treatment by exposure to a gas or vapour

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H01L21/02312

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/02312treatment by exposure to a gas or vapour

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Patents Grantslast 30 patents

Information Patent Grant
Methods and compositions for RNA-directed target DNA modification a...
- Patent number 12,123,015
- Issue date Oct 22, 2024
- The Regents of the University of California
- Jennifer A. Doudna
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Method for manufacturing semiconductor structure
- Patent number 12,119,267
- Issue date Oct 15, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chen-Cheng Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,080,550
- Issue date Sep 3, 2024
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Advanced temperature monitoring system and methods for semiconducto...
- Patent number 12,068,180
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Xuesong Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,033,852
- Issue date Jul 9, 2024
- Kokusai Electric Corporation
- Takayuki Waseda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and compositions for RNA-directed target DNA modification a...
- Patent number 11,970,711
- Issue date Apr 30, 2024
- The Regents of the University of California
- Jennifer A. Doudna
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,923,193
- Issue date Mar 5, 2024
- Kokusai Electric Corporation
- Kimihiko Nakatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 11,915,925
- Issue date Feb 27, 2024
- Daicel Corporation
- Naoko Tsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of processing substrate and manufacturing semiconductor dev...
- Patent number 11,848,203
- Issue date Dec 19, 2023
- Kokusai Electric Corporation
- Takayuki Waseda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,837,466
- Issue date Dec 5, 2023
- Kokusai Electric Corporation
- Kimihiko Nakatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and compositions for RNA-directed target DNA modification a...
- Patent number 11,814,645
- Issue date Nov 14, 2023
- The Regents of the University of California
- Jennifer A. Doudna
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fin Field-Effect Transistor device and method of forming the same
- Patent number 11,728,215
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shich-Chang Suen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and compositions for RNA-directed target DNA modification a...
- Patent number 11,674,159
- Issue date Jun 13, 2023
- The Regents of the University of California
- Jennifer A. Doudna
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Method of selective deposition for forming fully self-aligned vias
- Patent number 11,658,068
- Issue date May 23, 2023
- Tokyo Electron Limited
- Kandabara Tapily
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming silicon nitride including plasma exposure
- Patent number 11,651,955
- Issue date May 16, 2023
- Micron Technology, Inc.
- Sumeet C. Pandey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and compositions for RNA-directed target DNA modification a...
- Patent number 11,634,730
- Issue date Apr 25, 2023
- The Regents of the University of California
- Jennifer A. Doudna
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Dry etching method, method for manufacturing semiconductor device,...
- Patent number 11,618,954
- Issue date Apr 4, 2023
- Central Glass Company, Limited
- Yuuta Takeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interconnect structure for semiconductor device and methods of fabr...
- Patent number 11,610,841
- Issue date Mar 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Ta Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,594,412
- Issue date Feb 28, 2023
- Kokusai Electric Corporation
- Keigo Nishida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,555,246
- Issue date Jan 17, 2023
- Kokusai Electric Corporation
- Hironori Shimada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor structure
- Patent number 11,551,979
- Issue date Jan 10, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chen-Cheng Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing oxygen-containing workpiece
- Patent number 11,548,804
- Issue date Jan 10, 2023
- Tokyo Electron Limited
- Reiko Sasahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing blocking layers on conductive surfaces
- Patent number 11,515,156
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,476,113
- Issue date Oct 18, 2022
- Kokusai Electric Corporation
- Ryota Kataoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,417,518
- Issue date Aug 16, 2022
- Kokusai Electric Corporation
- Takayuki Waseda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structures and method for growing diamond layers
- Patent number 11,348,858
- Issue date May 31, 2022
- Imec VZW
- Paulius Pobedinskas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment to control deposition rate
- Patent number 11,342,177
- Issue date May 24, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wan-Yi Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,335,554
- Issue date May 17, 2022
- Kokusai Electric Corporation
- Takashi Nakagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Area selective deposition for cap layer formation in advanced contacts
- Patent number 11,170,992
- Issue date Nov 9, 2021
- Tokyo Electron Limited
- Kandabara Tapily
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,158,501
