the material containing more than one metal element

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H01L21/02161

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02161the material containing more than one metal element

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Germanium mediated de-oxidation of silicon
- Patent number 11,651,956
- Issue date May 16, 2023
- PSIQUANTUM, CORP.
- Yong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Epitaxial strontium titanate on silicon
- Patent number 11,615,954
- Issue date Mar 28, 2023
- PSIQUANTUM, CORP.
- Yong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and method for SRAM FinFET device
- Patent number 11,563,118
- Issue date Jan 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuo-Cheng Ching
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Germanium mediated de-oxidation of silicon
- Patent number 11,302,528
- Issue date Apr 12, 2022
- PSIQUANTUM, CORP.
- Yong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and method for SRAM FinfET device
- Patent number 10,453,961
- Issue date Oct 22, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuo-Cheng Ching
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for forming film including at least...
- Patent number 10,026,607
- Issue date Jul 17, 2018
- Hitachi Kokusai Electric, Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and glass film forming...
- Patent number 9,978,882
- Issue date May 22, 2018
- SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.
- Shinichi Nagase
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 9,893,142
- Issue date Feb 13, 2018
- Samsung Electronics Co., Ltd.
- Se-Hyoung Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resin-sealed semiconductor device and method of manufacturing resin...
- Patent number 9,570,408
- Issue date Feb 14, 2017
- Shindengen Electric Manufacturing Co., Ltd.
- Atsushi Ogasawara
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Semiconductor device and manufacturing method for the same
- Patent number 9,496,365
- Issue date Nov 15, 2016
- Kabushiki Kaisha Toshiba
- Tatsuo Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device for forming film inclu...
- Patent number 9,478,417
- Issue date Oct 25, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Resin-sealed semiconductor device and method of manufacturing the same
- Patent number 9,455,231
- Issue date Sep 27, 2016
- Shindengen Electric Manufacturing Co., Ltd.
- Atsushi Ogasawara
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Method of manufacturing semiconductor device by forming a film on a...
- Patent number 9,384,971
- Issue date Jul 5, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus of manufacturing a semiconductor device by for...
- Patent number 9,385,013
- Issue date Jul 5, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device by forming a film on...
- Patent number 9,384,966
- Issue date Jul 5, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device by forming a film on...
- Patent number 9,384,968
- Issue date Jul 5, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device by forming a film on a...
- Patent number 9,384,969
- Issue date Jul 5, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device by forming a film on a...
- Patent number 9,384,972
- Issue date Jul 5, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device by forming a film on...
- Patent number 9,384,967
- Issue date Jul 5, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device by forming a film on a...
- Patent number 9,384,970
- Issue date Jul 5, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 9,330,904
- Issue date May 3, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, method of processing...
- Patent number 9,318,316
- Issue date Apr 19, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 9,312,123
- Issue date Apr 12, 2016
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Glass composition for protecting semiconductor junction, method of...
- Patent number 9,236,318
- Issue date Jan 12, 2016
- Shindengen Electric Manufacturing Co., Ltd.
- Koji Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Glass composition for protecting semiconductor junction, method of...
- Patent number 9,099,483
- Issue date Aug 4, 2015
- Shindengen Electric Manufacturing Co., Ltd.
- Koya Muyari
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Nitridation of atomic layer deposited high-k dielectrics using tris...
- Patent number 9,064,694
- Issue date Jun 23, 2015
- Tokyo Electron Limited
- Steven P Consiglio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for fabricating semiconductor device
- Patent number 9,058,984
- Issue date Jun 16, 2015
- SK Hynix Inc.
- Kee-Jeung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for fabricating semiconductor device
- Patent number 8,716,842
- Issue date May 6, 2014
- SK Hynix Inc.
- Kee-Jeung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for manufacturing dielectric films
- Patent number 8,524,617
- Issue date Sep 3, 2013
- Canon Anelva Corporation
- Takashi Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nonvolatile semiconductor memory device with high-K insulating film
- Patent number 8,482,053
- Issue date Jul 9, 2013
- Kabushiki Kaisha Toshiba
- Akira Takashima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EPITAXIAL STRONTIUM TITANATE ON SILICON
- Publication number 20230197443
