the workpieces being stored in a carrier, involving loading and unloading

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H01L21/6779

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/6779the workpieces being stored in a carrier, involving loading and unloading

Industries

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Patents Grantslast 30 patents

Information Patent Grant
System with substrate carrier deterioration detection and repair
- Patent number 12,162,134
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jen-Ti Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Device for self-assembling semiconductor light-emitting diodes
- Patent number 12,159,800
- Issue date Dec 3, 2024
- LG Electronics Inc.
- Inbum Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus including bonding head
- Patent number 12,136,563
- Issue date Nov 5, 2024
- Samsung Electronics Co., Ltd.
- Mingu Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing substrate, substrate processing apparatus, met...
- Patent number 11,841,343
- Issue date Dec 12, 2023
- Kokusai Electric Corporation
- Teruo Yoshino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transport system
- Patent number 11,710,652
- Issue date Jul 25, 2023
- Sinfonia Technology Co., Ltd.
- Toshihiro Kawai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotational indexer with additional rotational axes
- Patent number 11,699,610
- Issue date Jul 11, 2023
- Lam Research Corporation
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for handling diced wafers of integrated circuits
- Patent number 11,658,056
- Issue date May 23, 2023
- NXP B.V.
- Antonius Hendrikus Jozef Kamphuis
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Substrate carrier deterioration detection and repair
- Patent number 11,584,019
- Issue date Feb 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jen-Ti Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Rotational indexer with additional rotational axes
- Patent number 11,482,436
- Issue date Oct 25, 2022
- Lam Research Corporation
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quick release purge valve and substrate container using same
- Patent number 11,306,841
- Issue date Apr 19, 2022
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate loading system
- Patent number 11,195,739
- Issue date Dec 7, 2021
- Molecular Imprints, Inc.
- Roy Matthew Patterson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chip bonding device
- Patent number 11,081,380
- Issue date Aug 3, 2021
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Feibiao Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chuck for clamping workpieces, measuring devices and method...
- Patent number 11,062,934
- Issue date Jul 13, 2021
- Helmut Fischer GmbH Institut für Elektronik und Messtechnik
- Werner Volz
- G01 - MEASURING TESTING
Information Patent Grant
Wafer handling equipment and method thereof
- Patent number 11,031,266
- Issue date Jun 8, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Hung Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage apparatus and storage method
- Patent number 10,882,697
- Issue date Jan 5, 2021
- Murata Machinery, Ltd.
- Masanao Murata
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Quick release purge valve and substrate container using same
- Patent number 10,876,647
- Issue date Dec 29, 2020
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Carrier substrate
- Patent number 10,820,426
- Issue date Oct 27, 2020
- Unimicron Technology Corp.
- Chun-Ting Lin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Micro device transferring method and micro device transferring appa...
- Patent number 10,714,369
- Issue date Jul 14, 2020
- KAISTAR Lighting (Xiamen) Co., Ltd
- Steve Mengyuan Hong
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Vacuum chuck for clamping workpieces, measuring devices and method...
- Patent number 10,707,112
- Issue date Jul 7, 2020
- Helmut Fischer GmbH Institut für Elektronik und Messtechnik
- Werner Volz
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Teaching jig, substrate processing apparatus, and teaching method
- Patent number 10,535,543
- Issue date Jan 14, 2020
- Kokusai Electric Corporation
- Akihito Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for transferring a substrate
- Patent number 10,529,610
- Issue date Jan 7, 2020
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Xiao Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate loading system
- Patent number 10,475,685
- Issue date Nov 12, 2019
- Molecular Imprints, Inc.
- Roy Matthew Patterson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exchange and flip chamber design for heterojunction solar cell form...
- Patent number 10,453,728
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Kyung-Tae Kim
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Substrate arrangement apparatus and substrate arrangement method
- Patent number 10,395,962
- Issue date Aug 27, 2019
- SCREEN Holdings Co., Ltd.
- Yukiteru Miyamoto
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Transport container and transfer method for stored object
- Patent number 10,304,712
- Issue date May 28, 2019
- Murata Machinery, Ltd.
- Yasuhisa Ito
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate gripping hand and substrate transfer apparatus
- Patent number 10,283,395
- Issue date May 7, 2019
- Kawasaki Jukogyo Kabushiki Kaisha
- Takayuki Fukushima
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Wafer cassette and placement method thereof
- Patent number 10,147,626
- Issue date Dec 4, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- Si Jun Nian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 10,115,588
- Issue date Oct 30, 2018
- SCREEN Holdings Co., Ltd.
- Koji Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotational indexer with additional rotational axes
- Patent number 10,109,517
- Issue date Oct 23, 2018
- Lam Research Corporation
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Table device and conveyance device
- Patent number 9,933,108
- Issue date Apr 3, 2018