- Issue date Oct 26, 2021
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Methods and Compositions for RNA-Directed Target DNA Modification a...
- Publication number 20240417756
- Publication date Dec 19, 2024
- The Regents of the University of California
- Jennifer A. Doudna
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE DEPOSITION OF A MATERIAL COMPRISING SILICON AND NITROGEN
- Publication number 20240379347
- Publication date Nov 14, 2024
- ASM IP HOLDING B.V.
- Mikko Ruoho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDE FILM REACTION SURFACE CONTROL AGENT, METHOD OF FORMING OXIDE...
- Publication number 20240352583
- Publication date Oct 24, 2024
- Soulbrain Co., LTD
- Seung Hyun LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR PRODUCING A LOW-DEFECT INTERFACE
- Publication number 20240321574
- Publication date Sep 26, 2024
- ROBERT BOSCH GmbH
- Mirjam Henn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240312777
- Publication date Sep 19, 2024
- Kokusai Electric Corporation
- Shingo NOHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FORMING STRUCTURES COMPRISING A THRESHOLD V...
- Publication number 20240234129
- Publication date Jul 11, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENTS TO ENHANCE MATERIAL STRUCTURES
- Publication number 20240234133
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Steven C. H. HUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SELECTIVELY FORMING A DIELECTRIC LAYER ON A METALLIC SU...
- Publication number 20240222111
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Viraj Madhiwala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE DEPOSITION OF MATERIAL COMPRISING SILICON AND NITROGEN
- Publication number 20240162036
- Publication date May 16, 2024
- ASM IP HOLDING B.V.
- Viraj Madhiwala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRIC ON DIELECTRIC SELECTIVE DEPOSITION USING ANILINE PASSIVA...
- Publication number 20240120195
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Keith T. Wong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, MET...
- Publication number 20240071752
- Publication date Feb 29, 2024
- Kokusai Electric Corporation
- Takayuki WASEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20240055252
- Publication date Feb 15, 2024
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING REGION-SELECTIVE THIN FILM USING SELECTIVATING A...
- Publication number 20230366080
- Publication date Nov 16, 2023
- EGTM CO., LTD.
- Jae Min KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLIER, PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEM...
- Publication number 20230253222
- Publication date Aug 10, 2023
- Kokusai Electric Corporation
- Kenta Kasamatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND COMPOSITIONS FOR RNA-DIRECTED TARGET DNA MODIFICATION A...
- Publication number 20230227859
- Publication date Jul 20, 2023
- The Regents of the University of California
- Jennifer A. Doudna
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
METHODS AND COMPOSITIONS FOR RNA-DIRECTED TARGET DNA MODIFICATION A...
- Publication number 20230212614
- Publication date Jul 6, 2023
- The Regents of the University of California
- Jennifer A. Doudna
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
SELECTIVE FILM FORMATION METHOD
- Publication number 20230175115
- Publication date Jun 8, 2023
- TOKYO ELECTRON LIMITED
- Shuji AZUMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20230170212
- Publication date Jun 1, 2023
- Kokusai Electric Corporation
- Keigo NISHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE
- Publication number 20230154799
- Publication date May 18, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Cheng CHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR FORMING DOPED SILICON NITRIDE FILMS
- Publication number 20230126516
- Publication date Apr 27, 2023
- ASM IP HOLDING B.V.
- Xingye Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...
- Publication number 20230112057
- Publication date Apr 13, 2023
- Kokusai Electric Corporation
- Hironori SHIMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR DEPOSITION TO GAPS USING AN INHIBITOR
- Publication number 20230069459
- Publication date Mar 2, 2023
- ASM IP HOLDING B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING METHOD
- Publication number 20220310387
- Publication date Sep 29, 2022
- ASM IP HOLDING B.V.
- WanGyu Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220277955
- Publication date Sep 1, 2022
- Kokusai Electric Corporation
- Takayuki WASEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Treatment to Control Deposition Rate
- Publication number 20220277956
- Publication date Sep 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wan-Yi Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SELECTIVE DEPOSITION OF DIELECTRIC ON DIELECTRIC
- Publication number 20220238323
- Publication date Jul 28, 2022
- TOKYO ELECTRON LIMITED
- Robert Clark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20220139696
- Publication date May 5, 2022
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Selective Molecular Layer Deposition Of Organic And Hybrid Organic-...
- Publication number 20220130663
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Tapash Chakraborty
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20210391165
- Publication date Dec 16, 2021
- DAICEL CORPORATION
- Naoko TSUJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20210366706
- Publication date Nov 25, 2021
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

