Temperature variations

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CPC
H01J2237/2065

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2065Temperature variations

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 12,106,945
- Issue date Oct 1, 2024
- Samsung Electronics Co., Ltd.
- Siqing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for temperature monitoring in cryo-electron microscopy
- Patent number 12,070,753
- Issue date Aug 27, 2024
- FEI Company
- Jakub Drahotsky
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Semiconductor manufacturing apparatus and wafer holding table for s...
- Patent number 12,046,488
- Issue date Jul 23, 2024
- Sumitomo Electric Industries, Ltd.
- Koichi Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating a gas feed device for a particle beam apparatus
- Patent number 12,002,656
- Issue date Jun 4, 2024
- Carl Zeiss Microscopy GmbH
- Andreas Schmaunz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating a gas supply device for a particle beam device
- Patent number 11,764,036
- Issue date Sep 19, 2023
- Carl Zeiss Microscopy GmbH
- Andreas Schmaunz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for non line-of-sight doping
- Patent number 11,631,588
- Issue date Apr 18, 2023
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam inspection tool and method of controlling heat load
- Patent number 11,158,484
- Issue date Oct 26, 2021
- ASML Netherlands B.V.
- Dennis Herman Caspar Van Banning
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer holder
- Patent number 11,127,605
- Issue date Sep 21, 2021
- Sumitomo Electric Industries, Ltd.
- Koichi Kimura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Roll to roll fabrication apparatus for preventing thermal impact
- Patent number 11,008,656
- Issue date May 18, 2021
- LG Display Co., Ltd.
- Seunghyun Youk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Specimen holder
- Patent number 10,768,124
- Issue date Sep 8, 2020
- Mel-Build Corporation
- Hiroya Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of observing liquid specimen, method of analyzing liquid spe...
- Patent number 10,741,357
- Issue date Aug 11, 2020
- Jeol Ltd.
- Noriyuki Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contactless temperature measurement in a charged particle microscope
- Patent number 10,134,563
- Issue date Nov 20, 2018
- FEI Company
- Jacob Simon Faber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High temperature intermittent ion implantation
- Patent number 10,049,856
- Issue date Aug 14, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsin-Wei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope having a carrier
- Patent number 9,842,722
- Issue date Dec 12, 2017
- Industrial Technology Research Institute
- Hsin-Hung Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor compression refrigeration chuck for ion implanters
- Patent number 9,558,980
- Issue date Jan 31, 2017
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for temperature measurement and calibration of semiconduc...
- Patent number 9,212,949
- Issue date Dec 15, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Jeffrey E. Krampert
- G01 - MEASURING TESTING
Information Patent Grant
Method of welding a frozen aqueous sample to a microprobe
- Patent number 9,142,384
- Issue date Sep 22, 2015
- FEI Company
- Rudolf Johannes Peter Gerardus Schampers
- G01 - MEASURING TESTING
Information Patent Grant
Methods of using temperature control devices in electron microscopy
- Patent number 9,048,065
- Issue date Jun 2, 2015
- Protochips, Inc.
- John Damiano
- G01 - MEASURING TESTING
Information Patent Grant
Electron microscope and sample holder
- Patent number 8,878,144
- Issue date Nov 4, 2014
- Hitachi High-Technologies Corporation
- Toshie Yaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample holder, method for use of the sample holder, and charged par...
- Patent number 8,853,648
- Issue date Oct 7, 2014
- Hitachi High-Technologies Corporation
- Yasuhira Nagakubo
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for 4D tomography and ultrafast scanning electron...
- Patent number 8,841,613
- Issue date Sep 23, 2014
- California Institute of Technology
- Ahmed H. Zewail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample holding apparatus for electron microscope, and electron micr...
- Patent number 8,835,847
- Issue date Sep 16, 2014
- Hitachi High-Technologies Corporation
- Toshie Yaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In situ holder assembly
- Patent number 8,698,098
- Issue date Apr 15, 2014
- E. A. Fischione Instruments, Inc.
- Pushkarraj V. Deshmukh
- G01 - MEASURING TESTING
Information Patent Grant
In situ holder assembly
- Patent number 8,178,851
- Issue date May 15, 2012
- E. A. Fischione Instruments, Inc.
- Pushkarraj V. Deshmukh
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for detecting defect by examining electric characteristic...
- Patent number 7,932,733
- Issue date Apr 26, 2011
- Hitachi High-Technologies Corporation
- Masahiro Sasajima
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for ultrafast photoelectron microscope
- Patent number 7,915,583
- Issue date Mar 29, 2011
- California Institute of Technology
- Ahmed Zewail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for temperature-controlled ion implantation
- Patent number 7,655,933
- Issue date Feb 2, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan Gerald England
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for producing photocatalyst
- Patent number 7,608,562
- Issue date Oct 27, 2009
- Shibaura Mechatronics Corporation
- Junji Hiraoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for producing photocatalyst
- Patent number 7,462,578
- Issue date Dec 9, 2008
- Shibaura Mechatronics Corporation
- Junji Hiraoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for ultrafast photoelectron microscope
- Patent number 7,442,931
- Issue date Oct 28, 2008
- California Institute of Technology
- Ahmed Zewail