- NSK Ltd.
- Toshinori Satou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
WAFER PICKING AND PLACING APPARATUS
- Publication number 20240186165
- Publication date Jun 6, 2024
- HERMES-EPITEK CORPORATION
- Cheng-Huang Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIAGE SYSTEM CONTROL METHOD AND CARRIAGE SYSTEM CONTROL APPARATUS
- Publication number 20240178028
- Publication date May 30, 2024
- SEMES CO., LTD.
- Kisub YOON
- G08 - SIGNALLING
Information Patent Application
Automatic Alignment Of Overhead Transport Vehicles To Load Ports Of...
- Publication number 20240096676
- Publication date Mar 21, 2024
- Skylla Technologies, Inc.
- Kota Weaver
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20240014063
- Publication date Jan 11, 2024
- InnoLux Corporation
- Kai Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20230420280
- Publication date Dec 28, 2023
- SCREEN Holdings Co., Ltd.
- Tadashi MAEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC COMPONENT TRANSFER BY LEVITATION
- Publication number 20230402302
- Publication date Dec 14, 2023
- NEXPERIA B.V.
- Joep Stokkermans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT AND METHOD OF MOVING STAGE OF LOAD PORT
- Publication number 20230395416
- Publication date Dec 7, 2023
- SINFONIA TECHNOLOGY CO., LTD.
- Tatsuru Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
- Publication number 20230374663
- Publication date Nov 23, 2023
- JUSUNG ENGINEERING CO., LTD.
- Jong Sik KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOZZLE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20230207337
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Jae Youl KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20230197475
- Publication date Jun 22, 2023
- TOKYO ELECTRON LIMITED
- Teruhiko KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTATIONAL INDEXER WITH ADDITIONAL ROTATIONAL AXES
- Publication number 20230063281
- Publication date Mar 2, 2023
- LAM RESEARCH CORPORATION
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT SYSTEM
- Publication number 20220336245
- Publication date Oct 20, 2022
- SINFONIA TECHNOLOGY CO., LTD.
- Toshihiro Kawai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING BONDING HEAD
- Publication number 20220102185
- Publication date Mar 31, 2022
- Samsung Electronics Co., Ltd.
- Mingu Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ALIGNING MICRO LIGHT-EMITTING DIODES
- Publication number 20210398837
- Publication date Dec 23, 2021
- Innostar Service, Inc.
- Meng-Chih WU
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
ROTATIONAL INDEXER WITH ADDITIONAL ROTATIONAL AXES
- Publication number 20210118715
- Publication date Apr 22, 2021
- LAM RESEARCH CORPORATION
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR SELF-ASSEMBLING SEMICONDUCTOR LIGHT-EMITTING DIODES
- Publication number 20210090925
- Publication date Mar 25, 2021
- LG ELECTRONICS INC.
- Inbum YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
QUICK RELEASE PURGE VALVE AND SUBSTRATE CONTAINER USING SAME
- Publication number 20210080020
- Publication date Mar 18, 2021
- GUDENG PRECISION INDUSTRIAL CO., LTD.
- MING-CHIEN CHIU
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
VACUUM CHUCK FOR CLAMPING WORKPIECES, MEASURING DEVICES AND METHOD...
- Publication number 20200312701
- Publication date Oct 1, 2020
- Helmut Fischer GmbH Institut fur Elektronik und Messtechnik
- Werner Volz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOT Deform Lead-retract Removal Track
- Publication number 20200251364
- Publication date Aug 6, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Sunday Hirro Rey
- B07 - SEPARATING SOLIDS FROM SOLIDS SORTING
Information Patent Application
SUBSTRATE LOADING SYSTEM
- Publication number 20200098596
- Publication date Mar 26, 2020
- Molecular Imprints, Inc.
- Roy Matthew Patterson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WAFER HANDLING EQUIPMENT AND METHOD THEREOF
- Publication number 20200020558
- Publication date Jan 16, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Hung LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICRO DEVICE TRANSFERRING METHOD AND MICRO DEVICE TRANSFERRING APPA...
- Publication number 20190393066
- Publication date Dec 26, 2019
- KAISTAR Lighting (Xiamen) Co., Ltd
- Steve Mengyuan Hong
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
CHIP BONDING DEVICE
- Publication number 20190378741
- Publication date Dec 12, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Feibiao CHEN
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
A PROCESSING APPARATUS AND A METHOD FOR CORRECTING A PARAMETER VARI...
- Publication number 20190311921
- Publication date Oct 10, 2019
- ASML NETHERLANDS B.V.
- Everhardus Cornelis MOS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE INVERTING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SUB...
- Publication number 20190096729
- Publication date Mar 28, 2019
- SCREEN Holdings Co., Ltd.
- Ryo MURAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE GRIPPING HAND AND SUBSTRATE TRANSFER APPARATUS
- Publication number 20190067075
- Publication date Feb 28, 2019
- KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Takayuki FUKUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR TRANSFERRING A SUBSTRATE
- Publication number 20180247840
- Publication date Aug 30, 2018
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO.,LTD.
- Xiao LIANG
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
EXCHANGE AND FLIP CHAMBER DESIGN FOR HETEROJUNCTION SOLAR CELL FORM...
- Publication number 20180144966
- Publication date May 24, 2018
- Applied Materials, Inc.
- Kyung-Tae KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LOADING SYSTEM
- Publication number 20180122657
- Publication date May 3, 2018
- Molecular Imprints, Inc.
- Roy Matthew Patterson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE CHIP, ACCOMMODATING TRAY, AND METHOD OF ACCOMMODATING DEVICE...
- Publication number 20180108583
- Publication date Apr 19, 2018
- Disco Corporation
- Koichi Kondo
- H01 - BASIC ELECTRIC ELEMENTS