- Publication date Jun 22, 2023
- Psiquantum, Corp.
- Yong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING SAME
- Publication number 20230118405
- Publication date Apr 20, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Xiang LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GERMANIUM MEDIATED DE-OXIDATION OF SILICON
- Publication number 20220270874
- Publication date Aug 25, 2022
- Psiquantum, Corp.
- Yong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTERNAL STONTIUM TIANATE ON SILICON
- Publication number 20210028009
- Publication date Jan 28, 2021
- PsiQuantum Corp.
- Yong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure and Method for SRAM FinFET Device
- Publication number 20200052119
- Publication date Feb 13, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuo-Cheng Ching
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME
- Publication number 20180277354
- Publication date Sep 27, 2018
- UNITED MICROELECTRONICS CORP.
- Feng-Yi Chang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR FORMING FILM INCLUDING AT LEAST...
- Publication number 20160329208
- Publication date Nov 10, 2016
- Hitachi Kokusai Electric Inc.
- Yushin TAKASAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRUCTURE AND METHOD FOR SRAM FINFET DEVICE
- Publication number 20160079427
- Publication date Mar 17, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuo-Cheng Ching
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GLASS COMPOSITION FOR PROTECTING SEMICONDUCTOR JUNCTION, METHOD OF...
- Publication number 20160002093
- Publication date Jan 7, 2016
- SHINDENGEN ELECTRIC MANUFACTURING CO., LTD
- Koji ITO
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20150214031
- Publication date Jul 30, 2015
- Hitachi Kokusai Electric Inc.
- Yushin TAKASAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RESIN-SEALED SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20140361446
- Publication date Dec 11, 2014
- SHINDENGEEN MANUFACTURING CO., LTD
- Atsushi Ogasawara
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
RESIN-SEALED SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING RESIN...
- Publication number 20140361416
- Publication date Dec 11, 2014
- Shindengen Electric Manufacturing Co., Ltd.
- Atsushi Ogasawara
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
GLASS COMPOSITION FOR PROTECTING SEMICONDUCTOR JUNCTION, METHOD OF...
- Publication number 20140339685
- Publication date Nov 20, 2014
- Koya Muyari
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
- Publication number 20140242772
- Publication date Aug 28, 2014
- SK HYNIX INC.
- Kee-Jeung LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NITRIDATION OF ATOMIC LAYER DEPOSITED HIGH-K DIELECTRICS USING TRIS...
- Publication number 20140017907
- Publication date Jan 16, 2014
- Steven P. Consiglio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
- Publication number 20120146196
- Publication date Jun 14, 2012
- Kee-Jeung LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20120108078
- Publication date May 3, 2012
- Kabushiki Kalsha Toshiba
- Tsunehiro INO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURIN...
- Publication number 20120025297
- Publication date Feb 2, 2012
- Akira TAKASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR MANUFACTURING DIELECTRIC FILMS
- Publication number 20120021612
- Publication date Jan 26, 2012
- Canon ANELVA Corporation
- Takashi Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20100130024
- Publication date May 27, 2010
- Hitachi Kokusai Electric Inc.
- Yushin TAKASAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW K INTERCONNECT DIELECTRIC USING SURFACE TRANSFORMATION
- Publication number 20090256243
- Publication date Oct 15, 2009
- Micron Technology, Inc.
- Joseph E. Geusic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING A GATE INSULATING FILM
- Publication number 20090181549
- Publication date Jul 16, 2009
- Kenji Yoneda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20090114996
- Publication date May 7, 2009
- Seiji Inumiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and method for manufacturing the same
- Publication number 20070252232
- Publication date Nov 1, 2007
- Tsunehiro Ino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FABRICATING A HIGH DIELECTRIC CONSTANT TRANSISTOR GATE US...
- Publication number 20070218623
- Publication date Sep 20, 2007
- APPLIED MATERIALS, INC.
- Thai Cheng Chua
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Glass material for use at high frequencies
- Publication number 20070166520
- Publication date Jul 19, 2007
- Schott AG
- Jurgen Leib
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for producing copy protection for an electronic circuit
- Publication number 20060177963
- Publication date Aug 10, 2006
- Dietrich Mund
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Process for producing a product having a structured surface
- Publication number 20060051584
- Publication date Mar 9, 2006
- Florian Bieck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a component comprising a conductor structure t...
- Publication number 20060012005
- Publication date Jan 19, 2006
- Jurgen Leib
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for the production of structured layers on substrates
- Publication number 20050233503
- Publication date Oct 20, 2005
- Jurgen Leib
- B81 - MICRO-STRUCTURAL TECHNOLOGY

