the gas, other than thermal contact gas, being introduced the rear of the substrate to flow around its periphery

Industry

CPC
C23C16/45521

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45521the gas, other than thermal contact gas, being introduced the rear of the substrate to flow around its periphery

Industries

Patents Grantslast 30 patents

Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 11,946,142
- Issue date Apr 2, 2024
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor with ring to limit backside deposition
- Patent number 11,885,019
- Issue date Jan 30, 2024
- ASM IP Holding B.V.
- Mark Hawkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic-chuck heater
- Patent number 11,688,590
- Issue date Jun 27, 2023
- NGK Insulators, Ltd.
- Yutaka Unno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic-chuck heater
- Patent number 11,664,203
- Issue date May 30, 2023
- NGK Insulators, Ltd.
- Yutaka Unno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of manufacturing display apparatus
- Patent number 11,534,790
- Issue date Dec 27, 2022
- Samsung Display Co., Ltd.
- Sangjin Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer deposition apparatus and atomic layer deposition method
- Patent number 11,453,944
- Issue date Sep 27, 2022
- The Japan Steel Works, Ltd.
- Keisuke Washio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor with ring to limit backside deposition
- Patent number 11,085,112
- Issue date Aug 10, 2021
- ASM IP Holding B.V.
- Mark Hawkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for processing a substrate
- Patent number 10,837,110
- Issue date Nov 17, 2020
- Tokyo Electron Limited
- Kaoru Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for atomic layer deposition
- Patent number 10,633,737
- Issue date Apr 28, 2020
- The Japan Steel Works, Ltd.
- Tatsuya Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma excitation for spatial atomic layer deposition (ALD) reactors
- Patent number 10,550,469
- Issue date Feb 4, 2020
- Lam Research Corporation
- Karl F. Leeser
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,121,650
- Issue date Nov 6, 2018
- Hitachi Kokusai Electric, Inc.
- Tsukasa Kamakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and process for producing thin layers
- Patent number 10,030,307
- Issue date Jul 24, 2018
- Gebr. Schmid GmbH
- Christian Schmid
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing methods and apparatus with temperature distribution control
- Patent number 10,002,805
- Issue date Jun 19, 2018
- Veeco Instruments Inc.
- Alexander I. Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method using reversible decomposition reaction
- Patent number 9,976,217
- Issue date May 22, 2018
- Tokyo Electron Limited
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase growth apparatus and vapor phase growth method
- Patent number 9,869,035
- Issue date Jan 16, 2018
- NUFLARE TECHNOLOGY, INC.
- Takumi Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hot wall reactor with cooled vacuum containment
- Patent number 9,837,250
- Issue date Dec 5, 2017
- Applied Materials, Inc.
- Joel M. Huston
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition device
- Patent number 9,777,374
- Issue date Oct 3, 2017
- Altatech Semiconductor
- Patrice Nal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial growth method
- Patent number 9,518,339
- Issue date Dec 13, 2016
- Sumco Corporation
- Masayuki Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing methods and apparatus with temperature distribution control
- Patent number 9,324,590
- Issue date Apr 26, 2016
- Veeco Instruments Inc.
- Alex Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial growth method
- Patent number 9,127,374
- Issue date Sep 8, 2015
- Sumco Corporation
- Masayuki Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing with preionized and predissociated tuning gases a...
- Patent number 9,090,460
- Issue date Jul 28, 2015
- Micron Technology, Inc.
- Mark Kiehlbauch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stackable multi-port gas nozzles
- Patent number 8,968,473
- Issue date Mar 3, 2015
- Silevo, Inc.
- Steve Poppe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus, film deposition method, computer readabl...
- Patent number 8,961,691
- Issue date Feb 24, 2015
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer processing hardware for epitaxial deposition with reduced bac...
- Patent number 8,951,351
- Issue date Feb 10, 2015
- Applied Materials, Inc.
- Kailash Kiran Patalay
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer processing hardware for epitaxial deposition with reduced aut...
- Patent number 8,852,349
- Issue date Oct 7, 2014
- Applied Materials, Inc.
- Juan Chacin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing with preionized and predissociated tuning gases a...
- Patent number 8,721,836
- Issue date May 13, 2014
- Micron Technology, Inc.
- Mark Kiehlbauch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Film deposition apparatus
- Patent number 8,721,790
- Issue date May 13, 2014
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic heater
- Patent number 8,540,819
- Issue date Sep 24, 2013
- NGK Insulators, Ltd.
- Takashi Kataigi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus, film forming method and storage medium
- Patent number 8,539,908
- Issue date Sep 24, 2013
- Tokyo Electron Limited
