Membership
Tour
Register
Log in
to change their surface-physical characteristics or shape
Follow
Industry
CPC
H01L21/461
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/461
to change their surface-physical characteristics or shape
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Laser devices using a semipolar plane
Patent number
11,749,969
Issue date
Sep 5, 2023
KYOCERA SLD Laser, Inc.
James W. Raring
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor wafer with low defect count and method for manufactur...
Patent number
11,610,808
Issue date
Mar 21, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Yu-Hung Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
FETs and methods of forming FETs
Patent number
11,600,715
Issue date
Mar 7, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Tzu-Ching Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Using absolute Z-height values for synergy between tools
Patent number
11,600,497
Issue date
Mar 7, 2023
KLA Corporation
Sandeep Madhogarhia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,594,424
Issue date
Feb 28, 2023
Tokyo Electron Limited
Takahiro Shiozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,532,487
Issue date
Dec 20, 2022
Tokyo Electron Limited
Akihiro Kubo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cut first self-aligned litho-etch patterning
Patent number
11,521,857
Issue date
Dec 6, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Kuan-Wei Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser devices using a semipolar plane
Patent number
11,387,630
Issue date
Jul 12, 2022
KYOCERA SLD Laser, Inc.
James W. Raring
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Devices having a semiconductor material that is semimetal in bulk a...
Patent number
11,302,804
Issue date
Apr 12, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Jean-Pierre Colinge
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Use of a chemical mechanical polishing (CMP) composition for polish...
Patent number
11,286,402
Issue date
Mar 29, 2022
BASF SE
Robert Reichardt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device including SGT
Patent number
11,282,958
Issue date
Mar 22, 2022
Unisantis Electronics Singapore Pte. Ltd.
Fujio Masuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing apparatus and semiconductor manufacturi...
Patent number
11,227,762
Issue date
Jan 18, 2022
Mitsubishi Electric Corporation
Hiroshi Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing a pillar-shaped semiconductor device
Patent number
11,211,488
Issue date
Dec 28, 2021
Unisantis Electronics Singapore Pte. Ltd.
Fujio Masuoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
FinFET having a non-faceted top surface portion for a source/drain...
Patent number
11,205,713
Issue date
Dec 21, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Tzu-Ching Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck optimized for refurbishment
Patent number
11,179,965
Issue date
Nov 23, 2021
Applied Materials, Inc.
Vijay D. Parkhe
B44 - DECORATIVE ARTS
Information
Patent Grant
Chemical-mechanical polishing composition comprising benzotriazole...
Patent number
11,168,239
Issue date
Nov 9, 2021
BASF SE
Robert Reichardt
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Metal analyzing plasma CNC cutting machine and associated methods
Patent number
11,065,709
Issue date
Jul 20, 2021
Matthew Fagan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
10,964,801
Issue date
Mar 30, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Sheng Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Use of a chemical mechanical polishing (CMP) composition for polish...
Patent number
10,899,945
Issue date
Jan 26, 2021
BASF SE
Robert Reichardt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Composite particles, method of refining and use thereof
Patent number
10,894,906
Issue date
Jan 19, 2021
VERSUM MATERIALS US, LLC
Hongjun Zhou
B24 - GRINDING POLISHING
Information
Patent Grant
High performance solar cells, arrays and manufacturing processes th...
Patent number
10,892,372
Issue date
Jan 12, 2021
mPower Technology, Inc.
Murat Okandan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Transistor
Patent number
10,879,362
Issue date
Dec 29, 2020
E Ink Holdings Inc.
Hsiao-Wen Zan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Laser devices using a semipolar plane
Patent number
10,879,674
Issue date
Dec 29, 2020
Soraa Laser Diode, Inc.
James W. Raring
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for supporting a semiconductor wafer and method of vibrat...
Patent number
10,871,720
Issue date
Dec 22, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Astha Sharma
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing method, polishing apparatus, and substrate processing system
Patent number
10,854,473
Issue date
Dec 1, 2020
Ebara Corporation
Yu Ishii
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Devices having a semiconductor material that is semimetal in bulk a...
Patent number
10,818,780
Issue date
Oct 27, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Jean-Pierre Colinge
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical mechanical polishing slurry composition for polishing poly...
Patent number
10,767,081
Issue date
Sep 8, 2020
Kyung Il Park
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Semiconductor device and method for manufacturing thereof
Patent number
10,699,904
Issue date
Jun 30, 2020
Semiconductor Energy Laboratory Co., Ltd.
Yuta Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal analyzing plasma CNC cutting machine and associated methods
Patent number
10,668,554
Issue date
Jun 2, 2020
Matthew Fagan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Chemical-mechanical polishing composition comprising benzotriazole...
Patent number
10,647,900
Issue date
May 12, 2020
BASF SE
Robert Reichardt
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, AND WATERPROOFING DEVICE FOR ACOUST...
Publication number
20230268194
Publication date
Aug 24, 2023
EBARA CORPORATION
Hiroaki NISHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FETS AND METHODS OF FORMING FETS
Publication number
20230215935
Publication date
Jul 6, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Tzu-Ching Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE
Publication number
20220416114
Publication date
Dec 29, 2022
ENKRIS SEMICONDUCTOR, INC.
