Switches making use of microelectromechanical systems [MEMS]

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HELECTRICITY H01Electric elements H01HELECTRIC SWITCHES RELAYS SELECTORS EMERGENCY PROTECTIVE DEVICES H01H1/00Contacts

Current Industry

H01H1/0036Switches making use of microelectromechanical systems [MEMS]

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Patents Grantslast 30 patents

Information Patent Grant
Micro-electromechanical system switch and communication device
- Patent number 12,288,649
- Issue date Apr 29, 2025
- BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
- Yingli Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrically controllable integrated switch
- Patent number 12,272,509
- Issue date Apr 8, 2025
- STMicroelectronics (Rousset) SAS
- Christian Rivero
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing variable radio frequency micro-electromech...
- Patent number 12,249,468
- Issue date Mar 11, 2025
- Universite de Limoges
- Romain Stefanini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS relay
- Patent number 12,230,458
- Issue date Feb 18, 2025
- Robert Bosch GmbH
- Jochen Reinmuth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a MEMS switch having an embedded metal con...
- Patent number 12,230,457
- Issue date Feb 18, 2025
- Robert Bosch GmbH
- Jochen Reinmuth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduction of ringing and intermodulation distortion in a MEMS device
- Patent number 12,187,599
- Issue date Jan 7, 2025
- Texas Instruments Incorporated
- Adam Joseph Fruehling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Power relay circuit
- Patent number 12,176,172
- Issue date Dec 24, 2024
- Infineon Technologies Austria AG
- Ingo Muri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Subsea connector
- Patent number 12,149,031
- Issue date Nov 19, 2024
- Siemens Energy Global GmbH & Co. KG
- Karstein Berge Kristiansen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for sensing a motion of a deflective surface
- Patent number 12,133,050
- Issue date Oct 29, 2024
- Infineon Technologies AG
- Darragh Francis Corrigan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Power switch comprising a switching circuit serially connected betw...
- Patent number 12,113,258
- Issue date Oct 8, 2024
- AIRMEMS
- Romain Stefanini
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-plane sliding parallel capacitive radio frequency switch
- Patent number 12,106,911
- Issue date Oct 1, 2024
- RESEARCH INSTITUTE OF TSINGHUA UNIVERSITY IN SHENZHEN
- Quanshui Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses and methods for testing semiconductor circuitry using m...
- Patent number 12,099,085
- Issue date Sep 24, 2024
- Analog Devices International Unlimited Company
- Padraig Fitzgerald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arrangement of MEMS switches
- Patent number 12,094,675
- Issue date Sep 17, 2024
- Robert Bosch GmbH
- Franziska Lambrecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Waterproof MEMS button device, input device comprising the MEMS but...
- Patent number 12,050,102
- Issue date Jul 30, 2024
- STMicroelectronics S.r.l.
- Gabriele Gattere
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Liquid metal MEMS switch
- Patent number 12,046,430
- Issue date Jul 23, 2024
- Texas Instruments Incorporated
- Adam Joseph Fruehling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of operation of capacitive radio frequency micr...
- Patent number 11,864,947
- Issue date Jan 9, 2024
- Koninklijke Philips N.V.
- Hans-Peter Loebl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS encapsulation employing lower pressure and higher pressure dep...
- Patent number 11,834,331
- Issue date Dec 5, 2023
- Texas Instruments Incorporated
- Scott Robert Summerfelt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Liquid metal MEMS switch
- Patent number 11,728,111
- Issue date Aug 15, 2023
- Texas Instruments Incorporated
- Adam Joseph Fruehling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS element and electrical circuit
- Patent number 11,646,170
- Issue date May 9, 2023
- Kabushiki Kaisha Toshiba
- Hiroaki Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS switch
- Patent number 11,615,924
- Issue date Mar 28, 2023
- AAC Technologies Pte. Ltd.
- Shawn Jay Cunningham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Actuator with buckling member stability
- Patent number 11,560,919
- Issue date Jan 24, 2023
- The United States of America as represented by the Secretary of the Army
- Robert A. Haynes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
ESD protection of MEMS for RF applications
- Patent number 11,476,245
- Issue date Oct 18, 2022
- Qorvo US, Inc.
- Roberto Gaddi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromechanical relay with deformable conductive beam and drain e...
- Patent number 11,469,067
- Issue date Oct 11, 2022
- The University of Bristol
- Dinesh Pamunuwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS RF-switch with near-zero impact landing
- Patent number 11,417,487
- Issue date Aug 16, 2022
- Qorvo US, Inc.
- Richard L. Knipe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS element fuse-like electrical circuit interrupter
- Patent number 11,387,064
- Issue date Jul 12, 2022
- Kabushiki Kaisha Toshiba
- Hiroaki Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Infrared sensor structure
- Patent number 11,378,459
- Issue date Jul 5, 2022
- Shanghai IC R&D Center Co., Ltd.
- Xiaoxu Kang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanical connection for a MEMS and NEMS device for measuring a va...
- Patent number 11,337,016
- Issue date May 17, 2022
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Loïc Joet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Switch device facilitating frequency shift of a resonator in a quan...
- Patent number 11,189,435
- Issue date Nov 30, 2021
- International Business Machines Corporation
- Vivekananda P. Adiga
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,174,160
- Issue date Nov 16, 2021
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Full symmetric multi-throw switch using conformal pinched through via
- Patent number 11,148,935
- Issue date Oct 19, 2021
