the substrate being rotated

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CPC
C23C16/4588

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/4588the substrate being rotated

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for a preheat ring in a semiconductor wafer rea...
- Patent number 12,252,806
- Issue date Mar 18, 2025
- GlobalWafers Co., Ltd.
- Chieh Hu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced chemical vapor deposition coating system
- Patent number 12,129,549
- Issue date Oct 29, 2024
- Benjamin Lawrence
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method of low temperature thin film deposition and in-si...
- Patent number 12,018,374
- Issue date Jun 25, 2024
- DSGI Technologies, Inc.
- Jeffrey Edward Kowalski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic electrical and fluid delivery system with indexing motion f...
- Patent number 11,950,384
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Akshay Gunaji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,935,762
- Issue date Mar 19, 2024
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,913,115
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Yoshitaka Miura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,898,247
- Issue date Feb 13, 2024
- Kokusai Electric Corporation
- Hidenari Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a film on a substrate by chemical vapor deposition
- Patent number 11,885,022
- Issue date Jan 30, 2024
- Shin-Etsu Chemical Co., Ltd.
- Chikara Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Voltage breakdown uniformity in piezoelectric structure for piezoel...
- Patent number 11,832,520
- Issue date Nov 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Ming Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-line coater for vacuum deposition of thin film coatings
- Patent number 11,732,349
- Issue date Aug 22, 2023
- OOO IZOVAK TEHNOLOGII
- Vladimir J. Shiripov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holding mechanism and substrate processing apparatus
- Patent number 11,664,201
- Issue date May 30, 2023
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating apparatus and coating method
- Patent number 11,646,182
- Issue date May 9, 2023
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic electrical and fluid delivery system with indexing motion f...
- Patent number 11,602,064
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Akshay Gunaji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,508,571
- Issue date Nov 22, 2022
- Tokyo Electron Limited
- Jun Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming films on substrates
- Patent number 11,505,863
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electric discharge generator and power supply device of electric di...
- Patent number 11,466,366
- Issue date Oct 11, 2022
- Toshiba Mitsubishi-Electric Industrial Systems Corporation
- Yoichiro Tabata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,450,536
- Issue date Sep 20, 2022
- Kokusai Electric Corporation
- Daigi Kamimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotation angle detection apparatus and rotation angle detection met...
- Patent number 11,422,008
- Issue date Aug 23, 2022
- Tokyo Electron Limited
- Takeshi Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fixture for coating of double-ended tools
- Patent number 11,225,717
- Issue date Jan 18, 2022
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Phillip Joel Laforce
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Swirled flow chemical vapor deposition
- Patent number 11,008,652
- Issue date May 18, 2021
- Rolls-Royce Corporation
- Chong M. Cha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer boat cooldown device
- Patent number 10,858,738
- Issue date Dec 8, 2020
- ASM International N.V.
- Chris G. M. de Ridder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for vapor deposition of substrates with circular...
- Patent number 10,808,319
- Issue date Oct 20, 2020
- QUANTUM INNOVATIONS, INC.
- Norman L. Kester
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus, susceptor, and film forming method
- Patent number 10,584,417
- Issue date Mar 10, 2020
- NuFlare Technology, Inc.
- Hideki Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Periphery purge shutter and flow control systems and methods
- Patent number 10,570,510
- Issue date Feb 25, 2020
- Veeco Instruments Inc.
- Bojan Mitrovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer chuck with aerodynamic design for turbulence reduction
- Patent number 10,563,298
- Issue date Feb 18, 2020
- Novellus Systems, Inc.
- Craig P. Stephens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma polymerization coating apparatus
- Patent number 10,424,465
- Issue date Sep 24, 2019
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for deposition of integrated computational elemen...
- Patent number 10,358,714
- Issue date Jul 23, 2019
- Halliburton Energy Services, Inc.
- David L. Perkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Swirled flow chemical vapor deposition
- Patent number 10,227,696
- Issue date Mar 12, 2019
- Rolls-Royce Corporation
- Chong M. Cha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Variable gap hard stop design
- Patent number 10,087,525
- Issue date Oct 2, 2018
- ASM IP Holding B.V.
- Michael Schmotzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for dual speed spin chuck
- Patent number 10,022,745
- Issue date Jul 17, 2018
- VEECO PRECISION SURFACE PROCESSING LLC
