Patent Application
20170252895
Technical Field
The present invention relates to an apparatus for processing a substrate, such as a semiconductor wafer.
Background Art
Chemical mechanical polishing (CMP) apparatuses for polishing a surface of a substrate have been known in production of semiconductor devices. In a CMP apparatus, a polishing pad is pasted on the upper surface of a polishing table to form a polishing surface. The CMP apparatus presses a polishing target surface of a substrate held by a top ring against the polishing surface, and rotates the polishing table and the top ring while supplying a slurry as a polishing liquid to the polishing surface. Accordingly, the polishing surface and the polishing target surface are relatively moved with the surfaces being in sliding contact, and the polishing target surface is polished.
In a typical CMP apparatus, the polishing table or the polishing pad is larger than a substrate to be polished. While the substrate is held by the top ring such that a polishing target surface faces downward, the substrate is polished. The polished substrate is cleaned by a sponge member, such as of polyvinyl alcohol (PVA), rotating in contact with the substrate, and is then dried.
The applicant of the present application has filed an application on a technique where, after polishing of a substrate, a finishing process unit that presses a contact member having a smaller diameter than the substrate against the polished substrate to relatively move the contact member is provided in a CMP apparatus separately from a main polishing unit, and the substrate is slightly and additionally polished and cleaned (Japanese Patent Laid-Open No. 8-71511).
The CMP apparatus includes: a polishing unit for performing a substrate polishing process; a cleaning unit for performing a substrate cleaning process and drying process; and a load/unload unit that passes a substrate to the polishing unit and receives the substrate having been subjected to the cleaning process and the drying process by the cleaning unit. The CMP apparatus further includes a conveyor mechanism that conveys the substrate in the polishing unit, the cleaning unit, and the load/unload unit. The CMP apparatus sequentially performs various types of processes including polishing, cleaning and drying, while allowing the conveyor mechanism to convey the substrate. A cleaning unit has been disclosed that brings a cleaning member into contact with a semiconductor substrate to scrub and clean the substrate, and then brings the cleaning member having been cleaned into contact with a flat and rough surface of a correction member to perform self-cleaning (see Japanese Patent Laid-Open No. 9-92633).
In some cases, a substrate processing apparatus may be provided with a buff process module. The buff process module applies at least one of a buff-polishing process and a buff-cleaning process to a substrate. The buff-polishing process is a process that relatively moves a wafer and a buff pad against each other while the buff pad is in contact with the wafer, and causes a slurry to intervene between the wafer and the buff pad, thereby polishing and removing unwanted portions on a processing target surface of the wafer. On the other hand, the buff-cleaning process is a process that relatively moves the wafer and the buff pad against each other while the buff pad is in contact with the wafer, and causes a cleaning process liquid (a chemical solution, or the chemical solution and pure water) to intervene between the wafer and the buff pad, thereby removing contaminants on the surface of the wafer or modifying the property of the processing target surface.
Unfortunately, continuation of the buff-polishing process and the buff-cleaning process by the buff pad clogs the surface of the buff pad, thereby reducing the polishing performance and the cleaning performance. Accordingly, in order to renew the performance of the buff pad, conditioning which is referred to as a dressing process is required. The conditioning is performed by a conditioner. The conditioner includes a dressing table, and a dresser installed on the dressing table. The dressing table can be rotated by a drive mechanism. The dresser may be formed of a diamond dresser or a brush dresser, or a combination of these dressers.
When the buff pad is conditioned, the buff process module swings the buff arm such that the buff pad reaches a position facing the dresser. The buff process module rotates the dressing table about a predetermined rotation axis while rotating the buff head, and presses the buff pad against the dresser, thereby applying the dressing process to the buff pad (conditioning).
The attached
In a finishing process unit, in order to bring a contact member into contact at a high pressure and improve the cleaning effect and to increase the polishing speed, a substrate is required to be held by a table that is in contact with the entire rear surface of the substrate. In the case where a substrate is supported by a table that supports the substrate at an entire surface, abrasive grains and polishing by-products (organic residues) sometimes accumulate on the table surface, and contaminates the substrate to be processed. Accordingly, the table that supports the substrate, and structural components (a substrate conveyor mechanism etc.) accompanying the table are always required to have high cleanliness.
The present invention has an object to improve the degree of cleaning of a table on which a substrate is mounted and structural components accompanying the table during a polishing process.
The conventional technique only cleans the buff pad by relatively moving the buff pad and the dresser against each other. The cleaning process can thus be achieved to a certain extent, only with which the buff pad however cannot sufficiently cleaned in some cases.
Accordingly, the invention of the present application has an object to provide a buff process module having an enhanced buff pad cleaning power.
If the buff process module in the aforementioned example is provided with an atomizer, the following problem occurs. That is, in the example of the conventional technique in
On the contrary, in the buff process module, the buff pad has a size equivalent or smaller than the dresser. Consequently, in the buff process module, the entire surface of the buff pad is covered with the dresser. As a result, unlike the conventional technique, it is difficult to install the atomizer in the buff process module.
Accordingly, the invention of the present application has an object to provide an atomizer applicable to a buff process module that includes a buff pad having a size equivalent to or smaller than a dresser.
Furthermore, the aforementioned conventional technique has the following problems. That is, when the dresser of the conditioner continues applying the dressing process to the buff pad, contamination accumulates. Consequently, the surface of the dresser is required to be periodically cleaned (dress-rinsed). At this time, the surface of the dresser and the surface of the wafer, which is a processing target object, reside in the substantially same surface. This arrangement is adopted because the buff-polishing process, the buff-cleaning process and the dressing process can be achieved only by parallel (e.g., horizontal) movement of the buff pad. Unfortunately, if no measures are taken for cleaning the dresser, the cleaning liquid jetted toward the dresser is dispersed to the wafer and contaminates the wafer.
Accordingly, the invention of the present application has an object to provide a conditioner that does not contaminate the wafer on the buff table adjacent to the dresser even when the dresser is cleaned (dress-rinsed).
Furthermore, the aforementioned cleaning unit adopts only one cleaning method. Consequently, a cleaning target member cannot be sufficiently cleaned in some cases. For example, if grooves are formed on the cleaning target member, particles having entered the grooves (e.g., a slurry used for polishing, polishing dust on a substrate, etc.) cannot be sufficiently removed only by brushing in some cases. In such cases, it is preferred that in addition to the process of dressing the cleaning member using a brush or the like, pressurized water be separately jetted to the cleaning member by the atomizer to sufficiently remove the particles. That is, it is preferred that two or more types of conditioning be performed. If the two or more types of conditioning are to be performed, multiple conditioning devices are required to be installed for performing the respective types of conditioning. In this case, the installation space of the devices increases with the number of the conditioning devices. The increase, in turn, increases the entire size of the facility. Furthermore, the cleaning member is required to be moved between these devices. Consequently, the processing time is increased by a time required for the movement. These problems are commonly found not only in the cleaning unit but also in a final polishing unit that performs final polishing after polishing by a main polishing unit.
The present invention is made to solve at least a part of the aforementioned problem, and can be achieved as the following embodiments.
Embodiment 1 of the present invention is an apparatus for buff-processing a processing target object, including: a buff table that includes a support surface for supporting the processing target object; and a nozzle for supplying the support surface with a chemical solution for cleaning the support surface of the buff table.
Embodiment 2 of the present invention is the apparatus for buff-processing according to Embodiment 1, wherein the buff table includes astage film, and a surface of the stage film serves as the support surface for supporting the processing target object.
Embodiment 3 of the present invention is the apparatus for buff-processing according to Embodiment 1 or 2, wherein the nozzle is configured such that a direction of the nozzle can be changed in a plane of the buff table.
Embodiment 4 of the present invention is the apparatus for buff-processing according to any one of Embodiments 1 to 3, wherein the nozzle is configured such that a direction of the nozzle can be changed in a plane perpendicular to a plane of the buff table.
Embodiment 5 of the present invention is the apparatus for buff-processing according to any one of Embodiments 1 to 4, wherein the nozzle is configured such that a position of the nozzle can be changed in a direction perpendicular to a plane of the buff table.
Embodiment 6 of the present invention is the apparatus for buff-processing according to any one of Embodiments 1 to 5, wherein the buff table includes a fluid passage that extends to the support surface and is for supplying a fluid to the support surface through the buff table while the support surface of the buff table is cleaned.
Embodiment 7 of the present invention is the apparatus for buff-processing according to Embodiment 6, wherein the fluid passage is configured to communicate with a pure water and/or chemical solution supply source.
Embodiment 8 of the present invention is the apparatus for buff-processing according to Embodiment 6 or 7, wherein the fluid passage is configured to be communicable with a vacuum source for causing the processing target object to be vacuum-sucked onto the support surface while the processing target object is buff-processed.
Embodiment 9 of the present invention is the apparatus for buff-processing according to any one of Embodiments 1 to 8, further including a cleaning mechanism for cleaning the support surface of the buff table through physical contact.
Embodiment 10 of the present invention is the apparatus for buff-processing according to Embodiment 9, further including a buff head to which a buff pad for buff-processing the processing target object through physical contact can be attached, wherein the apparatus is configured to clean the support surface of the buff table through physical contact using the buff head and the buff pad.
Embodiment 11 of the present invention is the apparatus for buff-processing according to Embodiment 10, further including a fluid passage for supplying a fluid to the support surface through the buff head and the buff pad.
Embodiment 12 of the present invention is the apparatus for buff-processing according to Embodiment 9, further including a buff head to which a buff pad for buff-processing the processing target object through physical contact can be attached, wherein the buff head is configured such that a brush or a sponge member for cleaning the support surface of the buff table through physical contact can be attached to the buff head.
Embodiment 13 of the present invention is the apparatus for buff-processing according to Embodiment 9, further including: a buff head to which a buff pad for buff-processing the processing target object through physical contact can be attached; and a cleaning head to which a cleaning member, a brush, or a sponge member for cleaning the support surface of the buff table through physical contact can be attached.
Embodiment 14 of the present invention is the apparatus for buff-processing according to Embodiment 9, further including a roll sponge member configured to clean the support surface of the buff table through physical contact by rotating on the buff table.
Embodiment 15 of the present invention is the apparatus for buff-processing according to any one of Embodiments 1 to 14, further including at least one of an atomizer cleaner, an ultrasonic cleaner, and a cavitation jet cleaner for cleaning the support surface of the buff table.
Embodiment 16 of the present invention is any one of Embodiments 1 to 15, wherein the buff table includes a conveyor mechanism for conveying the processing target object to and/or from the buff table, and the apparatus is configured such that the conveyor mechanism is cleaned while the support surface is cleaned.
Embodiment 17 of the present invention provides a method of cleaning a support surface of a buff table of an apparatus for buff-processing a processing target object, the buff table being for supporting the processing target object, the method including a step of supplying the support surface with a chemical solution for cleaning the support surface of the buff table.
Embodiment 18 of the present invention is the method of cleaning the support surface of the buff table according to Embodiment 17, wherein the buff table includes a stage film, and a surface of the stage film serves as the support surface for supporting the processing target object.
Embodiment 19 of the present invention is the method of cleaning the support surface of the buff table according to Embodiment 17 or 18, wherein the buff table includes a conveyor mechanism for conveying the processing target object to and/or from the buff table, and the method further includes a step of cleaning the conveyor mechanism while cleaning the support surface.
Embodiment 20 of the present invention is the method of cleaning the support surface of the buff table according to any one of Embodiments 17 to 19, further including a step of changing a position where the chemical solution is supplied to the support surface, while the support surface of the buff table is cleaned.
Embodiment 21 of the present invention is the method of cleaning the support surface of the buff table according to any one of Embodiments 17 to 20, wherein the buff table includes a fluid passage that extends to the support surface and is for supplying a fluid to the support surface through the buff table while the support surface of the buff table is cleaned, and the method further includes a step of causing the fluid to flow through the fluid passage.
Embodiment 22 of the present invention is the method of cleaning the support surface of the buff table according to Embodiment 21, further including a step of causing pure water and/or the chemical solution to flow through the fluid passage.
Embodiment 23 of the present invention is the method of cleaning the support surface of the buff table according to any one of Embodiments 17 to 22, further including a step of cleaning the support surface of the buff table through physical contact.
Embodiment 24 of the present invention is the method of cleaning the support surface of the buff table according to any one of Embodiments 17 to 23, wherein the apparatus includes a buff head to which a buff pad for buff-processing the processing target object through physical contact can be attached, and the method further includes a step of cleaning the support surface of the buff table through physical contact using the buff head and the buff pad.
Embodiment 25 of the present invention is the method of cleaning the support surface of the buff table according to Embodiment 24, wherein the apparatus includes a fluid passage for supplying a fluid to the support surface through the buff head and the buff pad, and the method further includes a step of supplying the fluid through the fluid passage.
Embodiment 26 of the present invention is the method of cleaning the support surface of the buff table according to Embodiment 23, further including a step of cleaning the support surface of the buff table using a brush or a sponge member.
Embodiment 27 of the present invention is the method of cleaning the support surface of the buff table according to any one of Embodiments 17 to 26, further including a step of cleaning the support surface of the buff table using at least one of an atomizer cleaner, an ultrasonic cleaner, and a cavitation jet cleaner.
Embodiment 28 of the present invention provides an apparatus for buff-processing a processing target object, including: a buff table that includes a support surface for supporting the processing target object; and chemical solution supplying device for supplying the support surface with a chemical solution for cleaning the support surface of the buff table.
Embodiment 29 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 28, wherein the buff table includes a stage film, and a surface of the stage film serves as the support surface for supporting the processing target object.
Embodiment 30 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 28 or 29, wherein the buff table includes a conveyor mechanism for conveying the processing target object to and/or from the buff table, and the apparatus is configured such that the conveyor mechanism is cleaned while the support surface is cleaned.
Embodiment 31 of the present invention is the apparatus for buff-processing the processing target object according to any one of Embodiments 28 to 30, wherein the buff table includes a fluid passage that extends to the support surface and is for supplying a fluid to the support surface through the buff table while the support surface of the buff table is cleaned.
Embodiment 32 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 31, wherein the fluid passage is configured to be communicable with a vacuum source for causing the processing target object to be vacuum-sucked onto the support surface while the processing target object is buff-processed.
Embodiment 33 of the present invention is the apparatus for buff-processing the processing target object according to any one of Embodiments 28 to 32, further including a cleaning mechanism for cleaning the support surface of the buff table through physical contact.
Embodiment 34 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 33, further including a buff head to which a buff pad for buff-processing the processing target object through physical contact can be attached, wherein the apparatus is configured to clean the support surface of the buff table through physical contact using the buff head and the buff pad.
Embodiment 35 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 34, further including a fluid passage for supplying a fluid to the support surface through the buff head and the buff pad.
Embodiment 36 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 33, further including a buff head to which a buff pad for buff-processing the processing target object through physical contact can be attached, wherein the buff head is configured such that a brush or a sponge member for cleaning the support surface of the buff table through physical contact can be attached to the buff head.
Embodiment 37 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 33, further including: a buff head to which a buff pad for buff-processing the processing target object through physical contact can be attached; and a cleaning head to which a cleaning member, a brush, or a sponge member for cleaning the support surface of the buff table through physical contact can be attached.
Embodiment 38 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 33, further including a roll sponge member configured to clean the support surface of the buff table through physical contact by rotating on the buff table.
Embodiment 39 of the present invention is the apparatus for buff-processing the processing target object according to any one of Embodiments 28 to 38, further including at least one of an atomizer cleaner, an ultrasonic cleaner, and a cavitation jet cleaner for cleaning the support surface of the buff table.
Embodiment 40 of the present invention provides an apparatus for buff-processing a processing target object, including: a buff table that includes a support surface for supporting the processing target object; and a cleaning mechanism for cleaning the support surface of the buff table through physical contact.
Embodiment 41 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 40, further including a buff head to which a buff pad for buff-processing the processing target object through physical contact can be attached, wherein the apparatus is configured to clean the support surface of the buff table through physical contact using the buff head and the buff pad.
Embodiment 42 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 41, further including a fluid passage for supplying a fluid to the support surface through the buff head and the buff pad.
Embodiment 43 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 40, further including a buff head to which a buff pad for buff-processing the processing target object through physical contact can be attached, wherein the buff head is configured such that a brush or a sponge member for cleaning the support surface of the buff table through physical contact can be attached to the buff head.
Embodiment 44 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 40, further including: a buff head to which a buff pad for buff-processing the processing target object through physical contact can be attached; and a cleaning head to which a cleaning pad, a brush, or a sponge member for cleaning the support surface of the buff table through physical contact can be attached.
Embodiment 45 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 40, further including a roll sponge member configured to clean the support surface of the buff table through physical contact by rotating on the buff table.
Embodiment 46 of the present invention is the apparatus for buff-processing the processing target object according to any one of Embodiments 40 to 45, further including at least one of an atomizer cleaner, an ultrasonic cleaner, and a cavitation jet cleaner for cleaning the support surface of the buff table.
Embodiment 47 of the present invention is the apparatus for buff-processing the processing target object according to any one of Embodiments 40 to 46, further including a nozzle for supplying the support surface with a liquid for cleaning the support surface of the buff table.
Embodiment 48 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 47, wherein the nozzle is configured such that a direction of the nozzle can be changed in a plane of the buff table.
Embodiment 49 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 47 or 48, wherein the nozzle is configured such that a direction of the nozzle can be changed in a plane perpendicular to a plane of the buff table.
Embodiment 50 of the present invention is the apparatus for buff-processing the processing target object according to any one of Embodiments 47 to 49, wherein the nozzle is configured such that a position of the nozzle can be changed in a direction perpendicular to a plane of the buff table.