- Menlo Microsystems, Inc.
- Xu Zhu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CIRCUIT BREAKER CIRCUIT WITH MICRO-ELECTROMECHANICAL SYSTEMS SWITCH...
- Publication number 20250210283
- Publication date Jun 26, 2025
- Analog Devices International Unlimited Company
- Padraig L. Fitzgerald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM SWITCH CONFIGURED FOR HIGH CURRENT A...
- Publication number 20250210282
- Publication date Jun 26, 2025
- Analog Devices International Unlimited Company
- Padraig L. Fitzgerald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS Switch With High Off State Voltage Standoff Rating
- Publication number 20250149266
- Publication date May 8, 2025
- Menlo Microsystems, Inc.
- Tamir Eran Moran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEMS SWITCH WITH BEAM MOVEMENT ORTHOGONA...
- Publication number 20250118501
- Publication date Apr 10, 2025
- Raytheon Company
- Bahram Ghodsian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE
- Publication number 20250091857
- Publication date Mar 20, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Adam Joseph Fruehling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROMECHANICAL SWITCHES ON INPUT/OUTPUT (I/O) COMPONENTS
- Publication number 20250021501
- Publication date Jan 16, 2025
- Micron Technology, Inc.
- Jeremy Kuehlwein
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS (MEMS) SWITCH-BASED INTERFACES
- Publication number 20250013589
- Publication date Jan 9, 2025
- Micron Technology, Inc.
- Ming-ta Hsieh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEVICE FOR SENSING A MOTION OF A DEFLECTIVE SURFACE
- Publication number 20250016509
- Publication date Jan 9, 2025
- INFINEON TECHNOLOGIES AG
- Darragh Francis Corrigan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMOS RF-MEMS CAPACITIVE SWITCH IMPLEMENTATIONS
- Publication number 20240429001
- Publication date Dec 26, 2024
- Nanusens SL
- Josep Montanyà i SILVESTRE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES AND METHODS FOR TESTING SEMICONDUCTOR CIRCUITRY USING M...
- Publication number 20240402239
- Publication date Dec 5, 2024
- Analog Devices International Unlimited Company
- Padraig Fitzgerald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTACT ELEMENT OF A MEMS RELAY
- Publication number 20240371577
- Publication date Nov 7, 2024
- ROBERT BOSCH GmbH
- Bernd Klein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM SWITCH AND COMMUNICATION DEVICE
- Publication number 20240312730
- Publication date Sep 19, 2024
- BOE TECHNOLOGY GROUP CO., LTD.
- Yingli SHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRICAL CONTACT SYSTEM WITH LIQUID METAL LAYER AND DIFFUSION BAR...
- Publication number 20240274373
- Publication date Aug 15, 2024
- Eaton Intelligent Power Limited
- Stanislav Kadlec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS SWITCH AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240242899
- Publication date Jul 18, 2024
- BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Yue LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BIT RATE-ADAPTING RESOSWITCH
- Publication number 20240203669
- Publication date Jun 20, 2024
- The Regents of the University of California
- Clark T.-C. Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RELAY, AND METHOD FOR OPERATING A RELAY
- Publication number 20240194423
- Publication date Jun 13, 2024
- ROBERT BOSCH GmbH
- Matthew Lewis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Encapsulated MEMS Switching Element, Device and Production Method
- Publication number 20240150166
- Publication date May 9, 2024
- SIEMENS AKTIENGESELLSCHAFT
- Oliver Raab
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Self-Powered Smart Switch
- Publication number 20240128032
- Publication date Apr 18, 2024
- Menlo Microsystems, Inc.
- Pallab Midya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS SWITCH
- Publication number 20240071694
- Publication date Feb 29, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Gokhan Ariturk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID METAL MEMS SWITCH
- Publication number 20230335355
- Publication date Oct 19, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Adam Joseph Fruehling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electronic Module
- Publication number 20230253173
- Publication date Aug 10, 2023
- SIEMENS AKTIENGESELLSCHAFT
- Oliver Raab
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-PLANE SLIDING PARALLEL CAPACITIVE RADIO FREQUENCY SWITCH
- Publication number 20230238191
- Publication date Jul 27, 2023
- RESEARCH INSTITUTE OF TSINGHUA UNIVERSITY IN SHENZHEN
- Quanshui ZHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS RELAY
- Publication number 20230223208
- Publication date Jul 13, 2023
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO-STAGE ACTUATION IN MEMS OHMIC RELAYS
- Publication number 20230140449
- Publication date May 4, 2023
- Qorvo US, Inc.
- Roberto Gaddi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE
- Publication number 20230101598
- Publication date Mar 30, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Adam Joseph Fruehling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSEA CONNECTOR
- Publication number 20220393407
- Publication date Dec 8, 2022
- Siemens Aktiengesellschaft
- Karstein Berge Kristiansen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES AND METHODS FOR TESTING SEMICONDUCTOR CIRCUITRY USING M...
- Publication number 20220373592
- Publication date Nov 24, 2022
- Analog Devices International Unlimited Company
- Padraig Fitzgerald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH FREQUENCY LARGE BANDWIDTH POWER SWITCH AND DEVICE INCORPORATIN...
- Publication number 20220352611
- Publication date Nov 3, 2022
- AIRMEMS
- Romain STEFANINI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS ENCAPSULATION EMPLOYING LOWER PRESSURE AND HIGHER PRESSURE DEP...
- Publication number 20220324702
- Publication date Oct 13, 2022
- TEXAS INSTRUMENTS INCORPORATED
- Scott Robert SUMMERFELT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCH INCLUDING AN EMBEDDED METAL CONTACT
- Publication number 20220328258
- Publication date Oct 13, 2022
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- H01 - BASIC ELECTRIC ELEMENTS

