Travelling wave deflectors

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CPC
H01J2237/1512

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/1512Travelling wave deflectors

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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

Information Patent Application
GRAZING ANGLE PLASMA PROCESSING FOR MODIFYING A SUBSTRATE SURFACE
- Publication number 20150255243
- Publication date Sep 10, 2015
- Applied Materials, Inc.
- Ludovic GODET
- H01 - BASIC ELECTRIC ELEMENTS