the substrate being handled substantially vertically

Industry

CPC
H01L21/67712

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67712the substrate being handled substantially vertically

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate conveying robot and substrate conveying robot system
- Patent number 12,162,145
- Issue date Dec 10, 2024
- Kawasaki Jukogyo Kabushiki Kaisha
- Haruhiko Tan
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer transfer device and wafer transfer method
- Patent number 12,100,606
- Issue date Sep 24, 2024
- SHENYANG KINGSEMI CO., LTD.
- Tianyao Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interlayer transfer apparatus and article transfer system including...
- Patent number 12,068,185
- Issue date Aug 20, 2024
- Samsung Electronics Co., Ltd.
- Young Wook Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier with vertical grid for supporting substrates in coater
- Patent number 12,068,142
- Issue date Aug 20, 2024
- View, Inc.
- Bo Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate carrying apparatus
- Patent number 11,996,310
- Issue date May 28, 2024
- Shibaura Mechatronics Corporation
- Masaaki Furuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of processing substrate, met...
- Patent number 11,996,311
- Issue date May 28, 2024
- Kokusai Electric Corporation
- Hiroshi Ashihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transferring LED
- Patent number 11,978,650
- Issue date May 7, 2024
- LG Display Co., Ltd.
- Seong Kyong Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer mechanism and substrate transferring method
- Patent number 11,978,655
- Issue date May 7, 2024
- Tokyo Electron Limited
- Kousei Ide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer module and method thereof for transferring to-be-tra...
- Patent number 11,972,963
- Issue date Apr 30, 2024
- Shanghai Huali Integrated Circuit Corporation
- Yu Ren
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Vertical feeding and wafer inserting integrated machine
- Patent number 11,915,956
- Issue date Feb 27, 2024
- TIANJIN HUANBO SCIENCE AND TECHNOLOGY CO., LTD
- Lihui Jin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CMP wafer cleaning equipment, wafer transfer robot and wafer flippi...
- Patent number 11,908,720
- Issue date Feb 20, 2024
- HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
- Linghan Shen
- B08 - CLEANING
Information Patent Grant
Transport system
- Patent number 11,894,251
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,869,789
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding hand and substrate conveying apparatus
- Patent number 11,837,485
- Issue date Dec 5, 2023
- Kawasaki Jukogyo Kabushiki Kaisha
- Tetsuya Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for improving transfer efficiency of an automat...
- Patent number 11,804,394
- Issue date Oct 31, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Fu Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer cassette warehouse transportation structure system
- Patent number 11,764,091
- Issue date Sep 19, 2023
- EDDIE AND SONS TECHNOLOGY CO., LTD
- James Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-line coater for vacuum deposition of thin film coatings
- Patent number 11,732,349
- Issue date Aug 22, 2023
- OOO IZOVAK TEHNOLOGII
- Vladimir J. Shiripov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask arrangement for masking a substrate in a processing chamber, a...
- Patent number 11,718,904
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Stefan Bangert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer mechanism and substrate transferring method
- Patent number 11,705,359
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Kousei Ide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid system architecture for thin film deposition
- Patent number 11,694,913
- Issue date Jul 4, 2023
- Intevac, Inc.
- Terry Bluck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier with vertical grid for supporting substrates in coater
- Patent number 11,688,589
- Issue date Jun 27, 2023
- View, Inc.
- Bo Garrett Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,664,254
- Issue date May 30, 2023
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Tower lift
- Patent number 11,591,167
- Issue date Feb 28, 2023
- Semes Co., Ltd.
- Seung Keun Jun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus with erected tube
- Patent number 11,587,812
- Issue date Feb 21, 2023
- Disco Corporation
- Shuzo Mitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceiling conveyance vehicle system and temporary storage method for...
- Patent number 11,515,186
- Issue date Nov 29, 2022
- Murata Machinery, Ltd.
- Yoshiki Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of transferring micro device using micro device transfer head
- Patent number 11,495,485
- Issue date Nov 8, 2022
- Acer Incorporated
- Jui-Chieh Hsiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate accommodating unit and maintenance method for vacuum tran...
- Patent number 11,476,140
- Issue date Oct 18, 2022
- Tokyo Electron Limited
- Takuya Umise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,443,972
- Issue date Sep 13, 2022
- SCREEN Holdings Co., Ltd.
- Ryo Muramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier with vertical grid for supporting substrates in coater
- Patent number 11,424,109
- Issue date Aug 23, 2022
- View, Inc.
- Bo Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Contactless vertical transfer device using linear motor
