the processing being a planarization of conductive layers

Industry

CPC
H01L21/02074

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02074the processing being a planarization of conductive layers

Industries

Patents Grantslast 30 patents

Information Patent Grant
Selective cobalt deposition on copper surfaces
- Patent number 11,959,167
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Sang-Ho Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and structure for semiconductor interconnect
- Patent number 11,961,731
- Issue date Apr 16, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ru-Shang Hsiao
- B08 - CLEANING
Information Patent Grant
Method and apparatus for cleaning process monitoring
- Patent number 11,926,017
- Issue date Mar 12, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Charlie Wang
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Microelectronic devices with isolation trenches in upper portions o...
- Patent number 11,925,037
- Issue date Mar 5, 2024
- Yi Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 11,897,077
- Issue date Feb 13, 2024
- Kioxia Corporation
- Tsutomu Miki
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning compositions and methods of use thereof
- Patent number 11,884,900
- Issue date Jan 30, 2024
- Fujifilm Electronic Materials U.S.A., Inc.
- Zachary L. Schaefer
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Semiconductor device and method
- Patent number 11,854,814
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Lien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface treatment composition, method for producing surface treatme...
- Patent number 11,851,638
- Issue date Dec 26, 2023
- FUJIMI INCORPORATED
- Tsutomu Yoshino
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Compositions and methods for post-CMP cleaning of cobalt substrates
- Patent number 11,845,917
- Issue date Dec 19, 2023
- Entegris, Inc.
- Daniela White
- B08 - CLEANING
Information Patent Grant
In-situ CMP self-assembled monolayer for enhancing metal-dielectric...
- Patent number 11,810,817
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Zhen Yu Guan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface conversion in chemical mechanical polishing
- Patent number 11,804,378
- Issue date Oct 31, 2023
- International Business Machines Corporation
- Raghuveer R Patlolla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device cleaning solution, method of use, and method o...
- Patent number 11,773,353
- Issue date Oct 3, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Pinlei Edmund Chu
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Method for fabricating metal gate devices and resulting structures
- Patent number 11,764,280
- Issue date Sep 19, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Po-Chi Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post-CMP cleaning and apparatus
- Patent number 11,728,157
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fu-Ming Huang
- B08 - CLEANING
Information Patent Grant
Steam-assisted single substrate cleaning process and apparatus
- Patent number 11,728,185
- Issue date Aug 15, 2023
- Applied Materials, Inc.
- Jianshe Tang
- B08 - CLEANING
Information Patent Grant
Semiconductor structure and method for preparing the same
- Patent number 11,728,158
- Issue date Aug 15, 2023
- SJ Semiconductor (Jiangyin) Corporation
- Jiashan Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning system with in-line SPM processing
- Patent number 11,682,567
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Brian J. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for chemical mechanical polishing process
- Patent number 11,682,552
- Issue date Jun 20, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-I Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, substrate...
- Patent number 11,676,827
- Issue date Jun 13, 2023
- Ebara Corporation
- Tomoatsu Ishibashi
- B08 - CLEANING
Information Patent Grant
Method of selective deposition for forming fully self-aligned vias
- Patent number 11,658,068
- Issue date May 23, 2023
- Tokyo Electron Limited
- Kandabara Tapily
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning liquid, cleaning method, and method for producing semicond...
- Patent number 11,597,896
- Issue date Mar 7, 2023
- Mitsubishi Chemical Corporation
- Toshiaki Shibata
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Post chemical mechanical planarization (CMP) cleaning
- Patent number 11,560,533
- Issue date Jan 24, 2023
- VERSUM MATERIALS US, LLC
- Dnyanesh C. Tamboli
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Roller for cleaning wafer and cleaning apparatus having the same
- Patent number 11,551,940
- Issue date Jan 10, 2023
- XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- Yong-Seok Ro
- B08 - CLEANING
Information Patent Grant
Integrated circuit package and method
- Patent number 11,532,533
- Issue date Dec 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chen-Hua Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming an abrasive slurry and methods for chemical- mec...
- Patent number 11,482,450
- Issue date Oct 25, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia Hsuan Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface treatment composition, method for producing surface treatme...
- Patent number 11,466,234
- Issue date Oct 11, 2022
- FUJIMI INCORPORATED
- Tsutomu Yoshino
- B08 - CLEANING
Information Patent Grant
System for cleaning wafer in CMP process of semiconductor manufactu...
- Patent number 11,446,712
- Issue date Sep 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Ying Tien
- B08 - CLEANING
Information Patent Grant
Semiconductor device and method
- Patent number 11,398,385
- Issue date Jul 26, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Lien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective cobalt deposition on copper surfaces
- Patent number 11,384,429
- Issue date Jul 12, 2022
- Applied Materials, Inc.
- Sang-Ho Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electronic apparatus with tiered stacks having conductive structure...
- Patent number 11,362,142
- Issue date Jun 14, 2022
