the material comprising alkyl silsesquioxane

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CPC
H01L21/02137

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02137the material comprising alkyl silsesquioxane

Industries

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Patents Grantslast 30 patents

Information Patent Grant
System for dispensing spin-on glass (SOG) and method of using
- Patent number 12,272,549
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Tsun Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Passivation against vapor deposition
- Patent number 11,739,422
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- Varun Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for dispensing liquid spin-on glass (SOG) onto se...
- Patent number 11,443,939
- Issue date Sep 13, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Tsun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure formation
- Patent number 11,404,267
- Issue date Aug 2, 2022
- Micron Technology, Inc.
- Santanu Sarkar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Passivation against vapor deposition
- Patent number 11,396,701
- Issue date Jul 26, 2022
- ASM IP Holding B.V.
- Varun Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Passivation against vapor deposition
- Patent number 10,900,120
- Issue date Jan 26, 2021
- ASM IP Holding B.V.
- Varun Sharma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 10,680,073
- Issue date Jun 9, 2020
- Fujitsu Limited
- Shirou Ozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for dispensing liquid spin-on glass (SOG) onto se...
- Patent number 10,446,390
- Issue date Oct 15, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Tsun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Use of silyl bridged alkyl compounds for dense OSG films
- Patent number 10,249,489
- Issue date Apr 2, 2019
- VERSUM MATERIALS US, LLC
- Raymond Nicholas Vrtis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Trench silicide with self-aligned contact vias
- Patent number 10,068,850
- Issue date Sep 4, 2018
- International Business Machines Corporation
- Josephine B. Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Trench silicide with self-aligned contact vias
- Patent number 9,721,888
- Issue date Aug 1, 2017
- International Business Machines Corporation
- Josephine B. Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shallow trench isolation trenches and methods for NAND memory
- Patent number 9,711,390
- Issue date Jul 18, 2017
- SanDisk Technologies LLC
- Shinjiro Umehara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon-containing EUV resist underlayer film forming composition
- Patent number 9,337,052
- Issue date May 10, 2016
- Nissan Chemical Industries, Ltd.
- Shuhei Shigaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for forming interconnect structures
- Patent number 9,245,792
- Issue date Jan 26, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Neng-Kuo Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and apparatus for active energy assist baking
- Patent number 9,004,914
- Issue date Apr 14, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Chi Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photo-patternable dielectric materials curable to porous dielectric...
- Patent number 9,006,373
- Issue date Apr 14, 2015
- International Business Machines Corporation
- Phillip J. Brock
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Photo-patternable dielectric materials curable to porous dielectric...
- Patent number 8,981,031
- Issue date Mar 17, 2015
- International Business Machines Corporation
- Robert D. Miller
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Photo-patternable dielectric materials curable to porous dielectric...
- Patent number 8,946,371
- Issue date Feb 3, 2015
- International Business Machines Corporation
- Phillip J. Brock
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Compositions, layers and films for optoelectronic devices, methods...
- Patent number 8,901,268
- Issue date Dec 2, 2014
- Ahila Krishnamoorthy
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method and materials for reverse patterning
- Patent number 8,828,252
- Issue date Sep 9, 2014
- Dow Corning Corporation
- Michael L. Bradford