- William Gilbert Breingan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Plasma-Enhanced Chemical Vapor Deposition Coating System
- Publication number 20250043426
- Publication date Feb 6, 2025
- HZO, Inc.
- Daniel Pulsipher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING METHOD
- Publication number 20240420914
- Publication date Dec 19, 2024
- Jiangsu Favored Nanotechnology Co., Ltd.
- Jian ZONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING APPARATUS, FILM-FORMING METHOD, GALLIUM OXIDE FILM AND...
- Publication number 20240229236
- Publication date Jul 11, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takahiro SAKATSUME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS, FILM-FORMING METHOD, GALLIUM OXIDE FILM AND...
- Publication number 20240133029
- Publication date Apr 25, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takahiro SAKATSUME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VOLTAGE BREAKDOWN UNIFORMITY IN PIEZOELECTRIC STRUCTURE FOR PIEZOEL...
- Publication number 20240023445
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ming Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AN ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD
- Publication number 20230407474
- Publication date Dec 21, 2023
- BENEQ OY
- Mika Jauhiainen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR MANUFACTURING A SEMICONDUCTOR WAFER USING A PREHEAT RIN...
- Publication number 20230243065
- Publication date Aug 3, 2023
- GLOBALWAFERS CO., LTD.
- Chieh Hu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20230193465
- Publication date Jun 22, 2023
- Kokusai Electric Corporation
- Hideto TATENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE HOLDER, AND METHOD OF MAN...
- Publication number 20230187188
- Publication date Jun 15, 2023
- Kokusai Electric Corporation
- Tsuyoshi TAKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC ELECTRICAL AND FLUID DELIVERY SYSTEM WITH INDEXING MOTION F...
- Publication number 20230175131
- Publication date Jun 8, 2023
- Applied Materials, Inc.
- Akshay Gunaji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20230095537
- Publication date Mar 30, 2023
- Kokusai Electric Corporation
- Ryosuke TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
- Publication number 20230049118
- Publication date Feb 16, 2023
- Jusung Engineering Co., Ltd.
- InSeo YOO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING FILMS ON SUBSTRATES
- Publication number 20230042777
- Publication date Feb 9, 2023
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20220392783
- Publication date Dec 8, 2022
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VOLTAGE BREAKDOWN UNIFORMITY IN PIEZOELECTRIC STRUCTURE FOR PIEZOEL...
- Publication number 20220344575
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Chih-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION COATING SYSTEM
- Publication number 20220275509
- Publication date Sep 1, 2022
- HZO, Inc.
- Benjamin Lawrence
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR A PREHEAT RING IN A SEMICONDUCTOR WAFER REA...
- Publication number 20220205134
- Publication date Jun 30, 2022
- GLOBALWAFERS CO., LTD.
- Chieh Hu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD OF FORMING FILM
- Publication number 20220170153
- Publication date Jun 2, 2022
- Shin-Etsu Chemical Co., Ltd.
- Chikara Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dynamic Electrical and Fluid Delivery System with Indexing Motion f...
- Publication number 20220071037
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Akshay Gunaji
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20210305067
- Publication date Sep 30, 2021
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE HOLDING MECHANISM AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210249235
- Publication date Aug 12, 2021
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR AND CHEMICAL VAPOR DEPOSITION APPARATUS
- Publication number 20210217648
- Publication date Jul 15, 2021
- SHOWA DENKO K.K.
- Jia YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCEDURE FOR COATING COMPONENT SURFACES UNDER VACUUM AND THE VACUU...
- Publication number 20210207263
- Publication date Jul 8, 2021
- HELLA GmbH & Co. KGaA
- Ralf Rochotzki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20210207268
- Publication date Jul 8, 2021
- Kokusai Electric Corporation
- Hidenari YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20210057207
- Publication date Feb 25, 2021
- TOKYO ELECTRON LIMITED
- Jun OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210017646
- Publication date Jan 21, 2021
- TOKYO ELECTRON LIMITED
- Yoshitaka MIURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FORMING FILMS ON SUBSTRATES
- Publication number 20200378000
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Alexander N. Lerner
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FIXTURE FOR COATING OF DOUBLE-ENDED TOOLS
- Publication number 20200308699
- Publication date Oct 1, 2020
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Phillip Joel LAFORCE
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Rotation Angle Detection Apparatus and Rotation Angle Detection Met...
- Publication number 20200116528
- Publication date Apr 16, 2020
- TOKYO ELECTRON LIMITED
- Takeshi KOBAYASHI
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Information Patent Application
Methods Of Operating A Spatial Deposition Tool
- Publication number 20200090978
- Publication date Mar 19, 2020
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

