the mass being suspended so as to only allow movement perpendicular to the plane of the substrate

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GPHYSICS G01Measuring instruments G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT

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G01P2015/0837the mass being suspended so as to only allow movement perpendicular to the plane of the substrate

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Patents Grantslast 30 patents

Information Patent Grant
Increased sensitivity z-axis accelerometer
- Patent number 11,255,873
- Issue date Feb 22, 2022
- Analog Devices, Inc.
- Xin Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Micromechanical sensor system
- Patent number 11,242,240
- Issue date Feb 8, 2022
- Robert Bosch GmbH
- Benny Pekka Herzogenrath
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low-power accelerometer
- Patent number 11,002,756
- Issue date May 11, 2021
- Nicolas Pierre Delorme
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Single axis accelerometer with inertial threshold
- Patent number 10,900,993
- Issue date Jan 26, 2021
- MECHOPTIX, INC.
- Joseph McGinty
- G01 - MEASURING TESTING
Information Patent Grant
Single axis inertial sensor with suppressed parasitic modes
- Patent number 10,809,277
- Issue date Oct 20, 2020
- NXP USA, INC.
- Jun Tang
- G01 - MEASURING TESTING
Information Patent Grant
MEMS sensor with dual pendulous proof masses
- Patent number 10,759,656
- Issue date Sep 1, 2020
- Apple Inc.
- Christopher C. Painter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low-power accelerometer
- Patent number 10,725,067
- Issue date Jul 28, 2020
- Nicolas Pierre Delorme
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical sensor device, sensor apparatus and cable
- Patent number 10,551,255
- Issue date Feb 4, 2020
- Fugro Technology B.V.
- Martijn Matthijssen
- G01 - MEASURING TESTING
Information Patent Grant
Resonant opto-mechanical accelerometer for use in navigation grade...
- Patent number 10,488,429
- Issue date Nov 26, 2019
- General Electric Company
- Sergey Alexandrovich Zotov
- G01 - MEASURING TESTING
Information Patent Grant
High sensitivity single-axis MEMS accelerometer with bilateral flex...
- Patent number 10,473,687
- Issue date Nov 12, 2019
- National Technology & Engineering Solutions of Sandia, LLC
- Paul J. Resnick
- G01 - MEASURING TESTING
Information Patent Grant
Optical sensor device, sensor apparatus, cable and method of manufa...
- Patent number 10,451,449
- Issue date Oct 22, 2019
- Fugro Technology B.V.
- German Enrique Knoppers
- G01 - MEASURING TESTING
Information Patent Grant
Three-axis inertial sensor for detecting linear acceleration forces
- Patent number 10,429,407
- Issue date Oct 1, 2019
- NXP USA, INC.
- Jun Tang
- G01 - MEASURING TESTING
Information Patent Grant
Accelerometer
- Patent number 10,401,378
- Issue date Sep 3, 2019
- Honeywell International Inc.
- Paul W. Dwyer
- G01 - MEASURING TESTING
Information Patent Grant
Teeter-totter type MEMS accelerometer with electrodes on circuit wafer
- Patent number 10,371,714
- Issue date Aug 6, 2019
- Analog Devices, Inc.
- Yu-Tsun Chien
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS accelerometer with proof masses moving in an anti-phase direction
- Patent number 10,371,715
- Issue date Aug 6, 2019
- Invensense, Inc.
- Leonardo Baldasarre
- G01 - MEASURING TESTING
Information Patent Grant
Physical quantity sensor, sensor device, electronic apparatus, and...
- Patent number 10,352,701
- Issue date Jul 16, 2019
- Seiko Epson Corporation
- Satoru Tanaka
- G01 - MEASURING TESTING
Information Patent Grant
Accelerometer sensor system
- Patent number 10,330,696
- Issue date Jun 25, 2019
- Northrop Grumman Systems Corporation
- Michael D. Bulatowicz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor and method for producing a micromechanical s...
- Patent number 10,294,095
- Issue date May 21, 2019
- Robert Bosch GmbH
- Benny Pekka Herzogenrath
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Z-axis microelectromechanical detection structure with reduced drifts
- Patent number 10,209,269
- Issue date Feb 19, 2019
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial sensor
- Patent number 9,958,472
- Issue date May 1, 2018
- Hitachi, Ltd.
- Yuudai Kamada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Force feedback electrodes in MEMS accelerometer
- Patent number 9,945,968
- Issue date Apr 17, 2018
- PGS Geophysical AS
- Ilker Ender Ocak
- G01 - MEASURING TESTING
Information Patent Grant
MEMS-sensor
- Patent number 9,856,133
- Issue date Jan 2, 2018
- TRONICS MICROSYSTEMS S.A.
- François-Xavier Boillot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Translating Z axis accelerometer
- Patent number 9,840,409
- Issue date Dec 12, 2017
- Invensense, Inc.
- Matthew Julian Thompson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS accelerometer
- Patent number 9,625,486
- Issue date Apr 18, 2017
- Meggitt (Orange County), Inc.
- Tom Kwa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromechanical acceleration sensor
- Patent number 9,575,088
- Issue date Feb 21, 2017
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- G01 - MEASURING TESTING
Information Patent Grant
Inertia sensors with multi-directional shock protection
- Patent number 9,527,722
- Issue date Dec 27, 2016
- Omnitek Partners LLC
- Jahangir S Rastegar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High-sensitivity, z-axis micro-electro-mechanical detection structu...
- Patent number 9,513,310
- Issue date Dec 6, 2016
- STMicroelectronics S.r.l.
- Leonardo Baldasarre
- G01 - MEASURING TESTING
Information Patent Grant
Fully differential capacitive architecture for MEMS accelerometer
- Patent number 9,506,946
- Issue date Nov 29, 2016
- PGS Geophysical AS
- Ilker Ender Ocak
- G01 - MEASURING TESTING
Information Patent Grant
Physical quantity sensor and electronic apparatus
- Patent number 9,429,589
- Issue date Aug 30, 2016
- Seiko Epson Corporation
- Satoru Tanaka
- G01 - MEASURING TESTING
Information Patent Grant
MEMS sensor with dynamically variable reference capacitance
- Patent number 9,410,981
- Issue date Aug 9, 2016
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS ACCELEROMETER WITH VERTICAL STOPS
- Publication number 20240329076
- Publication date Oct 3, 2024
- NXP USA, Inc.
- Jun Tang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR COMPONENT INCLUDING A MICROELECTROMECHANICAL Z INERTIAL SENS...
- Publication number 20220091155
- Publication date Mar 24, 2022
- ROBERT BOSCH GmbH
- Martin Rambach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL SENSOR WITH SPLIT ANCHORS AND FLEXURE COMPLIANCE BETWEEN T...
- Publication number 20220050124
- Publication date Feb 17, 2022
- NXP USA, Inc.
- Fengyuan Li
- G01 - MEASURING TESTING
Information Patent Application
LOW-POWER ACCELEROMETER
- Publication number 20200355723
- Publication date Nov 12, 2020
- Nicolas Pierre DELORME
- G01 - MEASURING TESTING
Information Patent Application
LOW-POWER ACCELEROMETER
- Publication number 20190128918
- Publication date May 2, 2019
- Nicolas Pierre DELORME
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL SENSOR SYSTEM
- Publication number 20190092619
- Publication date Mar 28, 2019
- ROBERT BOSCH GmbH
- Benny Pekka Herzogenrath
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-AXIS, SINGLE-DRIVE INERTIAL DEVICE
- Publication number 20180299269
- Publication date Oct 18, 2018
- Lumedyne Technologies Incorporated
- Ozan Anac
- G01 - MEASURING TESTING
Information Patent Application
HIGH-SENSITIVITY, Z-AXIS MICRO-ELECTRO-MECHANICAL DETECTION STRUCTU...
- Publication number 20140283605
- Publication date Sep 25, 2014
- STMicroelectronics S.r. I.
- Leonardo Baldasarre
- G01 - MEASURING TESTING
Information Patent Application
FULLY DIFFERENTIAL CAPACITIVE ARCHITECTURE FOR MEMS ACCELEROMETER
- Publication number 20140260617
- Publication date Sep 18, 2014
- Agency for Science Technology and Research (A"STAR)
- Ilker Ender Ocak
- G01 - MEASURING TESTING
Information Patent Application
FORCE FEEDBACK ELECTRODES IN MEMS ACCELEROMETER
- Publication number 20140260618
- Publication date Sep 18, 2014
- Agency for Science Technology and Research (A"STAR)
