Tunnel dielectric layer used for the peripheral transistor

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H01L27/11543

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L27/00Devices consisting of a plurality of semiconductor or other solid state components formed in or on a common substrate

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H01L27/11543Tunnel dielectric layer used for the peripheral transistor

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Tunnel dielectric layer used for the peripheral transistor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Three-dimensional semiconductor memory device

Three-dimensional memory device including discrete memory elements...

Three-dimensional memory device containing III-V compound semicondu...

Memory structure and method of manufacturing the same

Three-dimensional memory device containing III-V compound semicondu...

Method of forming split gate memory cells with thinned side edge tu...

Semiconductor memory device having three-dimensional structure and...

Three-dimensional memory device containing III-V compound semicondu...

Three-dimensional memory device having an epitaxial vertical semico...

Non-volatile memory and method of fabricating the same

Three-dimensional memory device including wrap around word lines an...

Method of fabricating semiconductor device

Semiconductor device and manufacturing method thereof

Nonvolatile memory devices comprising a conductive line comprising...

Nonvolatile memory device and method for manufacturing the same

Method for fabricating semiconductor structure

Three-dimensional memory device including bottle-shaped memory stac...

Three-dimensional memory device containing offset column stairs and...

Method for manufacturing semiconductor memory device

Semiconductor device and a method of fabricating the same

Semiconductor device and manufacturing method thereof

Hybrid electronically erasable programmable read-only memory (EEPRO...

Low cost flash memory fabrication flow based on metal gate process

Method for forming flash memory unit

FinFET based flash memory cell

Semiconductor device manufacturing method including implementing el...

Semiconductor device, related manufacturing method, and related ele...

Semiconductor structure and method for fabricating the same

Nonvolatile semiconductor memory device and method of manufacturing...

High voltage double-diffused MOS (DMOS) device and method of manufa...

Patents Applicationslast 30 patents

ELECTRONIC DEVICES INCLUDING AN IMPLANT STRUCTURE, AND RELATED SYST...

NON-VOLATILE MEMORY DEVICE

METHOD OF FABRICATING A SEMICONDUCTOR DEVICE USING LASER ANNEALING

THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICES, METHODS OF MANUFACT...

SEMICONDUCTOR DEVICE WITH SINGLE POLY NON-VOLATILE MEMORY DEVICE AN...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

THREE-DIMENSIONAL MEMORY DEVICE WITH PLURAL CHANNELS PER MEMORY OPE...

MEMORY STRUCTURE AND METHOD OF MANUFACTURING THE SAME

THREE-DIMENSIONAL MEMORY DEVICE CONTAINING III-V COMPOUND SEMICONDU...

THREE-DIMENSIONAL MEMORY DEVICE CONTAINING III-V COMPOUND SEMICONDU...

THREE-DIMENSIONAL MEMORY DEVICE CONTAINING III-V COMPOUND SEMICONDU...

THREE-DIMENSIONAL MEMORY DEVICE INCLUDING WRAP AROUND WORD LINES AN...

THREE-DIMENSIONAL MEMORY DEVICE INCLUDING DISCRETE MEMORY ELEMENTS...

THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

NON-VOLATILE MEMORY AND METHOD OF FABRICATING THE SAME

SEMICONDUCTOR MEMORY DEVICE HAVING THREE-DIMENSIONAL STRUCTURE AND...

THREE-DIMENSIONAL MEMORY DEVICE HAVING AN EPITAXIAL VERTICAL SEMICO...

NONVOLATILE MEMORY DEVICES COMPRISING A CONDUCTIVE LINE COMPRISING...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

METHOD OF FABRICATING SEMICONDUCTOR DEVICE

THREE-DIMENSIONAL MEMORY DEVICE CONTAINING OFFSET COLUMN STAIRS AND...

NONVOLATILE MEMORY DEVICES AND METHODS OF FABRICATING THE SAME

CONDUCTIVE CHANNELS AND SOURCE LINE COUPLING

METHOD FOR FORMING FLASH MEMORY UNIT

METHOD FOR FABRICATING SEMICONDUCTOR STRUCTURE

NONVOLATILE MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE, RELATED MANUFACTURING METHOD, AND RELATED ELE...

HIGH VOLTAGE DOUBLE-DIFFUSED MOS (DMOS) DEVICE AND METHOD OF MANUFA...

SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME