Ultra or megasonic jets

Industry

CPC
B08B2203/0288

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B08Cleaning B08BCLEANING IN GENERAL PREVENTION OF FOULING IN GENERAL B08B2203/00Details of cleaning machines or methods involving the use or presence of liquid or steam

Current Industry

B08B2203/0288Ultra or megasonic jets

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 12,350,787
- Issue date Jul 8, 2025
- Ebara Corporation
- Kuniaki Yamaguchi
- B08 - CLEANING
Information Patent Grant
Wafer cleaning apparatus
- Patent number 12,341,052
- Issue date Jun 24, 2025
- ZEUS CO., LTD.
- Seung Dae Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultrasonically activated water ejector
- Patent number 12,303,946
- Issue date May 20, 2025
- Disco Corporation
- Xiaoming Qiu
- B08 - CLEANING
Information Patent Grant
Processing liquid nozzle and cleaning apparatus
- Patent number 12,109,580
- Issue date Oct 8, 2024
- Tokyo Electron Limited
- Daisuke Goto
- B08 - CLEANING
Information Patent Grant
Apparatus and method for prevention and treatment of marine biofouling
- Patent number 12,017,739
- Issue date Jun 25, 2024
- SLOAN WATER TECHNOLOGY LIMITED
- Timothy Grant Leighton
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Acoustic emitter device for regular cleaning of a downhole filter
- Patent number 11,945,012
- Issue date Apr 2, 2024
- Sergey Victorovich Korostelev
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,731,240
- Issue date Aug 22, 2023
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Non-contact clean module
- Patent number 11,721,563
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Jagan Rangarajan
- B08 - CLEANING
Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 11,660,643
- Issue date May 30, 2023
- Ebara Corporation
- Tomoatsu Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carousel for ultrasonic cleaning and method of using thereof
- Patent number 11,433,436
- Issue date Sep 6, 2022
- Applied Materials, Inc.
- Michael J. Coughlin
- B08 - CLEANING
Information Patent Grant
System and method for surface cleaning
- Patent number 11,351,579
- Issue date Jun 7, 2022
- The Boeing Company
- Sergey G. Ponomarev
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate support device and substrate cleaning device including th...
- Patent number 11,302,540
- Issue date Apr 12, 2022
- Samsung Electronics Co., Ltd.
- Jong keun Oh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Non-contact clean module
- Patent number 11,289,347
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Jagan Rangarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Filter cleaning method and filter cleaning apparatus
- Patent number 11,219,930
- Issue date Jan 11, 2022
- Nagase Filter Co, Ltd.
- Toshiki Eguchi
- B08 - CLEANING
Information Patent Grant
Electrodischarge apparatus
- Patent number 11,179,732
- Issue date Nov 23, 2021
- VLN Advanced Technologies Inc.
- Mohan Vijay
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for surface cleaning
- Patent number 11,167,325
- Issue date Nov 9, 2021
- The Boeing Company
- Sergey G. Ponomarev
- B08 - CLEANING
Information Patent Grant
Non-contact clean module
- Patent number 11,158,524
- Issue date Oct 26, 2021
- Applied Materials, Inc.
- Jagan Rangarajan
- B08 - CLEANING
Information Patent Grant
Megasonic cleaner
- Patent number 10,937,670
- Issue date Mar 2, 2021
- Samsung Electronics Co., Ltd.
- Sung-Yong Park
- B08 - CLEANING
Information Patent Grant
Fall-proof apparatus for cleaning semiconductor devices and a chamb...
- Patent number 10,770,315
- Issue date Sep 8, 2020
- ACM Research (Shanghai) Inc.
- Zhenming Chu
- B08 - CLEANING
Information Patent Grant
System and method for surface cleaning
- Patent number 10,688,536
- Issue date Jun 23, 2020
- The Boeing Company
- Sergey G. Ponomarev
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,522,370
- Issue date Dec 31, 2019
- Samsung Electronics Co., Ltd.
- Sang-Hyun Park
- B08 - CLEANING
Information Patent Grant
System and method for surface cleaning
- Patent number 10,343,193
- Issue date Jul 9, 2019
- The Boeing Company
- Sergey G. Ponomarev
- B24 - GRINDING POLISHING
Information Patent Grant
Integrated fluidjet system for stripping, prepping and coating a part
- Patent number 10,272,468
- Issue date Apr 30, 2019
- VLN Advanced Technologies Inc.
- Mohan M. Vijay
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus and treatment liquid nozzle
- Patent number 10,211,074
- Issue date Feb 19, 2019
- Semes Co., Ltd.
- Yoon Jong Ju
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,201,888
- Issue date Feb 12, 2019
- Ebara Corporation
- Kuniaki Yamaguchi
- B08 - CLEANING
Information Patent Grant
Ultrasonic cleaner
- Patent number 9,956,595
- Issue date May 1, 2018
- Toyota Jidosha Kabushiki Kaisha
- Takayasu Sato
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Substrate cleaning method and substrate cleaning apparatus
- Patent number 9,859,110
- Issue date Jan 2, 2018
- SCREEN Holdings Co., Ltd.
- Yosuke Hanawa
- B08 - CLEANING
Information Patent Grant
Integrated fluidjet system for stripping, prepping and coating a part
- Patent number 9,821,337
- Issue date Nov 21, 2017
- VLN Advanced Technologies Inc.
- Mohan M. Vijay
- B24 - GRINDING POLISHING
Information Patent Grant
Ultrasonic cleaning apparatus
- Patent number 9,815,092
- Issue date Nov 14, 2017
- Kaijo Corporation
- Junichiro Soejima
- B08 - CLEANING
Information Patent Grant
Substrate cleaning method and substrate cleaning apparatus
- Patent number 9,728,396
- Issue date Aug 8, 2017