- Ilker Ender Ocak
- G01 - MEASURING TESTING
Information Patent Application
MEMS DEVICE WITH MULTIPLE ELECTRODES AND FABRICATING METHOD THEREOF
- Publication number 20140175572
- Publication date Jun 26, 2014
- Industrial Technology Research Institute
- YU WEN HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Teeter-Totter Type MEMS Accelerometer with Electrodes on Circuit Wafer
- Publication number 20130333471
- Publication date Dec 19, 2013
- Analog Devices, Inc.
- Yu-Tsun Chien
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHYSICAL QUANTITY SENSOR AND ELECTRONIC APPARATUS
- Publication number 20130228013
- Publication date Sep 5, 2013
- SEIKO EPSON CORPORATION
- Satoru TANAKA
- G01 - MEASURING TESTING
Information Patent Application
MICRO-ELECTRO-MECHANICAL SENSING DEVICE AND MANUFACTURING METHOD TH...
- Publication number 20130152688
- Publication date Jun 20, 2013
- PixArt Imaging Incorporation
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZORESISTIVE TYPE Z-AXIS ACCELEROMETER
- Publication number 20130091949
- Publication date Apr 18, 2013
- RICHWAVE TECHNOLOGY CORP.
- Chih-Wei HUANG
- G01 - MEASURING TESTING
Information Patent Application
Inertial Sensor
- Publication number 20120272734
- Publication date Nov 1, 2012
- SAMSUNG ELECTRONICS CO., LTD.
- Won Kyu Jeung
- G01 - MEASURING TESTING
Information Patent Application
MEMS COMPOSITE TRANSDUCER INCLUDING COMPLIANT MEMBRANE
- Publication number 20120266686
- Publication date Oct 25, 2012
- James D. Huffman
- G01 - MEASURING TESTING
Information Patent Application
MEMS SENSOR WITH DUAL PROOF MASSES
- Publication number 20120186347
- Publication date Jul 26, 2012
- FREESCALE SEMICONDUCTOR, INC.
- Andrew C. McNeil
- G01 - MEASURING TESTING
Information Patent Application
Z-AXIS CAPACITIVE ACCELEROMETER
- Publication number 20120125103
- Publication date May 24, 2012
- MEMSIC, INC.
- Leyue Jiang
- G01 - MEASURING TESTING
Information Patent Application
MEMS SENSOR
- Publication number 20120104520
- Publication date May 3, 2012
- Alps Electric Co., Ltd.
- Yoshitaka UTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
UNSTABLE ELECTROSTATIC SPRING ACCELEROMETER
- Publication number 20120090393
- Publication date Apr 19, 2012
- Baolab Microsystems SL
- Josep Montanya Silvestre
- G01 - MEASURING TESTING
Information Patent Application
PHYSICAL QUANTITY SENSOR
- Publication number 20120055249
- Publication date Mar 8, 2012
- Alps Electric Co., Ltd.
- Akira MIYATAKE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS accelerometer with enhanced structural strength
- Publication number 20120042729
- Publication date Feb 23, 2012
- PixArt Imaging Incorporation, R.O.C.
- Chuan-Wei Wang
- G01 - MEASURING TESTING
Information Patent Application
MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
- Publication number 20120038963
- Publication date Feb 16, 2012
- Hitachi, Ltd.
- Chisaki TAKUBO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION SENSOR HAVING A DAMPING DEVICE
- Publication number 20120031185
- Publication date Feb 9, 2012
- Johannes Classen
- G01 - MEASURING TESTING
Information Patent Application
MEMS THREE-AXIS ACCELEROMETER
- Publication number 20110303010
- Publication date Dec 15, 2011
- Bin Yang
- G01 - MEASURING TESTING
Information Patent Application
ELEMENT STRUCTURE, INERTIA SENSOR, AND ELECTRONIC DEVICE
- Publication number 20110291208
- Publication date Dec 1, 2011
- SEIKO EPSON CORPORATION
- Shigekazu TAKAGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND DEVICES FOR PRESSURE DETECTION
- Publication number 20110235156
- Publication date Sep 29, 2011
- QUALCOMM MEMS Technologies, Inc.
- Manish Kothari
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ACCELERATION SENSOR
- Publication number 20110203373
- Publication date Aug 25, 2011
- Mitsubishi Electric Corporation
- Nobuaki Konno
- G01 - MEASURING TESTING
Information Patent Application
LATERALLY INTEGRATED MEMS SENSOR DEVICE WITH MULTI-STIMULUS SENSING
- Publication number 20110126632
- Publication date Jun 2, 2011
- FREESCALE SEMICONDUCTOR, INC.
- Andrew C. McNeil
- B81 - MICRO-STRUCTURAL TECHNOLOGY

