the devices involving a micro-mechanical structure

Industry

CPC
G01C19/5621

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Parent Industries

GPHYSICS G01Measuring instruments G01CMEASURING DISTANCES, LEVELS OR BEARINGS SURVEYING NAVIGATION GYROSCOPIC INSTRUMENTS PHOTOGRAMMETRY OR VIDEOGRAMMETRY G01C19/00Gyroscopes Turn-sensitive devices using vibrating masses Turn-sensitive devices without moving masses Measuring angular rate using gyroscopic effects

Current Industry

G01C19/5621the devices involving a micro-mechanical structure

Industries

Patents Grantslast 30 patents

Information Patent Grant
Silicon MEMS gyroscopes with upper and lower sense plates
- Patent number 12,092,460
- Issue date Sep 17, 2024
- The Charles Stark Draper Laboratory, Inc.
- Eugene H. Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrator device, oscillator, gyro sensor, electronic apparatus, and...
- Patent number 12,034,433
- Issue date Jul 9, 2024
- Seiko Epson Corporation
- Tetsuya Otsuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration element, physical quantity sensor, inertial measurement u...
- Patent number 11,888,464
- Issue date Jan 30, 2024
- Seiko Epson Corporation
- Seiichiro Ogura
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Sensor element, angular velocity sensor, and multi-axis angular vel...
- Patent number 11,835,338
- Issue date Dec 5, 2023
- Kyocera Corporation
- Munetaka Soejima
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration element, manufacturing method of vibration element, physi...
- Patent number 11,595,026
- Issue date Feb 28, 2023
- Seiko Epson Corporation
- Seiichiro Ogura
- G01 - MEASURING TESTING
Information Patent Grant
Physical quantity detection device, manufacturing method for physic...
- Patent number 11,555,702
- Issue date Jan 17, 2023
- Seiko Epson Corporation
- Ryuta Nishizawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric thin film, piezoelectric thin film device, piezoelect...
- Patent number 11,532,781
- Issue date Dec 20, 2022
- TDK Corporation
- Junpei Morishita
- G11 - INFORMATION STORAGE
Information Patent Grant
Methods for fabricating silicon MEMS gyroscopes with upper and lowe...
- Patent number 11,530,917
- Issue date Dec 20, 2022
- The Charles Stark Draper Laboratory, Inc.
- Eugene H. Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrator device, oscillator, gyro sensor, electronic apparatus, and...
- Patent number 11,509,288
- Issue date Nov 22, 2022
- Seiko Epson Corporation
- Tetsuya Otsuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor element and angular velocity sensor
- Patent number 11,448,505
- Issue date Sep 20, 2022
- Kyocera Corporation
- Munetaka Soejima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vibration element, method of manufacturing vibration element, physi...
- Patent number 11,402,208
- Issue date Aug 2, 2022
- Seiko Epson Corporation
- Shogo Sasaki
- G01 - MEASURING TESTING
Information Patent Grant
Vibrator device, electronic apparatus, and vehicle
- Patent number 11,340,070
- Issue date May 24, 2022
- Seiko Epson Corporation
- Ryuta Nishizawa
- G01 - MEASURING TESTING
Information Patent Grant
Vibratory error compensation in a tuning fork gyroscope such as a C...
- Patent number 11,333,499
- Issue date May 17, 2022
- Honeywell International Inc.
- Daniel Endean
- G01 - MEASURING TESTING
Information Patent Grant
Vibrator device, circuit device, method of manufacturing vibrator d...
- Patent number 11,326,881
- Issue date May 10, 2022
- Seiko Epson Corporation
- Hiroshi Kiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Accelerometer system enclosing gas
- Patent number 11,079,227
- Issue date Aug 3, 2021
- Honeywell International Inc.
- Chad Fertig
- G01 - MEASURING TESTING
Information Patent Grant
Angular velocity sensor, sensor element, and multi-axis angular vel...
- Patent number 11,054,259
- Issue date Jul 6, 2021
- Kyocera Corporation
- Munetaka Soejima
- G01 - MEASURING TESTING
Information Patent Grant
Vibration element, manufacturing method of vibration element, physi...
- Patent number 11,025,222
- Issue date Jun 1, 2021
- Seiko Epson Corporation
- Seiichiro Ogura
- G01 - MEASURING TESTING
Information Patent Grant
Detection device for detecting dynamic quantity exerted on mechanic...
- Patent number 10,928,198
- Issue date Feb 23, 2021
- Kabushiki Kaisha Toshiba
- Yohei Hatakeyama
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS metal-quartz gyroscope
- Patent number 10,900,783
- Issue date Jan 26, 2021
- Lawrence Livermore National Security, LLC
- Sangtae Park