the material containing more than one metal element

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Germanium mediated de-oxidation of silicon

Epitaxial strontium titanate on silicon

Structure and method for SRAM FinFET device

Germanium mediated de-oxidation of silicon

Structure and method for SRAM FinfET device

Substrate processing apparatus for forming film including at least...

Method of manufacturing semiconductor device and glass film forming...

Method for manufacturing semiconductor device

Resin-sealed semiconductor device and method of manufacturing resin...

Semiconductor device and manufacturing method for the same

Method of manufacturing semiconductor device for forming film inclu...

Resin-sealed semiconductor device and method of manufacturing the same

Method of manufacturing semiconductor device by forming a film on a...

Method and apparatus of manufacturing a semiconductor device by for...

Method of manufacturing a semiconductor device by forming a film on...

Method of manufacturing a semiconductor device by forming a film on...

Method of manufacturing semiconductor device by forming a film on a...

Method of manufacturing semiconductor device by forming a film on a...

Method of manufacturing a semiconductor device by forming a film on...

Method of manufacturing semiconductor device by forming a film on a...

Method of manufacturing semiconductor device and substrate processi...

Method of manufacturing semiconductor device, method of processing...

Method of manufacturing semiconductor device and substrate processi...

Glass composition for protecting semiconductor junction, method of...

Glass composition for protecting semiconductor junction, method of...

Nitridation of atomic layer deposited high-k dielectrics using tris...

Method for fabricating semiconductor device

Method for fabricating semiconductor device

Methods for manufacturing dielectric films

Nonvolatile semiconductor memory device with high-K insulating film

Patents Applicationslast 30 patents

EPITAXIAL STRONTIUM TITANATE ON SILICON

SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING SAME

GERMANIUM MEDIATED DE-OXIDATION OF SILICON

EXTERNAL STONTIUM TIANATE ON SILICON

Structure and Method for SRAM FinFET Device

SEMICONDUCTOR STRUCTURE AND METHOD OF FORMING THE SAME

SUBSTRATE PROCESSING APPARATUS FOR FORMING FILM INCLUDING AT LEAST...

STRUCTURE AND METHOD FOR SRAM FINFET DEVICE

GLASS COMPOSITION FOR PROTECTING SEMICONDUCTOR JUNCTION, METHOD OF...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

RESIN-SEALED SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

RESIN-SEALED SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING RESIN...

GLASS COMPOSITION FOR PROTECTING SEMICONDUCTOR JUNCTION, METHOD OF...

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE

NITRIDATION OF ATOMIC LAYER DEPOSITED HIGH-K DIELECTRICS USING TRIS...

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURIN...

METHODS FOR MANUFACTURING DIELECTRIC FILMS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

LOW K INTERCONNECT DIELECTRIC USING SURFACE TRANSFORMATION

METHOD FOR FORMING A GATE INSULATING FILM

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

Semiconductor device and method for manufacturing the same

METHOD OF FABRICATING A HIGH DIELECTRIC CONSTANT TRANSISTOR GATE US...

Glass material for use at high frequencies

Process for producing copy protection for an electronic circuit

Process for producing a product having a structured surface

Method for producing a component comprising a conductor structure t...

Method for the production of structured layers on substrates