the substrate being rotated

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Systems and methods for a preheat ring in a semiconductor wafer rea...

Plasma-enhanced chemical vapor deposition coating system

System and method of low temperature thin film deposition and in-si...

Dynamic electrical and fluid delivery system with indexing motion f...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus, method of manufacturing semiconduct...

Method of forming a film on a substrate by chemical vapor deposition

Voltage breakdown uniformity in piezoelectric structure for piezoel...

In-line coater for vacuum deposition of thin film coatings

Substrate holding mechanism and substrate processing apparatus

Coating apparatus and coating method

Dynamic electrical and fluid delivery system with indexing motion f...

Film forming method and film forming apparatus

Methods for forming films on substrates

Electric discharge generator and power supply device of electric di...

Substrate processing apparatus and method of manufacturing semicond...

Rotation angle detection apparatus and rotation angle detection met...

Fixture for coating of double-ended tools

Swirled flow chemical vapor deposition

Wafer boat cooldown device

System and method for vapor deposition of substrates with circular...

Film forming apparatus, susceptor, and film forming method

Periphery purge shutter and flow control systems and methods

Wafer chuck with aerodynamic design for turbulence reduction

Plasma polymerization coating apparatus

System and method for deposition of integrated computational elemen...

Swirled flow chemical vapor deposition

Variable gap hard stop design

Apparatus for dual speed spin chuck

Patents Applicationslast 30 patents

Plasma-Enhanced Chemical Vapor Deposition Coating System

COATING METHOD

FILM-FORMING APPARATUS, FILM-FORMING METHOD, GALLIUM OXIDE FILM AND...

FILM-FORMING APPARATUS, FILM-FORMING METHOD, GALLIUM OXIDE FILM AND...

VOLTAGE BREAKDOWN UNIFORMITY IN PIEZOELECTRIC STRUCTURE FOR PIEZOEL...

AN ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD

METHODS FOR MANUFACTURING A SEMICONDUCTOR WAFER USING A PREHEAT RIN...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE HOLDER, AND METHOD OF MAN...

DYNAMIC ELECTRICAL AND FLUID DELIVERY SYSTEM WITH INDEXING MOTION F...

SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING...

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

METHODS FOR FORMING FILMS ON SUBSTRATES

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

VOLTAGE BREAKDOWN UNIFORMITY IN PIEZOELECTRIC STRUCTURE FOR PIEZOEL...

PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION COATING SYSTEM

SYSTEMS AND METHODS FOR A PREHEAT RING IN A SEMICONDUCTOR WAFER REA...

CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD OF FORMING FILM

Dynamic Electrical and Fluid Delivery System with Indexing Motion f...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE HOLDING MECHANISM AND SUBSTRATE PROCESSING APPARATUS

SUSCEPTOR AND CHEMICAL VAPOR DEPOSITION APPARATUS

PROCEDURE FOR COATING COMPONENT SURFACES UNDER VACUUM AND THE VACUU...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

FILM FORMING METHOD AND FILM FORMING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHODS AND SYSTEMS FOR FORMING FILMS ON SUBSTRATES

FIXTURE FOR COATING OF DOUBLE-ENDED TOOLS

Rotation Angle Detection Apparatus and Rotation Angle Detection Met...

Methods Of Operating A Spatial Deposition Tool