the material being halogen doped silicon oxides

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H01L21/02131

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/02131the material being halogen doped silicon oxides

Industries

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Patents Grantslast 30 patents

Information Patent Grant
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Planar passivation layers
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Wafer level sequencing flow cell fabrication
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- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
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Planar passivation layers
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Information Patent Grant
Interconnect structure for semiconductor device and methods of fabr...
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Method for forming semiconductor device and resulting device
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SOI substrate and manufacturing method of the same, and semiconduct...
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Method for manufacturing semiconductor device, semiconductor device...
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WAFER LEVEL SEQUENCING FLOW CELL FABRICATION
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MONOALKOXYSILANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM
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METHOD FOR PROCESSING WORKPIECE
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METHOD OF FORMING A DIELECTRIC FILM
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- H01 - BASIC ELECTRIC ELEMENTS

the material being halogen doped silicon oxides

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wafer level sequencing flow cell fabrication

Planar passivation layers

Low-κ ALD gap-fill methods and material

DRAM with a hydrogen-supply layer and a high-capacitance embedded c...

Method for forming semiconductor device and resulting device

Interconnect structure for semiconductor device and methods of fabr...

Integrated assemblies, and methods of forming integrated assemblies

Wafer level sequencing flow cell fabrication

Planar passivation layers

DRAM with a hydrogen-supply layer and a high-capacitance embedded c...

Integrated assemblies, and methods of forming integrated assemblies

Method for processing workpiece

Water level sequencing flow cell fabrication

Method of manufacturing semiconductor device, substrate processing...

Interconnect structure for semiconductor device and methods of fabr...

Planar passivation layers

Interconnect structure for semiconductor device and methods of fabr...

Method for forming semiconductor device and resulting device

Film forming method

Silicon-on-insulator device and intermetallic dielectric layer stru...

Method of manufacturing solar cell

Method of manufacturing dielectric layers of semiconductor structure

Method of manufacturing solar cell

Three dimensional NAND device containing fluorine doped layer and m...

Semiconductor device and method for fabricating the same

Method of forming a dielectric film

Method for manufacturing SOI substrate and method for manufacturing...

SOI substrate and manufacturing method of the same, and semiconduct...

Semiconductor substrate, semiconductor device and manufacturing met...

Method for manufacturing semiconductor device, semiconductor device...

Patents Applicationslast 30 patents

PLANAR PASSIVATION LAYERS

LOW-K ALD GAP-FILL METHODS AND MATERIAL

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD FOR FORMING SEMICONDUCTOR DEVICE AND RESULTING DEVICE

AIR GAP FORMING METHOD AND SELECTIVE DEPOSITION METHOD

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

WAFER LEVEL SEQUENCING FLOW CELL FABRICATION

MONOALKOXYSILANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM

PLANAR PASSIVATION LAYERS

LOW-K ALD GAP-FILL METHODS AND MATERIAL

SEMICONDUCTOR DEVICE

Integrated Assemblies, and Methods of Forming Integrated Assemblies

Integrated Assemblies, and Methods of Forming Integrated Assemblies

WAFER LEVEL SEQUENCING FLOW CELL FABRICATION

PLANAR PASSIVATION LAYERS

INTERCONNECT STRUCTURE FOR SEMICONDUCTOR DEVICE AND METHODS OF FABR...

METHOD FOR FORMING SEMICONDUCTOR DEVICE AND RESULTING DEVICE

METHOD FOR PROCESSING WORKPIECE

WAFER LEVEL SEQUENCING FLOW CELL FABRICATION

INTERCONNECT STRUCTURE FOR SEMICONDUCTOR DEVICE AND METHODS OF FABR...

METHOD FOR FORMING SEMICONDUCTOR DEVICE AND RESULTING DEVICE

PLANAR PASSIVATION LAYERS

FILM FORMING METHOD

APPLYING EQUALIZED PLASMA COUPLING DESIGN FOR MURA FREE SUSCEPTOR

METHOD OF MANUFACTURING SOLAR CELL

SILICON-ON-INSULATOR DEVICE AND INTERMETALLIC DIELECTRIC LAYER STRU...

METHOD OF FORMING A DIELECTRIC FILM

METHOD OF FORMING METAL OXIDE FILM, METAL OXIDE FILM AND OPTICAL EL...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE...

SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR DEVICE AND MANUFACTURING MET...