Embodiment 51 of the present invention is the apparatus for buff-processing the processing target object according to any one of Embodiments 40 to 50, wherein the buff table includes a fluid passage that extends to the support surface and is for supplying a fluid to the support surface through the buff table while the support surface of the buff table is cleaned.
Embodiment 52 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 51, wherein the fluid passage is configured to communicate with a pure water and/or chemical solution supply source.
Embodiment 53 of the present invention is the apparatus for buff-processing the processing target object according to Embodiment 51 or 52, wherein the fluid passage is configured to be communicable with a vacuum source for causing the processing target object to be vacuum-sucked onto the support surface while the processing target object is buff-processed.
Embodiment 54 of the present invention is the apparatus for buff-processing the processing target object according to any one of Embodiments 40 to 53, wherein the buff table includes a conveyor mechanism for conveying the processing target object to and/or from the buff table, and the apparatus is configured such that the conveyor mechanism is cleaned while the support surface is cleaned.
Embodiment 55 of the present invention provides a method of cleaning a support surface of a buff table of an apparatus for buff-processing a processing target object, the buff table being for supporting the processing target object, the method including a step of cleaning the support surface of the buff table through physical contact.
Embodiment 56 of the present invention is the method of cleaning the support surface of the buff table of the apparatus for buff-processing the processing target object according to Embodiment 55, wherein the apparatus includes a buff head to which a buff pad for buff-processing the processing target object through physical contact can be attached, and the method further includes a step of cleaning the support surface of the buff table through physical contact using the buff head and the buff pad.
Embodiment 57 of the present invention is the method of cleaning the support surface of the buff table of the apparatus for buff-processing the processing target object according to Embodiment 56, wherein the apparatus includes a fluid passage for supplying a fluid to the support surface through the buff head and the buff pad, and the method further includes a step of supplying the fluid through the fluid passage.
Embodiment 58 of the present invention is the method of cleaning the support surface of the buff table of the apparatus for buff-processing the processing target object according to Embodiment 55, further including a step of cleaning the support surface of the buff table using a brush or a sponge member.
Embodiment 59 of the present invention is the method of cleaning the support surface of the buff table of the apparatus for buff-processing the processing target object according to any one of Embodiments 55 to 58, further including a step of cleaning the support surface of the buff table using at least one of an atomizer cleaner, an ultrasonic cleaner, and a cavitation jet cleaner.
Embodiment 60 of the present invention is the method of cleaning the support surface of the buff table of the apparatus for buff-processing the processing target object according to any one of Embodiments 55 to 59, wherein the buff table includes a conveyor mechanism for conveying the processing target object to and/or from the buff table, and the method further includes a step of cleaning the conveyor mechanism while cleaning the support surface.
Embodiment 61 of the present invention is a buff process module, including: a buff table on which a processing target object is mounted; a buff head that holds a buff pad for applying a predetermined process to the processing target object; a buff arm that supports and swings the buff head; a dresser for dressing the buff pad; and a brush-cleaning mechanism that is disposed between the buff table and the dresser and is for cleaning the buff pad.
Embodiment 62 of the present invention adopts, in addition to the configuration of Embodiment 61, a configuration wherein the brush-cleaning mechanism can clean an entire surface of the buff pad configured to move between the buff table and the dresser.
Embodiment 63 of the present invention adopts, in addition to the configuration of Embodiment 62, a configuration wherein the brush-cleaning mechanism is disposed such that the brush-cleaning mechanism can be in contact with a radius portion of the buff pad configured to move between the buff table and the dresser, and can clean the entire surface of the buff pad through rotation of the buff head.
Embodiment 64 of the present invention adopts, in addition to the configuration of any one of Embodiments 61 to 63, a configuration wherein the brush-cleaning mechanism can access and retract from a movement path of the buff pad.
Embodiment 65 of the present invention adopts, in addition to the configuration of Embodiment 64, a configuration wherein the brush-cleaning mechanism can be rotationally moved by a rotary actuator or linearly moved by a cylinder.
Embodiment 66 of the present invention adopts, in addition to the configuration of any one of Embodiments 61 to 65, a configuration wherein a base is provided in proximity to the dresser, and the brush-cleaning mechanism is installed on the base.
Embodiment 67 of the present invention adopts, in addition to the configuration of any one of Embodiments 61 to 66, a configuration wherein cleaning by the brush-cleaning mechanism is performed in at least any of stages before, during, and after a dressing process.
Embodiment 68 of the present invention adopts, in addition to the configuration of any one of Embodiments 61 to 67, a configuration wherein the brush-cleaning mechanism includes a process liquid jet orifice for jetting a process liquid toward the buff pad.
Embodiment 69 of the present invention adopts, in addition to the configuration of any one of Embodiments 61 to 68, a configuration wherein on a surface of the buff pad, a groove continuous from a center portion to an outer peripheral portion is formed, and a process liquid outlet from which a process liquid flows is provided at the center portion of the buff pad, and the process liquid flows from the process liquid outlet in a state where the buff pad is in contact with the dresser.
Embodiment 70 of the present invention adopts, in addition to the configuration of Embodiment 69, a configuration wherein the groove of the buff pad includes a flow rate reducer that reduces a flow rate of the process liquid in proximity to an outermost peripheral portion of the buff pad.
Embodiment 71 of the present invention adopts, in addition to the configuration of any one of Embodiments 61 to 70, a configuration wherein a dresser groove is formed on a surface of the dresser.
Embodiment 72 of the present invention adopts, in addition to the configuration of Embodiment 71, a configuration wherein the dresser groove is radial or spiral.
Embodiment 73 of the present invention adopts, in addition to the configuration of Embodiment 68, a configuration wherein an adjustment valve configured to adjust at least one of a flow rate or a pressure of the process liquid communicates with the process liquid jet orifice.
Embodiment 74 of the present invention adopts, in addition to the configuration of any one of Embodiments 61 to 73, a configuration wherein a buff pad cover configured to prevent the process liquid from dispersing is provided in proximity to the buff pad.
Embodiment 75 of the present invention adopts, in addition to the configuration of Embodiment 74, a configuration wherein at least a part of the buff arm performs a part of a function of the buff pad cover.
Embodiment 76 of the present invention adopts, in addition to the configuration of any one of Embodiments 61 to 75, a configuration wherein the process liquid is at least one liquid selected from a group consisting of deionized water, a chemical solution and a slurry, or a mixture of the liquid and compressed air.
Embodiment 77 of the present invention adopts, in addition to the configuration of Embodiment 76, a configuration wherein supply of each of the liquids is switchable.
Embodiment 78 of the present invention adopts, in addition to the configuration of any one of Embodiments 69 to 77, a configuration wherein the buff pad is cleaned by an ultrasonic cleaning fluid instead of or together with the process liquid.
Embodiment 79 of the present invention adopts a configuration of a substrate processing apparatus, including the buff process module according to any one of Embodiments 61 to 78.
Embodiment 80 of the present invention adopts a configuration of a buff pad cleaning method for cleaning a buff pad for applying a predetermined process to a processing target object, including: supporting and swinging a buff head that holds the buff pad by a buff arm; and cleaning the buff pad by a brush-cleaning mechanism disposed between a buff table on which the processing target object is mounted and a dresser for dressing the buff pad.
Embodiment 81 of the present invention adopts, in addition to the configuration of Embodiment 80, a configuration wherein the brush-cleaning mechanism cleans an entire surface of the buff pad configured to move between the buff table and the dresser.
Embodiment 82 of the present invention adopts, in addition to the configuration of Embodiment 81, a configuration wherein the entire surface of the buff pad is cleaned by the brush-cleaning mechanism disposed such that the brush-cleaning mechanism can be in contact with a radius portion of the buff pad configured to move between the buff table and the dresser, while the buff head is rotated.
Embodiment 83 of the present invention adopts, in addition to the configuration of any one of Embodiments 80 to 82, a configuration wherein the brush-cleaning mechanism can access and retract from a movement path of the buff pad.
Embodiment 84 of the present invention adopts, in addition to the configuration of any one of Embodiments 80 to 83, a configuration wherein the brush-cleaning mechanism is rotationally moved by a rotary actuator or linearly moved by a cylinder.
Embodiment 85 of the present invention adopts, in addition to the configuration of any one of Embodiments 80 to 84, a configuration wherein cleaning by the brush-cleaning mechanism is performed in at least any of stages before, during, and after a dressing process.
Embodiment 86 of the present invention adopts, in addition to the configuration of any one of Embodiments 80 to 85, a configuration wherein cleaning by the brush-cleaning mechanism is performed while a process liquid is jetted from a process liquid jet orifice provided for the brush-cleaning mechanism.
Embodiment 87 of the present invention adopts a configuration of a buff process module, including: a buff pad held by a buff head; and a cleaning mechanism that cleans a surface of the buff pad, wherein a groove is formed on the surface of the buff pad, and the cleaning mechanism includes an atomizer that jets a high pressure cleaning fluid to remove deposit in the groove.
Embodiment 88 of the present invention adopts, in addition to the configuration of Embodiment 87, a configuration wherein the atomizer is disposed below the buff pad that faces perpendicularly downward.
Embodiment 89 of the present invention adopts, in addition to the configuration of Embodiment 87 or 88, a configuration wherein the buff pad is movable between a buff table configured to hold a substrate and a dresser configured to dresse the buff pad, and the atomizer is disposed in a movement path of the buff pad.
Embodiment 90 of the present invention adopts, in addition to the configuration of Embodiment 89, a configuration wherein the buff head can be apart from the dresser, and the atomizer is positioned between the buff head and the dresser, and jets the high pressure cleaning fluid.
Embodiment 91 of the present invention adopts, in addition to the configuration of any one of Embodiments 87 to 90, a configuration wherein the atomizer is freely movable.
Embodiment 92 of the present invention adopts, in addition to the configuration of Embodiment 91, a configuration wherein the atomizer can be rotationally moved by a rotary actuator or linearly moved by a cylinder.
Embodiment 93 of the present invention adopts, in addition to the configuration of any one of Embodiments 87 to 92, a configuration wherein the atomizer is positioned such that the atomizer can clean at least a radius portion of the buff pad, and can clean the entire surface through rotation of the buff pad.
Embodiment 94 of the present invention adopts, in addition to the configuration of any one of Embodiments 87 to 93, a configuration wherein the atomizer includes a plurality of fluid jet orifices along a linearly shaped main body.
Embodiment 95 of the present invention adopts, in addition to the configuration of any one of Embodiments 87 to 94, a configuration wherein a cover configured to prevent the high pressure cleaning fluid from dispersing is provided in proximity to the buff pad.
Embodiment 96 of the present invention adopts, in addition to the configuration of Embodiment 95, further including a buff arm that holds the buff head, a configuration wherein the buff arm is covered with the cover.
Embodiment 97 of the present invention adopts, in addition to the configuration of Embodiment 95 or 96, a configuration wherein instead of the cover, a fixed cover fixed around the dresser is provided.
Embodiment 98 of the present invention adopts, in addition to the configuration of Embodiment 97, a configuration wherein the fixed cover has a notch formed to avoid contact with the buff arm.
Embodiment 99 of the present invention adopts, in addition to the configuration of Embodiment 96, a configuration wherein the buff arm itself has a function of the cover.
Embodiment 100 of the present invention adopts, in addition to the configuration of Embodiment 96, a configuration wherein the atomizer jets the high pressure cleaning fluid while being positioned below the buff arm.
Embodiment 101 of the present invention adopts, in addition to the configuration of Embodiment 96 or 100, a configuration wherein the atomizer cleans a lower surface of the buff arm at a same time of cleaning the buff pad.
Embodiment 102 of the present invention adopts, in addition to the configuration of any one of Embodiments 87 to 101, a configuration wherein the cleaning mechanism further includes at least one of an ultrasonic cleaning mechanism and a brush-cleaning mechanism in a cleaning liquid container.
Embodiment 103 of the present invention adopts, in addition to the configuration of any one of Embodiments 87 to 102, a configuration wherein the high pressure cleaning fluid is a liquid or a mixed fluid of the liquid and a gas.
Embodiment 104 of the present invention adopts, in addition to the configuration of Embodiment 103, a configuration wherein the cleaning liquid is at least any one liquid selected from a group consisting of deionized water, a chemical solution and a slurry, or a mixture of the liquid and compressed air.
Embodiment 105 of the present invention adopts, in addition to the configuration of Embodiment 104, a configuration wherein supply of each type of the liquid is switchable.
Embodiment 106 of the present invention adopts, in addition to the configuration of any one of Embodiments 87 to 105, a configuration wherein an ultrasonic cleaning fluid is used together with the high pressure cleaning fluid.
Embodiment 107 of the present invention adopts a configuration of a substrate processing apparatus, including the buff process module according to any one of Embodiments 87 to 106.
Embodiment 108 of the present invention adopts a configuration of a buff pad cleaning method for cleaning a buff pad used in a substrate processing apparatus, including using the buff pad subjected to a dressing process by a dresser, and jetting a high pressure cleaning fluid from an atomizer to the buff pad.
Embodiment 109 of the present invention is adopts, in addition to the configuration of Embodiment 108, a configuration wherein the jetting of the cleaning fluid to the buff pad is performed in parallel with a process to a substrate on the buff table.
Embodiment 110 of the present invention is adopts, in addition to the configuration of Embodiment 108 or 109, a configuration wherein when the buff pad is disposed above the dresser, the atomizer moves between the buff pad and the dresser and jets the cleaning fluid.
Embodiment 111 of the present invention is adopts, in addition to the configuration of any one of Embodiments 108 to 110, a configuration wherein when a buff arm for swinging the buff pad is above the atomizer, the atomizer jets the cleaning fluid.
Embodiment 112 of the present invention adopts a configuration of a conditioner including a dresser for dressing a buff pad of a substrate processing apparatus, the dresser further including a dresser cleaning mechanism configured to jet a cleaning liquid to the dresser to clean the dresser, wherein a surface of the dresser is at a lower position than a position of a buff table disposed adjacent to the dresser.
Embodiment 113 of the present invention adopts, in addition to the configuration of Embodiment 112, a configuration wherein the dresser cleaning mechanism jets the cleaning liquid in a direction away from the buff table.
Embodiment 114 of the present invention adopts, in addition to the configuration of Embodiment 112 or 113, a configuration wherein a cover for preventing the cleaning liquid from dispersing is disposed between the dresser and the buff table.
Embodiment 115 of the present invention adopts, in addition to the configuration of Embodiment 114, a configuration wherein the cover includes a contact avoiding mechanism that avoids contact with the swinging buff pad.
Embodiment 116 of the present invention adopts, in addition to the configuration of Embodiment 115, a configuration wherein the contact avoiding mechanism includes a cover moving mechanism configured to move the cover in an axial direction of a rotation axis of the dresser or the buff table.
Embodiment 117 of the present invention adopts, in addition to the configuration of Embodiment 115 or 116, a configuration wherein the cover includes a substantially cylindrical cover that covers at least a part of a periphery of the dresser, or a periphery of the buff table, and the contact avoiding mechanism includes a notch formed at least a part of the substantially cylindrical cover for allowing the buff pad to pass, and a rotational drive mechanism configured to rotate the cover concentrically with a rotation axis of the dresser or the buff table.
Embodiment 118 of the present invention adopts, in addition to the configuration of Embodiment 117, a configuration wherein the contact avoiding mechanism includes a movable cover member for opening and closing the notch.
Embodiment 119 of the present invention adopts, in addition to the configuration of Embodiment 118, a configuration wherein the movable cover member is movable along a circumferential direction or a central axial direction with respect to the cover.
Embodiment 120 of the present invention adopts, in addition to the configuration of any one of Embodiments 112 to 119, further including an air curtain forming mechanism configured to form an air curtain in a space between the buff table and this mechanism.
Embodiment 121 of the present invention adopts, in addition to the configuration of Embodiment 120, a configuration wherein while jetting of the cleaning liquid is stopped, formation of the air curtain is also stopped.
Embodiment 122 of the present invention adopts, in addition to the configuration of any one of Embodiments 112 to 121, further including a locally exhausted state forming mechanism configured to form a locally exhausted state around the dresser.
Embodiment 123 of the present invention adopts, in addition to the configuration of any one of Embodiments 112 to 122, a configuration wherein the cleaning liquid is a liquid including at least any one selected from a group consisting of deionized water, a chemical solution and a slurry, or a mixture of the liquid and compressed air.
Embodiment 124 of the present invention adopts, in addition to the configuration of Embodiment 123, a configuration wherein supply of each type of the liquid is switchable.
Embodiment 125 of the present invention adopts, in addition to the configuration of any one of Embodiments 112 to 124, a configuration wherein an ultrasonic cleaning fluid is used together with the high pressure cleaning fluid.
Embodiment 126 of the present invention adopts, in addition to the configuration of any one of Embodiments 112 to 125, a configuration wherein the cleaning liquid is a high pressure cleaning fluid.
Embodiment 127 of the present invention adopts a configuration of a buff process module, including: the conditioner according to any one of Embodiments 112 to 126; a buff table configured to hold a wafer; and a buff head configured to hold a buff pad and to buff-processe the wafer, wherein if a cover for preventing the cleaning liquid from dispersing is fixedly provided between the dresser and the buff table, the buff head is movable in a direction of a rotation axis of the dresser or a rotation axis of the wafer, and the buff head is movable between the conditioner and the buff table in a state of being moved to a higher position than a position of the cover.
Embodiment 128 of the present invention adopts, in addition to the configuration of Embodiment 127, a configuration wherein a buff table cover is provided at least a part of a periphery of the buff table.
Embodiment 129 of the present invention adopts, in addition to the configuration of Embodiment 127 or 128, a configuration including a descending air current generating mechanism configured to generate a descending air current from above the buff table.
Embodiment 130 of the present invention adopts a configuration of a substrate processing apparatus, including the conditioner according to any one of Embodiments 112 to 126.