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Methods of forming intermediate semiconductor device structures usi...
- Patent number 8,486,612
- Issue date Jul 16, 2013
- Micron Technology, Inc.
- Weimin Li
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of and apparatus for active energy assist baking
- Patent number 8,481,412
- Issue date Jul 9, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Chi Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Molding material comprising polysilsesquioxane compound, sealing ma...
- Patent number 8,481,669
- Issue date Jul 9, 2013
- Lintec Corporation
- Mikihiro Kashio
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Interconnect structures with patternable low-k dielectrics and meth...
- Patent number 8,450,854
- Issue date May 28, 2013
- International Business Machines Corporation
- Qinghuang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photo-patternable dielectric materials curable to porous dielectric...
- Patent number 8,389,663
- Issue date Mar 5, 2013
- International Business Machines Corporation
- Phillip Joe Brock
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Pattern forming method and method of manufacturing semiconductor de...
- Patent number 8,168,377
- Issue date May 1, 2012
- Tokyo Electron Limited
- Kazuyuki Mitsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and devices for forming nanostructure monolayers and device...
- Patent number 8,143,703
- Issue date Mar 27, 2012
- Nanosys, Inc.
- David L. Heald
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Interconnect structures with patternable low-k dielectrics and meth...
- Patent number 8,084,862
- Issue date Dec 27, 2011
- International Business Machines Corporation
- Qinghuang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment of low K films with a silylating agent for damage repair
- Patent number 8,034,638
- Issue date Oct 11, 2011
- Novellus Systems, Inc.
- Bart J. Schravendijk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insulating film forming composition and production method of insula...
- Patent number 8,013,077
- Issue date Sep 6, 2011
- FUJIFILM Corporation
- Kensuke Morita
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM FOR DISPENSING SPIN-ON GLASS (SOG) AND METHOD OF USING
- Publication number 20220367181
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Tsun LIU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PASSIVATION AGAINST VAPOR DEPOSITION
- Publication number 20220349059
- Publication date Nov 3, 2022
- ASM IP HOLDING B.V.
- Varun Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR STRUCTURE FORMATION
- Publication number 20210202246
- Publication date Jul 1, 2021
- Micron Technology, Inc.
- Santanu Sarkar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PASSIVATION AGAINST VAPOR DEPOSITION
- Publication number 20210115559
- Publication date Apr 22, 2021
- ASM IP HOLDING B.V.
- Varun Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR DISPENSING LIQUID SPIN-ON GLASS (SOG) ONTO SE...
- Publication number 20200043724
- Publication date Feb 6, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Tsun LIU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SILSESQUIOXANE RESIN AND SILYL-ANHYDRIDE COMPOSITION
- Publication number 20190169436
- Publication date Jun 6, 2019
- Dow Silicones Corporation
- David Altergott
- C07 - ORGANIC CHEMISTRY
Information Patent Application
PASSIVATION AGAINST VAPOR DEPOSITION
- Publication number 20190017170
- Publication date Jan 17, 2019
- ASM IP HOLDING B.V.
- Varun Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
USE OF SILYL BRIDGED ALKYL COMPOUNDS FOR DENSE OSG FILMS
- Publication number 20180122632
- Publication date May 3, 2018
- VERSUM MATERIALS US, LLC
- Raymond Nicholas Vrtis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRENCH SILICIDE WITH SELF-ALIGNED CONTACT VIAS
- Publication number 20170330830
- Publication date Nov 16, 2017
- International Business Machines Corporation
- Josephine B. Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRENCH SILICIDE WITH SELF-ALIGNED CONTACT VIAS
- Publication number 20170162496
- Publication date Jun 8, 2017
- International Business Machines Corporation
- Josephine B. Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHALLOW TRENCH ISOLATION TRENCHES AND METHODS FOR NAND MEMORY
