laminated Film, Laminated F...

MAGNETIC THIN FILM DEPOSITION CHAMBER AND THIN FILM DEPOSITION APPA...

MAGNETIC MATERIAL SPUTTERING TARGET AND METHOD FOR PRODUCING SAME

Sputtering Target for Forming Magnetic Recording Film and Method fo...

Method of Engineering Single Phase Magnetoelectric Hexaferrite Films

MAGNETIC MATERIAL SPUTTERING TARGET AND METHOD FOR PRODUCING SAME

Fe-Co-BASED ALLOY SPUTTERING TARGET MATERIAL, AND METHOD OF PRODUCI...

Sputtering Target for Rare-Earth Magnet and Production Method Therefor

Sputtering Target for Magnetic Recording Film

MAGNETRON SPUTTERING TARGET AND METHOD FOR MANUFACTURING THE SAME

MAGNETRON SPUTTERING TARGET AND PROCESS FOR PRODUCING THE SAME

Fe-Al Based Alloy Sputtering Target

Alloy and Sputtering Target Material for Soft-Magnetic Film Layer i...

SPUTTERING TARGET FOR FORMING MAGNETIC RECORDING MEDIUM FILM AND ME...

FE-PT-Based Ferromagnetic Sputtering Target and Method for Producin...

Sputtering Target for Magnetic Recording Film and Process for Produ...

Sputtering Target

Ferromagnetic Material Sputtering Target

FERROMAGNETIC MATERIAL SPUTTERING TARGET

Sputtering Target for Magnetic Recording Film and Method for Produc...

FERROMAGNETIC MATERIAL SPUTTERING TARGET