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Y10S148/159
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GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10
USPC classification
Y10S
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10S148/00
Metal treatment
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Y10S148/159
Strain gauges
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Patents Grants
last 30 patents
Information
Patent Grant
Method of producing a complex structure by assembling stressed stru...
Patent number
7,550,052
Issue date
Jun 23, 2009
Commissariat a l'Energie Atomique
Franck Fournel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing external force detection sensor
Patent number
7,393,714
Issue date
Jul 1, 2008
Murata Manufacturing Co., Ltd.
Takahiro Oguchi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing an external force detection sensor
Patent number
7,067,344
Issue date
Jun 27, 2006
Murata Manufacturing Co., Ltd.
Takahiro Oguchi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing an external force detection sensor
Patent number
7,049,165
Issue date
May 23, 2006
Murata Manufacturing Co., Ltd.
Takahiro Oguchi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfabrication using germanium-based release masks
Patent number
6,440,766
Issue date
Aug 27, 2002
Analog Devices IMI, Inc.
William A. Clark
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Acceleration sensor
Patent number
6,055,858
Issue date
May 2, 2000
Robert Bosch GmbH
Horst Muenzel
G01 - MEASURING TESTING
Information
Patent Grant
Manufacturing process of strain gauge sensor using the piezoresisti...
Patent number
6,001,666
Issue date
Dec 14, 1999
Commissariat a l'Energie Atomique
Bernard Diem
G01 - MEASURING TESTING
Information
Patent Grant
Acceleration sensor
Patent number
5,959,208
Issue date
Sep 28, 1999
GmbH; Robert Bosch
Horst Muenzel
G01 - MEASURING TESTING
Information
Patent Grant
Method of fabricating direct-bonded semiconductor wafers
Patent number
5,932,048
Issue date
Aug 3, 1999
Komatsu Electronic Metals Co., Ltd.
Hiroshi Furukawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pressure transducer comprising a sealed transducer with a rigid dia...
Patent number
5,912,499
Issue date
Jun 15, 1999
Commissariat a l'Energie Atomique
Bernard Diem
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a force sensor
Patent number
5,804,457
Issue date
Sep 8, 1998
Gerhard Benz
G01 - MEASURING TESTING
Information
Patent Grant
Process for manufacturing a sensor
Patent number
5,723,353
Issue date
Mar 3, 1998
Robert Bosch GmbH
Horst Muenzel
G01 - MEASURING TESTING
Information
Patent Grant
Method of manufacturing cantilever drive mechanism and probe drive...
Patent number
5,648,300
Issue date
Jul 15, 1997
Canon Kabushiki Kaisha
Masaru Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Force sensor and a method for manufacturing a force sensor
Patent number
5,553,506
Issue date
Sep 10, 1996
Robert Bosch GmbH
Gerhard Benz
G01 - MEASURING TESTING
Information
Patent Grant
Process for producing a pressure transducer using silicon-on-insula...
Patent number
5,510,276
Issue date
Apr 23, 1996
Commissariat a l'Energie Atomique
Bernard Diem
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing cantilever drive mechanism, method of manuf...
Patent number
5,398,229
Issue date
Mar 14, 1995
Canon Kabushiki Kaisha
Masaru Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of bonding semiconductor substrates
Patent number
5,383,993
Issue date
Jan 24, 1995
Nippon Soken Inc.
Mitsutaka Katada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Probe drive mechanism and electronic device which uses the same
Patent number
5,334,835
Issue date
Aug 2, 1994
Canon Kabushiki Kaisha
Masaru Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of making an acceleration sensor
Patent number
5,310,450
Issue date
May 10, 1994
Robert Bosch GmbH
Michael Offenberg
G01 - MEASURING TESTING
Information
Patent Grant
Method of making a multi-layer silicon structure
Patent number
5,169,472
Issue date
Dec 8, 1992
Robert Bosch GmbH
Herbert Goebel
G01 - MEASURING TESTING
Information
Patent Grant
Fabrication of oxynitride frontside microstructures
Patent number
5,164,339
Issue date
Nov 17, 1992
Siemens-Bendix Automotive Electronics L.P.
George E. Gimpelson
G01 - MEASURING TESTING
Information
Patent Grant
Method for fabricating a silicon pressure sensor incorporating sili...
Patent number
5,155,061
Issue date
Oct 13, 1992
Allied-Signal Inc.
James M. O'Connor
G01 - MEASURING TESTING
Information
Patent Grant
Silicon membrane with controlled stress
Patent number
5,110,373
Issue date
May 5, 1992
Nanostructures, Inc.
Philip E. Mauger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Low stress polysilicon microstructures
Patent number
5,059,556
Issue date
Oct 22, 1991
Siemens-Bendix Automotive Electronics, L.P.
Duane T. Wilcoxen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dielectrically isolated semiconductor substrate
Patent number
4,878,957
Issue date
Nov 7, 1989
Kabushiki Kaisha Toshiba
Yoshihiro Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing compound semiconductor apparatus
Patent number
4,738,935
Issue date
Apr 19, 1988
Kabushiki Kaisha Toshiba
Masaru Shimbo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Recessed oxide method for making a silicon-on-insulator substrate
Patent number
4,704,186
Issue date
Nov 3, 1987
RCA Corporation
Lubomir L. Jastrzebski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making silicon diaphragm pressure sensor
Patent number
4,670,969
Issue date
Jun 9, 1987
Hitachi, Ltd.
Kazuji Yamada
G01 - MEASURING TESTING
Information
Patent Grant
Method of making a semiconductor transducer having multiple level d...
Patent number
4,665,610
Issue date
May 19, 1987
Stanford University
Phillip W. Barth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing semiconductor substrate
Patent number
4,638,552
Issue date
Jan 27, 1987
Kabushiki Kaisha Toshiba
Masaru Shimbo
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method of producing a complex structure by assembling stressed stru...
Publication number
20060141742
Publication date
Jun 29, 2006
Franck Fournel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of manufacturing an external force detection sensor
Publication number
20060110843
Publication date
May 25, 2006
Takahiro Oguchi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of manufacturing an external force detection sensor
Publication number
20040110318
Publication date
Jun 10, 2004
Murata Manufacturing Co., Ltd.
Takahiro Oguchi
B81 - MICRO-STRUCTURAL TECHNOLOGY