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the final conductor next to the insulator having a lateral composition or doping variation, or being formed laterally by more than one deposition step
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Industry
CPC
H01L21/28105
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/28105
the final conductor next to the insulator having a lateral composition or doping variation, or being formed laterally by more than one deposition step
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