- Patent number 11,393,707
- Issue date Jul 19, 2022
- Foundation of Soongsil University-Industry Cooperation
- Hyeong Joon Ahn
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FIREPROOF DOOR APPARATUS, FIREPROOF STRUCTURE AND SUBSTRATE TREATIN...
- Publication number 20240392622
- Publication date Nov 28, 2024
- SEMES CO., LTD.
- Min Beom KIM
- B66 - HOISTING LIFTING HAULING
Information Patent Application
APPARATUS FOR TRANSFERRING CARRIERS
- Publication number 20240327136
- Publication date Oct 3, 2024
- Samsung Electronics Co., Ltd.
- Minkyun LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240274455
- Publication date Aug 15, 2024
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD
- Publication number 20240249968
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Kousei IDE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFERRING APPARATUS, AND LIQUID PROCESSING APPARATUS A...
- Publication number 20240222174
- Publication date Jul 4, 2024
- SEMES CO., LTD.
- Seul Gi CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIAGE LIFTING/LOWERING DEVICE
- Publication number 20240182265
- Publication date Jun 6, 2024
- MURATA MACHINERY, LTD.
- Jun Sai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER UNIT AND SUBSTRATE TREATMENT APPARATUS INCLUDING...
- Publication number 20240162070
- Publication date May 16, 2024
- SEMES CO., LTD.
- Nam Ki HONG
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TOWER LIFT
- Publication number 20240158205
- Publication date May 16, 2024
- SEMES CO., LTD.
- Myungjin LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transport Vehicle
- Publication number 20240153805
- Publication date May 9, 2024
- DAIFUKU CO., LTD.
- Yoshinari WADA
- B66 - HOISTING LIFTING HAULING
Information Patent Application
Handling device for transporting interface units for a test device...
- Publication number 20240153804
- Publication date May 9, 2024
- Turbodynamics GmbH
- Stefan Thurmaier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS EQUIPMENT
- Publication number 20240153803
- Publication date May 9, 2024
- Applied Materials, Inc.
- Bhaskar PRASAD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OVERHEAD TRANSPORT VEHICLE
- Publication number 20240128113
- Publication date Apr 18, 2024
- MURATA MACHINERY, LTD.
- Yuji SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MODULE AND SUBSTRATE TRANSFER METHOD
- Publication number 20240112936
- Publication date Apr 4, 2024
- TOKYO ELECTRON LIMITED
- Mitsuyori SUWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240105483
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Ichiro MITSUYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240096673
- Publication date Mar 21, 2024
- SCREEN Holdings Co., Ltd.
- Takashi IZUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240079256
- Publication date Mar 7, 2024
- TOKYO ELECTRON LIMITED
- Tsuyoshi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Article Elevating Device
- Publication number 20240063040
- Publication date Feb 22, 2024
- DAIFUKU CO., LTD.
- Hiroshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OVERHEAD TRANSPORT VEHICLE AND TRANSPORT VEHICLE SYSTEM
- Publication number 20240017973
- Publication date Jan 18, 2024
- MURATA MACHINERY, LTD.
- Makoto Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Article Transport Vehicle
- Publication number 20240014058
- Publication date Jan 11, 2024
- DAIFUKU CO., LTD.
- Yoshinari WADA
- B66 - HOISTING LIFTING HAULING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD...
- Publication number 20240014055
- Publication date Jan 11, 2024
- Kokusai Electric Corporation
- Kazuyoshi YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Systems for Improving Transfer Efficiency of an Automat...
- Publication number 20230369088
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Fu SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSFER DEVICE AND WAFER TRANSFER METHOD
- Publication number 20230343623
- Publication date Oct 26, 2023
- SHENYANG KINGSEMI Co., Ltd.
- Tianyao WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATH SETTING SYSTEM, PATH SETTING METHOD, AND SOFTWARE
- Publication number 20230343624
- Publication date Oct 26, 2023
- TOKYO ELECTRON LIMITED
- Yoshinori IGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CARRIER STORAGE SYSTEM, SEMICONDUCTOR FABRICATION SYS...
- Publication number 20230326777
- Publication date Oct 12, 2023
- Samsung Electronics Co., Ltd.
- Youngwook KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20230298918
- Publication date Sep 21, 2023
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD
- Publication number 20230298927
- Publication date Sep 21, 2023
- TOKYO ELECTRON LIMITED
- Kousei IDE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Article Transport Vehicle
- Publication number 20230278833
- Publication date Sep 7, 2023
- DAIFUKU CO., LTD.
- Tomotaka Kinugawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
- Publication number 20230282458
- Publication date Sep 7, 2023
- VIEW, INC.
- Bo Garrett Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VERTICAL FEEDING AND WAFER INSERTING INTEGRATED MACHINE
- Publication number 20230274961
- Publication date Aug 31, 2023
- TIANJIN HUANBO SCIENCE AND TECHNOLOGY CO., LTD
- Lihui JIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, INSPECTION APPARATUS, AND MA...
- Publication number 20230215770
- Publication date Jul 6, 2023
- Fasford Technology Co., Ltd.
- Hideharu KOBASHI
- H01 - BASIC ELECTRIC ELEMENTS