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20240213000
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Kazuya NAGASEKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPERATING A GAS SUPPLY DEVICE FOR A PARTICLE BEAM DEVICE
- Publication number 20230420224
- Publication date Dec 28, 2023
- CARL ZEISS MICROSCOPY GMBH
- Andreas Schmaunz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHO...
- Publication number 20230103943
- Publication date Apr 6, 2023
- Xiamen Chip-Nova Technology Co., Ltd.
- Honggang Liao
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR CONTINUOUS CHAINED ENERGY ION IMPLANTATION
- Publication number 20230038565
- Publication date Feb 9, 2023
- Axcelis Technologies, Inc.
- Causon Jen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220076931
- Publication date Mar 10, 2022
- Samsung Electronics Co., Ltd.
- Siqing Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR TEMPERATURE MONITORING IN CRYO-ELECTRON MICROSCOPY
- Publication number 20210299665
- Publication date Sep 30, 2021
- FEI Company
- Jakub Drahotsky
- G01 - MEASURING TESTING
Information Patent Application
OPERATING A GAS SUPPLY DEVICE FOR A PARTICLE BEAM DEVICE
- Publication number 20200335309
- Publication date Oct 22, 2020
- CARL ZEISS MICROSCOPY GMBH
- Andreas Schmaunz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Observing Liquid Specimen, Method of Analyzing Liquid Spe...
- Publication number 20190295813
- Publication date Sep 26, 2019
- JEOL Ltd.
- Noriyuki Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROLL TO ROLL FABRICATION APPARATUS FOR PREVENTING THERMAL IMPACT
- Publication number 20180148843
- Publication date May 31, 2018
- LG Display Co., Ltd.
- Seunghyun YOUK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Technique For Temperature Measurement And Calibration Of Semiconduc...
- Publication number 20150276487
- Publication date Oct 1, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Jeffrey E. Krampert
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF WELDING A FROZEN AQUEOUS SAMPLE TO A MICROPROBE
- Publication number 20140367571
- Publication date Dec 18, 2014
- FEI Company
- Rudolf Johannes Peter Gerardus Schampers
- G02 - OPTICS
Information Patent Application
SAMPLE HOLDING APPARATUS FOR ELECTRON MICROSCOPE, AND ELECTRON MICR...
- Publication number 20140042318
- Publication date Feb 13, 2014
- Hitachi High-Technologies Corporation
- Toshie Yaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR IRRADIATING AN ETEM-SAMPLE WITH LIGHT
- Publication number 20140034829
- Publication date Feb 6, 2014
- Peter Crozier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN SITU HOLDER ASSEMBLY
- Publication number 20130119267
- Publication date May 16, 2013
- E.A. Fischione Instruments, Inc.
- Pushkarraj V. Deshmukh
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON MICROSCOPE AND SAMPLE HOLDER
- Publication number 20120305769
- Publication date Dec 6, 2012
- Hitachi High-Technologies Corporation
- Toshie Yaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF USING TEMPERATURE CONTROL DEVICES IN ELECTRON MICROSCOPY
- Publication number 20120292505
- Publication date Nov 22, 2012
- PROTOCHIPS, INC.
- John Damiano
- G01 - MEASURING TESTING
Information Patent Application
SAMPLE HOLDER, METHOD FOR USE OF THE SAMPLE HOLDER, AND CHARGED PAR...
- Publication number 20120112064
- Publication date May 10, 2012
- Yasuhira Nagakubo
- G01 - MEASURING TESTING
Information Patent Application
IN SITU HOLDER ASSEMBLY
- Publication number 20120025103
- Publication date Feb 2, 2012
- Pushkarraj V. Deshmukh
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR 4D TOMOGRAPHY AND ULTRAFAST SCANNING ELECTRON...
- Publication number 20110284744
- Publication date Nov 24, 2011
- California Institute of Technology
- Ahmed H. Zewail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vapor Compression Refridgeration Chuck for Ion Implanters
- Publication number 20100171044
- Publication date Jul 8, 2010
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR ULTRAFAST PHOTOELECTRON MICROSCOPE
- Publication number 20090236521
- Publication date Sep 24, 2009
- California Institute of Technology
- Ahmed Zewail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR DETECTING DEFECT
- Publication number 20090224788
- Publication date Sep 10, 2009
- Masahiro Sasajima
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR PRODUCING PHOTOCATALYST
- Publication number 20090134022
- Publication date May 28, 2009
- SHIBAURA MECHATRONICS CORPORATION
- Junji HIRAOKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID SAMPLE, SOLID SAMPLE FABRICATING METHOD, AND SOLID SAMPLE FAB...
- Publication number 20080293832
- Publication date Nov 27, 2008
- Canon Kabushiki Kaisha
- Hideto Yokoi
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam system and its specimen holder
- Publication number 20080093565
- Publication date Apr 24, 2008
- Hitachi High-Technologies Corporation
- Toshie Yaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR TEMPERATURE-CONTROLLED ION IMPLANTATION
- Publication number 20080042078
- Publication date Feb 21, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan Gerald ENGLAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for ultrafast photoelectron microscope
- Publication number 20080017796
- Publication date Jan 24, 2008
- California Institute of Technology
- Ahmed Zewail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for evaluating cross section of specimen
- Publication number 20060060777
- Publication date Mar 23, 2006
- Canon Kabushiki Kaisha
- Taiko Motoi
- G01 - MEASURING TESTING
Information Patent Application
Method and system for ultrafast photoelectron microscope
- Publication number 20050253069
- Publication date Nov 17, 2005
- California Institute of Technology
- Ahmed Zewail
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for producing photocatalyst
- Publication number 20050020444
- Publication date Jan 27, 2005
- Junji Hiraoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Temperature variations