Embodiment 131 of the present invention adopts a configuration of a substrate processing apparatus, including the buff process module according to any one of Embodiments 127 to 129.
Embodiment 132 of the present invention adopts a configuration of a dresser rinsing method of cleaning a dresser in a conditioner, the conditioner including the dresser, the dresser being for dressing a buff pad of a substrate processing apparatus, the method including: providing a dresser cleaning mechanism configured to jet a cleaning liquid to the dresser to clean the dresser; disposing a surface of the dresser at a lower position than a position of a buff table disposed adjacent to the dresser, and jetting the cleaning liquid from the dresser cleaning mechanism to the dresser.
Embodiment 133 of the present invention adopts, in addition to the configuration of Embodiment 132, a configuration wherein the jetting of the cleaning liquid to the dresser is performed in parallel with a process to a substrate on the buff table.
Embodiment 134 of the present invention adopts, in addition to the configuration of Embodiment 132 or 133, a configuration wherein a predetermined cover is provided at least at a part of a periphery of the dresser or a periphery of the buff table, and when the buff pad is moved between the buff table and the dresser, a contact avoiding mechanism is operated to avoid contact between the buff pad and the cover.
Embodiment 135 of the present invention adopts, in addition to the configuration of any one of Embodiments 132 to 134, a configuration wherein the method performs at least any one of forming an air curtain between the buff table and the dresser, forming a locally exhausted state around the dresser, and forming a descending air current from above the buff table, at a same time of jetting the cleaning liquid to the dresser.
Embodiment 136 of the present invention adopts a configuration of a conditioner including a dresser for dressing a buff pad of a substrate processing apparatus, further including a dresser cleaning mechanism configured to jet a cleaning liquid to the dresser to clean the dresser, wherein a cover for preventing the cleaning liquid from dispersing is provided between the dresser and a buff table disposed adjacent to the dresser.
Embodiment 137 of the present invention adopts a configuration of a conditioner including a dresser for dressing a buff pad of a substrate processing apparatus, further including a dresser cleaning mechanism configured to jet a cleaning liquid to the dresser to clean the dresser, wherein the dresser cleaning mechanism is configured to jet the cleaning liquid in a direction away from the buff table.
Embodiment 138 of the present invention provides a conditioning device for conditioning a buff pad used for a buff process. This conditioning device includes: a base plate configured to be rotatable; a first conditioner provided in an installation area of the base plate; and a second conditioner that is provided in the installation area of the base plate, but has different conditioning characteristics than the first conditioner has.
The conditioning device according to Embodiment 138 can perform two types of conditioning by the first conditioner and the second conditioner in the installation space of one base plate. Consequently, the installation space for the conditioning device can be reduced in comparison with the case of installing multiple conditioning devices each having a single type of conditioning function. Furthermore, in the case of applying two types of conditioning to the buff pad, there is no need to move the buff pad between the two conditioning devices. Consequently, the time required for conditioning the buff pad can be reduced. Alternatively, three or more types of conditioning may be applied to the buff pad. The multiple types of conditioning may be applied simultaneously or sequentially.
Embodiment 139 of the present invention is according to Embodiment 138, wherein the first conditioner includes a plurality of blocks separated from each other by intervals. The second conditioner is provided between the blocks. This embodiment can easily install the first conditioner and the second conditioner in the installation area of the base plate. Consequently, the conditioning device can be easily manufactured.
Embodiment 140 of the present invention is according to Embodiment 138, wherein at least one of a hole, a groove, and a notch is formed at the first conditioner. The at least one of the hole, the groove, and the notch is provided with the second conditioner. This embodiment can appropriately form the first conditioner and the second conditioner in the installation area of the base plate. The hole may be a through-hole, or a blind hole.
Embodiment 141 of the present invention is according to any one of Embodiments 138 to 140, wherein the second conditioner includes at least one of a brush and a jet nozzle. According to this embodiment, the buff pad can be appropriately conditioned by at least one of brushing and fluid jetting.
Embodiment 142 of the present invention is according to Embodiment 141, wherein the second conditioner includes a plurality of jet nozzles. This embodiment facilitates conditioning over the entire surface of the buff pad.
Embodiment 143 of the present invention is according to Embodiment 142, wherein a common supply path for supplying a fluid to each of the jet nozzles is formed in the base plate. This embodiment can simplify the configuration of the fluid supply path. Consequently, the size of the conditioning device can be reduced. Alternatively, the conditioning device can be easily manufactured or maintained.
Embodiment 144 of the present invention is according to any one of Embodiments 141 to 143, wherein the first conditioner has a through-hole formed to penetrate the first conditioner in a front-and-rear-surface direction. The through-hole functions as the jet nozzle. This embodiment allows the through-hole of the first conditioner to function as the second conditioner. Consequently, the configuration of the conditioning device can be simplified.
Embodiment 145 of the present invention is according to any one of Embodiments 141 to 143, wherein the first conditioner has a through-hole formed to penetrate the first conditioner in a front-and-rear-surface direction. The jet nozzle is disposed in the through-hole. According to this embodiment, the jet nozzle is provided on the base plate, and the first conditioner is attached to the base plate such that the through-hole can accommodate the jet nozzle, thereby allowing the conditioning device to be manufactured. Consequently, manufacture can be facilitated.
Embodiment 146 of the present invention is according to any one of Embodiments 142 and 143 and Embodiments 144 and 145 dependent on Embodiment 142, wherein the jet nozzles are configured such that if the buff pad is disposed at a predetermined position where conditioning is performed, jetting areas of the respective jet nozzles do not overlap with each other between the jet nozzles and the buff pad disposed at the predetermined position. This embodiment can prevent the jets of fluid emitted by the respective jet nozzles from colliding with each other, which in turn can prevent the pressure applied by the fluid to the buff pad from being reduced. Consequently, reduction in conditioning performance due to the collision can be prevented.
Embodiment 147 of the present invention is according to any one of Embodiments 142, 143 and 146 and Embodiments 144 and 145 dependent on Embodiment 142, wherein the jet nozzles are disposed at respective positions different in a radial direction from each other. According to this embodiment, during rotation of the first and second conditioners due to rotation of the base plate, the jet nozzles are arranged on the respective rotation trajectories different from each other. Consequently, a small number of jet nozzles can condition the entire surface of the buff pad. In other words, the state where the multiple jet nozzles are arranged on the same trajectory can be prevented, which allows the number of jet nozzles to be reduced.
Embodiment 148 of the present invention is according to Embodiment 147, wherein the jet nozzles are configured to have fluid jetting rates different from each other. This embodiment can achieve highly flexible conditioning. For example, the jet nozzle arranged relatively outside in the radial direction has a larger area to be conditioned than the jet nozzle arranged relatively inside has. Accordingly, the jetting rate of the jet nozzle arranged outside is configured to be higher than the jet nozzle arranged inside. This configuration can achieve the balance of the distribution of flow rates of fluid colliding against the buff pad per unit area.
Embodiment 149 of the present invention is according to any one of Embodiments 138 to 148, wherein the first conditioner is formed of diamond, ceramic, or a brush. This embodiment can appropriately condition the buff pad by the first conditioner.
Embodiment 150 of the present invention provides a buff process apparatus, including the conditioning device according to any one of Embodiments 138 to 149. This buff process apparatus can exert advantageous effects similar to those of any one of Embodiments 138 to 149.
Embodiment 151 of the present invention provides a substrate processing apparatus. This substrate processing apparatus includes: a chemical mechanical polishing apparatus; and the buff process apparatus according to Embodiment 150 for applying postprocessing to a substrate having been processed by the chemical mechanical polishing apparatus. This substrate processing apparatus can exert advantageous effects similar to those of any one of Embodiments 138 to 149.
Embodiment 152 of the present invention provides a dresser for conditioning a buff pad used for a buff process. This dresser has at least one of a hole, a groove and a notch formed in the dresser. This dresser can be used for the conditioning device of Embodiment 140.
Embodiment 153 of the present invention provides a conditioning method for conditioning a buff pad used for a buff process. This method includes a step of simultaneously applying two types of conditioning to the buff pad using a first area for conditioning the buff pad, and a second area for conditioning that has conditioning characteristics different than the conditioning characteristics the first area has. This method can exert advantageous effects similar to those of Embodiment 138. Furthermore, the time required for conditioning can be reduced.
Embodiment 154 of the present invention provides a conditioning method for conditioning a buff pad used for a buff process. This method includes: a step of preparing a conditioning device where a second area provided with a jet nozzle for conditioning, and a first area for conditioning by a method different from a method for the second area are formed in an installation area of a base plate; a first conditioning step of conditioning the buff pad in the first area, and a second conditioning step of conditioning the buff pad in the second area in a state where a distance between the base plate and the buff pad is more than the distance between the base plate and the buff pad in the first step, before or after the first step. This method can exert advantageous effects similar to those of Embodiment 138. More specifically, in the case of performing the second step after the first step, the fluid is jetted from the jet nozzle in the state where a gap is formed between the buff pad and the first conditioner. Consequently, conditioning dust generated by the first step and the second step can be easily ejected outside.
A buff process apparatus, which is a substrate processing apparatus according to the present invention, is hereinafter described with reference to the accompanying
In this specification, the buff process includes at least one of a buff-polishing process and a buff-cleaning process.
The buff-polishing process is a process that relatively moves a substrate and a buff pad against each other while the buff pad is in contact with the substrate, and causes a slurry to intervene between the substrate and the buff pad, thereby polishing and removing unwanted portions on a processing target surface of the substrate. The buff-polishing process is a process that can apply a stronger physical action force to a substrate than a physical action force applied to the substrate when the substrate is cleaned by the physical action force using a sponge member (e.g., PVA sponge member). Accordingly, the buff pad may be, for example, a pad including foamed polyurethane and non-woven fabric that are stacked on each other, more specifically, a commercially available series of IC1000™/SUBA®, or a suede-like porous polyurethane non-fibrous pad, more specifically, a commercially available POLITEX® or the like. The buff-polishing process can achieve removal of a surface part which is damaged by a scratch or the like or to which contaminants adhere, additional removal of a portion which cannot have been removed by main polishing in the main polishing unit, or improvement in morphology, such as on unevenness in micro regions and film thickness distribution over the entire substrate after main polishing.
The buff-cleaning process is a process that relatively moves the substrate and the buff pad against each other while the buff pad is in contact with the substrate, and causes a cleaning process liquid (a chemical solution, or the chemical solution and pure water) to intervene between the substrate and the buff pad, thereby removing contaminants on the surface of the substrate or modifying the property of the processing target surface. The buff-cleaning process is a process that can apply a stronger physical action force to the substrate than a physical action force applied to the substrate when the substrate is cleaned by the physical action force using a sponge member or the like. Accordingly, the buff pad may be the aforementioned series of IC1000 ™/SUBA®, or series of POLITEX®. Alternatively, in the buff process apparatus according to the present invention, PVA sponge may be adopted as the buff pad.
The buff process module 1-300A can perform the aforementioned buff-polishing process and/or buff-cleaning process. Although the details will be described later, the buff process module 1-300A can be used to clean a support surface 1-402 of the buff table 1-400 in a state shown in
The buff table 1-400 has a support surface 1-402 for supporting the wafer W. The support surface 1-402 has an opening 1-404 of a fluid passage 1-410 (see
In this specification, in the case where the wafer W is mounted on the buff table 1-400 via the stage film 1-450, the surface of the stage film 1-450 in the state where this stage film 1-450 is attached serves as the “support surface” for supporting the wafer W. In the case where the wafer W is directly sucked onto the buff table 1-400 where the stage film 1-450 does not intervene, the surface of the buff table serves as the “support surface” for supporting the wafer W. Hereinafter, in the case of simply referring to “the support surface” or “the support surface of the buff table”, these terms include both the cases.
The buff table 1-400 further includes lift pins 1-480 (see
The buff table 1-400 can be rotated about a rotation axis A by a drive mechanism, not shown. The buff head 1-500 is configured to ascend and descend. The buff pad 1-502 is attached to a surface of the buff head 1-500 that faces the wafer W. The buff pad 1-502 is pressed against the wafer W held on the support surface 1-402 of the buff table 1-400 by descent of the buff head 1-500. The buff arm 1-600 can rotate the buff head 1-500 about a rotation axis B, and swing the buff head 1-500 in the radial direction of the wafer W as indicated by an arrow C. The buff arm 1-600 can swing the buff head 1-500 to a position where the buff pad 1-502 faces the conditioner 1-800.
The liquid supply system 1-700 includes a pure water nozzle 1-710 for supplying pure water (DIW: deionized water) to the processing target surface of the wafer W. The pure water nozzle 1-710 communicates with a pure water supply source 1-714 through pure water piping 1-712. The pure water piping 1-712 is provided with an on-off valve 1-716 that can open and close the pure water piping 1-712. The on-off valve 1-716 opening and closing control through a control device, not shown, can supply pure water to the processing target surface of the wafer W or the support surface 1-402 of the buff table 1-400 for supporting the wafer W, at any timing.
The direction of the pure water nozzle 1-710 can be changed (swung) in the plane (the direction in xy-plane) of the support surface 1-402 of the buff table 1-400. Alternatively or additionally, the direction of the pure water nozzle 1-710 can be changed (tilted) in a plane (the direction in zx-plane) perpendicular to the support surface 1-402 of the buff table 1-400. Furthermore, alternatively or additionally, the position of the pure water nozzle 1-710 can be changed in a direction (the z direction) perpendicular to the support surface 1-402 of the buff table 1-400. Any mechanism may be adopted to change the direction and the position of the pure water nozzle 1-710.
The liquid supply system 1-700 includes a first chemical solution nozzle 1-720 for supplying a chemical solution (Chemi) to the processing target surface of the wafer W. The first chemical solution nozzle 1-720 supplies the surface of the wafer W with the chemical solution during chemical solution cleaning after the buff-cleaning process or the buff-polishing process. The first chemical solution nozzle 1-720 communicates with a first chemical solution supply source 1-724 through chemical solution piping 1-722. The chemical solution piping 1-722 is provided with an on-off valve 1-726 that can open and close the chemical solution piping 1-722. The on-off valve 1-726 opening and closing control through a control device, not shown, can supply the chemical solution to the processing target surface of the wafer W or the support surface 1-402 of the buff table 1-400 for supporting the wafer W, at any timing.
The direction of the first chemical solution nozzle 1-720 can be changed (swung) in the plane (the direction in xy-plane) of the support surface 1-402 of the buff table 1-400. Alternatively or additionally, the direction of the first chemical solution nozzle 1-720 can be changed (tilted) in a plane (the direction in zx-plane) perpendicular to the support surface 1-402 of the buff table 1-400. Furthermore, alternatively or additionally, the position of the first chemical solution nozzle 1-720 can be changed in a direction (the z direction) perpendicular to the support surface 1-402 of the buff table 1-400. Any mechanism may be adopted to change the direction and the position of the first chemical solution nozzle 1-720.
Additionally, the liquid supply system 1-700 includes a second chemical solution nozzle 1-720-2 for supplying a chemical solution to the support surface 1-402 of the buff table 1-400 for supporting the wafer W. The second chemical solution nozzle 1-720-2 sprays the chemical solution on the support surface 1-402 during cleaning the support surface 1-402. The second chemical solution nozzle 1-720-2 communicates with a second chemical solution supply source 1-724-2 through chemical solution piping 1-722-2. The chemical solution piping 1-722-2 is provided with an on-off valve 1-726-2 that can open and close the chemical solution piping 1-722-2. The on-off valve 1-726-2 opening and closing control through the control device, not shown, can supply the chemical solution to the support surface 1-402, at any timing.
As with the first chemical solution nozzle 1-720, the second chemical solution nozzle 1-720-2 can change the direction and/or height of the nozzle.
The chemical solution supplied by the second chemical solution nozzle 1-720-2 may be different from or the same as the chemical solution supplied by the first chemical solution nozzle 1-720. In the case of using the same chemical solution, the second chemical solution nozzle 1-720-2 and the accompanying piping or the like may be omitted.
The buff process module 1-300A according to the illustrated embodiment can selectively supply the pure water, chemical solution, or slurry to the processing target surface of the wafer W or the support surface 1-420 of the buff table 1-400 for supporting the wafer W, through the buff arm 1-600, the buff head 1-500, and the buff pad 1-502.
That is, branched pure water piping 1-712a is branched from the pure water piping 1-712 between the pure water supply source 1-714 and the on-off valve 1-716. Furthermore, branched chemical solution piping 1-722a is branched from the chemical solution piping 1-722 between the first chemical solution supply source 1-724 and the on-off valve 1-726. The branched pure water piping 1-712a, the branched chemical solution piping 1-722a, and slurry piping 1-732, which communicates with a slurry supply source 1-734, join together into liquid supply piping 1-740. The branched pure water piping 1-712a is provided with an on-off valve 1-718 that can open and close the branched pure water piping 1-712a. The branched chemical solution piping 1-722a is provided with an on-off valve 1-728 that can open and close the branched chemical solution piping 1-722a. The slurry piping 1-732 is provided with an on-off valve 1-736 that can open and close the slurry piping 1-732.
A first end of the liquid supply piping 1-740 communicates with three systems of piping, which are the branched pure water piping 1-712a, the branched chemical solution piping 1-722a, and the slurry piping 1-732. The liquid supply piping 1-740 extends through the inside of the buff arm 1-600, the center of the buff head 1-500, and the center of the buff pad 1-502. A second end of the liquid supply piping 1-740 opens toward the processing target surface of the wafer W or the support surface 1-402 of the buff table 1-400 for supporting the wafer W. The control device, not shown, can supply the processing target surface of the wafer W or the support surface 1-402 of the buff table 1-400 for supporting the wafer W, with any one of the pure water, chemical solution, and slurry, or a mixed liquid that is any combination thereof, by controlling on and off of the on-off valve 1-718, the on-off valve 1-728 and the on-off valve 1-736.
