System calibration

Industry

CPC
H01J2237/30433

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/30433System calibration

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Devices, systems, and methods for using an imaging device to calibr...
- Patent number 11,925,983
- Issue date Mar 12, 2024
- Arcam AB
- Anders Snis
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
X-ray calibration standard object
- Patent number 11,806,800
- Issue date Nov 7, 2023
- Arcam AB
- Johan Backlund
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Verification plates with automated evaluation of melt performance
- Patent number 11,733,187
- Issue date Aug 22, 2023
- Arcam AB
- David Svensson
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Lithography system, sensor and measuring method
- Patent number RE49602
- Issue date Aug 8, 2023
- ASML Netherlands B.V.
- Pieter Kruit
Information Patent Grant
Ion beam cutting calibration system and method
- Patent number 11,658,001
- Issue date May 23, 2023
- INSTITUTE OF GEOLOGY AND GEOPHYSICS, CHINESE ACADEMY OF SCIENCES
- Zhongming Du
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical alignment correction using convolutional neural network eva...
- Patent number 10,923,318
- Issue date Feb 16, 2021
- FEI Company
- Galen Gledhill
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of pattern data preparation and method of forming pattern in...
- Patent number 10,861,673
- Issue date Dec 8, 2020
- United Microelectronics Corp.
- Chien-Ying Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece processing technique
- Patent number 10,847,372
- Issue date Nov 24, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray calibration standard object
- Patent number 10,807,187
- Issue date Oct 20, 2020
- Arcam AB
- Johan Backlund
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Process window analysis
- Patent number 10,720,367
- Issue date Jul 21, 2020
- Applied Materials Israel Ltd.
- Idan Kaizerman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography system, sensor and measuring method
- Patent number RE48046
- Issue date Jun 9, 2020
- ASML Netherlands B.V.
- Pieter Kruit
Information Patent Grant
Temperature measuring mask and temperature measuring method
- Patent number 10,670,472
- Issue date Jun 2, 2020
- NuFlare Technology, Inc.
- Kota Fujiwara
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for characterizing an electron beam
- Patent number 10,586,683
- Issue date Mar 10, 2020
- Arcam AB
- Tomas Lock
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Calibration of elementary small patterns in variable-shaped-beam el...
- Patent number 10,573,492
- Issue date Feb 25, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Aurélien Fay
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus
- Patent number 10,361,066
- Issue date Jul 23, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Haruka Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
On-axis illumination and alignment for charge control during charge...
- Patent number 10,168,614
- Issue date Jan 1, 2019
- Applied Materials Israel Ltd.
- Alex Goldenshtein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi charged particle beam writing apparatus, and multi charged pa...
- Patent number 10,134,562
- Issue date Nov 20, 2018
- NuFlare Technology, Inc.
- Yasuo Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam apparatus, and shape adjustment method...
- Patent number 9,966,228
- Issue date May 8, 2018
- NuFlare Technology, Inc.
- Osamu Iizuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for structuring an object with the aid of a particle beam ap...
- Patent number 9,905,395
- Issue date Feb 27, 2018
- Carl Zeiss Microscopy GmbH
- Simon Stegmaier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combined laser processing system and focused ion beam system
- Patent number 9,793,122
- Issue date Oct 17, 2017
- Carl Zeiss Microscopy GmbH
- Carl Kuebler
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and device for characterizing an electron beam
- Patent number 9,721,755
- Issue date Aug 1, 2017
- Arcam AB
- Tomas Lock
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Charged particle beam writing apparatus, charged particle beam writ...
- Patent number 9,583,310
- Issue date Feb 28, 2017
- NuFlare Technology, Inc.
- Tomoo Motosugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for analyzing and/or processing an object as well as a parti...
- Patent number 9,558,911
- Issue date Jan 31, 2017
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for verifying characteristics of an electron beam
- Patent number 9,543,116
- Issue date Jan 10, 2017
- Arcam AB
- Tomas Lock
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electron beam exposure apparatus and method of detecting error usin...
- Patent number 9,229,327
- Issue date Jan 5, 2016
- Samsung Electronics Co., Ltd.
- Sang Yong Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
- Patent number 9,159,555
- Issue date Oct 13, 2015
- Nuflare Technology, Inc.
- Hiroshi Matsumoto
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for determining a distance between two beamlets in a multi-b...
- Patent number 9,030,675
- Issue date May 12, 2015
- Mapper Lithography IP B.V.
- Jan Andries Meijer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Focused ion beam apparatus and method of adjusting ion beam optics
- Patent number 8,822,911
- Issue date Sep 2, 2014
- Hitachi High-Tech Science Corporation
- Yasuhiko Sugiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Acquisition method of charged particle beam deflection shape error...
- Patent number 8,779,379
- Issue date Jul 15, 2014
- Nuflare Technology, Inc.
- Rieko Nishimura
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam drawing apparatus and method of manufacturing...
- Patent number 8,766,215
- Issue date Jul 1, 2014
- Canon Kabushiki Kaisha
- Shigeo Koya