- G01 - MEASURING TESTING
Information Patent Grant
Silicon-based micro-machined vibratory gyroscope with an I-shaped s...
- Patent number 10,876,838
- Issue date Dec 29, 2020
- NANJING UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Qin Shi
- G01 - MEASURING TESTING
Information Patent Grant
Positioning apparatus comprising an inertial sensor and inertial se...
- Patent number 10,877,059
- Issue date Dec 29, 2020
- STMicroelectronics S.r.l.
- Nicola Matteo Palella
- G01 - MEASURING TESTING
Information Patent Grant
Sensor element, physical quantity sensor, electronic apparatus, and...
- Patent number 10,866,097
- Issue date Dec 15, 2020
- Seiko Epson Corporation
- Keiichi Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Physical quantity detecting device, electronic apparatus, and movin...
- Patent number 10,794,778
- Issue date Oct 6, 2020
- Seiko Epson Corporation
- Ryuta Nishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vibration device, electronic apparatus, and vehicle
- Patent number 10,784,835
- Issue date Sep 22, 2020
- Seiko Epson Corporation
- Ryuta Nishizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vibration device, angular velocity sensor, electronic device, and v...
- Patent number 10,760,908
- Issue date Sep 1, 2020
- Seiko Epson Corporation
- Ryuta Nishizawa
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Silicon carbide microelectromechanical structure, device, and method
- Patent number 10,717,642
- Issue date Jul 21, 2020
- The Government of the United States of America, as represented by the Secreta...
- Francis J. Kub
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor element, sensor, electronic apparatus, and vehicle
- Patent number 10,690,500
- Issue date Jun 23, 2020
- Seiko Epson Corporation
- Ryuta Nishizawa
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Vibrator device, oscillator, gyro sensor, electronic apparatus, and...
- Patent number 10,651,819
- Issue date May 12, 2020
- Seiko Epson Corporation
- Tetsuya Otsuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon carbide microelectromechanical structure, device, and method
- Patent number 10,589,983
- Issue date Mar 17, 2020
- The Government of the United States of America, as represented by the Secreta...
- Francis J. Kub
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration device
- Patent number 10,541,671
- Issue date Jan 21, 2020
- Kabushiki Kaisha Toshiba
- Tamio Ikehashi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Vibration Element, Manufacturing Method of Vibration Element, Physi...
- Publication number 20230387885
- Publication date Nov 30, 2023
- SEIKO EPSON CORPORATION
- Seiichiro OGURA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
PRECISION GYROSCOPE MODE-MATCHING INSENSITIVE TO RATE INPUT
- Publication number 20230304799
- Publication date Sep 28, 2023
- The Regents of the University of California
- Bernhard E. Boser
- G01 - MEASURING TESTING
Information Patent Application
Vibration Element, Physical Quantity Sensor, Inertial Measurement U...
- Publication number 20230109944
- Publication date Apr 13, 2023
- SEIKO EPSON CORPORATION
- Seiichiro OGURA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHODS FOR FABRICATING SILICON MEMS GYROSCOPES WITH UPPER AND LOWE...
- Publication number 20230076161
- Publication date Mar 9, 2023
- The Charles Stark Draper Laboratory, Inc.
- Eugene H. Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vibrator Device, Oscillator, Gyro Sensor, Electronic Apparatus, And...
- Publication number 20230040197
- Publication date Feb 9, 2023
- SEIKO EPSON CORPORATION
- Tetsuya OTSUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vibrator Device, Electronic Apparatus, And Vehicle
- Publication number 20220236058
- Publication date Jul 28, 2022
- SEIKO EPSON CORPORATION
- Ryuta Nishizawa
- G01 - MEASURING TESTING
Information Patent Application
SENSOR ELEMENT AND ANGULAR VELOCITY SENSOR
- Publication number 20220042800
- Publication date Feb 10, 2022
- KYOCERA Corporation
- Munetaka SOEJIMA
- G01 - MEASURING TESTING
Information Patent Application
Vibration Element, Manufacturing Method Of Vibration Element, Physi...
- Publication number 20210313959
- Publication date Oct 7, 2021
- SEIKO EPSON CORPORATION
- Seiichiro OGURA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
VIBRATOR DEVICE, ELECTRONIC APPARATUS, AND VEHICLE
- Publication number 20210033398
- Publication date Feb 4, 2021
- SEIKO EPSON CORPORATION
- Ryuta Nishizawa
- G01 - MEASURING TESTING
Information Patent Application
ACCELEROMETER SYSTEM ENCLOSING GAS