The buff process module 1-300A according to the illustrated embodiment supplies the wafer W with the process liquid through the liquid supply piping 1-740, rotates the buff table 1-400 about the rotation axis A, presses the buff pad 1-502 against the processing target surface of the wafer W, and swings the buff head 1-500 in the direction of arrow C while rotating this head about the rotation axis B, thereby allowing the buff process to be applied to the wafer W.
The conditioner 1-800 shown in
When the buff pad 1-502 is conditioned, the buff process module 1-300A swings the buff arm 1-600 such that the buff pad 1-502 reaches a position facing the dresser 1-820 (see
The illustrated embodiment can include a cover 1-470 that at least partially covers the buff table 1-400 (see
During cleaning the support surface 1-402, the chemical solution is jetted to the support surface 1-402 from the second chemical solution nozzle 1-720-2, which communicates with the second chemical solution supply source 1-724-2, and the support surface 1-402 is cleaned. Use of the chemical solution can more efficiently clean abrasive grains and polishing by-products which adhere to the support surface 1-402, off this surface. Subsequently, pure water is supplied from the pure water nozzle 1-710 to the support surface 1-402, and the support surface 1-402 is further cleaned.
As with the first chemical solution nozzle 1-720, the second chemical solution nozzle 1-720-2 can change its direction and position, and clean the support surface 1-402 while changing the position at which the chemical solution is supplied.
The chemical solution supplied by the second chemical solution nozzle 1-720-2 may be different from the chemical solution supplied by the first chemical solution nozzle 1-720. Alternatively, the same chemical solution may be used. In the case of using the same chemical solution between the second chemical solution nozzle 1-720-2 and the first chemical solution nozzle 1-720, the second chemical solution nozzle 1-720-2 may be omitted.
Supply of the pure water and/or chemical solution from the fluid passage 1-410 during cleaning of the buff table 1-400 can prevent foreign substances from entering the inside of the buff table 1-400 during cleaning, and improve the cleaning efficiency. Here, the chemical solution for cleaning the fluid passage 1-410 may be the same as the chemical solution for cleaning the support surface 1-402 of the buff table 1-400. Alternatively, different chemical solutions may be used for the respective cases.
As shown in
In one embodiment of this disclosure, the buff process module 1-300A may include: a dedicated cleaning arm 1-650 that is different from the buff arm 1-600, to which the buff pad 1-502 is attached, but is for cleaning the support surface 1-402 of the buff table 1-400; a cleaning head 1-652; and the cleaning member 1-654 (see
The cleaning member 1-654 may have a configuration similar to that of the buff pad 1-502. The cleaning member 1-654 may be a brush or a sponge member.
In one embodiment of this disclosure, the buff process module 1-300A includes roll sponge 1-656 for cleaning the support surface 1-402 of the buff table 1-400 (see
In one embodiment of this disclosure, the buff process module 1-300A may include at least one of an atomizer cleaner 1-680, an ultrasonic cleaner 1-682 and a cavitation jet cleaner 1-684, which are for cleaning the support surface 1-402 of the buff table 1-400 (
As shown in
As shown in
As shown in
The cleaning on the support surface 1-402 of the buff table 1-400 has thus been described. That is, the cleaning on the support surface 1-402 by means of the pure water or chemical solution or physical contact of the buff pad 1-502 or the cleaning member 1-654 dedicated for buff-cleaning, or by means of the noncontact cleaner 1-680, 1-682 or 1-684 has been described. These measures may also clean the conveyor mechanism (lift pins 1-480) of the buff table 1-400.
A process of cleaning the support surface 1-402 of the buff table 1-400 that supports the wafer W, using the buff process module 1-300A, is hereinafter described as an embodiment of this disclosure.
As shown in
After completion of the buff process, the rotation of the buff table 1-400 is finished, and the nitrogen gas is supplied through the fluid passage 1-410 in order to release the wafer W. Furthermore, ascent of the lift pins 1-480 raises the wafer W. The released wafer W is moved to the next processing section by the substrate conveyor robot.
After the substrate is unloaded, the support surface 1-402 of the buff table 1-400 is cleaned.
The type of chemical solution used for cleaning the support surface 1-402 of the buff table 1-400 with this chemical solution may be any type according to the usage. For example, in the case of washing out dust and organic substances on the support surface 1-402, use of alkaline chemical solution, such as ammonia and hydrogen peroxide water, can remove particles on the support surface 1-402 by means of the action of zeta potential. Alternatively, use of a surfactant may apply a hydrophilization process onto the support surface, thereby preventing foreign substance from adhering.
In the case where foreign substances to be removed from the support surface 1-402 are metal ions, such as of copper, iron and aluminum, use of acid chemical solution, citric acid, and oxalic acid, and an addition agent can prevent the metal ion and the like from adhering again by means of the chelate effect.
As with the example of
In the example shown in
In the example shown in
In the example shown in
Thus, the buff process apparatus that has a function of cleaning the support surface of the buff table, and the cleaning method have been described with reference to
A substrate processing apparatus and a conditioner according to one embodiment of the invention of the present application are hereinafter described with reference to
<Substrate Processing Apparatus>
<Load/Unload Unit>
The load/unload unit 3-2 includes at least two (four in this embodiment) front loaders 3-20 where wafer cassettes for stocking multiple wafers (substrates) are mounted. These front loaders 3-20 are disposed adjacent to the housing 3-1, and disposed in the width direction of the substrate processing apparatus (the direction perpendicular to the longitudinal direction). The front loader 3-20 can be mounted with an open cassette, a SMIF (Standard Manufacturing Interface) pod, or a FOUP (Front Opening Unified Pod). Here, the SMIF and FOUP are closed containers that can keep an environment independent from the external space by internally storing the wafer cassette and covering the internal space with partitions.
In the load/unload unit 3-2, a traveling mechanism 3-21 is laid along the arrangement of the front loaders 3-20. Two conveyor robots (loaders and conveyor mechanisms) 3-22 that can travel along the arrangement direction of the wafer cassettes are installed on the traveling mechanism 3-21. The conveyor robots 3-22 can access the wafer cassettes mounted on the front loaders 3-20 by traveling on the traveling mechanism 3-21. Each conveyor robot 3-22 includes vertically arranged two hands. The upper hand is used to return a processed wafer to the wafer cassette. The lower hand is used to take a wafer having not been processed yet from the wafer cassette. The upper and lower hands can thus be used differently. Furthermore, the lower hand of the conveyor robot 3-22 is configured so as to be capable of reversing the wafer.
The load/unload unit 3-2 defines a region where the cleanest state should be maintained. Accordingly, the inside of the load/unload unit 3-2 is always kept at a higher pressure than any of the pressures of the outside of the substrate processing apparatus, the polishing unit 3-3 and the cleaning unit 3-4. The polishing unit 3-3 defines the dirtiest region because a slurry is used as the polishing liquid. Consequently, a negative pressure is formed in the polishing unit 3-3. This pressure is maintained lower than the internal pressure of the cleaning unit 3-4. The load/unload unit 2 is provided with a filter-fan unit (not shown) that includes a clean air filter, such as a HEPA filter, ULPA filter, or chemical filter. Clean air from which particles, toxic vapor, or toxic gas have been removed is always blown from the filter-fan unit.
<Polishing Unit>
The polishing unit 3-3 defines a region where a wafer is polished (flattened). The polishing unit 3-3 includes a first polishing unit 3-3A, a second polishing unit 3-3B, a third polishing unit 3-3C, and a fourth polishing unit 3-3D. The first polishing unit 3-3A, the second polishing unit 3-3B, the third polishing unit 3-3C and the fourth polishing unit 3-3D are arranged along the longitudinal direction of the substrate processing apparatus, as shown in
As shown in
Likewise, the second polishing unit 3-3B includes a polishing table 3-30B, a top ring 3-31B, a polishing liquid supply nozzle 3-32B, a dresser 3-33B, and an atomizer 3-34B. The third polishing unit 3-3C includes a polishing table 3-30C, a top ring 3-31C, a polishing liquid supply nozzle 3-32C, a dresser 3-33C, and an atomizer 3-34C. The fourth polishing unit 3-3D includes a polishing table 3-30D, a top ring 3-31D, a polishing liquid supply nozzle 3-32D, a dresser 3-33D, and an atomizer 3-34D.
Since the first polishing unit 3-3A, the second polishing unit 3-3B, the third polishing unit 3-3C and the fourth polishing unit 3-3D have the same configuration as each other, only the first polishing unit 3-3A is hereinafter described.
<Conveyor Mechanism>
Next, the conveyor mechanism for conveying the wafer is described. As shown in
Furthermore, a second linear transporter 3-7 is disposed adjacent to the third polishing unit 3-3C and the fourth polishing unit 3-3D. The second linear transporter 3-7 is a mechanism that conveys the wafer between three conveyance positions (a fifth conveyance position 3-TP5, a sixth conveyance position 3-TP6 and a seventh conveyance position 3-TP7 sequentially from the site near the load/unload unit) along the direction in which the polishing units 3-3C and 3-3D are disposed.
The wafer is conveyed by the first linear transporter 3-6 to the polishing units 3-3A and 3-3B. The top ring 3-31A of the first polishing unit 3-3A moves between the polishing position and the second conveyance position 3-TP2 by a swing operation of the top ring head. Consequently, the wafer is passed to the top ring 3-31A at the second conveyance position 3-TP2. Likewise, the top ring 3-31B of the second polishing unit 3-3B moves between the polishing position and the third conveyance position 3-TP3, and the wafer is passed to the top ring 3-31B at the third conveyance position 3-TP3. The top ring 3-31C of the third polishing unit 3-3C moves between the polishing position and the sixth conveyance position 3-TP6, and the wafer is passed to the top ring 3-31C at the sixth conveyance position 3-TP6. The top ring 3-31D of the fourth polishing unit 3-3D moves between the polishing position and the seventh conveyance position 3-TP7, and the wafer is passed to the top ring 3-31D at the seventh conveyance position 3-TP7.
A lifter 3-11 for receiving the wafer from the conveyor robot 3-22 is disposed at the first conveyance position 3-TP1. The wafer is passed from the conveyor robot 3-22 to the first linear transporter 3-6 via the lifter 3-11. Between the lifter 3-11 and the conveyor robot 3-22, a shutter (not shown) is provided at the partition 3-1a. When the wafer is conveyed, the shutter is opened and the wafer is passed from the conveyor robot 3-22 to the lifter 3-11. A swing transporter 3-12 is disposed among the first linear transporter 3-6, the second linear transporter 3-7 and the cleaning unit 3-4. The swing transporter 3-12 includes a hand that is movable between the fourth conveyance position 3-TP4 and the fifth conveyance position 3-TP5. The wafer is passed from the first linear transporter 3-6 to the second linear transporter 3-7 by the swing transporter 3-12. The wafer is conveyed by the second linear transporter 3-7 to the third polishing unit 3-3C and/or the fourth polishing unit 3-3D. The wafer polished by the polishing unit 3-3 is conveyed to the cleaning unit 3-4 via the swing transporter 3-12.
<Cleaning Unit>
In the roll cleaning chamber 3-190, an upper roll cleaning module 3-201A and a lower roll cleaning module 3-201B, which are arranged in the vertical direction, are disposed. The upper roll cleaning module 3-201A is disposed above the lower roll cleaning module 3-201B. Each of the upper roll cleaning module 3-201A and the lower roll cleaning module 3-201B is a cleaner that supplies the cleaning liquid to the front and rear surfaces of the wafer while pressing the rotating two roll sponge members against the front and rear surfaces of the wafer, thereby cleaning the wafer. A wafer temporary stage 3-204 is provided between the upper roll cleaning module 3-201A and the lower roll cleaning module 3-201B.
In the pen cleaning chamber 3-192, an upper pen cleaning module 3-202A and a lower pen cleaning module 3-202B, which are arranged along the vertical direction, are disposed. The upper pen cleaning module 3-202A is disposed above the lower pen cleaning module 3-202B. Each of the upper pen cleaning module 3-202A and the lower pen cleaning module 3-202B is a cleaner that supplies the cleaning liquid to the surface of the wafer while pressing a rotating pencil sponge member against the surface of the wafer and swinging the sponge in the radial direction of the wafer, thereby cleaning the wafer. A wafer temporary stage 3-203 is provided between the upper pen cleaning module 3-202A and the lower pen cleaning module 3-202B.
In the drying chamber 3-194, an upper drying module 3-205A and a lower drying module 3-205B, which are arranged along the vertical direction, are disposed. The upper drying module 3-205A and the lower drying module 3-205B are separated from each other. Filter-fan units 3-207A and 3-207B that supply clean air into the drying modules 3-205A and 3-205B are provided above the upper drying module 3-205A and the lower drying module 3-205B, respectively.
The upper roll cleaning module 3-201A, the lower roll cleaning module 3-201B, the upper pen cleaning module 3-202A, the lower pen cleaning module 3-202B, the temporary stage 3-203, the upper drying module 3-205A and the lower drying module 3-205B are fixed to frames, not shown, with bolts and the like.
In the first conveyance chamber 3-191, a vertically movable first conveyor robot (conveyor mechanism) 3-209 is disposed. In the second conveyance chamber 3-193, a vertically movable second conveyor robot 3-210 is disposed. In the third conveyance chamber 3-195, a vertically movable third conveyor robot (conveyor mechanism) 3-213 is disposed. The first conveyor robot 3-209, the second conveyor robot 3-210 and the third conveyor robot 3-213 are movably supported by vertically extending support shafts 3-211, 3-212 and 3-214, respectively. The first conveyor robot 3-209, the second conveyor robot 3-210 and the third conveyor robot 3-213 internally includes drive mechanisms, such as motors, and are vertically movable along the support shafts 3-211, 3-212 and 3-214, respectively. As with the conveyor robot 3-22, the first conveyor robot 3-209 includes hands at upper and lower stages. As indicated by a broken line in
The first conveyor robot 3-209 operates so as to convey the wafer W between the temporary stage 3-180, the upper roll cleaning module 3-201A, the lower roll cleaning module 3-201B, the temporary stage 3-204, the temporary stage 3-203, the upper pen cleaning module 3-202A and the lower pen cleaning module 3-202B. The first conveyor robot 3-209 uses the lower hand for conveying the wafer having not been cleaned yet (wafer to which the slurry adheres), and uses the upper hand for conveying the cleaned wafer.
The second conveyor robot 3-210 operates so as to convey the wafer W between the upper pen cleaning module 3-202A, the lower pen cleaning module 3-202B, the temporary stage 3-203, the upper drying module 3-205A and the lower drying module 3-205B. Since the second conveyor robot 3-210 only conveys the cleaned wafer, this robot only includes one hand. The conveyor robot 3-22 shown in
In the buff process chamber 3-300, an upper buff process module 3-300A and a lower buff process module 3-300B are provided. The third conveyor robot 3-213 operates so as to convey the wafer W between the upper roll cleaning module 3-201A, the lower roll cleaning module 3-201B, the temporary stage 3-204, the upper buff process module 3-300A and the lower buff process module 3-300B.
This embodiment exemplifies the example of disposing the buff process chamber 3-300, the roll cleaning chamber 3-190 and the pen cleaning chamber 3-192 in the cleaning unit 3-4, sequentially from the site far from the load/unload unit 3-2. The disposition is not limited to this example. The mode of disposing the buff process chamber 3-300, the roll cleaning chamber 3-190 and the pen cleaning chamber 3-192 may be appropriately selected according to the quality of wafer and the throughput. The upper buff process module 3-300A and the lower buff process module 3-300B are hereinafter described. Since the upper buff process module 3-300A and the lower buff process module 3-300B have similar configurations, only the upper buff process module 3-300A is described.
<Buff Process Module>
The buff table 3-400 includes a mechanism for sucking the wafer W. The buff table 3-400 can be rotated about a rotation axis A by a drive mechanism, not shown. The buff pad 3-502 is attached to a surface of the buff head 3-500 that faces the wafer W. The buff arm 3-600 can rotate the buff head 3-500 about a rotation axis B, and swing the buff head 3-500 in the radial direction of the wafer W as indicated by an arrow C. The buff arm 3-600 can swing the buff head 3-500 to a position where the buff pad 3-502 faces the conditioner 3-800.
The liquid supply system 3-700 includes a pure water nozzle 3-710 for supplying pure water (DIW) to the processing target surface of the wafer W. The pure water nozzle 3-710 communicates with a pure water supply source 3-714 through pure water piping 3-712. The pure water piping 3-712 is provided with an on-off valve 3-716 that can open and close the pure water piping 3-712. The on-off valve 3-716 opening and closing control through the control device, not shown, can supply the pure water to the processing target surface of the wafer W, at any timing.
The liquid supply system 3-700 includes a chemical solution nozzle 3-720 for supplying a chemical solution (Chemi) to the processing target surface of the wafer W. The chemical solution nozzle 3-720 communicates with a chemical solution supply source 3-724 through chemical solution piping 3-722. The chemical solution piping 3-722 is provided with an on-off valve 3-726 that can open and close the chemical solution piping 3-722. The on-off valve 3-726 opening and closing control through the control device can supply the chemical solution to the processing target surface of the wafer W, at any timing.
The upper buff process module 3-300A can selectively supply the pure water, chemical solution, or slurry to the processing target surface of the wafer W through the buff arm 3-600, the buff head 3-500, and the buff pad 3-502.
