treatment by exposure to radiation

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/02345treatment by exposure to radiation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device manufacturing method
- Patent number 12,165,882
- Issue date Dec 10, 2024
- Yuta Akasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photovoltaic cell
- Patent number 12,166,143
- Issue date Dec 10, 2024
- STMicroelectronics S.r.l.
- Cosimo Gerardi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sequential plasma and thermal treatment
- Patent number 12,142,475
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Ning Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated circuitry, method used in the fabrication of a vertical...
- Patent number 12,057,493
- Issue date Aug 6, 2024
- Micron Technology, Inc.
- Masihhur R. Laskar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light-driven transition from insulator to conductor
- Patent number 11,923,245
- Issue date Mar 5, 2024
- Bowling Green State University
- Farida Selim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device manufacturing method
- Patent number 11,915,925
- Issue date Feb 27, 2024
- Daicel Corporation
- Naoko Tsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method making the same
- Patent number 11,894,226
- Issue date Feb 6, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- PingHeng Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display module, method for manufacturing display module, and laser...
- Patent number 11,890,700
- Issue date Feb 6, 2024
- Samsung Display Co., Ltd.
- Youngjin Oh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor device and manufacturing method of semiconductor device
- Patent number 11,881,522
- Issue date Jan 23, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for high pressure anneal
- Patent number 11,854,800
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuitry, method used in the fabrication of a vertical...
- Patent number 11,777,011
- Issue date Oct 3, 2023
- Micron Technology, Inc.
- Masihhur R. Laskar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,694,890
- Issue date Jul 4, 2023
- Tokyo Electron Limited
- Kiwamu Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra-thin dielectric films using photo up-conversion for applicati...
- Patent number 11,670,504
- Issue date Jun 6, 2023
- Intel Corporation
- Jeremy D. Ecton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display module, method for manufacturing display module, and laser...
- Patent number 11,534,867
- Issue date Dec 27, 2022
- Samsung Display Co., Ltd.
- Youngjin Oh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor constructions comprising dielectric material, and met...
- Patent number 11,515,198
- Issue date Nov 29, 2022
- Micron Technology, Inc.
- Gurtej S. Sandhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices and methods of fabricating the same
- Patent number 11,495,597
- Issue date Nov 8, 2022
- Samsung Electronics Co., Ltd.
- Moon-Kyu Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 11,476,339
- Issue date Oct 18, 2022
- Renesas Electronics Corporation
- Tadashi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of post treating dielectric films with microwave radiation
- Patent number 11,469,100
- Issue date Oct 11, 2022
- Applied Materials, Inc.
- Yong Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 11,450,547
- Issue date Sep 20, 2022
- Kioxia Corporation
- Shinichi Nakao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for microwave treatment of dielectric films
- Patent number 11,343,884
- Issue date May 24, 2022
- Applied Materials, Inc.
- Iftikhar Ahmad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isolation in integrated circuit devices
- Patent number 11,270,995
- Issue date Mar 8, 2022
- Intel Corporation
- Sang-Won Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formulation for deposition of silicon doped hafnium oxide as ferroe...
- Patent number 11,193,206
- Issue date Dec 7, 2021
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Imprint apparatus, imprint method, and method of manufacturing article
- Patent number 11,187,977
- Issue date Nov 30, 2021
- Canon Kabushiki Kaisha
- Naoki Murasato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,183,382
- Issue date Nov 23, 2021
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxidation reduction for SiOC film
- Patent number 11,133,177
- Issue date Sep 28, 2021
- APPLIED MATERIALS, INC.
- Martin Jay Seamons
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pattern decomposition lithography techniques
- Patent number 11,107,786
- Issue date Aug 31, 2021
- Intel Corporation
- Charles H. Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for manufacturing flexible light emission device
- Patent number 11,088,122
- Issue date Aug 10, 2021
- SAKAI DISPLAY PRODUCTS CORPORATION
- Katsuhiko Kishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser assisted SiC growth on silicon
- Patent number 11,069,527
- Issue date Jul 20, 2021
- Board of Trustees of Michigan State University
- Premjeet Chahal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for high pressure anneal
- Patent number 11,037,781
- Issue date Jun 15, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 11,024,744
- Issue date Jun 1, 2021
- Sumitomo Electric Industries, Ltd.
- Miki Miyanaga
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR APPARATUS, POWER CONVERTER AND MANUFACTURING METHOD F...
- Publication number 20240355874
- Publication date Oct 24, 2024
- Mitsubishi Electric Corporation
- Atsufumi INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated Circuitry, Method Used In The Fabrication Of A Vertical...
- Publication number 20240355909
- Publication date Oct 24, 2024
- Micron Technology, Inc.
- Masihhur R. Laskar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20240249960
- Publication date Jul 25, 2024
- Kokusai Electric Corporation
- Kazuya NABETA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERNING BASED ON IN-SITU FORMATION OF BLOCK COPOYLMER THROUGH DE...
- Publication number 20240222119
- Publication date Jul 4, 2024
- Intel Corporation
- Eungnak Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20240113207
- Publication date Apr 4, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing Method Of Semiconductor Device
- Publication number 20240063028
- Publication date Feb 22, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated Circuitry, Method Used In The Fabrication Of A Vertical...
- Publication number 20230395699
- Publication date Dec 7, 2023
- Micron Technology, Inc.
- Masihhur R. Laskar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR HIGH PRESSURE ANNEAL
- Publication number 20230386832
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LARGE AREA GAPFILL USING VOLUMETRIC EXPANSION
- Publication number 20230360903
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Supriya Ghosh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS INCLUDING A SUBSTRATE CHUCK, A DISPENSER, AND A PLANARIZA...
- Publication number 20230197463
- Publication date Jun 22, 2023
- Canon Kabushiki Kaisha
- Ozkan Ozturk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR BONDING SEMICONDUCTOR ELEMENTS
- Publication number 20230187264
- Publication date Jun 15, 2023
- ADEIA SEMICONDUCTOR TECHNOLOGIES LLC
- Cyprian Emeka Uzoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPLAY MODULE, METHOD FOR MANUFACTURING DISPLAY MODULE, AND LASER...
- Publication number 20230101169
- Publication date Mar 30, 2023
- SAMSUNG DISPLAY CO., LTD.
- Youngjin OH
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT-DRIVEN TRANSITION FROM INSULATOR TO CONDUCTOR
- Publication number 20230101586
- Publication date Mar 30, 2023
- Bowling Green State University
- Farida Selim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPORARY PASSIVATION LAYER ON A SUBSTRATE
- Publication number 20220359332
- Publication date Nov 10, 2022
- SPTS TECHNOLOGIES LIMITED
- Michael Grimes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20220319872
- Publication date Oct 6, 2022
- Showa Denko Materials Co., Ltd.
- Yuta AKASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEQUENTIAL PLASMA AND THERMAL TREATMENT
- Publication number 20220262619
- Publication date Aug 18, 2022
- Applied Materials, Inc.
- Ning Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD MAKING THE SAME
- Publication number 20220139700
- Publication date May 5, 2022
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Pingheng Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ISOLATION IN INTEGRATED CIRCUIT DEVICES
- Publication number 20220139913
- Publication date May 5, 2022
- Intel Corporation
- Sang-Won Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated Circuitry, Method Used In The Fabrication Of A Vertical...
- Publication number 20220093771
- Publication date Mar 24, 2022
- Micron Technology, Inc.
- Masihhur R. Laskar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20220084868
- Publication date Mar 17, 2022
- KIOXIA Corporation
- Shinichi NAKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20220037511
- Publication date Feb 3, 2022
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
- Publication number 20210391165
- Publication date Dec 16, 2021
- DAICEL CORPORATION
- Naoko TSUJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN DECOMPOSITION LITHOGRAPHY TECHNIQUES
- Publication number 20210375807
- Publication date Dec 2, 2021
- Intel Corporation
- CHARLES H. WALLACE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING A SILICON CARBIDE DEVICE
- Publication number 20210335607
- Publication date Oct 28, 2021
- X-FAB Texas, Inc.
- Daniel Mauch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING GATE INSULATOR FILM AND HEAT TREATMENT METHOD
- Publication number 20210327709
- Publication date Oct 21, 2021
- SCREEN Holdings Co., Ltd.
- Hideaki TANIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device and Method for High Pressure Anneal
- Publication number 20210280414
- Publication date Sep 9, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Szu-Ying Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING DIELECTRIC MATERIAL LAYERS USING PULSED PLASMA PO...
- Publication number 20210257213
- Publication date Aug 19, 2021
- ASM IP HOLDING B.V.
- Yoshiyuki Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME
- Publication number 20210020631
- Publication date Jan 21, 2021
- Samsung Electronics Co., Ltd.
- Moon-Kyu PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF POST TREATING DIELECTRIC FILMS WITH MICROWAVE RADIATION
- Publication number 20200381248
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Yong SUN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRA-THIN DIELECTRIC FILMS USING PHOTO UP-CONVERSION FOR APPLICATI...
- Publication number 20200373157
- Publication date Nov 26, 2020
- Intel Corporation
- Jeremy D. ECTON
- H01 - BASIC ELECTRIC ELEMENTS