- Toshio Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus
- Patent number 8,465,592
- Issue date Jun 18, 2013
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
LOCALIZED PLASMA ARC PREVENTION VIA PURGE RING
- Publication number 20230402259
- Publication date Dec 14, 2023
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE RING FOR LOCALIZED DELIVERY OF TUNING GAS
- Publication number 20230128551
- Publication date Apr 27, 2023
- LAM RESEARCH CORPORATION
- Yohan SEEPERSAD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
- Publication number 20220298632
- Publication date Sep 22, 2022
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220093447
- Publication date Mar 24, 2022
- Kokusai Electric Corporation
- Naofumi OHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR WITH RING TO LIMIT BACKSIDE DEPOSITION
- Publication number 20210363637
- Publication date Nov 25, 2021
- ASM IP HOLDING B.V.
- Mark Hawkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERCHANGEABLE HOT FILAMENTS CVD REACTOR
- Publication number 20190071776
- Publication date Mar 7, 2019
- ICDAT, Ltd.
- Dimitry Boguslavsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION DEVICE
- Publication number 20180320266
- Publication date Nov 8, 2018
- KOBUS SAS
- Patrice Nal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING WITH PREIONIZED AND PREDISSOCIATED TUNING GASES A...
- Publication number 20140238955
- Publication date Aug 28, 2014
- Micron Technology, Inc.
- Mark Kiehlbauch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FILM DEPOSITION METHOD AND COMPUTER READABLE STORAGE MEDIUM
- Publication number 20130251904
- Publication date Sep 26, 2013
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR WITH RING TO LIMIT BACKSIDE DEPOSITION
- Publication number 20130109192
- Publication date May 2, 2013
- ASM AMERICA, INC
- Mark Hawkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20130074770
- Publication date Mar 28, 2013
- TOKYO ELECTRON LIMITED
- MANABU HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR AND CHEMICAL VAPOR DEPOSITION APPARATUS INCLUDING THE SAME
- Publication number 20110303154
- Publication date Dec 15, 2011
- Young-ki Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLACING TABLE STRUCTURE
- Publication number 20110263123
- Publication date Oct 27, 2011
- TOKYO ELECTRON LIMITED
- Atsushi Gomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHODS AND APPARATUS WITH TEMPERATURE DISTRIBUTION CONTROL
- Publication number 20110206843
- Publication date Aug 25, 2011
- VEECO INSTRUMENTS INC.
- Alex Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER RE...
- Publication number 20110151122
- Publication date Jun 23, 2011
- TOKYO ELECTRON LIMITED
- HITOSHI KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS
- Publication number 20110139074
- Publication date Jun 16, 2011
- TOKYO ELECTRON LIMITED
- HITOSHI KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20110107968
- Publication date May 12, 2011
- TERASEMICON Corporation
- Taek Yong Jang
- C30 - CRYSTAL GROWTH
Information Patent Application
STACKABLE MULTI-PORT GAS NOZZLES
- Publication number 20110067632
- Publication date Mar 24, 2011
- SIERRA SOLAR POWER, INC.
- Steve Poppe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR FILM DEPOSITION
- Publication number 20110064878
- Publication date Mar 17, 2011
- Kunihiko SUZUKI
- C30 - CRYSTAL GROWTH
Information Patent Application
Vacuum Processing Method
- Publication number 20100300483
- Publication date Dec 2, 2010
- Ken Kitaoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS, FILM FORMING METHOD AND STORAGE MEDIUM
- Publication number 20100119727
- Publication date May 13, 2010
- TOKYO ELECTRON LIMITED
- Toshio Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, COMPUTER READABL...
- Publication number 20100055351
- Publication date Mar 4, 2010
- TOKYO ELECTRON LIMITED
- HITOSHI KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER RE...
- Publication number 20090324828
- Publication date Dec 31, 2009
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Epitaxial growth susceptor
- Publication number 20090314210
- Publication date Dec 24, 2009
- Masayuki Ishibashi
- C30 - CRYSTAL GROWTH
Information Patent Application
VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD
- Publication number 20090288684
- Publication date Nov 26, 2009
- Hitachi High-Technologies Corporation
- Ken Kitaoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING WITH PREIONIZED AND PREDISSOCIATED TUNING GASES A...
- Publication number 20090260763
- Publication date Oct 22, 2009
- Micron Technology, Inc.
- Mark Kiehlbauch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CERAMIC HEATER
- Publication number 20090235866
- Publication date Sep 24, 2009
- NGK Insulators, Ltd.
- Takashi Kataigi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas processing apparatus and gas processing method
- Publication number 20090151639
- Publication date Jun 18, 2009
- Shigeru Kasai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR IMPROVING DEPOSITION UNIFORMITY IN A VAPOR DE...
- Publication number 20080236497
- Publication date Oct 2, 2008
- TOKYO ELECTON LIMITED
- Mirko Vukovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE DEVELOPMENT TO REDUCE BEVEL DEPOSITION
- Publication number 20080152838
- Publication date Jun 26, 2008
- Applied Materials, Inc.
- SOOVO SEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