the workpieces being stored in a carrier, involving loading and unloading

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System with substrate carrier deterioration detection and repair

Device for self-assembling semiconductor light-emitting diodes

Semiconductor manufacturing apparatus including bonding head

Method of processing substrate, substrate processing apparatus, met...

Transport system

Rotational indexer with additional rotational axes

Technique for handling diced wafers of integrated circuits

Substrate carrier deterioration detection and repair

Rotational indexer with additional rotational axes

Quick release purge valve and substrate container using same

Substrate loading system

Chip bonding device

Vacuum chuck for clamping workpieces, measuring devices and method...

Wafer handling equipment and method thereof

Storage apparatus and storage method

Quick release purge valve and substrate container using same

Carrier substrate

Micro device transferring method and micro device transferring appa...

Vacuum chuck for clamping workpieces, measuring devices and method...

Teaching jig, substrate processing apparatus, and teaching method

Apparatus and method for transferring a substrate

Substrate loading system

Exchange and flip chamber design for heterojunction solar cell form...

Substrate arrangement apparatus and substrate arrangement method

Transport container and transfer method for stored object

Substrate gripping hand and substrate transfer apparatus

Wafer cassette and placement method thereof

Substrate treating apparatus and substrate treating method

Rotational indexer with additional rotational axes

Table device and conveyance device

Patents Applicationslast 30 patents

WAFER PICKING AND PLACING APPARATUS

CARRIAGE SYSTEM CONTROL METHOD AND CARRIAGE SYSTEM CONTROL APPARATUS

Automatic Alignment Of Overhead Transport Vehicles To Load Ports Of...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

SUBSTRATE TREATING APPARATUS

ELECTRONIC COMPONENT TRANSFER BY LEVITATION

LOAD PORT AND METHOD OF MOVING STAGE OF LOAD PORT

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

NOZZLE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

ROTATIONAL INDEXER WITH ADDITIONAL ROTATIONAL AXES

TRANSPORT SYSTEM

SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING BONDING HEAD

SYSTEM AND METHOD FOR ALIGNING MICRO LIGHT-EMITTING DIODES

ROTATIONAL INDEXER WITH ADDITIONAL ROTATIONAL AXES

DEVICE FOR SELF-ASSEMBLING SEMICONDUCTOR LIGHT-EMITTING DIODES

QUICK RELEASE PURGE VALVE AND SUBSTRATE CONTAINER USING SAME

VACUUM CHUCK FOR CLAMPING WORKPIECES, MEASURING DEVICES AND METHOD...

SOT Deform Lead-retract Removal Track

SUBSTRATE LOADING SYSTEM

WAFER HANDLING EQUIPMENT AND METHOD THEREOF

MICRO DEVICE TRANSFERRING METHOD AND MICRO DEVICE TRANSFERRING APPA...

CHIP BONDING DEVICE

A PROCESSING APPARATUS AND A METHOD FOR CORRECTING A PARAMETER VARI...

SUBSTRATE INVERTING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND SUB...

SUBSTRATE GRIPPING HAND AND SUBSTRATE TRANSFER APPARATUS

APPARATUS AND METHOD FOR TRANSFERRING A SUBSTRATE

EXCHANGE AND FLIP CHAMBER DESIGN FOR HETEROJUNCTION SOLAR CELL FORM...

SUBSTRATE LOADING SYSTEM

DEVICE CHIP, ACCOMMODATING TRAY, AND METHOD OF ACCOMMODATING DEVICE...