- Micron Technology, Inc.
- Yi Hu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CLEANING COMPOSITIONS AND METHODS OF USE THEREOF
- Publication number 20240117270
- Publication date Apr 11, 2024
- Fujifilm Electronic Materials U.S.A., Inc.
- Zachary L. Schaefer
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
TREATMENT LIQUID, CLEANING METHOD OF SEMICONDUCTOR SUBSTRATE, AND M...
- Publication number 20240117278
- Publication date Apr 11, 2024
- FUJIFILM CORPORATION
- Nobuaki SUGIMURA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20240082881
- Publication date Mar 14, 2024
- Samsung Electronics Co., Ltd.
- Donghoon KWON
- B24 - GRINDING POLISHING
Information Patent Application
CLEANING LIQUID FOR SEMICONDUCTOR SUBSTRATE AND CLEANING METHOD FOR...
- Publication number 20240018442
- Publication date Jan 18, 2024
- FUJIFILM CORPORATION
- Naoko OUCHI
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Method for Fabricating Metal Gate Devices and Resulting Structures
- Publication number 20230395689
- Publication date Dec 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Chi Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ART...
- Publication number 20230386849
- Publication date Nov 30, 2023
- Canon Kabushiki Kaisha
- Niyaz Khusnatdinov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE PRE-CLEANING
- Publication number 20230386822
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Hsiang CHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU CMP SELF-ASSEMBLED MONOLAYER FOR ENHANCING METAL-DIELECTRIC...
- Publication number 20230377959
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Zhen Yu GUAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device Cleaning Solution, Method of Use, and Method o...
- Publication number 20230365903
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pinlei Edmund Chu
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Post-CMP Cleaning and Apparatus
- Publication number 20230352295
- Publication date Nov 2, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fu-Ming Huang
- B08 - CLEANING
Information Patent Application
Semiconductor Devices
- Publication number 20230352308
- Publication date Nov 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Lien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHEMICAL MECHANICAL POLISHING METHOD AND METHOD FOR FABRICATING SEM...
- Publication number 20230352310
- Publication date Nov 2, 2023
- SAMSUNG ELECTRONICS., LTD.
- Yearin Byun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STEAM-ASSISTED SINGLE SUBSTRATE CLEANING PROCESS AND APPARATUS
- Publication number 20230335418
- Publication date Oct 19, 2023
- Applied Materials, Inc.
- Jianshe TANG
- B08 - CLEANING
Information Patent Application
SURFACE TREATMENT COMPOSITION, SURFACE TREATMENT METHOD, AND METHOD...
- Publication number 20230313069
- Publication date Oct 5, 2023
- Fujimi Incorporated
- HIDEYUKI TOKUSHIMA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
MICROELECTRONIC DEVICE CLEANING COMPOSITION
- Publication number 20230295537
- Publication date Sep 21, 2023
- Entegris, Inc.
- Jun Liu
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
CLEANING METHOD WITH IN-LINE SPM PROCESSING
- Publication number 20230290652
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Brian J. Brown
- B08 - CLEANING
Information Patent Application
TREATMENT LIQUID AND SUBSTRATE TREATMENT METHOD
- Publication number 20230287304
- Publication date Sep 14, 2023
- FUJIFILM CORPORATION
- Tomonori TAKAHASHI
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
METHOD AND SYSTEM FOR CHEMICAL MECHANICAL POLISHING PROCESS
- Publication number 20230274929
- Publication date Aug 31, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-I PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING LIQUID AND METHOD FOR CLEANING SUBSTRATE
- Publication number 20230203408
- Publication date Jun 29, 2023
- Tokyo Ohka Kogyo Co., Ltd.
- Yukihisa WADA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Post Chemical Mechanical Planarization (CMP) Cleaning
- Publication number 20230183611
- Publication date Jun 15, 2023
- VERSUM MATERIALS US, LLC
- Dnyanesh C. Tamboli
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
METHOD FOR PRODUCING TREATMENT LIQUID
- Publication number 20230143521
- Publication date May 11, 2023
- FUJIFILM CORPORATION
- Tetsuya Kamimura
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD FOR CLEANING SEMICONDUCTOR DEVICES
- Publication number 20230130419
- Publication date Apr 27, 2023
- ASMPT NEXX, INC.
- William SOLARI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Cleaning Composition for Post Chemical Mechanical Planarization And...
- Publication number 20230106132
- Publication date Apr 6, 2023
- FERRO CORPORATION
- Yihan YANG
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
CLEANING FLUID AND CLEANING METHOD
- Publication number 20230065213
- Publication date Mar 2, 2023
- FUJIFILM CORPORATION
- Tetsuya KAMIMURA
- B24 - GRINDING POLISHING
Information Patent Application
SURFACE TREATMENT COMPOSITION, METHOD FOR PRODUCING SURFACE TREATME...
- Publication number 20230027432
- Publication date Jan 26, 2023
- FUJIMI INCORPORATED
- Tsutomu YOSHINO
- B08 - CLEANING
Information Patent Application
METHOD FOR PROCESSING SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMIN...
- Publication number 20230022780
- Publication date Jan 26, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Runping WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Method
- Publication number 20220359210
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Lien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated Circuit Package and Method
- Publication number 20220359333
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Hua Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING COMPOSITION
- Publication number 20220336210
- Publication date Oct 20, 2022
- Entegris, Inc.
- Jun Liu
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
CLEANING SOLUTION AND CLEANING METHOD
- Publication number 20220325208
- Publication date Oct 13, 2022
- FUJIFILM CORPORATION
- Tetsuya KAMIMURA
- H01 - BASIC ELECTRIC ELEMENTS