treatment by exposure to radiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor device manufacturing method

Photovoltaic cell

Sequential plasma and thermal treatment

Integrated circuitry, method used in the fabrication of a vertical...

Light-driven transition from insulator to conductor

Semiconductor device manufacturing method

Semiconductor device and method making the same

Display module, method for manufacturing display module, and laser...

Semiconductor device and manufacturing method of semiconductor device

Device and method for high pressure anneal

Integrated circuitry, method used in the fabrication of a vertical...

Substrate processing method and substrate processing apparatus

Ultra-thin dielectric films using photo up-conversion for applicati...

Display module, method for manufacturing display module, and laser...

Semiconductor constructions comprising dielectric material, and met...

Semiconductor devices and methods of fabricating the same

Method of manufacturing semiconductor device

Methods of post treating dielectric films with microwave radiation

Method for manufacturing semiconductor device

Method and apparatus for microwave treatment of dielectric films

Isolation in integrated circuit devices

Formulation for deposition of silicon doped hafnium oxide as ferroe...

Imprint apparatus, imprint method, and method of manufacturing article

Method of manufacturing semiconductor device, substrate processing...

Oxidation reduction for SiOC film

Pattern decomposition lithography techniques

Method and device for manufacturing flexible light emission device

Laser assisted SiC growth on silicon

Device and method for high pressure anneal

Semiconductor device and method for manufacturing the same

Patents Applicationslast 30 patents

SEMICONDUCTOR APPARATUS, POWER CONVERTER AND MANUFACTURING METHOD F...

Integrated Circuitry, Method Used In The Fabrication Of A Vertical...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

PATTERNING BASED ON IN-SITU FORMATION OF BLOCK COPOYLMER THROUGH DE...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

Manufacturing Method Of Semiconductor Device

Integrated Circuitry, Method Used In The Fabrication Of A Vertical...

DEVICE AND METHOD FOR HIGH PRESSURE ANNEAL

LARGE AREA GAPFILL USING VOLUMETRIC EXPANSION

APPARATUS INCLUDING A SUBSTRATE CHUCK, A DISPENSER, AND A PLANARIZA...

METHODS FOR BONDING SEMICONDUCTOR ELEMENTS

DISPLAY MODULE, METHOD FOR MANUFACTURING DISPLAY MODULE, AND LASER...

LIGHT-DRIVEN TRANSITION FROM INSULATOR TO CONDUCTOR

TEMPORARY PASSIVATION LAYER ON A SUBSTRATE

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

SEQUENTIAL PLASMA AND THERMAL TREATMENT

SEMICONDUCTOR DEVICE AND METHOD MAKING THE SAME

ISOLATION IN INTEGRATED CIRCUIT DEVICES

Integrated Circuitry, Method Used In The Fabrication Of A Vertical...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

PATTERN DECOMPOSITION LITHOGRAPHY TECHNIQUES

METHOD FOR MANUFACTURING A SILICON CARBIDE DEVICE

METHOD FOR FORMING GATE INSULATOR FILM AND HEAT TREATMENT METHOD

Device and Method for High Pressure Anneal

METHOD OF FORMING DIELECTRIC MATERIAL LAYERS USING PULSED PLASMA PO...

SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME

METHODS OF POST TREATING DIELECTRIC FILMS WITH MICROWAVE RADIATION

ULTRA-THIN DIELECTRIC FILMS USING PHOTO UP-CONVERSION FOR APPLICATI...