That is, branched pure water piping 3-712a is branched from the pure water piping 3-712 between the pure water supply source 3-714 and the on-off valve 3-716. Furthermore, branched chemical solution piping 3-722a is branched from the chemical solution piping 3-722 between the chemical solution supply source 3-724 and the on-off valve 3-726. The branched pure water piping 3-712a, the branched chemical solution piping 3-722a, and slurry piping 3-732, which communicates with a slurry supply source 3-734, join together into liquid supply piping 3-740. The branched pure water piping 3-712a is provided with an on-off valve 3-718 that can open and close the branched pure water piping 3-712a. The branched chemical solution piping 3-722a is provided with an on-off valve 3-728 that can open and close the branched chemical solution piping 3-722a. The slurry piping 3-732 is provided with an on-off valve 3-736 that can open and close the slurry piping 3-732.
A first end of the liquid supply piping 3-740 communicates with three systems of piping, which are the branched pure water piping 3-712a, the branched chemical solution piping 3-722a, and the slurry piping 3-732. The liquid supply piping 3-740 extends through the inside of the buff arm 3-600, the center of the buff head 3-500, and the center of the buff pad 3-502. A second end of the liquid supply piping 3-740 is opened toward the processing target surface of the wafer W. The control device, not shown, can supply the processing target surface of the wafer W with any one of the pure water, chemical solution, and slurry, or a mixed liquid that is any combination thereof, by controlling on and off of the on-off valve 3-718, the on-off valve 3-728 and the on-off valve 3-736.
The upper buff process module 3-300A supplies the wafer W with the process liquid through the liquid supply piping 3-740, rotates the buff table 3-400 about the rotation axis A, presses the buff pad 3-502 against the processing target surface of the wafer W, and swings the buff head 3-500 in the direction of arrow C while rotating this head about the rotation axis B, thereby allowing the buff process to be applied to the wafer W. Note that the buff pad of this embodiment has a considerably smaller diameter than the wafer, which is a processing target, has. This is because a high flatness can be achieved by the buff process.
Here, the buff process includes at least one of a buff-polishing process and a buff-cleaning process. The buff-polishing process is a process that relatively moves a wafer W and a buff pad 3-502 against each other while the buff pad 3-502 is in contact with the wafer W, and causes a slurry to intervene between the wafer W and the buff pad 3-502, thereby polishing and removing unwanted portions of a processing target surface of the wafer W. The buff-polishing process is a process that can apply a stronger physical action force to the wafer W than the physical action force applied to the wafer W by the roll sponge in the roll cleaning chamber 3-190 and the physical action force applied to the wafer W by the pen sponge in the pen cleaning chamber 3-192. The buff-polishing process can achieve removal of a surface part which is damaged by a scratch or the like or to which contaminants adhere, additional removal of a portion which cannot have been removed by main polishing in the main polishing unit 3, or improvement in morphology after the main polishing.
The buff-cleaning process is a process that relatively moves the wafer W and the buff pad 3-502 against each other while the buff pad 3-502 is in contact with the wafer W, and causes the cleaning process liquid (the chemical solution, or the chemical solution and pure water) to intervene between the wafer W and the buff pad 3-502, thereby removing contaminants on the surface of the wafer W or modifying the property of the processing target surface. The buff-cleaning process is a process that can apply a stronger physical action force to the wafer W than the physical action force applied to the wafer W by the roll sponge in the roll cleaning chamber 3-190 and the physical action force applied to the wafer W by the pen sponge in the pen cleaning chamber 3-192.
The conditioner 3-800 is a member for conditioning the surface of the buff pad 3-502. The conditioner 3-800 includes a dressing table 3-810, and a dresser 3-820 installed on the dressing table 3-810. The dressing table 3-810 can be rotated about a rotation axis D by a drive mechanism, not shown. The dresser 3-820 may be formed of a diamond dresser or a brush dresser, or a combination of these dressers.
When the buff pad 3-502 is conditioned, the upper buff process module 3-300A swings the buff arm 3-600 such that the buff pad 3-502 reaches a position facing the dresser 3-820. The upper buff process module 3-300A rotates the dressing table 3-810 about the rotation axis D while rotating the buff head 3-500, and presses the buff pad 3-502 against the dresser 3-820, thereby conditioning the buff pad 3-502.
<Conditioner>
Next, referring to the various drawings, specific processes of cleaning processes for the conditioner 3-800 and the buff pad 3-502 are described.
The conditioner 3-800 is disposed adjacent to the buff table 3-400, and positioned at a radius position substantially identical to that of the buff table 3-400 with respect to the center of swing L of the buff arm 3-600. Accordingly, when the buff arm 3-600 is swung (swung counterclockwise in
A brush-cleaning mechanism 3-960 is provided between the buff table 3-400 and the dressing table 3-810. The brush-cleaning mechanism 3-960 is for brush-cleaning the surface of the buff pad 3-502. The brush-cleaning mechanism 3-960 is thus provided between the buff table 3-400 and the dressing table 3-810 because this position is on a path along which the buff pad 502 is moved by swing of the buff arm 3-600. The specific structure and operation of the brush-cleaning mechanism 3-960 is described later.
First, on the buff table 3-400, the buff-cleaning process (step S3-11) is applied to the wafer W. Needless to say, at this time, the buff pad 3-502 is positioned on the buff table 3-400. During the buff-cleaning process, the process liquid for buff-cleaning is supplied from the liquid supply piping 3-740, through the inside of the buff arm and the inside of the buff head rotating shaft 3-601 (see
On the buff table 3-400, a wafer rinsing process (step S3-12) is applied. The wafer rinsing process is a process of cleaning the wafer W with DIW. After completion of applying the wafer rinsing process to the wafer W, the wafer W is then taken out of the buff table 3-400 (step S3-13) and conveyed to the next step. Subsequently, the buff table 3-400 is cleaned according to the buff table rinsing process (step S3-14). The series of processes at the buff table has thus been completed. A new wafer W to be processed next is taken in (step S3-15), and the above processes are repeated.
On the other hand, on the dressing table 3-810, the dressing process is applied to the buff pad 3-502 in parallel to the above processes. The buff pad 3-502 (see
Next, the buff head 3-500 is lowered and brought into contact with the dresser 3-820, and the dressing process is applied to the buff pad 3-502 (step S3-23) (see
After application of the dressing process, the buff head 3-500 moves above the brush-cleaning mechanism, a brushing process (step S3-24) is applied to the buff head after the dressing process (see
The description has thus been made for the case where the buff pad 3-502 faces perpendicularly downward. However, the present invention is not limited to this case. The present invention is also applicable to the case where the buff pad 3-502 faces perpendicularly upward, and the case where this pad faces horizontally.
Next, referring to
Various shapes can be considered as the shapes of the grooves formed on the buff pad. For example, it can be considered that simple linear grooves may be formed radially over the circumference, or spiral grooves may be formed. Even lattice-shaped grooves can discharge deposit to the outside only if the grooves are continuous to the outermost peripheral portion of the buff pad 3-502. The sectional shapes and sectional areas of grooves are not necessarily constant along the longitudinal directions. In particular, the buff pad 3-502 rotates at a high speed. Accordingly, if no measures are taken for the structure of the grooves, the process liquid is sometimes dispersed over a wide range. To avoid such situations, flow rate reducers are formed at the grooves in proximity to the outermost peripheral portion of the buff pad 3-502. For example, for the sake of illustration,
It is sufficient that the brush-cleaning mechanism 3-960 of this embodiment has dimensions that can cover at least an extent of a radius portion of the buff pad 3-502. This is because the buff pad 3-502 itself rotates and one revolution of the buff pad 3-502 allows the entire surface to be in contact with the brush-cleaning mechanism 3-960. Alternatively, the dimensions and position of the brush-cleaning mechanism 3-960 may be configured such that the brush-cleaning mechanism 3-960 can cover the diameter of the buff pad 3-502.
The brush-cleaning mechanism is fixed to the base 3-970. The brush-cleaning mechanism 3-960 is configured such that the brush section 3-961 protrudes from the surface of the base 3-970. This brush section is brought into contact with the surface of the buff pad 3-502, and brush-cleaning is performed. According to an example, the brush-cleaning mechanism 3-960 extends in a direction parallel to the radial direction of the dressing table 3-810. Also in such a case where the brush-cleaning mechanism 3-960 and the base 3-970 are provided, movement of the buff pad 3-502 between the buff table 3-400 and the dressing table 3-810 allows the surface of the buff pad 3-502 to be cleaned by the brush-cleaning mechanism.
Next, referring to
The description has thus been made on various characteristic points with reference to the
A substrate processing apparatus and a conditioner according to one embodiment of the invention of the present application are hereinafter described with reference to
<Substrate Processing Apparatus>
<Load/Unload Unit>
The load/unload unit 4-2 includes at least two (four in this embodiment) front loaders 4-20 where wafer cassettes for stocking multiple wafers (substrates) are mounted. These front loaders 4-20 are disposed adjacent to the housing 4-1, and disposed in the width direction of the substrate processing apparatus (the direction perpendicular to the longitudinal direction). The front loader 4-20 can be mounted with an open cassette, a SMIF (Standard Manufacturing Interface) pod, or a FOUP (Front Opening Unified Pod). Here, the SMIF and FOUP are closed containers that can keep an environment independent from the external space by internally storing the wafer cassette and covering the internal space with partitions.
In the load/unload unit 4-2, a traveling mechanism 4-21 is laid along the arrangement of the front loaders 4-20. Two conveyor robots (loaders and conveyor mechanisms) 4-22 that can travel along the arrangement direction of the wafer cassettes are installed on the traveling mechanism 4-21. The conveyor robots 4-22 can access the wafer cassettes mounted on the front loaders 4-20 by traveling on the traveling mechanism 4-21. Each conveyor robot 4-22 includes vertically arranged two hands. The upper hand is used to return a processed wafer to the wafer cassette. The lower hand is used to take a wafer having not been processed yet from the wafer cassette. The upper and lower hands can thus be used differently. Furthermore, the lower hand of the conveyor robot 4-22 is configured so as to be capable of reversing the wafer.
The load/unload unit 4-2 defines a region where the cleanest state should be maintained. Accordingly, the inside of the load/unload unit 4-2 is always kept at a higher pressure than any of the pressures of the outside of the substrate processing apparatus, the polishing unit 4-3 and the cleaning unit 4-4. The polishing unit 4-3 defines the dirtiest region because a slurry is used as the polishing liquid. Consequently, a negative pressure is formed in the polishing unit 4-3. This pressure is maintained lower than the internal pressure of the cleaning unit 4-4. The load/unload unit 4-2 is provided with a filter-fan unit (not shown) that includes a clean air filter, such as a HEPA filter, ULPA filter, or chemical filter. Clean air from which particles, toxic vapor, or toxic gas have been removed is always blown from the filter-fan unit.
<Polishing Unit>
The polishing unit 4-3 defines a region where a wafer is polished (flattened). The polishing unit 4-3 includes a first polishing unit 4-3A, a second polishing unit 4-3B, a third polishing unit 4-3C, and a fourth polishing unit 4-3D. The first polishing unit 4-3A, the second polishing unit 4-3B, the third polishing unit 4-3C and the fourth polishing unit 4-3D are arranged along the longitudinal direction of the substrate processing apparatus, as shown in
As shown in
Likewise, the second polishing unit 4-3B includes a polishing table 4-30B, a top ring 4-31B, a polishing liquid supply nozzle 4-32B, a dresser 4-33B, and an atomizer 4-34B. The third polishing unit 4-3C includes a polishing table 4-30C, a top ring 4-31C, a polishing liquid supply nozzle 4-32C, a dresser 4-33C, and an atomizer 4-34C. The fourth polishing unit 4-3D includes a polishing table 4-30D, a top ring 4-31D, a polishing liquid supply nozzle 4-32D, a dresser 4-33D, and an atomizer 4-34D.
Since the first polishing unit 4-3A, the second polishing unit 4-3B, the third polishing unit 4-3C and the fourth polishing unit 4-3D have the same configuration as each other, only the first polishing unit 4-3A is hereinafter described.
<Conveyor Mechanism>
Next, the conveyor mechanism for conveying the wafer is described. As shown in
Furthermore, a second linear transporter 4-7 is disposed adjacent to the third polishing unit 4-3C and the fourth polishing unit 4-3D. The second linear transporter 4-7 is a mechanism that conveys the wafer between three conveyance positions (a fifth conveyance position 4-TP5, a sixth conveyance position 4-TP6 and a seventh conveyance position 4-TP7 sequentially from the site near the load/unload unit) along the direction in which the polishing units 4-3C and 4-3D are disposed.
The wafer is conveyed by the first linear transporter 4-6 to the polishing units 4-3A and 4-3B. The top ring 4-31A of the first polishing unit 4-3A moves between the polishing position and the second conveyance position 4-TP2 by a swing operation of the top ring head. Consequently, the wafer is passed to the top ring 4-31A at the second conveyance position 4-TP2. Likewise, the top ring 4-31B of the second polishing unit 4-3B moves between the polishing position and the third conveyance position 4-TP3, and the wafer is passed to the top ring 4-31B at the third conveyance position 4-TP3. The top ring 4-31C of the third polishing unit 4-3C moves between the polishing position and the sixth conveyance position 4-TP6, and the wafer is passed to the top ring 4-31C at the sixth conveyance position 4-TP6. The top ring 4-31D of the fourth polishing unit 4-3D moves between the polishing position and the seventh conveyance position 4-TP7, and the wafer is passed to the top ring 4-31D at the seventh conveyance position 4-TP7.
A lifter 4-11 for receiving the wafer from the conveyor robot 4-22 is disposed at the first conveyance position 4-TP1. The wafer is passed from the conveyor robot 4-22 to the first linear transporter 4-6 via the lifter 4-11. Between the lifter 4-11 and the conveyor robot 4-22, a shutter (not shown) is provided at the partition 4-1a. When the wafer is conveyed, the shutter is opened and the wafer is passed from the conveyor robot 4-22 to the lifter 4-11. A swing transporter 4-12 is disposed among the first linear transporter 4-6, the second linear transporter 4-7 and the cleaning unit 4-4. The swing transporter 4-12 includes a hand that is movable between the fourth conveyance position 4-TP4 and the fifth conveyance position 4-TP5. The wafer is passed from the first linear transporter 4-6 to the second linear transporter 4-7 by the swing transporter 4-12. The wafer is conveyed by the second linear transporter 4-7 to the third polishing unit 4-3C and/or the fourth polishing unit 4-3D. The wafer polished by the polishing unit 4-3 is conveyed to the cleaning unit 4-4 via the swing transporter 4-12.
<Cleaning Unit>
In the roll cleaning chamber 4-190, an upper roll cleaning module 4-201A and a lower roll cleaning module 4-201B, which are arranged along the vertical direction, are disposed. The upper roll cleaning module 4-201A is disposed above the lower roll cleaning module 4-201B. Each of the upper roll cleaning module 4-201A and the lower roll cleaning module 4-201B is a cleaner that supplies the cleaning liquid to the front and rear surfaces of the wafer while pressing the rotating two roll sponge members against the front and rear surfaces of the wafer, thereby cleaning the wafer. A wafer temporary stage 4-204 is provided between the upper roll cleaning module 4-201A and the lower roll cleaning module 4-201B.
In the pen cleaning chamber 4-192, an upper pen cleaning module 4-202A and a lower pen cleaning module 4-202B, which are arranged along the vertical direction, are disposed. The upper pen cleaning module 4-202A is disposed above the lower pen cleaning module 4-202B. Each of the upper pen cleaning module 4-202A and the lower pen cleaning module 4-202B is a cleaner that supplies the cleaning liquid to the surface of the wafer while pressing a rotating pencil sponge member against the surface of the wafer and swinging the sponge in the radial direction of the wafer, thereby cleaning the wafer. A wafer temporary stage 4-203 is provided between the upper pen cleaning module 4-202A and the lower pen cleaning module 4-202B.
In the drying chamber 4-194, an upper drying module 4-205A and a lower drying module 4-205B, which are arranged along the vertical direction, are disposed. The upper drying module 4-205A and the lower drying module 4-205B are separated from each other. Filter-fan units 4-207A and 4-207B that supply clean air into the drying modules 4-205A and 4-205B are provided above the upper drying module 4-205A and the lower drying module 4-205B, respectively.
The upper roll cleaning module 4-201A, the lower roll cleaning module 4-201B, the upper pen cleaning module 4-202A, the lower pen cleaning module 4-202B, the temporary stage 4-203, the upper drying module 4-205A and the lower drying module 4-205B are fixed to frames, not shown, with bolts and the like.
In the first conveyance chamber 4-191, a vertically movable first conveyor robot (conveyor mechanism) 4-209 is disposed. In the second conveyance chamber 4-193, a vertically movable second conveyor robot 4-210 is disposed. In the third conveyance chamber 4-195, a vertically movable third conveyor robot (conveyor mechanism) 4-213 is disposed. The first conveyor robot 4-209, the second conveyor robot 4-210 and the third conveyor robot 4-213 are movably supported by vertically extending support shafts 4-211, 4-212 and 4-214, respectively. The first conveyor robot 4-209, the second conveyor robot 4-210 and the third conveyor robot 4-213 internally includes drive mechanisms, such as motors, and are vertically movable along the support shafts 4-211, 4-212 and 4-214, respectively. As with the conveyor robot 4-22, the first conveyor robot 4-209 includes hands at upper and lower stages. As indicated by a broken line in
The first conveyor robot 4-209 operates so as to convey the wafer W between the temporary stage 4-180, the upper roll cleaning module 4-201A, the lower roll cleaning module 4-201B, the temporary stage 4-204, the temporary stage 4-203, the upper pen cleaning module 4-202A and the lower pen cleaning module 4-202B. The first conveyor robot 4-209 uses the lower hand for conveying the wafer having not been cleaned yet (wafer to which the slurry adheres), and uses the upper hand for conveying the cleaned wafer.