Kai Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Devices Having a Semiconductor Material That Is Semimetal in Bulk a...
Publication number
20220238704
Publication date
Jul 28, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Jean-Pierre Colinge
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING SEMICONDUCTOR WAFERS USING CAUSAL MODELS
Publication number
20220146991
Publication date
May 12, 2022
Brian E. Brooks
B24 - GRINDING POLISHING
Information
Patent Application
METHOD AND DEVICE OF CHEMICAL MECHANICAL POLISHING
Publication number
20220097199
Publication date
Mar 31, 2022
ZING SEMICONDUCTOR CORPORATION
Youhe SHA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING SOLUTION, AND USING THE SAME, METHOD FOR MANUFAC...
Publication number
20220059344
Publication date
Feb 24, 2022
Merck Patent GmbH
Takafumi KINUTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20210249277
Publication date
Aug 12, 2021
TOKYO ELECTRON LIMITED
Takahiro SHIOZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
USE OF A CHEMICAL MECHANICAL POLISHING (CMP) COMPOSITION FOR POLISH...
Publication number
20210102093
Publication date
Apr 8, 2021
BASF SE
Robert REICHARDT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL ANALYZING PLASMA CNC CUTTING MACHINE AND ASSOCIATED METHODS
Publication number
20210046576
Publication date
Feb 18, 2021
Matthew Fagan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Devices Having a Semiconductor Material That Is Semimetal in Bulk a...
Publication number
20210043756
Publication date
Feb 11, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Jean-Pierre Colinge
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20200365417
Publication date
Nov 19, 2020
TOKYO ELECTRON LIMITED
Akihiro Kubo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
USING ABSOLUTE Z-HEIGHT VALUES FOR SYNERGY BETWEEN TOOLS
Publication number
20200321221
Publication date
Oct 8, 2020
KLA Corporation
Sandeep Madhogarhia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHEMICAL-MECHANICAL POLISHING COMPOSITION COMPRISING BENZOTRIAZOLE...
Publication number
20200255713
Publication date
Aug 13, 2020
BASF SE
Robert REICHARDT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE INCLUDING SGT
Publication number
20200227553
Publication date
Jul 16, 2020
Unisantis Electronics Singapore PTE LTD.
Fujio MASUOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING A PILLAR-SHAPED SEMICONDUCTOR DEVICE
Publication number
20200119193
Publication date
Apr 16, 2020
Unisantis Electronics Singapore PTE LTD.
Fujio MASUOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FETS and Methods of Forming FETS
Publication number
20200052098
Publication date
Feb 13, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Tzu-Ching Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Device and Manufacturing Method Thereof
Publication number
20200027963
Publication date
Jan 23, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Sheng Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Devices Having a Semiconductor Material That Is Semimetal in Bulk a...
Publication number
20200006535
Publication date
Jan 2, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Jean-Pierre Colinge
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Composite Particles, Method of Refining And Use Thereof
Publication number
20190359868
Publication date
Nov 28, 2019
VERSUM MATERIALS US, LLC
Hongjun Zhou
B24 - GRINDING POLISHING
Information
Patent Application
METAL ANALYZING PLASMA CNC CUTTING MACHINE AND ASSOCIATED METHODS
Publication number
20190351503
Publication date
Nov 21, 2019
Matthew Fagan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
FETs and Methods of Forming FETs
Publication number
20190109217
Publication date
Apr 11, 2019
Taiwan Semiconductor Manufacturing Company, Ltd.
Tzu-Ching Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CUT FIRST SELF-ALIGNED LITHO-ETCH PATTERNING
Publication number
20190051523
Publication date
Feb 14, 2019
Taiwan Semiconductor Manufacturing Co., LTD
Kuan-Wei Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK OPTIMIZED FOR REFURBISHMENT
Publication number
20180319205
Publication date
Nov 8, 2018
Applied Materials, Inc.
Vijay D. Parkhe
B44 - DECORATIVE ARTS
Information
Patent Application
METHOD FOR PRODUCING AN OPTOELECTRONIC SEMICONDUCTOR COMPONENT, AND...
Publication number
20180294378
Publication date
Oct 11, 2018
Osram Opto Semiconductors GmbH
Isabel OTTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING METHOD, POLISHING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM
Publication number
20180254196
Publication date
Sep 6, 2018
EBARA CORPORATION
Yu ISHII
B24 - GRINDING POLISHING
Information
Patent Application
USE OF A CHEMICAL MECHANICAL POLISHING (CMP) COMPOSITION FOR POLISH...
Publication number
20180230333
Publication date
Aug 16, 2018
BASF SE
Robert REICHARDT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF TOP GATE THIN-FILM TRANSISTOR
Publication number
20180197973
Publication date
Jul 12, 2018
Shenzhen China Star Optoelectronics Technology Co., Ltd.
Yong Deng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Devices Having a Semiconductor Material That Is Semimetal in Bulk a...
Publication number
20180190799
Publication date
Jul 5, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Jean-Pierre Colinge
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL ANALYZING PLASMA CNC CUTTING MACHINE AND ASSOCIATED METHODS
Publication number
20180154475
Publication date
Jun 7, 2018
Matthew Fagan
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR