treatment by exposure to a liquid

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H01L21/02343

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02343treatment by exposure to a liquid

Industries

Patents Grantslast 30 patents

Information Patent Grant
Silicon oxide layer for oxidation resistance and method forming same
- Patent number 12,148,652
- Issue date Nov 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wan-Yi Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure
- Patent number 12,087,834
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Wen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuitry, memory arrays comprising strings of memory ce...
- Patent number 12,087,632
- Issue date Sep 10, 2024
- Micron Technology, Inc.
- Corey Staller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, estimation method of substrate proc...
- Patent number 12,051,587
- Issue date Jul 30, 2024
- Tokyo Electron Limited
- Hiroshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor film composition, method for manufacturing semiconduc...
- Patent number 11,965,109
- Issue date Apr 23, 2024
- Mitsui Chemicals, Inc.
- Yasuhisa Kayaba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 11,699,601
- Issue date Jul 11, 2023
- SCREEN Holdings Co., Ltd.
- Tomohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interconnect structure for semiconductor device and methods of fabr...
- Patent number 11,610,841
- Issue date Mar 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Ta Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and manufacturing method for the same
- Patent number 11,594,455
- Issue date Feb 28, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chih-Nan Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,538,679
- Issue date Dec 27, 2022
- Tokyo Electron Limited
- Yuji Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flash memory containing air gaps
- Patent number 11,456,307
- Issue date Sep 27, 2022
- Semiconductor Manufacturing International (Shanghai) Corporation
- Liang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon oxide layer for oxidation resistance and method forming same
- Patent number 11,393,711
- Issue date Jul 19, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wan-Yi Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure with barrier layer and method for forming t...
- Patent number 11,296,198
- Issue date Apr 5, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Wen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,282,718
- Issue date Mar 22, 2022
- SCREEN Holdings Co., Ltd.
- Takeshi Yoshida
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 11,164,750
- Issue date Nov 2, 2021
- SCREEN Holdings Co., Ltd.
- Tomohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing device of the same
- Patent number 11,081,596
- Issue date Aug 3, 2021
- Renesas Electronics Corporation
- Masaru Kadoshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interconnect structure for semiconductor device and methods of fabr...
- Patent number 10,777,504
- Issue date Sep 15, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Ta Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor film composition, method of manufacturing semiconduct...
- Patent number 10,759,964
- Issue date Sep 1, 2020
- Mitsui Chemicals, Inc.
- Yasuhisa Kayaba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor film composition, method for manufacturing semiconduc...
- Patent number 10,752,805
- Issue date Aug 25, 2020
- MITSUI CHEMICALS, INC.
- Yasuhisa Kayaba
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Semiconductor structure with barrier layer and method for forming t...
- Patent number 10,629,693
- Issue date Apr 21, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Wen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,615,026
- Issue date Apr 7, 2020
- SCREEN Holdings Co., Ltd.
- Shota Iwahata
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate treating apparatus
- Patent number 10,573,546
- Issue date Feb 25, 2020
- SCREEN Holdings Co., Ltd.
- Yukihiko Inagaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating compositions for use with an overcoated photoresist
- Patent number 10,527,942
- Issue date Jan 7, 2020
- Rohm and Haas Electronics Materials Korea Ltd.
- Jae Hwan Sim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for reducing scratch defects in chemical mechanical planari...
- Patent number 10,522,365
- Issue date Dec 31, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wan-Chun Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interconnect structure for semiconductor device and methods of fabr...
- Patent number 10,515,896
- Issue date Dec 24, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Ta Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Supercritical carbon dioxide process for low-k thin films
- Patent number 10,283,344
- Issue date May 7, 2019
- Applied Materials, Inc.
- Steven Verhaverbeke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique and related semiconductor devices based on crystalline se...
- Patent number 10,283,365
- Issue date May 7, 2019
- GLOBALFOUNDRIES Inc.
- Elliot John Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etch method with surface modification treatment for forming semicon...
- Patent number 10,163,623
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Andrew Joseph Kelly
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for trench isolation using flowable dielectric materials
- Patent number 10,147,634
- Issue date Dec 4, 2018
- Intel Corporation
- Ritesh Jhaveri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography method with surface modification layer
- Patent number 10,101,659
- Issue date Oct 16, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interconnect structure for semiconductor devices
- Patent number 10,062,645
- Issue date Aug 28, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Han-Hsin Kuo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SILICON OXIDE LAYER FOR OXIDATION RESISTANCE AND METHOD FORMING SAME
- Publication number 20240387238
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wan-Yi Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR REDUCING SCRATCH DEFECTS IN CHEMICAL MECHANICAL PLANARI...
- Publication number 20240387187
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wan-Chun Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20240363707
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Wen HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...
- Publication number 20240355617
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240222157
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Song yun Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING A PARTIALLY SILICIDED ELEMENT
- Publication number 20240087886
- Publication date Mar 14, 2024
- MICROCHIP TECHNOLOGY INCORPORATED
- Yaojian Leng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SURFACE TREATMENT FOR WAFER BONDING METHODS
- Publication number 20240071746
- Publication date Feb 29, 2024
- TOKYO ELECTRON LIMITED
- Yu-Hao Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR REDUCING SCRATCH DEFECTS IN CHEMICAL MECHANICAL PLANARI...
- Publication number 20230377898
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wan-Chun Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE SPACER AND FORMATION METHOD THEREOF
- Publication number 20230299175
- Publication date Sep 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Rui CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR THE SAME
- Publication number 20230215765
- Publication date Jul 6, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIH-NAN LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE MANUFACTURING METHOD AND STRUCTURE
- Publication number 20220415663
- Publication date Dec 29, 2022
- FUJIFILM CORPORATION
- Tomokazu UMEZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR TREATING OBJECT TO BE TREATED AND TREATMENT LIQUID
- Publication number 20220406596
- Publication date Dec 22, 2022
- FUJIFILM CORPORATION
- Atsushi MIZUTANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220392780
- Publication date Dec 8, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Silicon Oxide Layer for Oxidation Resistance and Method Forming Same
- Publication number 20220336264
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wan-Yi Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE
- Publication number 20220190127
- Publication date Jun 16, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Wen HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated Circuitry, Memory Arrays Comprising Strings Of Memory Ce...
- Publication number 20220093467
- Publication date Mar 24, 2022
- Micron Technology, Inc.
- Corey Staller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210305066
- Publication date Sep 30, 2021
- TOKYO ELECTRON LIMITED
- Song yun Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210296123
- Publication date Sep 23, 2021
- TOKYO ELECTRON LIMITED
- Yuji Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
- Publication number 20210066077
- Publication date Mar 4, 2021
- SEMES CO., LTD.
- Byungsun Bang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FILM COMPOSITION, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20200347265
- Publication date Nov 5, 2020
- Mitsui Chemicals, Inc.
- Yasuhisa KAYABA
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH BARRIER LAYER AND METHOD FOR FORMING T...
- Publication number 20200235214
- Publication date Jul 23, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Wen HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Silicon Oxide Layer for Oxidation Resistance and Method Forming Same
- Publication number 20200161170
- Publication date May 21, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wan-Yi Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERCONNECT STRUCTURE FOR SEMICONDUCTOR DEVICE AND METHODS OF FABR...
- Publication number 20200161240
- Publication date May 21, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Ta YU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Reducing Scratch Defects in Chemical Mechanical Planari...
- Publication number 20200126803
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Wan-Chun Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUE AND RELATED SEMICONDUCTOR DEVICES BASED ON CRYSTALLINE SE...
- Publication number 20190148149
- Publication date May 16, 2019
- GLOBALFOUNDRIES INC.
- Elliot John Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERCONNECT STRUCTURE FOR SEMICONDUCTOR DEVICE AND METHODS OF FABR...
- Publication number 20190067197
- Publication date Feb 28, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Ta YU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR FILM COMPOSITION, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20180327547
- Publication date Nov 15, 2018
- Mitsui Chemicals, Inc.
- Yasuhisa KAYABA
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD FOR MANUFACTURING FILLING PLANARIZATION FILM AND METHOD FOR...
- Publication number 20180076047
- Publication date Mar 15, 2018
- Mitsui Chemicals, Inc.
- Hirofumi TANAKA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Lithography Method with Surface Modification Layer
- Publication number 20180047561
- Publication date Feb 15, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Shu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Interconnect Structure for Semiconductor Devices
- Publication number 20170278785
- Publication date Sep 28, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Han-Hsin Kuo
- H01 - BASIC ELECTRIC ELEMENTS

treatment by exposure to a liquid

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Silicon oxide layer for oxidation resistance and method forming same

Semiconductor structure

Integrated circuitry, memory arrays comprising strings of memory ce...

Substrate processing apparatus, estimation method of substrate proc...

Semiconductor film composition, method for manufacturing semiconduc...

Substrate processing method

Interconnect structure for semiconductor device and methods of fabr...

Semiconductor device and manufacturing method for the same

Substrate processing method and substrate processing apparatus

Flash memory containing air gaps

Silicon oxide layer for oxidation resistance and method forming same

Semiconductor structure with barrier layer and method for forming t...

Substrate processing apparatus and substrate processing method

Substrate processing device and substrate processing method

Semiconductor device and manufacturing device of the same

Interconnect structure for semiconductor device and methods of fabr...

Semiconductor film composition, method of manufacturing semiconduct...

Semiconductor film composition, method for manufacturing semiconduc...

Semiconductor structure with barrier layer and method for forming t...

Substrate processing method and substrate processing apparatus

Substrate treating apparatus

Coating compositions for use with an overcoated photoresist

Methods for reducing scratch defects in chemical mechanical planari...

Interconnect structure for semiconductor device and methods of fabr...

Supercritical carbon dioxide process for low-k thin films

Technique and related semiconductor devices based on crystalline se...

Etch method with surface modification treatment for forming semicon...

Techniques for trench isolation using flowable dielectric materials

Lithography method with surface modification layer

Interconnect structure for semiconductor devices

Patents Applicationslast 30 patents

SILICON OXIDE LAYER FOR OXIDATION RESISTANCE AND METHOD FORMING SAME

METHODS FOR REDUCING SCRATCH DEFECTS IN CHEMICAL MECHANICAL PLANARI...

SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

FORMING A PARTIALLY SILICIDED ELEMENT

PLASMA SURFACE TREATMENT FOR WAFER BONDING METHODS

METHODS FOR REDUCING SCRATCH DEFECTS IN CHEMICAL MECHANICAL PLANARI...

GATE SPACER AND FORMATION METHOD THEREOF

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR THE SAME

STRUCTURE MANUFACTURING METHOD AND STRUCTURE

METHOD FOR TREATING OBJECT TO BE TREATED AND TREATMENT LIQUID

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Silicon Oxide Layer for Oxidation Resistance and Method Forming Same

SEMICONDUCTOR STRUCTURE

Integrated Circuitry, Memory Arrays Comprising Strings Of Memory Ce...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

APPARATUS AND METHOD FOR TREATING SUBSTRATE

SEMICONDUCTOR FILM COMPOSITION, METHOD FOR MANUFACTURING SEMICONDUC...

SEMICONDUCTOR STRUCTURE WITH BARRIER LAYER AND METHOD FOR FORMING T...

Silicon Oxide Layer for Oxidation Resistance and Method Forming Same

INTERCONNECT STRUCTURE FOR SEMICONDUCTOR DEVICE AND METHODS OF FABR...

Methods for Reducing Scratch Defects in Chemical Mechanical Planari...

TECHNIQUE AND RELATED SEMICONDUCTOR DEVICES BASED ON CRYSTALLINE SE...

INTERCONNECT STRUCTURE FOR SEMICONDUCTOR DEVICE AND METHODS OF FABR...

SEMICONDUCTOR FILM COMPOSITION, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD FOR MANUFACTURING FILLING PLANARIZATION FILM AND METHOD FOR...

Lithography Method with Surface Modification Layer

Interconnect Structure for Semiconductor Devices