Switches making use of microelectromechanical systems [MEMS]

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micro-electromechanical system switch and communication device

Electrically controllable integrated switch

Method for manufacturing variable radio frequency micro-electromech...

MEMS relay

Method for manufacturing a MEMS switch having an embedded metal con...

Reduction of ringing and intermodulation distortion in a MEMS device

Power relay circuit

Subsea connector

Device for sensing a motion of a deflective surface

Power switch comprising a switching circuit serially connected betw...

In-plane sliding parallel capacitive radio frequency switch

Apparatuses and methods for testing semiconductor circuitry using m...

Arrangement of MEMS switches

Waterproof MEMS button device, input device comprising the MEMS but...

Liquid metal MEMS switch

Systems and methods of operation of capacitive radio frequency micr...

MEMS encapsulation employing lower pressure and higher pressure dep...

Liquid metal MEMS switch

MEMS element and electrical circuit

MEMS switch

Actuator with buckling member stability

ESD protection of MEMS for RF applications

Electromechanical relay with deformable conductive beam and drain e...

MEMS RF-switch with near-zero impact landing

MEMS element fuse-like electrical circuit interrupter

Infrared sensor structure

Mechanical connection for a MEMS and NEMS device for measuring a va...

Switch device facilitating frequency shift of a resonator in a quan...

Planar cavity MEMS and related structures, methods of manufacture a...

Full symmetric multi-throw switch using conformal pinched through via

Patents Applicationslast 30 patents

CIRCUIT BREAKER CIRCUIT WITH MICRO-ELECTROMECHANICAL SYSTEMS SWITCH...

MICRO-ELECTROMECHANICAL SYSTEM SWITCH CONFIGURED FOR HIGH CURRENT A...

MEMS Switch With High Off State Voltage Standoff Rating

MICRO-ELECTROMECHANICAL SYSTEMS SWITCH WITH BEAM MOVEMENT ORTHOGONA...

REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE

ELECTROMECHANICAL SWITCHES ON INPUT/OUTPUT (I/O) COMPONENTS

MICROELECTROMECHANICAL SYSTEMS (MEMS) SWITCH-BASED INTERFACES

DEVICE FOR SENSING A MOTION OF A DEFLECTIVE SURFACE

CMOS RF-MEMS CAPACITIVE SWITCH IMPLEMENTATIONS

APPARATUSES AND METHODS FOR TESTING SEMICONDUCTOR CIRCUITRY USING M...

CONTACT ELEMENT OF A MEMS RELAY

MICRO-ELECTROMECHANICAL SYSTEM SWITCH AND COMMUNICATION DEVICE

ELECTRICAL CONTACT SYSTEM WITH LIQUID METAL LAYER AND DIFFUSION BAR...

MEMS SWITCH AND METHOD OF MANUFACTURING THE SAME

BIT RATE-ADAPTING RESOSWITCH

RELAY, AND METHOD FOR OPERATING A RELAY

Encapsulated MEMS Switching Element, Device and Production Method

Self-Powered Smart Switch

MEMS SWITCH

LIQUID METAL MEMS SWITCH

Electronic Module

IN-PLANE SLIDING PARALLEL CAPACITIVE RADIO FREQUENCY SWITCH

MEMS RELAY

TWO-STAGE ACTUATION IN MEMS OHMIC RELAYS

REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE

SUBSEA CONNECTOR

APPARATUSES AND METHODS FOR TESTING SEMICONDUCTOR CIRCUITRY USING M...

HIGH FREQUENCY LARGE BANDWIDTH POWER SWITCH AND DEVICE INCORPORATIN...

MEMS ENCAPSULATION EMPLOYING LOWER PRESSURE AND HIGHER PRESSURE DEP...

MEMS SWITCH INCLUDING AN EMBEDDED METAL CONTACT