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Deposition device and deposition method
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Patent number 10,815,567
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Issue date Oct 27, 2020
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Tokyo Electron Limited
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Katsuhito Hirose
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Continuous tow fiber coating reactor
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Patent number 10,710,111
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Issue date Jul 14, 2020
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Raytheon Technologies Corporation
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Ying She
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Film-forming apparatus
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Patent number 9,441,293
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Issue date Sep 13, 2016
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Tokyo Electron Limited
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Tetsuya Saitou
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Film cassette for gaseous vapor deposition
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Patent number 8,551,249
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Issue date Oct 8, 2013
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E I du Pont de Nemours and Company
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Peter Francis Carcia
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Apparatus for gaseous vapor deposition
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Patent number 8,529,700
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Issue date Sep 10, 2013
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E I du Pont de Nemours and Company
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Peter Francis Carcia
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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