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CPC
H01J2237/20221

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/20221Translation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Device and method for substrate transport in vacuum processing systems
- Patent number 12,142,463
- Issue date Nov 12, 2024
- VON ARDENNE Asset GmbH & Co. KG
- Falk Milde
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Movement systems for sputter coating of non-flat substrates
- Patent number 12,080,527
- Issue date Sep 3, 2024
- SOLERAS ADVANCED COATINGS BV
- Wilmert De Bosscher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrier with vertical grid for supporting substrates in coater
- Patent number 12,068,142
- Issue date Aug 20, 2024
- View, Inc.
- Bo Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods of clamp compensation
- Patent number 12,057,286
- Issue date Aug 6, 2024
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating a particle beam apparatus with an object holder
- Patent number 11,688,583
- Issue date Jun 27, 2023
- Carl Zeiss Microscopy GmbH
- Alexander Orchowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier with vertical grid for supporting substrates in coater
- Patent number 11,688,589
- Issue date Jun 27, 2023
- View, Inc.
- Bo Garrett Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film processing method and film manufacturing method
- Patent number 11,651,944
- Issue date May 16, 2023
- Toppan Printing Co., Ltd.
- Kengo Okamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion milling device and ion milling method
- Patent number 11,621,141
- Issue date Apr 4, 2023
- HITACHI HIGH-TECH CORPORATION
- Toru Iwaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atmospheric-pressure plasma processing apparatus and method using a...
- Patent number 11,610,765
- Issue date Mar 21, 2023
- APJeT, Inc.
- Gregory A. Roche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of clamp compensation
- Patent number 11,562,877
- Issue date Jan 24, 2023
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three-dimensional (3D) imaging system and method for nanostructure
- Patent number 11,488,801
- Issue date Nov 1, 2022
- INSTITUTE OF GEOLOGY AND GEOPHYSICS, CHINESE ACADEMY OF SCIENCES
- Zhongming Du
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation method and ion implanter for performing the same
- Patent number 11,482,401
- Issue date Oct 25, 2022
- Shanghai Huali Integrated Circuit Mfg. Co. Ltd.
- Chaorong Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier with vertical grid for supporting substrates in coater
- Patent number 11,424,109
- Issue date Aug 23, 2022
- View, Inc.
- Bo Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
E-beam apparatus
- Patent number 11,315,752
- Issue date Apr 26, 2022
- ASML Netherlands B.V.
- Peter Paul Hempenius
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nano-coating protection method for electrical devices
- Patent number 11,313,039
- Issue date Apr 26, 2022
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Multibeamlet charged particle device and method
- Patent number 11,309,163
- Issue date Apr 19, 2022
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Glass pallet for sputtering systems
- Patent number 11,133,158
- Issue date Sep 28, 2021
- View, Inc.
- Trevor Frank
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote capacitively coupled plasma source with improved ion blocker
- Patent number 11,069,514
- Issue date Jul 20, 2021
- Applied Materials, Inc.
- Vivek B Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nano-coating protection method for electrical connectors
- Patent number 11,041,244
- Issue date Jun 22, 2021
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cryotransfer system
- Patent number 11,041,788
- Issue date Jun 22, 2021
- HennyZ B.V.
- Hendrik Willem Zandbergen
- G01 - MEASURING TESTING
Information Patent Grant
Nano-coating protection method for electrical connectors
- Patent number 10,975,471
- Issue date Apr 13, 2021
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nano-coating protection method for electrical connectors
- Patent number 10,975,472
- Issue date Apr 13, 2021
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nano-coating protection method for electrical connectors
- Patent number 10,934,623
- Issue date Mar 2, 2021
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques, system and apparatus for selective deposition of a laye...
- Patent number 10,879,055
- Issue date Dec 29, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Christopher Hatem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
E-beam apparatus
- Patent number 10,867,770
- Issue date Dec 15, 2020
- ASML Netherlands B.V.
- Peter Paul Hempenius
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasmon-excited electron beam array for complementary patterning
- Patent number 10,861,668
- Issue date Dec 8, 2020
- Purdue Research Foundation
- Liang Pan
- G02 - OPTICS
Information Patent Grant
Multi-piece substrate holder and alignment mechanism
- Patent number 10,854,772
- Issue date Dec 1, 2020
- Intevac, Inc.
- Hoang Huy Vu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam irradiation apparatus
- Patent number 10,784,075
- Issue date Sep 22, 2020
- Nissin ION Equipment Co., Ltd.
- Shinya Hisada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor workpiece temperature measurement system
- Patent number 10,739,208
- Issue date Aug 11, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Petry
- G01 - MEASURING TESTING
Information Patent Grant
Method of performing electron diffraction pattern analysis upon a s...
- Patent number 10,663,414
- Issue date May 26, 2020
- Oxford Instruments Nanotechnology Tools Limited
