Tuning fork resonators

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CPC
H03H9/2468

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Parent Industries

HELECTRICITY H03Electronic circuits H03HIMPEDANCE NETWORKS H03H9/00Networks comprising electromechanical or electro-acoustic devices Electromechanical resonators

Current Industry

H03H9/2468Tuning fork resonators

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Resonator electrode shields
- Patent number 12,212,304
- Issue date Jan 28, 2025
- SiTime Corporation
- David Raymond Pedersen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonance device and manufacturing method
- Patent number 12,143,095
- Issue date Nov 12, 2024
- Murata Manufacturing Co., Ltd.
- Fumiya Endou
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonator electrode shields
- Patent number 11,799,449
- Issue date Oct 24, 2023
- SiTime Corporation
- David Raymond Pedersen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Temperature stable MEMS resonator
- Patent number 11,764,751
- Issue date Sep 19, 2023
- SiTime Corporation
- Paul M. Hagelin
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Resonator electrode shields
- Patent number 11,545,959
- Issue date Jan 3, 2023
- SiTime Corporation
- David Raymond Pedersen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Temperature stable MEMS resonator
- Patent number 11,469,734
- Issue date Oct 11, 2022
- SiTime Corporation
- Paul M. Hagelin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonator electrode shields
- Patent number 11,444,600
- Issue date Sep 13, 2022
- SiTime Corporation
- David Raymond Pedersen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Temperature stable mems resonator
- Patent number 11,082,024
- Issue date Aug 3, 2021
- SiTime Corporation
- Paul M. Hagelin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonator electrode shields
- Patent number 11,012,049
- Issue date May 18, 2021
- SiTime Corporation
- David Raymond Pedersen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonator and resonance device
- Patent number 10,715,106
- Issue date Jul 14, 2020
- MURATA MANUFACTURING CO., LTD.
- Wakana Hirota
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Temperature stable MEMS resonator
- Patent number 10,541,666
- Issue date Jan 21, 2020
- SiTime Corporation
- Paul M. Hagelin
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Vibration device
- Patent number 10,541,671
- Issue date Jan 21, 2020
- Kabushiki Kaisha Toshiba
- Tamio Ikehashi
- G01 - MEASURING TESTING
Information Patent Grant
Resonator electrode shields
- Patent number 10,439,590
- Issue date Oct 8, 2019
- SiTime Corporation
- David Raymond Pedersen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Ceramic temperature-compensated resonator
- Patent number 10,310,451
- Issue date Jun 4, 2019
- The Swatch Group Research and Development Ltd.
- Thierry Hessler
- G04 - HOROLOGY
Information Patent Grant
Vibration element manufacturing method, vibration element, electron...
- Patent number 10,128,430
- Issue date Nov 13, 2018
- Seiko Epson Corporation
- Yohei Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming capacitive MEMS sensor devices
- Patent number 10,107,830
- Issue date Oct 23, 2018
- Texas Instruments Incorporated
- Ira Oaktree Wygant
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Temperature stable MEMS resonator
- Patent number 9,948,273
- Issue date Apr 17, 2018
- SiTime Corporation
- Paul M. Hagelin
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Temperature stable MEMS resonator
- Patent number 9,548,720
- Issue date Jan 17, 2017
- SiTime Corporation
- Paul M. Hagelin
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Lever mechanisms for anti-phase mode isolation in MEMS tuning-fork...
- Patent number 9,217,756
- Issue date Dec 22, 2015
- The Regents of the University of California
- Brenton R. Simon
- G01 - MEASURING TESTING
Information Patent Grant
Temperature stable MEMS resonator
- Patent number 9,148,073
- Issue date Sep 29, 2015
- SiTime Corporation
- Paul M. Hagelin
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Detection circuit, physical quantity detection apparatus, angular v...
- Patent number 8,850,887
- Issue date Oct 7, 2014
- Seiko Epson Corporation
- Yoshinao Yanagisawa
- G01 - MEASURING TESTING
Information Patent Grant
Resonator electrode shields
- Patent number 8,749,315
- Issue date Jun 10, 2014
- SiTime Corporation
- David Raymond Pedersen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method of manufacturing a microelectromechanical system (MEMS) reso...
- Patent number 8,667,665
- Issue date Mar 11, 2014
- SiTime Corporation
- Paul Merritt Hagelin
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method for fabricating a microelectromechanical system (MEMS) reson...
- Patent number 8,234,774
- Issue date Aug 7, 2012
- SiTime Corporation
- Paul Merritt Hagelin
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Serrated MEMS resonators
- Patent number 7,545,237
- Issue date Jun 9, 2009
- SiTime Inc.
- Paul Merritt Hagelin
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
In-plane mechanically coupled microelectromechanical tuning fork re...
- Patent number 7,319,372
- Issue date Jan 15, 2008
- Board of Trustees of the Leland Standford Junior University
- Zhiyu Pan
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Coupled resonator vibratory rate sensor
- Patent number 5,763,781
- Issue date Jun 9, 1998
- Yishay Netzer
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
RESONANCE DEVICE AND MANUFACTURING METHOD
- Publication number 20230353122
- Publication date Nov 2, 2023
- Murata Manufacturing Co., Ltd.
- Fumiya ENDOU
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20220231663
- Publication date Jul 21, 2022
- Murata Manufacturing Co., Ltd.
- Masakazu FUKUMITSU
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
VIBRATION DEVICE
- Publication number 20180167053
- Publication date Jun 14, 2018
- Kabushiki Kaisha Toshiba
- Tamio IKEHASHI
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHOD OF FORMING CAPACITIVE MEMS SENSOR DEVICES
- Publication number 20160363609
- Publication date Dec 15, 2016
- TEXAS INSTRUMENTS INCORPORATED
- IRA OAKTREE WYGANT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CERAMIC TEMPERATURE-COMPENSATED RESONATOR
- Publication number 20140313866
- Publication date Oct 23, 2014
- THE SWATCH GROUP RESEARCH AND DEVELOPMENT LTD
- Thierry Hessler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LEVER MECHANISMS FOR ANTI-PHASE MODE ISOLATION IN MEMS TUNING-FORK...
- Publication number 20140260615
- Publication date Sep 18, 2014
- Brenton R. Simon
- G01 - MEASURING TESTING
Information Patent Application
Resonator Electrode Shields
- Publication number 20140028410
- Publication date Jan 30, 2014
- David Raymond Pedersen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
DETECTION CIRCUIT, PHYSICAL QUANTITY DETECTION APPARATUS, ANGULAR V...
- Publication number 20130055810
- Publication date Mar 7, 2013
- SEIKO NPC CORPORATION
- Yoshinao YANAGISAWA
- G01 - MEASURING TESTING
Information Patent Application
Temperature Stable MEMS Resonator
- Publication number 20120295384
- Publication date Nov 22, 2012
- Paul Merritt Hagelin
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Temperature Stable MEMS Resonator
- Publication number 20090160581
- Publication date Jun 25, 2009
- Paul Merritt Hagelin
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Temperature Stable MEMS Resonator
- Publication number 20090158566
- Publication date Jun 25, 2009
- Paul Merritt Hagelin
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Serrated MEMS Resonators
- Publication number 20080150390
- Publication date Jun 26, 2008
- Paul Merritt Hagelin
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
SERRATED MEMS RESONATORS
- Publication number 20080150654
- Publication date Jun 26, 2008
- Paul Merritt Hagelin
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
In-plane mechanically coupled microelectromechanical tuning fork re...
- Publication number 20070013464
- Publication date Jan 18, 2007
- Zhiyu Pan
- H03 - BASIC ELECTRONIC CIRCUITRY

Tuning fork resonators

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Resonator electrode shields

Resonance device and manufacturing method

Resonator electrode shields

Temperature stable MEMS resonator

Resonator electrode shields

Temperature stable MEMS resonator

Resonator electrode shields

Temperature stable mems resonator

Resonator electrode shields

Resonator and resonance device

Temperature stable MEMS resonator

Vibration device

Resonator electrode shields

Ceramic temperature-compensated resonator

Vibration element manufacturing method, vibration element, electron...

Method of forming capacitive MEMS sensor devices

Temperature stable MEMS resonator

Temperature stable MEMS resonator

Lever mechanisms for anti-phase mode isolation in MEMS tuning-fork...

Temperature stable MEMS resonator

Detection circuit, physical quantity detection apparatus, angular v...

Resonator electrode shields

Method of manufacturing a microelectromechanical system (MEMS) reso...

Method for fabricating a microelectromechanical system (MEMS) reson...

Serrated MEMS resonators

In-plane mechanically coupled microelectromechanical tuning fork re...

Coupled resonator vibratory rate sensor

Patents Applicationslast 30 patents

RESONANCE DEVICE AND MANUFACTURING METHOD

RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME

VIBRATION DEVICE

METHOD OF FORMING CAPACITIVE MEMS SENSOR DEVICES

CERAMIC TEMPERATURE-COMPENSATED RESONATOR

LEVER MECHANISMS FOR ANTI-PHASE MODE ISOLATION IN MEMS TUNING-FORK...

Resonator Electrode Shields

DETECTION CIRCUIT, PHYSICAL QUANTITY DETECTION APPARATUS, ANGULAR V...

Temperature Stable MEMS Resonator

Temperature Stable MEMS Resonator

Temperature Stable MEMS Resonator

Serrated MEMS Resonators

SERRATED MEMS RESONATORS

In-plane mechanically coupled microelectromechanical tuning fork re...