the processing being a planarization of conductive layers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Selective cobalt deposition on copper surfaces

Method and structure for semiconductor interconnect

Method and apparatus for cleaning process monitoring

Microelectronic devices with isolation trenches in upper portions o...

Semiconductor manufacturing apparatus

Cleaning compositions and methods of use thereof

Semiconductor device and method

Surface treatment composition, method for producing surface treatme...

Compositions and methods for post-CMP cleaning of cobalt substrates

In-situ CMP self-assembled monolayer for enhancing metal-dielectric...

Surface conversion in chemical mechanical polishing

Semiconductor device cleaning solution, method of use, and method o...

Method for fabricating metal gate devices and resulting structures

Post-CMP cleaning and apparatus

Steam-assisted single substrate cleaning process and apparatus

Semiconductor structure and method for preparing the same

Cleaning system with in-line SPM processing

Apparatus for chemical mechanical polishing process

Substrate cleaning apparatus, substrate cleaning method, substrate...

Method of selective deposition for forming fully self-aligned vias

Cleaning liquid, cleaning method, and method for producing semicond...

Post chemical mechanical planarization (CMP) cleaning

Roller for cleaning wafer and cleaning apparatus having the same

Integrated circuit package and method

Methods of forming an abrasive slurry and methods for chemical- mec...

Surface treatment composition, method for producing surface treatme...

System for cleaning wafer in CMP process of semiconductor manufactu...

Semiconductor device and method

Selective cobalt deposition on copper surfaces

Electronic apparatus with tiered stacks having conductive structure...

Patents Applicationslast 30 patents

CLEANING COMPOSITIONS AND METHODS OF USE THEREOF

TREATMENT LIQUID, CLEANING METHOD OF SEMICONDUCTOR SUBSTRATE, AND M...

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

CLEANING LIQUID FOR SEMICONDUCTOR SUBSTRATE AND CLEANING METHOD FOR...

Method for Fabricating Metal Gate Devices and Resulting Structures

PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANUFACTURING AN ART...

SEMICONDUCTOR DEVICE PRE-CLEANING

IN-SITU CMP SELF-ASSEMBLED MONOLAYER FOR ENHANCING METAL-DIELECTRIC...

Semiconductor Device Cleaning Solution, Method of Use, and Method o...

Post-CMP Cleaning and Apparatus

Semiconductor Devices

CHEMICAL MECHANICAL POLISHING METHOD AND METHOD FOR FABRICATING SEM...

STEAM-ASSISTED SINGLE SUBSTRATE CLEANING PROCESS AND APPARATUS

SURFACE TREATMENT COMPOSITION, SURFACE TREATMENT METHOD, AND METHOD...

MICROELECTRONIC DEVICE CLEANING COMPOSITION

CLEANING METHOD WITH IN-LINE SPM PROCESSING

TREATMENT LIQUID AND SUBSTRATE TREATMENT METHOD

METHOD AND SYSTEM FOR CHEMICAL MECHANICAL POLISHING PROCESS

CLEANING LIQUID AND METHOD FOR CLEANING SUBSTRATE

Post Chemical Mechanical Planarization (CMP) Cleaning

METHOD FOR PRODUCING TREATMENT LIQUID

METHOD FOR CLEANING SEMICONDUCTOR DEVICES

Cleaning Composition for Post Chemical Mechanical Planarization And...

CLEANING FLUID AND CLEANING METHOD

SURFACE TREATMENT COMPOSITION, METHOD FOR PRODUCING SURFACE TREATME...

METHOD FOR PROCESSING SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMIN...

Semiconductor Device and Method

Integrated Circuit Package and Method

CLEANING COMPOSITION

CLEANING SOLUTION AND CLEANING METHOD