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Temperature responsive devices
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CPC
H01J2237/20271
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/20271
Temperature responsive devices
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Patents Grants
last 30 patents
Information
Patent Grant
Electron beam inspection tool and method of controlling heat load
Patent number
11,158,484
Issue date
Oct 26, 2021
ASML Netherlands B.V.
Dennis Herman Caspar Van Banning
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Specimen holder
Patent number
10,768,124
Issue date
Sep 8, 2020
Mel-Build Corporation
Hiroya Miyazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage device and charged particle beam device using the same
Patent number
9,887,064
Issue date
Feb 6, 2018
Hitachi High-Technologies Corporation
Akira Nishioka
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Ion milling device
Patent number
9,558,912
Issue date
Jan 31, 2017
Hitachi High-Technologies Corporation
Asako Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Roller mold manufacturing device and manufacturing method
Patent number
9,000,325
Issue date
Apr 7, 2015
Asahi Kasei Kabushiki Kaisha
Naoto Ito
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Sensor for quantitative measurement of electromechanical properties...
Patent number
8,302,494
Issue date
Nov 6, 2012
Beijing University of Technology
Xiaodong Han
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
MEMS PLATFORM FOR THIN FILM NANOMECHANICS CHARACTERIZATION
Publication number
20230187167
Publication date
Jun 15, 2023
Carnegie Mellon University
Maarten de Boer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Stage Device and Charged Particle Beam Device Using the Same
Publication number
20160365219
Publication date
Dec 15, 2016
Hitachi High-Technologies Corporation
Akira NISHIOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ROLLER MOLD MANUFACTURING DEVICE AND MANUFACTURING METHOD
Publication number
20130068734
Publication date
Mar 21, 2013
ASAHI KASEI KABUSHIKI KAISHA
Naoto Ito
B82 - NANO-TECHNOLOGY
Information
Patent Application
SENSOR FOR QUANTITATIVE MEASUREMENT OF ELECTROMECHANICAL PROPERTIES...
Publication number
20110107472
Publication date
May 5, 2011
BEIJING UNIVERSITY OF TECHNOLOGY
XIAODONG HAN
G01 - MEASURING TESTING