the gas, other than thermal contact gas, being introduced the rear of the substrate to flow around its periphery

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Spatially tunable deposition to compensate within wafer differentia...

Susceptor with ring to limit backside deposition

Electrostatic-chuck heater

Electrostatic-chuck heater

Apparatus and method of manufacturing display apparatus

Atomic layer deposition apparatus and atomic layer deposition method

Susceptor with ring to limit backside deposition

Substrate processing apparatus and method for processing a substrate

Device for atomic layer deposition

Plasma excitation for spatial atomic layer deposition (ALD) reactors

Method of manufacturing semiconductor device

Apparatus and process for producing thin layers

Processing methods and apparatus with temperature distribution control

Film forming method using reversible decomposition reaction

Vapor phase growth apparatus and vapor phase growth method

Hot wall reactor with cooled vacuum containment

Chemical vapor deposition device

Epitaxial growth method

Processing methods and apparatus with temperature distribution control

Epitaxial growth method

Plasma processing with preionized and predissociated tuning gases a...

Stackable multi-port gas nozzles

Film deposition apparatus, film deposition method, computer readabl...

Wafer processing hardware for epitaxial deposition with reduced bac...

Wafer processing hardware for epitaxial deposition with reduced aut...

Plasma processing with preionized and predissociated tuning gases a...

Film deposition apparatus

Ceramic heater

Film forming apparatus, film forming method and storage medium

Film deposition apparatus

Patents Applicationslast 30 patents

LOCALIZED PLASMA ARC PREVENTION VIA PURGE RING

EDGE RING FOR LOCALIZED DELIVERY OF TUNING GAS

SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUSCEPTOR WITH RING TO LIMIT BACKSIDE DEPOSITION

INTERCHANGEABLE HOT FILAMENTS CVD REACTOR

CHEMICAL VAPOR DEPOSITION DEVICE

PLASMA PROCESSING WITH PREIONIZED AND PREDISSOCIATED TUNING GASES A...

FILM DEPOSITION METHOD AND COMPUTER READABLE STORAGE MEDIUM

SUSCEPTOR WITH RING TO LIMIT BACKSIDE DEPOSITION

FILM DEPOSITION APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUSCEPTOR AND CHEMICAL VAPOR DEPOSITION APPARATUS INCLUDING THE SAME

PLACING TABLE STRUCTURE

PROCESSING METHODS AND APPARATUS WITH TEMPERATURE DISTRIBUTION CONTROL

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER RE...

FILM DEPOSITION APPARATUS

SEMICONDUCTOR MANUFACTURING APPARATUS

STACKABLE MULTI-PORT GAS NOZZLES

APPARATUS AND METHOD FOR FILM DEPOSITION

Vacuum Processing Method

FILM FORMING APPARATUS, FILM FORMING METHOD AND STORAGE MEDIUM

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, COMPUTER READABL...

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER RE...

Epitaxial growth susceptor

VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD

PLASMA PROCESSING WITH PREIONIZED AND PREDISSOCIATED TUNING GASES A...

CERAMIC HEATER

Gas processing apparatus and gas processing method

METHOD AND SYSTEM FOR IMPROVING DEPOSITION UNIFORMITY IN A VAPOR DE...

HARDWARE DEVELOPMENT TO REDUCE BEVEL DEPOSITION