- Publication number 20200309524
- Publication date Oct 1, 2020
- HONEYWELL INTERNATIONAL INC.
- Chad Fertig
- G01 - MEASURING TESTING
Information Patent Application
POSITIONING APPARATUS COMPRISING AN INERTIAL SENSOR AND INERTIAL SE...
- Publication number 20200292570
- Publication date Sep 17, 2020
- STMicroelectronics S.r.l.
- Nicola Matteo Palella
- G01 - MEASURING TESTING
Information Patent Application
IN-PLANE NON-DEGENERATE CORIOLIS VIBRATORY GYROSCOPE
- Publication number 20200292313
- Publication date Sep 17, 2020
- HONEYWELL INTERNATIONAL INC.
- Daniel Endean
- G01 - MEASURING TESTING
Information Patent Application
Vibrator Device, Oscillator, Gyro Sensor, Electronic Apparatus, And...
- Publication number 20200235717
- Publication date Jul 23, 2020
- SEIKO EPSON CORPORATION
- Tetsuya OTSUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC THIN FILM, PIEZOELECTRIC THIN FILM DEVICE, PIEZOELECT...
- Publication number 20200227621
- Publication date Jul 16, 2020
- TDK Corporation
- Junpei MORISHITA
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
SENSOR ELEMENT AND ANGULAR VELOCITY SENSOR
- Publication number 20200208972
- Publication date Jul 2, 2020
- KYOCERA CORPORATION
- Munetaka SOEJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHYSICAL QUANTITY DETECTION DEVICE, MANUFACTURING METHOD FOR PHYSIC...
- Publication number 20200149889
- Publication date May 14, 2020
- SEIKO EPSON CORPORATION
- Ryuta NISHIZAWA
- G01 - MEASURING TESTING
Information Patent Application
Silicon Carbide Microelectromechanical Structure, Device, and Method
- Publication number 20200115219
- Publication date Apr 16, 2020
- The Government of the United States of America, as represented by the Secreta...
- Francis J. Kub
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR FABRICATING SILICON MEMS GYROSCOPES WITH UPPER AND LOWE...
- Publication number 20200096336
- Publication date Mar 26, 2020
- The Charles Stark Draper Laboratory, Inc.
- Eugene H. Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATORY ERROR COMPENSATION IN A TUNING FORK GYROSCOPE SUCH AS A C...
- Publication number 20200088518
- Publication date Mar 19, 2020
- HONEYWELL INTERNATIONAL INC.
- Daniel Endean
- G01 - MEASURING TESTING
Information Patent Application
MEMS METAL-QUARTZ GYROSCOPE
- Publication number 20190383611
- Publication date Dec 19, 2019
- LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
- Sangtae PARK
- G01 - MEASURING TESTING
Information Patent Application
SENSOR ELEMENT, ANGULAR VELOCITY SENSOR, AND MULTI-AXIS ANGULAR VE...
- Publication number 20190376789
- Publication date Dec 12, 2019
- KYOCERA CORPORATION
- Munetaka SOEJIMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHYSICAL QUANTITY SENSOR
- Publication number 20190301866
- Publication date Oct 3, 2019
- DENSO CORPORATION
- Takeru KANAZAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANGULAR VELOCITY SENSOR, SENSOR ELEMENT, AND MULTI-AXIS ANGULAR VEL...
- Publication number 20190265033
- Publication date Aug 29, 2019
- KYOCERA CORPORATION
- Munetaka SOEJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATOR DEVICE, CIRCUIT DEVICE, METHOD OF MANUFACTURING VIBRATOR D...
- Publication number 20190212145
- Publication date Jul 11, 2019
- SEIKO EPSON CORPORATION
- Hiroshi KIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION DEVICE, ELECTRONIC APPARATUS, AND VEHICLE
- Publication number 20190165759
- Publication date May 30, 2019
- SEIKO EPSON CORPORATION
- Ryuta NISHIZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANGULAR RATE SENSOR WITH IN-PHASE MOTION SUPPRESSION STRUCTURE
- Publication number 20190017823
- Publication date Jan 17, 2019
- NXP USA, INC.
- Peng Shao
- G01 - MEASURING TESTING
Information Patent Application
A SILICON-BASED MICRO-MACHINED VIBRATORY GYROSCOPE WITH AN I-SHAPED...
- Publication number 20190017822
- Publication date Jan 17, 2019
- NANJING UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Qin SHI
- G01 - MEASURING TESTING
Information Patent Application
MEMS DEVICE
- Publication number 20190011259
- Publication date Jan 10, 2019
- RICHTEK TECHNOLOGY CORPORATION
- Chiung-Wen Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Circuit Apparatus, Physical Quantity Measuring Apparatus, Electroni...
- Publication number 20180348277
- Publication date Dec 6, 2018
- SEIKO EPSON CORPORATION
- Hideo HANEDA
- B60 - VEHICLES IN GENERAL
Information Patent Application
COMPOSITE SENSOR
- Publication number 20180245919
- Publication date Aug 30, 2018
- Denso Corporation
- Naoki YOSHIDA
- B81 - MICRO-STRUCTURAL TECHNOLOGY