- Frank Willi Bauer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS OF CLAMP COMPENSATION
- Publication number 20240339286
- Publication date Oct 10, 2024
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING HIGHLY UNIFORM DIELECTRIC FILM
- Publication number 20240145217
- Publication date May 2, 2024
- Applied Materials, Inc.
- Qintao Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Microscope and Specimen Orientation Alignment Method
- Publication number 20240087840
- Publication date Mar 14, 2024
- JEOL Ltd.
- Motofumi Saitoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR SUBSTRATE TRANSPORT IN VACUUM PROCESSING SYSTEMS
- Publication number 20230402266
- Publication date Dec 14, 2023
- VON ARDENNE Asset GmbH & Co. KG
- Falk MILDE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ion Milling Device and Ion Milling Method
- Publication number 20230369010
- Publication date Nov 16, 2023
- HITACHI HIGH-TECH CORPORATION
- Toru Iwaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR DIRECTING CHARGED PARTICLE BEAM TOWARDS A...
- Publication number 20230326706
- Publication date Oct 12, 2023
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
- Publication number 20230282458
- Publication date Sep 7, 2023
- VIEW, INC.
- Bo Garrett Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STAGE DEVICE, CHARGED PARTICLE BEAM APPARATUS, AND VACUUM APPARATUS
- Publication number 20230260740
- Publication date Aug 17, 2023
- HITACHI HIGH-TECH CORPORATION
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20230227974
- Publication date Jul 20, 2023
- Picosun Oy
- Marko PUDAS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STAGE DEVICE, AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20230215684
- Publication date Jul 6, 2023
- HITACHI HIGH-TECH CORPORATION
- Motohiro TAKAHASHI
- G01 - MEASURING TESTING
Information Patent Application
MEMS PLATFORM FOR THIN FILM NANOMECHANICS CHARACTERIZATION
- Publication number 20230187167
- Publication date Jun 15, 2023
- Carnegie Mellon University
- Maarten de Boer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS OF CLAMP COMPENSATION
- Publication number 20230120177
- Publication date Apr 20, 2023
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL METHOD OF WRITING APPARATUS AND WRITING APPARATUS
- Publication number 20230111566
- Publication date Apr 13, 2023
- NuFlare Technology, Inc.
- Eita FUJISAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NANOPOSITIONING SYSTEMS AND ASSOCIATED METHODS
- Publication number 20230009873
- Publication date Jan 12, 2023
- THE TEXAS A&M UNIVERSITY SYSTEM
- ChaBum Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
- Publication number 20220351950
- Publication date Nov 3, 2022
- VIEW, INC.
- Bo Garrett Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SAMPLE CARRIER FOR USE IN A CHARGED PARTICLE MICROSCOPE, AND A METH...
- Publication number 20220319801
- Publication date Oct 6, 2022
- FEI Company
- Frantisek VASKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
E-BEAM POSITION TRACKER
- Publication number 20220293390
- Publication date Sep 15, 2022
- Nikon Corporation
- Jacek Kazimierz Tyminski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Uniform Ion Milling
- Publication number 20220262593
- Publication date Aug 18, 2022
- E.A. Fischione Instruments, Inc.
- Paul E. Fischione
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVEMENT SYSTEMS FOR SPUTTER COATING OF NON-FLAT SUBSTRATES
- Publication number 20220254613
- Publication date Aug 11, 2022
- SOLERAS ADVANCED COATINGS BV
- Wilmert DE BOSSCHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIFFRACTOMETER FOR CHARGED-PARTICLE CRYSTALLOGRAPHY
- Publication number 20220238299
- Publication date Jul 28, 2022
- ELDICO SCIENTIFIC AG
- Gunther STEINFELD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPERATING A PARTICLE BEAM APPARATUS WITH AN OBJECT HOLDER
- Publication number 20220230843
- Publication date Jul 21, 2022
- CARL ZEISS MICROSCOPY GMBH
- Alexander Orchowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GLASS PALLET FOR SPUTTERING SYSTEMS
- Publication number 20220037130
- Publication date Feb 3, 2022
- VIEW, INC.
- Trevor Frank
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Remote Capacitively Coupled Plasma Source with Improved Ion Blocker
- Publication number 20210351020
- Publication date Nov 11, 2021
- Applied Materials, Inc.
- Vivek B. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF CLAMP COMPENSATION
- Publication number 20210151276
- Publication date May 20, 2021
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
E-BEAM APPARATUS
- Publication number 20210151282
- Publication date May 20, 2021
- Peter Paul HEMPENIUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIBEAMLET CHARGED PARTICLE DEVICE AND METHOD
- Publication number 20210142976
- Publication date May 13, 2021
- Applied Materials, Inc.
- Mehdi VAEZ-IRAVANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTER FOR PERFORMING THE SAME
- Publication number 20200388465
- Publication date Dec 10, 2020
- Shanghai Huali Integrated Circuit Mfg. Co., Ltd.
- Chaorong Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
- Publication number 20200381223
- Publication date Dec 3, 2020
- VIEW, INC.
- Bo Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CRYOTRANSFER SYSTEM
- Publication number 20200141846
- Publication date May 7, 2020
- HennyZ B.V.
- Hendrik Willem ZANDBERGEN
- G01 - MEASURING TESTING
Information Patent Application
FILM PROCESSING METHOD AND FILM MANUFACTURING METHOD
- Publication number 20200144038
- Publication date May 7, 2020
- Toppan Printing Co., Ltd.
- Kengo OKAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Translation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Device and method for substrate transport in vacuum processing systems

Movement systems for sputter coating of non-flat substrates

Carrier with vertical grid for supporting substrates in coater

Systems and methods of clamp compensation

Operating a particle beam apparatus with an object holder

Carrier with vertical grid for supporting substrates in coater

Film processing method and film manufacturing method

Ion milling device and ion milling method

Atmospheric-pressure plasma processing apparatus and method using a...

Systems and methods of clamp compensation

Three-dimensional (3D) imaging system and method for nanostructure

Ion implantation method and ion implanter for performing the same

Carrier with vertical grid for supporting substrates in coater

E-beam apparatus

Nano-coating protection method for electrical devices

Multibeamlet charged particle device and method

Glass pallet for sputtering systems

Remote capacitively coupled plasma source with improved ion blocker

Nano-coating protection method for electrical connectors

Cryotransfer system

Nano-coating protection method for electrical connectors

Nano-coating protection method for electrical connectors

Nano-coating protection method for electrical connectors

Techniques, system and apparatus for selective deposition of a laye...

E-beam apparatus

Plasmon-excited electron beam array for complementary patterning

Multi-piece substrate holder and alignment mechanism

Ion beam irradiation apparatus

Semiconductor workpiece temperature measurement system

Method of performing electron diffraction pattern analysis upon a s...

Patents Applicationslast 30 patents

SYSTEMS AND METHODS OF CLAMP COMPENSATION

METHOD FOR FORMING HIGHLY UNIFORM DIELECTRIC FILM

Electron Microscope and Specimen Orientation Alignment Method

DEVICE AND METHOD FOR SUBSTRATE TRANSPORT IN VACUUM PROCESSING SYSTEMS

Ion Milling Device and Ion Milling Method

APPARATUS AND METHOD FOR DIRECTING CHARGED PARTICLE BEAM TOWARDS A...

CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER

STAGE DEVICE, CHARGED PARTICLE BEAM APPARATUS, AND VACUUM APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD

STAGE DEVICE, AND CHARGED PARTICLE BEAM DEVICE

MEMS PLATFORM FOR THIN FILM NANOMECHANICS CHARACTERIZATION

SYSTEMS AND METHODS OF CLAMP COMPENSATION

CONTROL METHOD OF WRITING APPARATUS AND WRITING APPARATUS

NANOPOSITIONING SYSTEMS AND ASSOCIATED METHODS

CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER

SAMPLE CARRIER FOR USE IN A CHARGED PARTICLE MICROSCOPE, AND A METH...

E-BEAM POSITION TRACKER

System and Method for Uniform Ion Milling

MOVEMENT SYSTEMS FOR SPUTTER COATING OF NON-FLAT SUBSTRATES

DIFFRACTOMETER FOR CHARGED-PARTICLE CRYSTALLOGRAPHY

OPERATING A PARTICLE BEAM APPARATUS WITH AN OBJECT HOLDER

GLASS PALLET FOR SPUTTERING SYSTEMS

Remote Capacitively Coupled Plasma Source with Improved Ion Blocker

SYSTEMS AND METHODS OF CLAMP COMPENSATION

E-BEAM APPARATUS

MULTIBEAMLET CHARGED PARTICLE DEVICE AND METHOD

ION IMPLANTATION METHOD AND ION IMPLANTER FOR PERFORMING THE SAME

CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER

CRYOTRANSFER SYSTEM

FILM PROCESSING METHOD AND FILM MANUFACTURING METHOD