treatment by exposure to a gas or vapour

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods and compositions for RNA-directed target DNA modification a...

Method for manufacturing semiconductor structure

Method of manufacturing semiconductor device, substrate processing...

Advanced temperature monitoring system and methods for semiconducto...

Method of processing substrate, method of manufacturing semiconduct...

Methods and compositions for RNA-directed target DNA modification a...

Method of manufacturing semiconductor device, substrate processing...

Semiconductor device manufacturing method

Methods of processing substrate and manufacturing semiconductor dev...

Method of manufacturing semiconductor device, substrate processing...

Methods and compositions for RNA-directed target DNA modification a...

Fin Field-Effect Transistor device and method of forming the same

Methods and compositions for RNA-directed target DNA modification a...

Method of selective deposition for forming fully self-aligned vias

Methods of forming silicon nitride including plasma exposure

Methods and compositions for RNA-directed target DNA modification a...

Dry etching method, method for manufacturing semiconductor device,...

Interconnect structure for semiconductor device and methods of fabr...

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus and method of manufacturing semicond...

Method for manufacturing semiconductor structure

Method and apparatus for processing oxygen-containing workpiece

Methods for depositing blocking layers on conductive surfaces

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device, substrate processing...

Structures and method for growing diamond layers

Treatment to control deposition rate

Method of manufacturing semiconductor device, substrate processing...

Area selective deposition for cap layer formation in advanced contacts

Method of manufacturing semiconductor device, substrate processing...

Patents Applicationslast 30 patents

Methods and Compositions for RNA-Directed Target DNA Modification a...

SELECTIVE DEPOSITION OF A MATERIAL COMPRISING SILICON AND NITROGEN

OXIDE FILM REACTION SURFACE CONTROL AGENT, METHOD OF FORMING OXIDE...

METHOD AND DEVICE FOR PRODUCING A LOW-DEFECT INTERFACE

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHODS AND SYSTEMS FOR FORMING STRUCTURES COMPRISING A THRESHOLD V...

TREATMENTS TO ENHANCE MATERIAL STRUCTURES

METHODS FOR SELECTIVELY FORMING A DIELECTRIC LAYER ON A METALLIC SU...

SELECTIVE DEPOSITION OF MATERIAL COMPRISING SILICON AND NITROGEN

DIELECTRIC ON DIELECTRIC SELECTIVE DEPOSITION USING ANILINE PASSIVA...

METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, MET...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD FOR FORMING REGION-SELECTIVE THIN FILM USING SELECTIVATING A...

GAS SUPPLIER, PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEM...

METHODS AND COMPOSITIONS FOR RNA-DIRECTED TARGET DNA MODIFICATION A...

METHODS AND COMPOSITIONS FOR RNA-DIRECTED TARGET DNA MODIFICATION A...

SELECTIVE FILM FORMATION METHOD

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE

METHODS AND SYSTEMS FOR FORMING DOPED SILICON NITRIDE FILMS

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...

METHODS AND SYSTEMS FOR DEPOSITION TO GAPS USING AN INHIBITOR

SEMICONDUCTOR PROCESSING METHOD

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

Treatment to Control Deposition Rate

METHOD FOR SELECTIVE DEPOSITION OF DIELECTRIC ON DIELECTRIC

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Selective Molecular Layer Deposition Of Organic And Hybrid Organic-...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...