the devices involving a micro-mechanical structure

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Silicon MEMS gyroscopes with upper and lower sense plates

Vibrator device, oscillator, gyro sensor, electronic apparatus, and...

Vibration element, physical quantity sensor, inertial measurement u...

Sensor element, angular velocity sensor, and multi-axis angular vel...

Vibration element, manufacturing method of vibration element, physi...

Physical quantity detection device, manufacturing method for physic...

Piezoelectric thin film, piezoelectric thin film device, piezoelect...

Methods for fabricating silicon MEMS gyroscopes with upper and lowe...

Vibrator device, oscillator, gyro sensor, electronic apparatus, and...

Sensor element and angular velocity sensor

Vibration element, method of manufacturing vibration element, physi...

Vibrator device, electronic apparatus, and vehicle

Vibratory error compensation in a tuning fork gyroscope such as a C...

Vibrator device, circuit device, method of manufacturing vibrator d...

Accelerometer system enclosing gas

Angular velocity sensor, sensor element, and multi-axis angular vel...

Vibration element, manufacturing method of vibration element, physi...

Detection device for detecting dynamic quantity exerted on mechanic...

MEMS metal-quartz gyroscope

Silicon-based micro-machined vibratory gyroscope with an I-shaped s...

Positioning apparatus comprising an inertial sensor and inertial se...

Sensor element, physical quantity sensor, electronic apparatus, and...

Physical quantity detecting device, electronic apparatus, and movin...

Vibration device, electronic apparatus, and vehicle

Vibration device, angular velocity sensor, electronic device, and v...

Silicon carbide microelectromechanical structure, device, and method

Sensor element, sensor, electronic apparatus, and vehicle

Vibrator device, oscillator, gyro sensor, electronic apparatus, and...

Silicon carbide microelectromechanical structure, device, and method

Vibration device

Patents Applicationslast 30 patents

Vibration Element, Manufacturing Method of Vibration Element, Physi...

PRECISION GYROSCOPE MODE-MATCHING INSENSITIVE TO RATE INPUT

Vibration Element, Physical Quantity Sensor, Inertial Measurement U...

METHODS FOR FABRICATING SILICON MEMS GYROSCOPES WITH UPPER AND LOWE...

Vibrator Device, Oscillator, Gyro Sensor, Electronic Apparatus, And...

Vibrator Device, Electronic Apparatus, And Vehicle

SENSOR ELEMENT AND ANGULAR VELOCITY SENSOR

Vibration Element, Manufacturing Method Of Vibration Element, Physi...

VIBRATOR DEVICE, ELECTRONIC APPARATUS, AND VEHICLE

ACCELEROMETER SYSTEM ENCLOSING GAS

POSITIONING APPARATUS COMPRISING AN INERTIAL SENSOR AND INERTIAL SE...

IN-PLANE NON-DEGENERATE CORIOLIS VIBRATORY GYROSCOPE

Vibrator Device, Oscillator, Gyro Sensor, Electronic Apparatus, And...

PIEZOELECTRIC THIN FILM, PIEZOELECTRIC THIN FILM DEVICE, PIEZOELECT...

SENSOR ELEMENT AND ANGULAR VELOCITY SENSOR

PHYSICAL QUANTITY DETECTION DEVICE, MANUFACTURING METHOD FOR PHYSIC...

Silicon Carbide Microelectromechanical Structure, Device, and Method

METHODS FOR FABRICATING SILICON MEMS GYROSCOPES WITH UPPER AND LOWE...

VIBRATORY ERROR COMPENSATION IN A TUNING FORK GYROSCOPE SUCH AS A C...

MEMS METAL-QUARTZ GYROSCOPE

SENSOR ELEMENT, ANGULAR VELOCITY SENSOR, AND MULTI-AXIS ANGULAR VE...

PHYSICAL QUANTITY SENSOR

ANGULAR VELOCITY SENSOR, SENSOR ELEMENT, AND MULTI-AXIS ANGULAR VEL...

VIBRATOR DEVICE, CIRCUIT DEVICE, METHOD OF MANUFACTURING VIBRATOR D...

VIBRATION DEVICE, ELECTRONIC APPARATUS, AND VEHICLE

ANGULAR RATE SENSOR WITH IN-PHASE MOTION SUPPRESSION STRUCTURE

A SILICON-BASED MICRO-MACHINED VIBRATORY GYROSCOPE WITH AN I-SHAPED...

MEMS DEVICE

Circuit Apparatus, Physical Quantity Measuring Apparatus, Electroni...

COMPOSITE SENSOR