- Publication number 20160343608
- Publication date Nov 24, 2016
- SANDISK TECHNOLOGIES INC.
- Shinjiro Umehara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DI-T-BUTOXYDIACETOXYSILANE-BASED SILSESQUIOXANE RESINS AS HARD-MASK...
- Publication number 20140342292
- Publication date Nov 20, 2014
- Peng-Fei Fu
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SILICON-CONTAINING EUV RESIST UNDERLAYER FILM FORMING COMPOSITION
- Publication number 20140232018
- Publication date Aug 21, 2014
- Shuhei Shigaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Method for Making Porous Materials
- Publication number 20140030432
- Publication date Jan 30, 2014
- Jih-Perng LEU
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD OF AND APPARATUS FOR ACTIVE ENERGY ASSIST BAKING
- Publication number 20130273732
- Publication date Oct 17, 2013
- Chung-Chi KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTO-PATTERNABLE DIELECTRIC MATERIALS CURABLE TO POROUS DIELECTRIC...
- Publication number 20130207278
- Publication date Aug 15, 2013
- International Business Machines Corporation
- Phillip J. Brock
- C07 - ORGANIC CHEMISTRY
Information Patent Application
PHOTO-PATTERNABLE DIELECTRIC MATERIALS CURABLE TO POROUS DIELECTRIC...
- Publication number 20130197253
- Publication date Aug 1, 2013
- International Business Machines Corporation
- Robert D. Miller
- C07 - ORGANIC CHEMISTRY
Information Patent Application
PHOTO-PATTERNABLE DIELECTRIC MATERIALS CURABLE TO POROUS DIELECTRIC...
- Publication number 20130189836
- Publication date Jul 25, 2013
- International Business Machines Corporation
- Phillip J. Brock
- C07 - ORGANIC CHEMISTRY
Information Patent Application
INSULATION PATTERN-FORMING METHOD AND INSULATION PATTERN-FORMING MA...
- Publication number 20130084394
- Publication date Apr 4, 2013
- JSR Corporation
- Satoshi Dei
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Method And Materials For Reverse Patterning
- Publication number 20120123135
- Publication date May 17, 2012
- Michael L. Bradford
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD OF AND APPARATUS FOR ACTIVE ENERGY ASSIST BAKING
- Publication number 20120077339
- Publication date Mar 29, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Chi KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITIONS, LAYERS AND FILMS FOR OPTOELECTRONIC DEVICES, METHODS...
- Publication number 20110171447
- Publication date Jul 14, 2011
- Ahila Krishnamoorthy
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
PHOTO-PATTERNABLE DIELECTRIC MATERIALS CURABLE TO POROUS DIELECTRIC...
- Publication number 20110083887
- Publication date Apr 14, 2011
- International Business Machines Corporation
- Phillip Joe Brock
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHODS OF FORMING INTERMEDIATE SEMICONDUCTOR DEVICE STRUCTURES USI...
- Publication number 20110065050
- Publication date Mar 17, 2011
- Micron Technology, Inc.
- Weimin Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MODIFIER FOR LOW DIELECTRIC CONSTANT FILM, AND METHOD FOR PRODUCTIO...
- Publication number 20100323530
- Publication date Dec 23, 2010
- Central Glass Company, Limited
- Tsuyoshi Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERCONNECT STRUCTURES WITH PATTERNABLE LOW-K DIELECTRICS AND METH...
- Publication number 20100283157
- Publication date Nov 11, 2010
- International Business Machines Corporation
- Qinghuang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPIN-ON ANTIREFLECTIVE COATING FOR INTEGRATION OF PATTERNABLE DIELE...
- Publication number 20100207276
- Publication date Aug 19, 2010
- International Business Machines Corporation
- Robert D. Allen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Forming Interconnect Structures
- Publication number 20100022084
- Publication date Jan 28, 2010
- Neng-Kuo Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Method and Storage Medium
- Publication number 20090286399
- Publication date Nov 19, 2009
- Yasushi Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN FORMING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DE...
- Publication number 20090220898
- Publication date Sep 3, 2009
- TOKYO ELECTRON LIMITED
- Kazuyuki MITSUOKA
- H01 - BASIC ELECTRIC ELEMENTS