the substrate being handled substantially vertically

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate conveying robot and substrate conveying robot system

Wafer transfer device and wafer transfer method

Interlayer transfer apparatus and article transfer system including...

Carrier with vertical grid for supporting substrates in coater

Substrate carrying apparatus

Substrate processing apparatus, method of processing substrate, met...

Apparatus for transferring LED

Substrate transfer mechanism and substrate transferring method

Wafer transfer module and method thereof for transferring to-be-tra...

Vertical feeding and wafer inserting integrated machine

CMP wafer cleaning equipment, wafer transfer robot and wafer flippi...

Transport system

Substrate processing apparatus and substrate processing method

Substrate holding hand and substrate conveying apparatus

Methods and systems for improving transfer efficiency of an automat...

Semiconductor wafer cassette warehouse transportation structure system

In-line coater for vacuum deposition of thin film coatings

Mask arrangement for masking a substrate in a processing chamber, a...

Substrate transfer mechanism and substrate transferring method

Hybrid system architecture for thin film deposition

Carrier with vertical grid for supporting substrates in coater

Substrate processing apparatus and substrate processing method

Tower lift

Processing apparatus with erected tube

Ceiling conveyance vehicle system and temporary storage method for...

Method of transferring micro device using micro device transfer head

Substrate accommodating unit and maintenance method for vacuum tran...

Substrate processing apparatus

Carrier with vertical grid for supporting substrates in coater

Contactless vertical transfer device using linear motor

Patents Applicationslast 30 patents

FIREPROOF DOOR APPARATUS, FIREPROOF STRUCTURE AND SUBSTRATE TREATIN...

APPARATUS FOR TRANSFERRING CARRIERS

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD

SUBSTRATE TRANSFERRING APPARATUS, AND LIQUID PROCESSING APPARATUS A...

CARRIAGE LIFTING/LOWERING DEVICE

SUBSTRATE TRANSFER UNIT AND SUBSTRATE TREATMENT APPARATUS INCLUDING...

TOWER LIFT

Transport Vehicle

Handling device for transporting interface units for a test device...

SEMICONDUCTOR PROCESS EQUIPMENT

OVERHEAD TRANSPORT VEHICLE

SUBSTRATE TRANSFER MODULE AND SUBSTRATE TRANSFER METHOD

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Article Elevating Device

OVERHEAD TRANSPORT VEHICLE AND TRANSPORT VEHICLE SYSTEM

Article Transport Vehicle

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, METHOD...

Methods and Systems for Improving Transfer Efficiency of an Automat...

WAFER TRANSFER DEVICE AND WAFER TRANSFER METHOD

PATH SETTING SYSTEM, PATH SETTING METHOD, AND SOFTWARE

SEMICONDUCTOR CARRIER STORAGE SYSTEM, SEMICONDUCTOR FABRICATION SYS...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE TRANSFERRING METHOD

Article Transport Vehicle

CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER

VERTICAL FEEDING AND WAFER INSERTING INTEGRATED MACHINE

SEMICONDUCTOR MANUFACTURING APPARATUS, INSPECTION APPARATUS, AND MA...