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Plasma processing apparatus and method of manufacturing semiconduct...

Method for temperature monitoring in cryo-electron microscopy

Semiconductor manufacturing apparatus and wafer holding table for s...

Operating a gas feed device for a particle beam apparatus

Operating a gas supply device for a particle beam device

Method and apparatus for non line-of-sight doping

Electron beam inspection tool and method of controlling heat load

Wafer holder

Roll to roll fabrication apparatus for preventing thermal impact

Specimen holder

Method of observing liquid specimen, method of analyzing liquid spe...

Contactless temperature measurement in a charged particle microscope

High temperature intermittent ion implantation

Electron microscope having a carrier

Vapor compression refrigeration chuck for ion implanters

Technique for temperature measurement and calibration of semiconduc...

Method of welding a frozen aqueous sample to a microprobe

Methods of using temperature control devices in electron microscopy

Electron microscope and sample holder

Sample holder, method for use of the sample holder, and charged par...

Method and system for 4D tomography and ultrafast scanning electron...

Sample holding apparatus for electron microscope, and electron micr...

In situ holder assembly

In situ holder assembly

Apparatus for detecting defect by examining electric characteristic...

Method and system for ultrafast photoelectron microscope

Techniques for temperature-controlled ion implantation

Method and apparatus for producing photocatalyst

Method and apparatus for producing photocatalyst

Method and system for ultrafast photoelectron microscope

Patents Applicationslast 30 patents

PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

OPERATING A GAS SUPPLY DEVICE FOR A PARTICLE BEAM DEVICE

TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHO...

METHOD AND APPARATUS FOR CONTINUOUS CHAINED ENERGY ION IMPLANTATION

PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...

METHOD FOR TEMPERATURE MONITORING IN CRYO-ELECTRON MICROSCOPY

OPERATING A GAS SUPPLY DEVICE FOR A PARTICLE BEAM DEVICE

Method of Observing Liquid Specimen, Method of Analyzing Liquid Spe...

ROLL TO ROLL FABRICATION APPARATUS FOR PREVENTING THERMAL IMPACT

Technique For Temperature Measurement And Calibration Of Semiconduc...

METHOD OF WELDING A FROZEN AQUEOUS SAMPLE TO A MICROPROBE

SAMPLE HOLDING APPARATUS FOR ELECTRON MICROSCOPE, AND ELECTRON MICR...

SYSTEM AND METHOD FOR IRRADIATING AN ETEM-SAMPLE WITH LIGHT

IN SITU HOLDER ASSEMBLY

ELECTRON MICROSCOPE AND SAMPLE HOLDER

METHODS OF USING TEMPERATURE CONTROL DEVICES IN ELECTRON MICROSCOPY

SAMPLE HOLDER, METHOD FOR USE OF THE SAMPLE HOLDER, AND CHARGED PAR...

IN SITU HOLDER ASSEMBLY

METHOD AND SYSTEM FOR 4D TOMOGRAPHY AND ULTRAFAST SCANNING ELECTRON...

Vapor Compression Refridgeration Chuck for Ion Implanters

METHOD AND SYSTEM FOR ULTRAFAST PHOTOELECTRON MICROSCOPE

APPARATUS FOR DETECTING DEFECT

METHOD AND APPARATUS FOR PRODUCING PHOTOCATALYST

SOLID SAMPLE, SOLID SAMPLE FABRICATING METHOD, AND SOLID SAMPLE FAB...

Charged particle beam system and its specimen holder

TECHNIQUES FOR TEMPERATURE-CONTROLLED ION IMPLANTATION

Method and system for ultrafast photoelectron microscope

Apparatus and method for evaluating cross section of specimen

Method and system for ultrafast photoelectron microscope

Method and apparatus for producing photocatalyst