the material comprising alkyl silsesquioxane

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System for dispensing spin-on glass (SOG) and method of using

Passivation against vapor deposition

System and method for dispensing liquid spin-on glass (SOG) onto se...

Semiconductor structure formation

Passivation against vapor deposition

Passivation against vapor deposition

Semiconductor device and manufacturing method thereof

System and method for dispensing liquid spin-on glass (SOG) onto se...

Use of silyl bridged alkyl compounds for dense OSG films

Trench silicide with self-aligned contact vias

Trench silicide with self-aligned contact vias

Shallow trench isolation trenches and methods for NAND memory

Silicon-containing EUV resist underlayer film forming composition

Method for forming interconnect structures

Method of and apparatus for active energy assist baking

Photo-patternable dielectric materials curable to porous dielectric...

Photo-patternable dielectric materials curable to porous dielectric...

Photo-patternable dielectric materials curable to porous dielectric...

Compositions, layers and films for optoelectronic devices, methods...

Method and materials for reverse patterning

Methods of forming intermediate semiconductor device structures usi...

Method of and apparatus for active energy assist baking

Molding material comprising polysilsesquioxane compound, sealing ma...

Interconnect structures with patternable low-k dielectrics and meth...

Photo-patternable dielectric materials curable to porous dielectric...

Pattern forming method and method of manufacturing semiconductor de...

Methods and devices for forming nanostructure monolayers and device...

Interconnect structures with patternable low-k dielectrics and meth...

Treatment of low K films with a silylating agent for damage repair

Insulating film forming composition and production method of insula...

Patents Applicationslast 30 patents

SYSTEM FOR DISPENSING SPIN-ON GLASS (SOG) AND METHOD OF USING

PASSIVATION AGAINST VAPOR DEPOSITION

SEMICONDUCTOR STRUCTURE FORMATION

PASSIVATION AGAINST VAPOR DEPOSITION

SYSTEM AND METHOD FOR DISPENSING LIQUID SPIN-ON GLASS (SOG) ONTO SE...

SILSESQUIOXANE RESIN AND SILYL-ANHYDRIDE COMPOSITION

PASSIVATION AGAINST VAPOR DEPOSITION

USE OF SILYL BRIDGED ALKYL COMPOUNDS FOR DENSE OSG FILMS

TRENCH SILICIDE WITH SELF-ALIGNED CONTACT VIAS

TRENCH SILICIDE WITH SELF-ALIGNED CONTACT VIAS

SHALLOW TRENCH ISOLATION TRENCHES AND METHODS FOR NAND MEMORY

DI-T-BUTOXYDIACETOXYSILANE-BASED SILSESQUIOXANE RESINS AS HARD-MASK...

SILICON-CONTAINING EUV RESIST UNDERLAYER FILM FORMING COMPOSITION

Method for Making Porous Materials

METHOD OF AND APPARATUS FOR ACTIVE ENERGY ASSIST BAKING

PHOTO-PATTERNABLE DIELECTRIC MATERIALS CURABLE TO POROUS DIELECTRIC...

PHOTO-PATTERNABLE DIELECTRIC MATERIALS CURABLE TO POROUS DIELECTRIC...

PHOTO-PATTERNABLE DIELECTRIC MATERIALS CURABLE TO POROUS DIELECTRIC...

INSULATION PATTERN-FORMING METHOD AND INSULATION PATTERN-FORMING MA...

Method And Materials For Reverse Patterning

METHOD OF AND APPARATUS FOR ACTIVE ENERGY ASSIST BAKING

COMPOSITIONS, LAYERS AND FILMS FOR OPTOELECTRONIC DEVICES, METHODS...

PHOTO-PATTERNABLE DIELECTRIC MATERIALS CURABLE TO POROUS DIELECTRIC...

METHODS OF FORMING INTERMEDIATE SEMICONDUCTOR DEVICE STRUCTURES USI...

MODIFIER FOR LOW DIELECTRIC CONSTANT FILM, AND METHOD FOR PRODUCTIO...

INTERCONNECT STRUCTURES WITH PATTERNABLE LOW-K DIELECTRICS AND METH...

SPIN-ON ANTIREFLECTIVE COATING FOR INTEGRATION OF PATTERNABLE DIELE...

Method for Forming Interconnect Structures

Substrate Processing Method and Storage Medium

PATTERN FORMING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DE...