the mass being suspended so as to only allow movement perpendicular to the plane of the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Increased sensitivity z-axis accelerometer

Micromechanical sensor system

Low-power accelerometer

Single axis accelerometer with inertial threshold

Single axis inertial sensor with suppressed parasitic modes

MEMS sensor with dual pendulous proof masses

Low-power accelerometer

Optical sensor device, sensor apparatus and cable

Resonant opto-mechanical accelerometer for use in navigation grade...

High sensitivity single-axis MEMS accelerometer with bilateral flex...

Optical sensor device, sensor apparatus, cable and method of manufa...

Three-axis inertial sensor for detecting linear acceleration forces

Accelerometer

Teeter-totter type MEMS accelerometer with electrodes on circuit wafer

MEMS accelerometer with proof masses moving in an anti-phase direction

Physical quantity sensor, sensor device, electronic apparatus, and...

Accelerometer sensor system

Micromechanical sensor and method for producing a micromechanical s...

Z-axis microelectromechanical detection structure with reduced drifts

Inertial sensor

Force feedback electrodes in MEMS accelerometer

MEMS-sensor

Translating Z axis accelerometer

MEMS accelerometer

Capacitive micromechanical acceleration sensor

Inertia sensors with multi-directional shock protection

High-sensitivity, z-axis micro-electro-mechanical detection structu...

Fully differential capacitive architecture for MEMS accelerometer

Physical quantity sensor and electronic apparatus

MEMS sensor with dynamically variable reference capacitance

Patents Applicationslast 30 patents

MEMS ACCELEROMETER WITH VERTICAL STOPS

SENSOR COMPONENT INCLUDING A MICROELECTROMECHANICAL Z INERTIAL SENS...

INERTIAL SENSOR WITH SPLIT ANCHORS AND FLEXURE COMPLIANCE BETWEEN T...

LOW-POWER ACCELEROMETER

LOW-POWER ACCELEROMETER

MICROMECHANICAL SENSOR SYSTEM

MULTI-AXIS, SINGLE-DRIVE INERTIAL DEVICE

HIGH-SENSITIVITY, Z-AXIS MICRO-ELECTRO-MECHANICAL DETECTION STRUCTU...

FULLY DIFFERENTIAL CAPACITIVE ARCHITECTURE FOR MEMS ACCELEROMETER

FORCE FEEDBACK ELECTRODES IN MEMS ACCELEROMETER

MEMS DEVICE WITH MULTIPLE ELECTRODES AND FABRICATING METHOD THEREOF

Teeter-Totter Type MEMS Accelerometer with Electrodes on Circuit Wafer

PHYSICAL QUANTITY SENSOR AND ELECTRONIC APPARATUS

MICRO-ELECTRO-MECHANICAL SENSING DEVICE AND MANUFACTURING METHOD TH...

PIEZORESISTIVE TYPE Z-AXIS ACCELEROMETER

Inertial Sensor

MEMS COMPOSITE TRANSDUCER INCLUDING COMPLIANT MEMBRANE

MEMS SENSOR WITH DUAL PROOF MASSES

Z-AXIS CAPACITIVE ACCELEROMETER

MEMS SENSOR

UNSTABLE ELECTROSTATIC SPRING ACCELEROMETER

PHYSICAL QUANTITY SENSOR

MEMS accelerometer with enhanced structural strength

MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE

ACCELERATION SENSOR HAVING A DAMPING DEVICE

MEMS THREE-AXIS ACCELEROMETER

ELEMENT STRUCTURE, INERTIA SENSOR, AND ELECTRONIC DEVICE

METHODS AND DEVICES FOR PRESSURE DETECTION

ACCELERATION SENSOR

LATERALLY INTEGRATED MEMS SENSOR DEVICE WITH MULTI-STIMULUS SENSING