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR AN IMAGING SYSTEM
- Publication number 20240186104
- Publication date Jun 6, 2024
- Frederick A. Flitsch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICES, SYSTEMS, AND METHODS FOR USING AN IMAGING DEVICE TO CALIBR...
- Publication number 20220402036
- Publication date Dec 22, 2022
- Arcam AB
- Anders Snis
- B22 - CASTING POWDER METALLURGY
Information Patent Application
VERIFICATION PLATES WITH AUTOMATED EVALUATION OF MELT PERFORMANCE
- Publication number 20220260509
- Publication date Aug 18, 2022
- Arcam AB
- David Svensson
- B22 - CASTING POWDER METALLURGY
Information Patent Application
OPTICAL ALIGNMENT CORRECTION USING CONVOLUTIONAL NEURAL NETWORK EVA...
- Publication number 20200203122
- Publication date Jun 25, 2020
- FEI Company
- Galen Gledhill
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESS WINDOW ANALYSIS
- Publication number 20190355628
- Publication date Nov 21, 2019
- APPLIED MATERIALS ISRAEL LTD.
- Idan KAIZERMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece Processing Technique
- Publication number 20190027367
- Publication date Jan 24, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ON-AXIS ILLUMINATION AND ALIGNMENT FOR CHARGE CONTROL DURING CHARGE...
- Publication number 20180364564
- Publication date Dec 20, 2018
- APPLIED MATERIALS ISRAEL LTD.
- Alex Goldenshtein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ION IMPLANTATION APPARATUS
- Publication number 20180330920
- Publication date Nov 15, 2018
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Haruka Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR CHARACTERIZING AN ELECTRON BEAM
- Publication number 20170294288
- Publication date Oct 12, 2017
- ARCAM AB
- Tomas Lock
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
MULTI CHARGED PARTICLE BEAM APPARATUS, AND SHAPE ADJUSTMENT METHOD...
- Publication number 20170169993
- Publication date Jun 15, 2017
- NuFlare Technology, Inc.
- Osamu IIZUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR CHARACTERIZING AN ELECTRON BEAM
- Publication number 20160211116
- Publication date Jul 21, 2016
- ARCAM AB
- Tomas Lock
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
DRAWING APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20140168629
- Publication date Jun 19, 2014
- Canon Kabushiki Kaisha
- Toshihiko NISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20140158903
- Publication date Jun 12, 2014
- Canon Kabushiki Kaisha
- Kentaro Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Linear Stage and Metrology Architecture for Reflective Electron Bea...
- Publication number 20130342827
- Publication date Dec 26, 2013
- KLA-Tencor Corporation
- Upendra Ummethala
- B82 - NANO-TECHNOLOGY
Information Patent Application
Combined Laser Processing System and Focused Ion Beam System
- Publication number 20130323937
- Publication date Dec 5, 2013
- CARL ZEISS MICROSCOPY GMBH
- Carl Kuebler
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ACQUISITION METHOD OF CHARGED PARTICLE BEAM DEFLECTION SHAPE ERROR...
- Publication number 20130264499
- Publication date Oct 10, 2013
- NuFlare Technology, Inc.
- Rieko NISHIMURA
- B82 - NANO-TECHNOLOGY
Information Patent Application
DRAWING APPARATUS, DRAWING METHOD, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130264497
- Publication date Oct 10, 2013
- Masato Muraki
- B82 - NANO-TECHNOLOGY
Information Patent Application
SHAPING OFFSET ADJUSTMENT METHOD AND CHARGED PARTICLE BEAM DRAWING...
- Publication number 20130256555
- Publication date Oct 3, 2013
- NuFlare Technology, Inc.
- Takahito NAKAYAMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20130253688
- Publication date Sep 26, 2013
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- B82 - NANO-TECHNOLOGY
Information Patent Application
FOCUSED ION BEAM APPARATUS AND METHOD OF ADJUSTING ION BEAM OPTICS
- Publication number 20130240720
- Publication date Sep 19, 2013
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Yasuhiko SUGIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20130143161
- Publication date Jun 6, 2013
- Canon Kabushiki Kaisha
- Keiichi ARITA
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR OPERATING A LASER SCANNER AND PROCESSING SYSTEM WITH LAS...
- Publication number 20130057874
- Publication date Mar 7, 2013
- Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
- Holger Doemer
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM D...
- Publication number 20130037724
- Publication date Feb 14, 2013
- NuFlare Technology, Inc.
- Kaoru TSURUTA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND METHOD OF MANUFACTURING...
- Publication number 20130020502
- Publication date Jan 24, 2013
- Canon Kabushiki Kaisha
- Shigeo Koya
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR DETERMINING A DISTANCE BETWEEN TWO BEAMLETS IN A MULTI-B...
- Publication number 20120293810
- Publication date Nov 22, 2012
- MAPPER LITHOGRAPHY IP BV
- Jan Andries MEIJER
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR MONITORING ION IMPLANTATION
- Publication number 20120085936
- Publication date Apr 12, 2012
- ADVANCED ION BEAM TECHNOLOGY, INC.
- Don BERRIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MICROSCOPE WITH ELECTRON SPECTROMETER
- Publication number 20110095182
- Publication date Apr 28, 2011
- Hitachi High-Technologies Corporation
- Shohei Terada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER, ION IMPLANTATION METHOD AND PROGRAM
- Publication number 20110029117
- Publication date Feb 3, 2011
- Yasuyuki Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for ion beam implantation using scanning and s...
- Publication number 20100237231
- Publication date Sep 23, 2010
- Jiong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED IMPLANT VOLTAGE DURING ION IMPLANTATION
- Publication number 20100084583
- Publication date Apr 8, 2010
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS

System calibration

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Devices, systems, and methods for using an imaging device to calibr...

X-ray calibration standard object

Verification plates with automated evaluation of melt performance

Lithography system, sensor and measuring method

Ion beam cutting calibration system and method

Optical alignment correction using convolutional neural network eva...

Method of pattern data preparation and method of forming pattern in...

Workpiece processing technique

X-ray calibration standard object

Process window analysis

Lithography system, sensor and measuring method

Temperature measuring mask and temperature measuring method

Method and device for characterizing an electron beam

Calibration of elementary small patterns in variable-shaped-beam el...

Ion implantation apparatus

On-axis illumination and alignment for charge control during charge...

Multi charged particle beam writing apparatus, and multi charged pa...

Multi charged particle beam apparatus, and shape adjustment method...

Method for structuring an object with the aid of a particle beam ap...

Combined laser processing system and focused ion beam system

Method and device for characterizing an electron beam

Charged particle beam writing apparatus, charged particle beam writ...

Method for analyzing and/or processing an object as well as a parti...

Method for verifying characteristics of an electron beam

Electron beam exposure apparatus and method of detecting error usin...

Multi charged particle beam writing apparatus and multi charged par...

Method for determining a distance between two beamlets in a multi-b...

Focused ion beam apparatus and method of adjusting ion beam optics

Acquisition method of charged particle beam deflection shape error...

Charged particle beam drawing apparatus and method of manufacturing...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR AN IMAGING SYSTEM

DEVICES, SYSTEMS, AND METHODS FOR USING AN IMAGING DEVICE TO CALIBR...

VERIFICATION PLATES WITH AUTOMATED EVALUATION OF MELT PERFORMANCE

OPTICAL ALIGNMENT CORRECTION USING CONVOLUTIONAL NEURAL NETWORK EVA...

PROCESS WINDOW ANALYSIS

Workpiece Processing Technique

ON-AXIS ILLUMINATION AND ALIGNMENT FOR CHARGE CONTROL DURING CHARGE...

ION IMPLANTATION APPARATUS

METHOD AND DEVICE FOR CHARACTERIZING AN ELECTRON BEAM

MULTI CHARGED PARTICLE BEAM APPARATUS, AND SHAPE ADJUSTMENT METHOD...

METHOD AND DEVICE FOR CHARACTERIZING AN ELECTRON BEAM

DRAWING APPARATUS, AND ARTICLE MANUFACTURING METHOD

DRAWING APPARATUS AND METHOD OF MANUFACTURING ARTICLE

Linear Stage and Metrology Architecture for Reflective Electron Bea...

Combined Laser Processing System and Focused Ion Beam System

ACQUISITION METHOD OF CHARGED PARTICLE BEAM DEFLECTION SHAPE ERROR...

DRAWING APPARATUS, DRAWING METHOD, AND METHOD OF MANUFACTURING ARTICLE

SHAPING OFFSET ADJUSTMENT METHOD AND CHARGED PARTICLE BEAM DRAWING...

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...

FOCUSED ION BEAM APPARATUS AND METHOD OF ADJUSTING ION BEAM OPTICS

CHARGED PARTICLE BEAM APPARATUS

METHOD FOR OPERATING A LASER SCANNER AND PROCESSING SYSTEM WITH LAS...

CHARGED PARTICLE BEAM DRAWING APPARATUS AND CHARGED PARTICLE BEAM D...

CHARGED PARTICLE BEAM DRAWING APPARATUS AND METHOD OF MANUFACTURING...

METHOD FOR DETERMINING A DISTANCE BETWEEN TWO BEAMLETS IN A MULTI-B...

METHOD FOR MONITORING ION IMPLANTATION

ELECTRON MICROSCOPE WITH ELECTRON SPECTROMETER

ION IMPLANTER, ION IMPLANTATION METHOD AND PROGRAM

Apparatus and method for ion beam implantation using scanning and s...

REDUCED IMPLANT VOLTAGE DURING ION IMPLANTATION