- SCREEN Holdings Co., Ltd.
- Yosuke Hanawa
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED CLEAN AND DRY MODULE FOR CLEANING A SUBSTRATE
- Publication number 20240222152
- Publication date Jul 4, 2024
- Applied Materials, Inc.
- Jason A. RYE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE AND METHOD OF CLEANING SUBSTRATE
- Publication number 20240082885
- Publication date Mar 14, 2024
- EBARA CORPORATION
- Fumitoshi Oikawa
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230405762
- Publication date Dec 21, 2023
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
ULTRASONICALLY ACTIVATED WATER EJECTOR
- Publication number 20230173552
- Publication date Jun 8, 2023
- Disco Corporation
- Xiaoming Qiu
- B08 - CLEANING
Information Patent Application
PROCESSING LIQUID NOZZLE AND CLEANING APPARATUS
- Publication number 20220371041
- Publication date Nov 24, 2022
- TOKYO ELECTRON LIMITED
- Daisuke GOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
NON-CONTACT CLEAN MODULE
- Publication number 20220044946
- Publication date Feb 10, 2022
- Applied Materials, Inc.
- Jagan RANGARAJAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method for Prevention and Treatment of Marine Biofouling
- Publication number 20210139115
- Publication date May 13, 2021
- SLOAN WATER TECHNOLOGY LIMITED
- Peter Robert Birkin
- B63 - SHIPS OR OTHER WATERBORNE VESSELS RELATED EQUIPMENT
Information Patent Application
ACOUSTIC EMITTER DEVICE FOR REGULAR CLEANING OF A DOWNHOLE FILTER
- Publication number 20210039143
- Publication date Feb 11, 2021
- Sergey Victorovich KOROSTELEV
- E21 - EARTH DRILLING MINING
Information Patent Application
SYSTEM AND METHOD FOR SURFACE CLEANING
- Publication number 20200290096
- Publication date Sep 17, 2020
- The Boeing Company
- Sergey G. Ponomarev
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200135505
- Publication date Apr 30, 2020
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200135504
- Publication date Apr 30, 2020
- SHIBAURA MECHATRONICS CORPORATION
- Konosuke HAYASHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200105547
- Publication date Apr 2, 2020
- SANG-HYUN PARK
- B08 - CLEANING
Information Patent Application
NON-CONTACT CLEAN MODULE
- Publication number 20200043756
- Publication date Feb 6, 2020
- Applied Materials, Inc.
- Jagan RANGARAJAN
- B08 - CLEANING
Information Patent Application
SYSTEM AND METHOD FOR SURFACE CLEANING
- Publication number 20190275566
- Publication date Sep 12, 2019
- The Boeing Company
- Sergey G. Ponomarev
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE SUPPORT DEVICE AND SUBSTRATE CLEANING DEVICE INCLUDING TH...
- Publication number 20190221451
- Publication date Jul 18, 2019
- Samsung Electronics Co., Ltd.
- Jong keun OH
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190118338
- Publication date Apr 25, 2019
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B08 - CLEANING
Information Patent Application
MEGASONIC CLEANER
- Publication number 20190013218
- Publication date Jan 10, 2019
- Samsung Electronics Co., Ltd.
- Sung-Yong Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180076058
- Publication date Mar 15, 2018
- Samsung Electronics Co., Ltd.
- Sang-Hyun PARK
- B08 - CLEANING
Information Patent Application
INTEGRATED FLUIDJET SYSTEM FOR STRIPPING, PREPPING AND COATING A PART
- Publication number 20180043394
- Publication date Feb 15, 2018
- VLN Advanced Technologies Inc.
- Mohan M. Vijay
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS
- Publication number 20170309472
- Publication date Oct 26, 2017
- SCREEN Holdings Co., Ltd.
- Yosuke HANAWA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170252895
- Publication date Sep 7, 2017
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B08 - CLEANING
Information Patent Application
PULSE JET LIQUID GAS CLEANING SYSTEM
- Publication number 20140251381
- Publication date Sep 11, 2014
- United Technologies Corporation
- John E. Markowski
- B08 - CLEANING
Information Patent Application
Method And Apparatus For Surface Cleaning
- Publication number 20140053868
- Publication date Feb 27, 2014
- SEMATECH, INC.
- Abbas Rastegar
- B08 - CLEANING
Information Patent Application
FACILITATING STREAMING FLUID USING ACOUSTIC WAVES
- Publication number 20130340838
- Publication date Dec 26, 2013
- SEMATECH, INC.
- Abbas RASTEGAR
- B08 - CLEANING
Information Patent Application
ROLLING MILL ROLL-CLEANING DEVICE AND CLEANING METHOD
- Publication number 20130305799
- Publication date Nov 21, 2013
- NS PLANT DESIGNING CORPORATION
- Muneshige Ogawa
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Methods and Systems For Removing Contaminants From A Wire Of A Saw
- Publication number 20130206163
- Publication date Aug 15, 2013
- MEMC ELECTRONIC MATERIALS, S.P.A.
- Carlo Zavattari
- B08 - CLEANING
Information Patent Application
METHOD OF CLEANING A WAFER
- Publication number 20120285483
- Publication date Nov 15, 2012
- Li-Chung Liu
- B08 - CLEANING
Information Patent Application
Ultrasonic Waterjet Apparatus
- Publication number 20120061485
- Publication date Mar 15, 2012
- United Technologies Corporation
- Mohan M. Vijay
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS USING ULTRASONIC WAVES
- Publication number 20120042913
- Publication date Feb 23, 2012
- Korea Institute of Machinery and Materials
- Yang-lae Lee
- B08 - CLEANING
Information Patent Application
MEGASONIC MULTIFREQUENCY APPARATUS WITH MATCHED TRANSDUCERS AND MOU...
- Publication number 20110094548
- Publication date Apr 28, 2011
- J. Michael Goodson
- B08 - CLEANING

Ultra or megasonic jets

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus

Wafer cleaning apparatus

Ultrasonically activated water ejector

Processing liquid nozzle and cleaning apparatus

Apparatus and method for prevention and treatment of marine biofouling

Acoustic emitter device for regular cleaning of a downhole filter

Substrate processing apparatus

Non-contact clean module

Substrate cleaning device and substrate cleaning method

Carousel for ultrasonic cleaning and method of using thereof

System and method for surface cleaning

Substrate support device and substrate cleaning device including th...

Non-contact clean module

Filter cleaning method and filter cleaning apparatus

Electrodischarge apparatus

Method for surface cleaning

Non-contact clean module

Megasonic cleaner

Fall-proof apparatus for cleaning semiconductor devices and a chamb...

System and method for surface cleaning

Substrate processing apparatus

System and method for surface cleaning

Integrated fluidjet system for stripping, prepping and coating a part

Substrate treating apparatus and treatment liquid nozzle

Substrate processing apparatus

Ultrasonic cleaner

Substrate cleaning method and substrate cleaning apparatus

Integrated fluidjet system for stripping, prepping and coating a part

Ultrasonic cleaning apparatus

Substrate cleaning method and substrate cleaning apparatus

Patents Applicationslast 30 patents

INTEGRATED CLEAN AND DRY MODULE FOR CLEANING A SUBSTRATE

SUBSTRATE CLEANING DEVICE AND METHOD OF CLEANING SUBSTRATE

SUBSTRATE PROCESSING APPARATUS

ULTRASONICALLY ACTIVATED WATER EJECTOR

PROCESSING LIQUID NOZZLE AND CLEANING APPARATUS

NON-CONTACT CLEAN MODULE

Apparatus and Method for Prevention and Treatment of Marine Biofouling

ACOUSTIC EMITTER DEVICE FOR REGULAR CLEANING OF A DOWNHOLE FILTER

SYSTEM AND METHOD FOR SURFACE CLEANING

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

NON-CONTACT CLEAN MODULE

SYSTEM AND METHOD FOR SURFACE CLEANING

SUBSTRATE SUPPORT DEVICE AND SUBSTRATE CLEANING DEVICE INCLUDING TH...

SUBSTRATE PROCESSING APPARATUS

MEGASONIC CLEANER

SUBSTRATE PROCESSING APPARATUS

INTEGRATED FLUIDJET SYSTEM FOR STRIPPING, PREPPING AND COATING A PART

SUBSTRATE CLEANING METHOD AND SUBSTRATE CLEANING APPARATUS

SUBSTRATE PROCESSING APPARATUS

PULSE JET LIQUID GAS CLEANING SYSTEM

Method And Apparatus For Surface Cleaning

FACILITATING STREAMING FLUID USING ACOUSTIC WAVES

ROLLING MILL ROLL-CLEANING DEVICE AND CLEANING METHOD

Methods and Systems For Removing Contaminants From A Wire Of A Saw

METHOD OF CLEANING A WAFER

Ultrasonic Waterjet Apparatus

CLEANING APPARATUS USING ULTRASONIC WAVES

MEGASONIC MULTIFREQUENCY APPARATUS WITH MATCHED TRANSDUCERS AND MOU...