The second conveyor robot 4-210 operates so as to convey the wafer W between the upper pen cleaning module 4-202A, the lower pen cleaning module 4-202B, the temporary stage 4-203, the upper drying module 4-205A and the lower drying module 4-205B. Since the second conveyor robot 4-210 only conveys the cleaned wafer, this robot only includes one hand. The conveyor robot 4-22 shown in
In the buff process chamber 4-300, an upper buff process module 4-300A and a lower buff process module 4-300B are provided. The third conveyor robot 4-213 operates so as to convey the wafer W between the upper roll cleaning module 4-201A, the lower roll cleaning module 4-201B, the temporary stage 4-204, the upper buff process module 4-300A and the lower buff process module 4-300B.
This embodiment exemplifies the example of disposing the buff process chamber 4-300, the roll cleaning chamber 4-190 and the pen cleaning chamber 4-192 in the cleaning unit 4-4, sequentially from the site far from the load/unload unit 4-2. The disposition is not limited to this example. The mode of disposing the buff process chamber 4-300, the roll cleaning chamber 4-190 and the pen cleaning chamber 4-192 may be appropriately selected according to the quality of wafer and the throughput. The upper buff process module 4-300A and the lower buff process module 4-300B are hereinafter described. Since the upper buff process module 4-300A and the lower buff process module 4-300B have similar configurations, only the upper buff process module 4-300A is described.
<Buff Process Module>
The buff table 4-400 includes a mechanism for sucking the wafer W. The buff table 4-400 can be rotated about a rotation axis A by a drive mechanism, not shown. The buff pad 4-502 is attached to a surface of the buff head 4-500 that faces the wafer W. The buff arm 4-600 can rotate the buff head 4-500 about a rotation axis B, and swing the buff head 4-500 in the radial direction of the wafer W as indicated by an arrow C. The buff arm 4-600 can swing the buff head 4-500 to a position where the buff pad 4-502 faces the conditioner 4-800.
The liquid supply system 4-700 includes a pure water nozzle 4-710 for supplying pure water (DIW) to the processing target surface of the wafer W. The pure water nozzle 4-710 communicates with a pure water supply source 4-714 through pure water piping 4-712. The pure water piping 4-712 is provided with an on-off valve 4-716 that can open and close the pure water piping 4-712. The on-off valve 4-716 opening and closing control through the control device, not shown, can supply the pure water to the processing target surface of the wafer W, at any timing.
The liquid supply system 4-700 includes a chemical solution nozzle 4-720 for supplying a chemical solution (Chemi) to the processing target surface of the wafer W. The chemical solution nozzle 4-720 communicates with a chemical solution supply source 4-724 through chemical solution piping 4-722. The chemical solution piping 4-722 is provided with an on-off valve 4-726 that can open and close the chemical solution piping 4-722. The on-off valve 4-726 opening and closing control through the control device can supply the chemical solution to the processing target surface of the wafer W, at any timing.
The upper buff process module 4-300A can selectively supply the pure water, chemical solution, or slurry to the processing target surface of the wafer W through the buff arm 4-600, the buff head 4-500, and the buff pad 4-502.
That is, branched pure water piping 4-712a is branched from the pure water piping 4-712 between the pure water supply source 4-714 and the on-off valve 4-716. Furthermore, branched chemical solution piping 4-722a is branched from the chemical solution piping 4-722 between the chemical solution supply source 4-724 and the on-off valve 4-726. The branched pure water piping 4-712a, the branched chemical solution piping 4-722a, and slurry piping 4-732, which communicates with a slurry supply source 4-734, join together into liquid supply piping 4-740. The branched pure water piping 4-712a is provided with an on-off valve 4-718 that can open and close the branched pure water piping 4-712a. The branched chemical solution piping 4-722a is provided with an on-off valve 4-728 that can open and close the branched chemical solution piping 4-722a. The slurry piping 4-732 is provided with an on-off valve 4-736 that can open and close the slurry piping 4-732.
A first end of the liquid supply piping 4-740 communicates with three systems of piping, which are the branched pure water piping 4-712a, the branched chemical solution piping 4-722a, and the slurry piping 4-732. The liquid supply piping 4-740 extends through the inside of the buff arm 4-600, the center of the buff head 4-500, and the center of the buff pad 4-502. A second end of the liquid supply piping 4-740 is opened toward the processing target surface of the wafer W. The control device, not shown, can supply the processing target surface of the wafer W with any one of the pure water, chemical solution, and slurry, or a mixed liquid that is any combination thereof, by controlling on and off of the on-off valve 4-718, the on-off valve 4-728 and the on-off valve 4-736.
The upper buff process module 4-300A supplies the wafer W with the process liquid through the liquid supply piping 4-740, rotates the buff table 4-400 about the rotation axis A, presses the buff pad 4-502 against the processing target surface of the wafer W, and swings the buff head 4-500 in the direction of arrow C while rotating this head about the rotation axis B, thereby allowing the buff process to be applied to the wafer W. Note that the buff pad of this embodiment has a considerably smaller diameter than the wafer, which is a processing target, has. This is because a high flatness can be achieved by the buff process.
Here, the buff process includes at least one of a buff-polishing process and a buff-cleaning process. The buff-polishing process is a process that relatively moves a wafer W and a buff pad 4-502 against each other while the buff pad 4-502 is in contact with the wafer W, and causes a slurry to intervene between the wafer W and the buff pad 4-502, thereby polishing and removing unwanted portions of a processing target surface of the wafer W. The buff-polishing process is a process that can apply a stronger physical action force to the wafer W than the physical action force applied to the wafer W by the roll sponge in the roll cleaning chamber 4-190 and the physical action force applied to the wafer W by the pen sponge in the pen cleaning chamber 4-192. The buff-polishing process can achieve removal of a surface part which is damaged by a scratch or the like or to which contaminants adhere, additional removal of a portion which cannot have been removed by main polishing in the main polishing unit 4-3, or improvement in morphology after the main polishing.
The buff-cleaning process is a process that relatively moves the wafer W and the buff pad 4-502 against each other while the buff pad 4-502 is in contact with the wafer W, and causes the cleaning process liquid (the chemical solution, or the chemical solution and pure water) to intervene between the wafer W and the buff pad 4-502, thereby removing contaminants on the surface of the wafer W or modifying the property of the processing target surface. The buff-cleaning process is a process that can apply a stronger physical action force to the wafer W than the physical action force applied to the wafer W by the roll sponge in the roll cleaning chamber 4-190 and the physical action force applied to the wafer W by the pen sponge in the pen cleaning chamber 4-192.
The conditioner 4-800 is a member for conditioning the surface of the buff pad 4-502. The conditioner 4-800 includes a dressing table 4-810, and a dresser 4-820 installed on the dressing table 4-810. The dressing table 4-810 can be rotated about a rotation axis D by a drive mechanism, not shown. The dresser 4-820 may be formed of a diamond dresser or a brush dresser, or a combination of these dressers.
When the buff pad 4-502 is conditioned, the upper buff process module 4-300A swings the buff arm 4-600 such that the buff pad 4-502 reaches a position facing the dresser 4-820. The upper buff process module 4-300A rotates the dressing table 4-810 about the rotation axis D while rotating the buff head 4-500, and presses the buff pad 4-502 against the dresser 4-820, thereby conditioning the buff pad 4-502.
<Conditioner>
Next, referring to various diagrams, the positional relationship between the buff table 4-400, the conditioner 4-800, the atomizer 4-950 and the buff pad 4-502, and specific processes of cleaning the buff pad 4-502 by the atomizer 4-950 are described.
The conditioner 4-800 is disposed adjacent to the buff table 4-400, and positioned at a radius position substantially identical to that of the buff table 4-400 with respect to the center of swing L of the buff arm 4-600. Accordingly, when the buff arm 4-600 is swung (swung counterclockwise in
First, on the buff table 4-400, the buff-cleaning process (step S4-11) is applied to the wafer W. Needless to say, at this time, the buff pad 4-502 is positioned on the buff table 4-400. During the buff-cleaning process, the process liquid for buff-cleaning is supplied from the liquid supply piping 4-740, through the inside of the buff arm and the inside of the buff head rotating shaft 4-601 (see
On the buff table 4-400, a wafer rinsing process (step S4-12) is applied. The wafer rinsing process is a process of cleaning the wafer W with DIW. After completion of applying the wafer rinsing process to the wafer W, the wafer W is then taken out of the buff table 4-400 (step S4-13) and conveyed to the next step. Subsequently, the buff table 4-400 is cleaned with DIW according to the buff table rinsing process (step S4-14). The series of processes at the buff table has thus been completed. A new wafer W to be processed next is taken in (step S4-15), and the above processes are repeated.
On the other hand, on the dressing table 4-810, the dressing process is applied to the buff pad 4-502 in parallel to the above processes. The buff pad 4-502 (see
Next, the buff head 4-500 is lowered and brought into contact with the dresser 4-820, and the dressing process is applied to the buff pad 4-502 (step S4-23) (see
After the dressing process, the buff head 4-500 ascends again and moves above the atomizer 4-950, a high pressure cleaning fluid is jetted from the aforementioned atomizer 4-950 toward the buff pad, and this buff pad 4-502 having been subjected to the dressing process is then subjected to an atomizing process (step S4-24) (see
The description has thus been made for the case where the buff pad 4-502 faces perpendicularly downward. However, the present invention is not limited to this case. The present invention is also applicable to the case where the buff pad 4-502 faces perpendicularly upward, and the case where this pad faces horizontally.
Even only with the atomizer 4-950, a sufficient cleaning effect in cleaning the buff pad 4-502 can be achieved. However, in order to further improve the cleaning effect, a combination with ultrasonic cleaning, brush-cleaning or the like can be considered. For example, a predetermined cleaning liquid container (not shown) is provided adjacent to the atomizer 4-950, the ultrasonic cleaning, brush-cleaning or the like is performed in this container. This configuration can remove contaminations that cannot be completely removed only through the cleaning process by the atomizer 4-950. This embodiment can provide an atomizer applicable to the buff process module that includes the buff pad 4-502 having a size equivalent to or smaller than the dresser 4-820 has.
Next, referring to
In
As with the configuration in
Although the atomizers 4-951A and 4-951B of this embodiment are examples, these atomizers include rod-like main bodies and can project and be retracted to and from a region above the dresser 4-820.
As shown in
As to both the rotational movement system and the linear movement system, it is sufficient that the atomizers 4-951A and 4-951B can reach a position allowing cleaning at least a radius portion of the buff pad 4-502. This is because the rotatable configuration of the buff pad 4-502 allows the entire surface to be cleaned through rotation of the buff pad 4-502 only if at least a radius portion can be cleaned. Alternatively, if the movable ranges of the atomizers 4-951A and 4-951B can be sufficiently secured, the dimensions and positions of the atomizers 4-951A and 4-951B may be configured so as to allow a diameter portion of the buff pad 4-502 to be cleaned. In this case, in a theoretical view, half a revolution of the buff pad 4-502 can clean the entire surface. This case can achieve an effect twice as high as the effect in the case of cleaning only the radius portion.
Next, referring to
The cover shown in
Furthermore, the atomizer 4-951A is thus positioned below the buff arm 4-600, thereby achieving the following secondary advantageous effects. That is, in each of the buff polishing, buff-cleaning, and dressing processes, the process liquid or cleaning liquid is dispersed and adheres onto the lower surface of the buff arm 4-600. Consequently, periodical cleaning is required. Typically, another piece of cleaning means is provided. However, since this embodiment includes the atomizer 4-951A, the lower surface of the buff arm 4-600 is cleaned by the atomizer 4-951A. This configuration negates the need to separately provide the other piece of cleaning means.
Next, referring to
The description has thus been made on various characteristic points in a mutually related manner with reference to the
A substrate processing apparatus and a conditioner according to one embodiment of the invention of the present application are hereinafter described with reference to
<Substrate Processing Apparatus>
<Load/Unload Unit>
The load/unload unit 5-2 includes at least two (four in this embodiment) front loaders 5-20 where wafer cassettes for stocking multiple wafers (substrates) are mounted. These front loaders 5-20 are disposed adjacent to the housing 5-1, and disposed in the width direction of the substrate processing apparatus (the direction perpendicular to the longitudinal direction). The front loader 5-20 can be mounted with an open cassette, a SMIF (Standard Manufacturing Interface) pod, or a FOUP (Front Opening Unified Pod). Here, the SMIF and FOUP are closed containers that can keep an environment independent from the external space by internally storing the wafer cassette and covering the internal space with partitions.
In the load/unload unit 5-2, a traveling mechanism 5-21 is laid along the arrangement of the front loaders 5-20. Two conveyor robots (loaders and conveyor mechanisms) 5-22 that can travel along the arrangement direction of the wafer cassettes are installed on the traveling mechanism 5-21. The conveyor robots 5-22 can access the wafer cassettes mounted on the front loaders 5-20 by traveling on the traveling mechanism 5-21. Each conveyor robot 5-22 includes vertically arranged two hands. The upper hand is used to return a processed wafer to the wafer cassette. The lower hand is used to take a wafer having not been processed yet from the wafer cassette. The upper and lower hands can thus be used differently. Furthermore, the lower hand of the conveyor robot 5-22 is configured so as to be capable of reversing the wafer.
The load/unload unit 5-2 defines a region where the cleanest state should be maintained. Accordingly, the inside of the load/unload unit 5-2 is always kept at a higher pressure than any of the pressures of the outside of the substrate processing apparatus, the polishing unit 5-3 and the cleaning unit 5-4. The polishing unit 5-3 defines the dirtiest region because a slurry is used as the polishing liquid. Consequently, a negative pressure is formed in the polishing unit 5-3. This pressure is maintained lower than the internal pressure of the cleaning unit 5-4. The load/unload unit 2 is provided with a filter-fan unit (not shown) that includes a clean air filter, such as a HEPA filter, ULPA filter, or chemical filter. Clean air from which particles, toxic vapor, or toxic gas have been removed is always blown from the filter-fan unit.
<Polishing Unit>
The polishing unit 5-3 defines a region where a wafer is polished (flattened). The polishing unit 5-3 includes a first polishing unit 5-3A, a second polishing unit 5-3B, a third polishing unit 5-3C, and a fourth polishing unit 5-3D. The first polishing unit 5-3A, the second polishing unit 5-3B, the third polishing unit 5-3C and the fourth polishing unit 5-3D are arranged along the longitudinal direction of the substrate processing apparatus, as shown in
As shown in
Likewise, the second polishing unit 5-3B includes a polishing table 5-30B, a top ring 5-31B, a polishing liquid supply nozzle 5-32B, a dresser 5-33B, and an atomizer 5-34B. The third polishing unit 5-3C includes a polishing table 5-30C, a top ring 5-31C, a polishing liquid supply nozzle 5-32C, a dresser 5-33C, and an atomizer 5-34C. The fourth polishing unit 5-3D includes a polishing table 5-30D, a top ring 5-31D, a polishing liquid supply nozzle 5-32D, a dresser 5-33D, and an atomizer 5-34D.
Since the first polishing unit 5-3A, the second polishing unit 5-3B, the third polishing unit 5-3C and the fourth polishing unit 5-3D have the same configuration as each other, only the first polishing unit 5-3A is hereinafter described.
<Conveyor Mechanism>
Next, the conveyor mechanism for conveying the wafer is described. As shown in
Furthermore, a second linear transporter 5-7 is disposed adjacent to the third polishing unit 5-3C and the fourth polishing unit 5-3D. The second linear transporter 5-7 is a mechanism that conveys the wafer between three conveyance positions (a fifth conveyance position 5-TP5, a sixth conveyance position 5-TP6 and a seventh conveyance position 5-TP7 sequentially from the site near the load/unload unit) along the direction in which the polishing units 5-3C and 5-3D are disposed.
The wafer is conveyed by the first linear transporter 5-6 to the polishing units 5-3A and 5-3B. The top ring 5-31A of the first polishing unit 5-3A moves between the polishing position and the second conveyance position 5-TP2 by a swing operation of the top ring head. Consequently, the wafer is passed to the top ring 5-31A at the second conveyance position 5-TP2. Likewise, the top ring 5-31B of the second polishing unit 5-3B moves between the polishing position and the third conveyance position 5-TP3, and the wafer is passed to the top ring 5-31B at the third conveyance position 5-TP3. The top ring 5-31C of the third polishing unit 5-3C moves between the polishing position and the sixth conveyance position 5-TP6, and the wafer is passed to the top ring 5-31C at the sixth conveyance position 5-TP6. The top ring 5-31D of the fourth polishing unit 5-3D moves between the polishing position and the seventh conveyance position 5-TP7, and the wafer is passed to the top ring 5-31D at the seventh conveyance position 5-TP7.
A lifter 5-11 for receiving the wafer from the conveyor robot 5-22 is disposed at the first conveyance position 5-TP1. The wafer is passed from the conveyor robot 5-22 to the first linear transporter 5-6 via the lifter 5-11. Between the lifter 5-11 and the conveyor robot 5-22, a shutter (not shown) is provided at the partition 5-1a. When the wafer is conveyed, the shutter is opened and the wafer is passed from the conveyor robot 5-22 to the lifter 5-11. A swing transporter 5-12 is disposed among the first linear transporter 5-6, the second linear transporter 5-7 and the cleaning unit 5-4. The swing transporter 5-12 includes a hand that is movable between the fourth conveyance position 5-TP4 and the fifth conveyance position 5-TP5. The wafer is passed from the first linear transporter 5-6 to the second linear transporter 5-7 by the swing transporter 5-12. The wafer is conveyed by the second linear transporter 5-7 to the third polishing unit 5-3C and/or the fourth polishing unit 5-3D. The wafer polished by the polishing unit 5-3 is conveyed to the cleaning unit 5-4 via the swing transporter 5-12.
<Cleaning Unit>
In the roll cleaning chamber 5-190, an upper roll cleaning module 5-201A and a lower roll cleaning module 5-201B, which are arranged along the vertical direction, are disposed. The upper roll cleaning module 5-201A is disposed above the lower roll cleaning module 5-201B. Each of the upper roll cleaning module 5-201A and the lower roll cleaning module 5-201B is a cleaner that supplies the cleaning liquid to the front and rear surfaces of the wafer while pressing the rotating two roll sponge members against the front and rear surfaces of the wafer, thereby cleaning the wafer. A wafer temporary stage 5-204 is provided between the upper roll cleaning module 5-201A and the lower roll cleaning module 5-201B.
In the pen cleaning chamber 5-192, an upper pen cleaning module 5-202A and a lower pen cleaning module 5-202B, which are arranged along the vertical direction, are disposed. The upper pen cleaning module 5-202A is disposed above the lower pen cleaning module 5-202B. Each of the upper pen cleaning module 5-202A and the lower pen cleaning module 5-202B is a cleaner that supplies the cleaning liquid to the surface of the wafer while pressing a rotating pencil sponge member against the surface of the wafer and swinging the sponge in the radial direction of the wafer, thereby cleaning the wafer. A wafer temporary stage 5-203 is provided between the upper pen cleaning module 5-202A and the lower pen cleaning module 5-202B.
In the drying chamber 5-194, an upper drying module 5-205A and a lower drying module 5-205B, which are arranged along the vertical direction, are disposed. The upper drying module 5-205A and the lower drying module 5-205B are separated from each other. Filter-fan units 5-207A and 5-207B that supply clean air into the drying modules 5-205A and 5-205B are provided above the upper drying module 5-205A and the lower drying module 5-205B, respectively.
The upper roll cleaning module 5-201A, the lower roll cleaning module 5-201B, the upper pen cleaning module 5-202A, the lower pen cleaning module 5-202B, the temporary stage 5-203, the upper drying module 5-205A and the lower drying module 5-205B are fixed to frames, not shown, with bolts and the like.
In the first conveyance chamber 5-191, a vertically movable first conveyor robot (conveyor mechanism) 5-209 is disposed. In the second conveyance chamber 5-193, a vertically movable second conveyor robot 5-210 is disposed. In the third conveyance chamber 5-195, a vertically movable third conveyor robot (conveyor mechanism) 5-213 is disposed. The first conveyor robot 5-209, the second conveyor robot 5-210 and the third conveyor robot 5-213 are movably supported by vertically extending support shafts 5-211, 5-212 and 5-214, respectively. The first conveyor robot 5-209, the second conveyor robot 5-210 and the third conveyor robot 5-213 internally includes drive mechanisms, such as motors, and are vertically movable along the support shafts 5-211, 5-212 and 5-214, respectively. As with the conveyor robot 5-22, the first conveyor robot 5-209 includes hands at upper and lower stages. As indicated by a broken line in
The first conveyor robot 5-209 operates so as to convey the wafer W between the temporary stage 5-180, the upper roll cleaning module 5-201A, the lower roll cleaning module 5-201B, the temporary stage 5-204, the temporary stage 5-203, the upper pen cleaning module 5-202A and the lower pen cleaning module 5-202B. The first conveyor robot 5-209 uses the lower hand for conveying the wafer having not been cleaned yet (wafer to which the slurry adheres), and uses the upper hand for conveying the cleaned wafer.
The second conveyor robot 5-210 operates so as to convey the wafer W between the upper pen cleaning module 5-202A, the lower pen cleaning module 5-202B, the temporary stage 5-203, the upper drying module 5-205A and the lower drying module 5-205B. Since the second conveyor robot 5-210 only conveys the cleaned wafer, this robot only includes one hand. The conveyor robot 5-22 shown in
In the buff process chamber 5-300, an upper buff process module 5-300A and a lower buff process module 5-300B are provided. The third conveyor robot 5-213 operates so as to convey the wafer W between the upper roll cleaning module 5-201A, the lower roll cleaning module 5-201B, the temporary stage 5-204, the upper buff process module 5-300A and the lower buff process module 5-300B.
This embodiment exemplifies the example of disposing the buff process chamber 5-300, the roll cleaning chamber 5-190 and the pen cleaning chamber 5-192 in the cleaning unit 5-4, sequentially from the site far from the load/unload unit 5-2. The disposition is not limited to this example. The mode of disposing the buff process chamber 5-300, the roll cleaning chamber 5-190 and the pen cleaning chamber 5-192 may be appropriately selected according to the quality of wafer and the throughput. The upper buff process module 5-300A and the lower buff process module 5-300B are hereinafter described. Since the upper buff process module 5-300A and the lower buff process module 5-300B have similar configurations, only the upper buff process module 5-300A is described.
<Buff Process Module>
The buff table 5-400 includes a mechanism for sucking the wafer W. The buff table 5-400 can be rotated about a rotation axis A by a drive mechanism, not shown. The buff pad 5-502 is attached to a surface of the buff head 5-500 that faces the wafer W. The buff arm 5-600 can rotate the buff head 5-500 about a rotation axis B, and swing the buff head 5-500 in the radial direction of the wafer W as indicated by an arrow C. The buff arm 5-600 can swing the buff head 5-500 to a position where the buff pad 5-502 faces the conditioner 5-800.
The liquid supply system 5-700 includes a pure water nozzle 5-710 for supplying pure water (DIW) to the processing target surface of the wafer W. The pure water nozzle 5-710 communicates with a pure water supply source 5-714 through pure water piping 5-712. The pure water piping 5-712 is provided with an on-off valve 5-716 that can open and close the pure water piping 5-712. The on-off valve 5-716 opening and closing control through the control device, not shown, can supply the pure water to the processing target surface of the wafer W, at any timing.
The liquid supply system 5-700 includes a chemical solution nozzle 5-720 for supplying a chemical solution (Chemi) to the processing target surface of the wafer W. The chemical solution nozzle 5-720 communicates with a chemical solution supply source 5-724 through chemical solution piping 5-722. The chemical solution piping 5-722 is provided with an on-off valve 5-726 that can open and close the chemical solution piping 5-722. The on-off valve 5-726 opening and closing control through the control device can supply the chemical solution to the processing target surface of the wafer W, at any timing.
The upper buff process module 5-300A can selectively supply the pure water, chemical solution, or slurry to the processing target surface of the wafer W through the buff arm 5-600, the buff head 5-500, and the buff pad 5-502.
That is, branched pure water piping 5-712a is branched from the pure water piping 5-712 between the pure water supply source 5-714 and the on-off valve 5-716. Furthermore, branched chemical solution piping 5-722a is branched from the chemical solution piping 5-722 between the chemical solution supply source 5-724 and the on-off valve 5-726. The branched pure water piping 5-712a, the branched chemical solution piping 5-722a, and slurry piping 5-732, which communicates with a slurry supply source 5-734, join together into liquid supply piping 5-740. The branched pure water piping 5-712a is provided with an on-off valve 5-718 that can open and close the branched pure water piping 5-712a. The branched chemical solution piping 5-722a is provided with an on-off valve 5-728 that can open and close the branched chemical solution piping 5-722a. The slurry piping 5-732 is provided with an on-off valve 5-736 that can open and close the slurry piping 5-732.
A first end of the liquid supply piping 5-740 communicates with three systems of piping, which are the branched pure water piping 5-712a, the branched chemical solution piping 5-722a, and the slurry piping 5-732. The liquid supply piping 5-740 extends through the inside of the buff arm 5-600, the center of the buff head 5-500, and the center of the buff pad 5-502. A second end of the liquid supply piping 5-740 is opened toward the processing target surface of the wafer W. The control device, not shown, can supply the processing target surface of the wafer W with any one of the pure water, chemical solution, and slurry, or a mixed liquid that is any combination thereof, by controlling on and off of the on-off valve 5-718, the on-off valve 5-728 and the on-off valve 5-736.
The upper buff process module 5-300A supplies the wafer W with the process liquid through the liquid supply piping 5-740, rotates the buff table 5-400 about the rotation axis A, presses the buff pad 5-502 against the processing target surface of the wafer W, and swings the buff head 5-500 in the direction of arrow C while rotating this head about the rotation axis B, thereby allowing the buff process to be applied to the wafer W. Note that the buff pad of this embodiment has a considerably smaller diameter than the wafer, which is a processing target, has. This is because a high flatness can be achieved by the buff process.
Here, the buff process includes at least one of a buff-polishing process and a buff-cleaning process. The buff-polishing process is a process that relatively moves a wafer W and a buff pad 5-502 against each other while the buff pad 5-502 is in contact with the wafer W, and causes a slurry to intervene between the wafer W and the buff pad 5-502, thereby polishing and removing unwanted portions of a processing target surface of the wafer W. The buff-polishing process is a process that can apply a stronger physical action force to the wafer W than the physical action force applied to the wafer W by the roll sponge in the roll cleaning chamber 5-190 and the physical action force applied to the wafer W by the pen sponge in the pen cleaning chamber 5-192. The buff-polishing process can achieve removal of a surface part which is damaged by a scratch or the like or to which contaminants adhere, additional removal of a portion which cannot have been removed by main polishing in the main polishing unit 5-3, or improvement in morphology after the main polishing.
The buff-cleaning process is a process that relatively moves the wafer W and the buff pad 5-502 against each other while the buff pad 5-502 is in contact with the wafer W, and causes the cleaning process liquid (the chemical solution, or the chemical solution and pure water) to intervene between the wafer W and the buff pad 5-502, thereby removing contaminants on the surface of the wafer W or modifying the property of the processing target surface. The buff-cleaning process is a process that can apply a stronger physical action force to the wafer W than the physical action force applied to the wafer W by the roll sponge in the roll cleaning chamber 5-190 and the physical action force applied to the wafer W by the pen sponge in the pen cleaning chamber 5-192.
The conditioner 5-800 is a member for conditioning the surface of the buff pad 5-502. The conditioner 5-800 includes a dressing table 5-810, and a dresser 5-820 installed on the dressing table 5-810. The dressing table 5-810 can be rotated about a rotation axis D by a drive mechanism, not shown. The dresser 5-820 may be formed of a diamond dresser or a brush dresser, or a combination of these dressers.
When the buff pad 5-502 is conditioned, the upper buff process module 5-300A swings the buff arm 5-600 such that the buff pad 5-502 reaches a position facing the dresser 5-820. The upper buff process module 5-300A rotates the dressing table 5-810 about the rotation axis D while rotating the buff head 5-500, and presses the buff pad 5-502 against the dresser 5-820, thereby conditioning the buff pad 5-502.
<Conditioner>
Next, referring to the various drawings, specific processes of conditioning for the conditioner 5-800 and the buff pad 5-502 are described.
The conditioner 5-800 is disposed adjacent to the buff table 5-400, and positioned at a radius position substantially identical to that of the buff table 5-400 with respect to the center of swing L of the buff arm 5-600. Accordingly, when the buff arm 5-600 is swung (swung counterclockwise in
First, on the buff table 5-400, the buff-cleaning process (step S5-11) is applied to the wafer W. Needless to say, at this time, the buff pad 5-502 is positioned on the buff table 5-400. During the buff-cleaning process, the process liquid for buff-cleaning is supplied from the liquid supply piping 5-740, through the inside of the buff arm and the inside of the buff head rotating shaft 5-601 (see
On the buff table 5-400, a wafer rinsing process (step S5-12) is applied. The wafer rinsing process is a process of cleaning the wafer W with DIW. After completion of applying the wafer rinsing process to the wafer W, the wafer W is then taken out of the buff table 5-400 (step S5-13) and conveyed to the next step. Subsequently, the buff table 5-400 is cleaned with DIW according to the buff table rinsing process (step S5-14). The series of processes at the buff table has thus been completed. A new wafer W to be processed next is taken in (step S5-15), and the above processes are repeated.
On the other hand, on the dressing table 5-810, the dressing process is applied to the buff pad 5-502 in parallel to the above processes. The buff pad 5-502 (see
Next, the buff head 5-500 is lowered and brought into contact with the dresser 5-820, and the dressing process is applied to the buff pad 5-502 (step S5-23) (see
After the dressing process, the buff head 5-500 ascends again, the cleaning liquid is jetted from the aforementioned buff pad cleaning mechanism 5-830 toward the buff pad, and this buff pad having been subjected to the dressing process is then subjected to the pad rinsing process again (step S5-24) (see
The description has thus been made for the case where the buff pad 5-502 faces perpendicularly downward. However, the present invention is not limited to this case. The present invention is also applicable to the case where the buff pad 5-502 faces perpendicularly upward, and the case where this pad faces horizontally.
Next, one characteristic point of this embodiment is described with reference to
To address the above problems, disposition of the dresser 5-820 at the lower position than that of the buff table 5-400 can effectively prevent the cleaning liquid from being dispersed to the buff table 5-400. Since the cleaning liquid is jetted to the dresser 5-820 by the dresser cleaning mechanism 5-840 from an obliquely above position, the difference in height between the buff table 5-400 and the dresser 5-820 prevents the cleaning liquid from being dispersed to the buff table 5-400. A difference in height even of several centimeters exerts sufficient contamination preventing effect.
Next, referring to
That is, a line passing through the center of the buff table 5-400 and the center of the dresser 5-820 is drawn, a line orthogonal to this line is further drawn at the center of the dresser 5-820, and the jetting direction is configured such that the dispersion should be toward an area far from the buff table 5-400 over the orthogonal line as a boundary. Furthermore, in other words, the dresser cleaning mechanism 5-840 is disposed in an area other than the shaded area with respect to the orthogonal line, which serves as the boundary. However, the dresser cleaning mechanism 5-840 cannot be disposed above the buff table 5-400. Consequently, as shown in
Next, referring to
Furthermore, the dresser cover 5-850 may be provided with a contact avoiding mechanism for avoiding contact with the buff pad 5-502. The buff pad 5-502 attached to the buff head 5-500 sometimes horizontally moves at the height equivalent to the surface of the dresser 5-820 during transition from the buff-cleaning process to the dressing process. In this case, as shown in
Various specific configurations of contact avoiding mechanisms may be considered. For example, a specific example may be exemplified where the dresser cover moving mechanism is a cylinder 5-853 that vertically moves the dresser cover 5-850. In
48B and 48C are diagrams for illustrating another example of the contact avoiding mechanism. First,
Next, referring to
To prevent such contamination, the dresser cover 5-860 is turned by about 90 degrees along a horizontal plane in the state where the buff pad 5-502 has been completely moved above the dresser 5-820 (see
Next, referring to
As described above, in the case of adopting the dresser cover 5-870 that includes the movable cover member 5-873, the notch 5-871 is closed with the movable cover member 5-873 during dresser rinsing, as shown in
Next, referring to
Next, referring to
The air curtain cooperates with supply of DIW during the dresser rinsing. That is, while DIW is supplied to the dresser 5-820 for the dresser rinsing, the air curtain 5-891a is formed. On the contrary, while supply of DIW is stopped, formation of the air curtain 5-891a is also stopped because the cleaning liquid is not dispersed. Consequently, the air curtain 5-891a does not affect conveyance of the wafer W and movement of the buff pad 5-502.
The locally exhausted state 5-893a is formed around the dressing table 5-810 by a local exhaust mechanism 5-893. The locally exhausted state 5-893a is achieved by a method of sucking a locally generated gas and the like to prevent diffusion to the surroundings. In this embodiment, it is preferred that a circular sucking inlet 5-893b be provided along the outer peripheral portion of the dressing table 5-810 to form the locally exhausted state 5-893a around the dressing table 5-810. Consequently, even when the cleaning liquid is dispersed in the dresser rinsing process or the like, the local exhaust prevents the buff table 5-400 from being contaminated. The local exhausted state is not necessarily formed over the entire periphery of the dressing table 5-810. The state is only required to be formed in at least a space between the buff table 5-400 and the dressing table 5-810.
Furthermore, the descending air current generating mechanism 5-895 forms the descending air current in the entire buff process module. The descending air current 5-895a collides with the wafer W on the buff table 5-400 and then flows outward in the radial direction. Consequently, if the cleaning liquid is dispersed from the side of the dressing table 5-810, the liquid can be pushed back outward in the radial direction by the airflow flowing outward in the radial direction on the buff table 5-400. The descending air current 5-895a can be used together with the aforementioned local exhaust 5-893a to exert a higher contamination preventing effect.
According to the configuration in
Next, referring to
The above embodiments with reference to
A conditioning device, buff process apparatus, substrate processing apparatus, dresser, and conditioning method according to one embodiment of the invention of the present application are hereinafter described with reference to
The load/unload unit 6-2 includes at least two (four in this embodiment) front loaders 6-20 where wafer cassettes for stocking multiple wafers (substrates) are mounted. These front loaders 6-20 are disposed adjacent to the housing 6-1, and disposed in the width direction of the substrate processing apparatus (the direction perpendicular to the longitudinal direction). The front loader 6-20 is configured to be capable of being mounted with an open cassette, a SMIF (Standard Manufacturing Interface) pod, or a FOUP (Front Opening Unified Pod).
In the load/unload unit 6-2, a traveling mechanism 6-21 is laid along the arrangement of the front loaders 6-20. Two conveyor robots 6-22 that can travel along the arrangement direction of the wafer cassettes are installed on the traveling mechanism 6-21. The conveyor robots 6-22 are configured to be capable of accessing the wafer cassettes mounted on the front loaders 6-20 by traveling on the traveling mechanism 6-21. Each conveyor robot 6-22 takes a wafer having not been processed yet from the wafer cassette and returns a processed wafer to the wafer cassette.
The polishing unit 6-3 defines a region where a wafer is polished (flattened). The polishing unit 6-3 includes a first polishing unit 6-3A, a second polishing unit 6-3B, a third polishing unit 6-3C, and a fourth polishing unit 6-3D. As shown in
As shown in
Likewise, the second polishing unit 6-3B includes a polishing table 6-30B, a top ring 6-31B, a polishing liquid supply nozzle 6-32B, a dresser 6-33B, and an atomizer 6-34B. The third polishing unit 6-3C includes a polishing table 6-30C, a top ring 6-31C, a polishing liquid supply nozzle 6-32C, a dresser 6-33C, and an atomizer 6-34C. The fourth polishing unit 6-3D includes a polishing table 6-30D, a top ring 6-31D, a polishing liquid supply nozzle 6-32D, a dresser 6-33D, and an atomizer 6-34D.
Since the first polishing unit 6-3A, the second polishing unit 6-3B, the third polishing unit 6-3C and the fourth polishing unit 6-3D have the same configuration as each other, only the first polishing unit 6-3A is hereinafter described.
Next, the conveyor mechanism for conveying the wafer is described. As shown in
Furthermore, a second linear transporter 6-7 is disposed adjacent to the third polishing unit 6-3C and the fourth polishing unit 6-3D. The second linear transporter 6-7 is a mechanism that conveys the wafer between three conveyance positions (a fifth conveyance position 6-TP5, a sixth conveyance position 6-TP6 and a seventh conveyance position 6-TP7 sequentially from the site near the load/unload unit) along the direction in which the polishing units 6-3C and 6-3D are disposed.
The wafer is conveyed by the first linear transporter 6-6 to the polishing units 6-3A and 6-3B. The top ring 6-31A of the first polishing unit 6-3A moves between the polishing position and the second conveyance position 6-TP2 by a swing operation of the top ring head. Consequently, the wafer is passed to the top ring 6-31A at the second conveyance position 6-TP2. Likewise, the top ring 6-31B of the second polishing unit 6-3B moves between the polishing position and the third conveyance position 6-TP3, and the wafer is passed to the top ring 6-31B at the third conveyance position 6-TP3. The top ring 6-31C of the third polishing unit 6-3C moves between the polishing position and the sixth conveyance position 6-TP6, and the wafer is passed to the top ring 6-31C at the sixth conveyance position 6-TP6. The top ring 6-31D of the fourth polishing unit 6-3D moves between the polishing position and the seventh conveyance position 6-TP7, and the wafer is passed to the top ring 6-31D at the seventh conveyance position 6-TP7.
A lifter 6-11 for receiving the wafer from the conveyor robot 6-22 is disposed at the first conveyance position 6-TP1. The wafer is passed from the conveyor robot 6-22 to the first linear transporter 6-6 via the lifter 6-11. A swing transporter 6-12 is disposed among the first linear transporter 6-6, the second linear transporter 6-7 and the cleaning unit 6-4. The swing transporter 6-12 includes a hand that is movable between the fourth conveyance position 6-TP4 and the fifth conveyance position 6-TP5. The wafer is passed from the first linear transporter 6-6 to the second linear transporter 6-7 by the swing transporter 6-12. The wafer is conveyed by the second linear transporter 6-7 to the third polishing unit 6-3C and/or the fourth polishing unit 6-3D. The wafer polished by the polishing unit 6-3 is conveyed to the temporary stage 6-180 by the swing transporter 6-12. The wafer mounted on the temporary stage 6-180 is then conveyed to the cleaning unit 6-4.
In the roll cleaning chamber 6-190, an upper roll cleaning module 6-201A and a lower roll cleaning module 6-201B, which are arranged along the vertical direction, are disposed. The upper roll cleaning module 6-201A is disposed above the lower roll cleaning module 6-201B. Each of the upper roll cleaning module 6-201A and the lower roll cleaning module 6-201B is a cleaner that supplies the cleaning liquid to the front and rear surfaces of the wafer while pressing the rotating two roll sponge members against the front and rear surfaces of the wafer, thereby cleaning the wafer. A wafer temporary stage 6-204 is provided between the upper roll cleaning module 6-201A and the lower roll cleaning module 6-201B.
In the pen cleaning chamber 6-192, an upper pen cleaning module 6-202A and a lower pen cleaning module 6-202B, which are arranged along the vertical direction, are disposed. The upper pen cleaning module 6-202A is disposed above the lower pen cleaning module 6-202B. Each of the upper pen cleaning module 6-202A and the lower pen cleaning module 6-202B is a cleaner that supplies the cleaning liquid to the surface of the wafer while pressing a rotating pencil sponge member against the surface of the wafer and swinging the sponge in the radial direction of the wafer, thereby cleaning the wafer. A wafer temporary stage 6-203 is provided between the upper pen cleaning module 6-202A and the lower pen cleaning module 6-202B.
In the drying chamber 6-194, an upper drying module 6-205A and a lower drying module 6-205B, which are arranged along the vertical direction, are disposed. The upper drying module 6-205A and the lower drying module 6-205B are separated from each other. Filter-fan units 6-207A and 6-207B that supply clean air into the drying modules 6-205A and 6-205B are provided above the upper drying module 6-205A and the lower drying module 6-205B, respectively.
In the first conveyance chamber 6-191, a vertically movable first conveyor robot (conveyor mechanism) 6-209 is disposed. In the second conveyance chamber 6-193, a vertically movable second conveyor robot 6-210 is disposed. In the third conveyance chamber 6-195, a vertically movable third conveyor robot (conveyor mechanism) 6-213 is disposed. The first conveyor robot 6-209, the second conveyor robot 6-210 and the third conveyor robot 6-213 are movably supported by vertically extending support shafts 6-211, 6-212 and 6-214, respectively. The first conveyor robot 6-209, the second conveyor robot 6-210 and the third conveyor robot 6-213 internally include drive mechanisms, such as motors, and are configured to be vertically movable along the support shafts 6-211, 6-212 and 6-214, respectively. The first conveyor robot 6-209 includes vertically arranged two hands. As indicated by a broken line in
The first conveyor robot 6-209 operates so as to convey the wafer W between the temporary stage 6-180, the upper roll cleaning module 6-201A, the lower roll cleaning module 6-201B, the temporary stage 6-204, the temporary stage 6-203, the upper pen cleaning module 6-202A and the lower pen cleaning module 6-202B. The first conveyor robot 6-209 uses the lower hand for conveying the wafer having not been cleaned yet (wafer to which the slurry adheres), and uses the upper hand for conveying the cleaned wafer.
The second conveyor robot 6-210 operates so as to convey the wafer W between the upper pen cleaning module 6-202A, the lower pen cleaning module 6-202B, the temporary stage 6-203, the upper drying module 6-205A and the lower drying module 6-205B. Since the second conveyor robot 6-210 only conveys the cleaned wafer, this robot only includes one hand. The conveyor robot 6-22 shown in
In the buff process chamber 6-300, an upper buff process module 6-300A and a lower buff process module 6-300B are provided. The third conveyor robot 6-213 operates so as to convey the wafer W between the upper roll cleaning module 6-201A, the lower roll cleaning module 6-201B, the temporary stage 6-204, the upper buff process module 6-300A and the lower buff process module 6-300B.
This embodiment exemplifies the example of disposing the buff process chamber 6-300, the roll cleaning chamber 6-190 and the pen cleaning chamber 6-192 in the cleaning unit 6-4, sequentially from the site far from the load/unload unit 6-2. The disposition is not limited to this example. The mode of disposing the buff process chamber 6-300, the roll cleaning chamber 6-190 and the pen cleaning chamber 6-192 may be appropriately selected according to the quality of wafer and the throughput. Since the upper buff process module 6-300A and the lower buff process module 6-300B have similar configurations, only the upper buff process module 6-300A is hereinafter described.
The buff table 6-400 includes a mechanism for holding the wafer W. In this exemplary embodiment, the wafer holding mechanism is a vacuum-sucking type mechanism. Alternatively, the mechanism may be of any type. For example, the wafer holding mechanism may be a clamp type mechanism that clamps the front and rear surfaces of the wafer at least at one point on the periphery of the wafer W. Alternatively, the mechanism may be a roller chuck type mechanism that holds the side of the wafer W at least at one point on the periphery of the wafer W. In this exemplary embodiment, the buff table 400 holds the wafer W such that the processing target surface of the wafer W faces upward.
The buff table 6-400 is configured to be rotated about a rotation axis A by a drive mechanism, not shown. A buff head 6-500 is attached to the buff arm 6-600 via a rotatably configured shaft 6-504. A buff pad 6-502 for applying the buff process to the wafer W is attached onto the surface of the buff head 6-500 that faces the wafer (or the buff table 6-400). The buff arm 6-600 is configured to rotate the buff head 6-500 about a rotation axis B. The area of the buff pad 6-502 is smaller than the area of the wafer W (or the buff table 6-400). Consequently, the buff arm 6-600 is configured to be capable of swinging the buff head 6-500 in the radial direction of the wafer W as indicated by arrows C. Consequently, the buff process can be uniformly applied to the wafer W. The buff arm 6-600 is configured to be capable of swinging the buff head 6-500 to a position where the buff pad 6-502 faces the conditioner 6-800. The buff head 6-500 is configured to be movable by an actuator (not shown) in a direction toward the buff table 6-400 and in a direction away from the buff table 6-400 (vertically in this exemplary embodiment). Consequently, the buff pad 6-502 is pressed against the wafer W at a predetermined pressure. This configuration can be achieved by expansion and contraction of the shaft 6-504, or achieved by vertical movement of the buff arm 6-600.
The liquid supply system 6-700 includes a pure water external nozzle 6-710 for supplying pure water (indicated as DIW in the diagram) to the processing target surface of the wafer W. The pure water external nozzle 6-710 communicates with a pure water supply source 6-714 through pure water piping 6-712. The pure water piping 6-712 is provided with an on-off valve 6-716 that can open and close the pure water piping 6-712. The control device 6-5 can control opening and closing of the on-off valve 6-716 to supply the pure water to the processing target surface of the wafer W, at any timing.
The liquid supply system 6-700 includes a chemical solution external nozzle 6-720 for supplying a chemical solution (indicated as Chemi in the diagram) to the processing target surface of the wafer W. The chemical solution external nozzle 6-720 communicates with a chemical solution supply source 6-724 through chemical solution piping 6-722. The chemical solution piping 6-722 is provided with an on-off valve 6-726 that can open and close the chemical solution piping 6-722. The control device 6-5 can control open and close of the on-off valve 6-726 to supply the chemical solution to the processing target surface of the wafer W, at any timing.
The liquid supply system 6-700 includes a slurry external nozzle 6-730 for supplying a slurry (indicated as Slurry in the diagram) to the processing target surface of the wafer W. The slurry external nozzle 6-730 communicates with a slurry supply source 6-734 through slurry piping 6-732. The slurry piping 6-732 is provided with an on-off valve 6-736 that can open and close the slurry piping 6-732. The control device 6-5 can control open and close of the on-off valve 6-736 to supply the slurry to the processing target surface of the wafer W, at any timing.
In this exemplary embodiment, all the external nozzles 6-710, 6-720 and 6-730 are disposed at fixed positions, and supply the pure water, chemical solution, and slurry to the fixed positions, respectively. The process liquids are supplied to the positions where the liquids are effectively supplied to the buff pad 6-502 by rotation of the wafer W. The external nozzles 6-710, 6-720 and 6-730 may be configured as one or two nozzles common to at least two of various types of process liquids. The external nozzle may be configured to supply at least one process liquid among the pure water, chemical solution and slurry.
The buff process module 6-300A is configured to be capable of selectively supplying the process liquid (pure water, chemical solution, or slurry) to the processing target surface of the wafer W through the buff arm 6-600, the buff head 6-500, and the buff pad 6-502. That is, branched pure water piping 6-712a is branched from the pure water piping 6-712 between the pure water supply source 6-714 and the on-off valve 6-716. Likewise, branched chemical solution piping 6-722a is branched from the chemical solution piping 6-722 between the chemical solution supply source 6-724 and the on-off valve 6-726. Branched slurry piping 6-732a is branched from the slurry piping 6-732 between the slurry supply source 6-734 and the on-off valve 6-736. The branched pure water piping 6-712a, the branched chemical solution piping 6-722a, and the branched slurry piping 6-732a join together into liquid supply piping 6-740. The branched pure water piping 6-712a is provided with an on-off valve 6-718 that can open and close the branched pure water piping 6-712a. The branched chemical solution piping 6-722a is provided with an on-off valve 6-728 that can open and close the branched chemical solution piping 6-722a. The branched slurry piping 6-732a is provided with an on-off valve 6-736 that can open and close the branched slurry piping 6-732a.
The liquid supply piping 6-740 communicates with the inside of the buff arm 6-600, the interior of the center of the buff head 6-500, and the interior of the center of the buff pad 6-502. More specifically, as shown in
In this exemplary embodiment, only one opening of the internal supply line 6-506 is provided at the center of the buff pad 6-502. Alternatively, multiple openings may be provided. For example, the internal supply line 6-506 may be branched toward openings which are arranged in a distributed manner, according to a water-pool jacket structure formed in the buff head 6-500. The openings may be arranged in a distributed manner so as to have different positions in the radial direction. The control device 5 can supply the processing target surface of the wafer W with any one of the pure water, chemical solution, and slurry, or a mixed liquid that is any combination thereof, by controlling on and off of the on-off valve 6-718, the on-off valve 6-728 and the on-off valve 6-736. As apparent from the above description, the buff process module 6-300A includes two series of process liquid supply means, which are the external nozzles 6-710, 6-720 and 6-730 and the internal supply line 6-506.
The buff process module 6-300A supplies the wafer W with the process liquid through at least one series between the series of external nozzles 6-710, 6-720 and 6-730 and the series of internal supply line 6-506, rotates the buff table 6-400 about the rotation axis A, presses the buff pad 6-502 against the processing target surface of the wafer W, and swings the buff head 6-500 in the direction of arrow C while rotating this head about the rotation axis B, thereby allowing the buff process to be applied to the wafer W. The relative motion between the buff table 6-400 and the buff head 6-500 during the buff process is not limited to the above example. Alternatively, the motion may be achieved by at least one of a rotational motion, translational motion, arc motion, reciprocating motion, scrolling motion, and angular rotational motion (motion of rotating by a predetermined angle less than 360 degrees).
In the present application, the buff process includes at least one of the buff-polishing process and the buff-cleaning process. The buff-polishing process is a process that relatively moves the wafer W and the buff pad 6-502 against each other while the buff pad 6-502 is in contact with the wafer W, and causes the slurry or the like to intervene between the wafer W and the buff pad 6-502, thereby polishing and removing unwanted portions of the processing target surface of the wafer W. Typically, the buff-polishing process is for what is called final polishing after main polishing that is performed for the sake of flattening the unevenness on the wafer, and for removing an unwanted film formed on the surface other than the trenches and the inside of via-holes. The amount of removing process after buff-polishing is, for example, to an extent ranging from several nanometers to several tens of nanometers. The buff pad 6-502 may be, for example, a pad including foamed polyurethane and non-woven fabric that are stacked on each other (more specifically, e.g., a commercially available series of IC1000 ®/SUBA®), or a suede-like porous polyurethane non-fibrous pad (more specifically, e.g., a commercially available POLITEX®) or the like. The buff-polishing process is a process that can apply a stronger physical action force to the wafer W than the physical action force applied to the wafer W by the roll sponge made of PVA in the roll cleaning chamber 6-190 and the physical action force applied to the wafer W by the pen sponge made of PVA in the pen cleaning chamber 6-192. The buff-polishing process can achieve removal of a surface part which is damaged by a scratch or the like or a surface part to which foreign substances adhere, additional removal of a portion which cannot have been removed by main polishing in the polishing unit 6-3, or improvement in morphology, such as on unevenness in micro regions and film thickness distribution over the entire substrate after main polishing.
The buff-cleaning process is a finishing process that relatively moves the wafer W and the buff pad 6-502 against each other while the buff pad 6-502 is in contact with the wafer W, and causes the cleaning process liquid (the chemical solution, pure water, or a mixture thereof) to intervene between the wafer W and the buff pad 6-502, thereby removing foreign substances on the surface of the wafer W or modifying the property of the processing target surface. The buff pad 6-502 may be the aforementioned series of IC1000 ®/SUBA®, or series of POLITEX® or the like. The buff-cleaning process is a process that can apply a stronger physical action force to the wafer W than the physical action force applied to the wafer W by the roll sponge made of PVA in the roll cleaning chamber 6-190 and the physical action force applied to the wafer W by the pen sponge made of PVA in the pen cleaning chamber 6-192. The buff-cleaning process can effectively clean and remove highly adhesive foreign substances and the like that cannot be removed only by contact with a sponge member made of PVA. Alternatively, for the buff-cleaning process according to the present invention, PVA sponge may be adopted as the buff pad.
The conditioner 6-800 conditions the surface of the buff pad 6-502. The conditioning includes shaving the surface of the buff pad, cleaning the surface while shaving this surface, and cleaning the surface without shaving this surface. In this exemplary embodiment, the conditioner 6-800 is disposed outside of the buff table 6-400. The conditioner 6-800 includes a base plate 6-810, and a dresser 6-820 installed on the base plate 6-810. The base plate 6-810 is configured to be capable of being rotated about a rotation axis D by a drive mechanism, not shown. In this exemplary embodiment, the area of the dresser 6-820 is larger than the area of the buff pad 6-502. Alternatively, the relationship of largeness in area between the dresser 6-820 and the buff pad 6-502 may be freely configured. The details of the dresser 6-820 are described later.
When the buff pad 6-502 is conditioned, the buff process module 6-300A swings the buff arm 6-600 such that the buff pad 6-502 reaches a position facing the dresser 6-820. The buff process module 6-300A rotates the base plate 6-810 about the rotation axis D while rotating the buff head 6-500, and presses the buff pad 6-502 against the dresser 6-820, thereby conditioning the buff pad 6-502. At this time, the buff head 6-500 is freely moved in the horizontal direction, as with the case during the buff process. This movement allows the processing target surface of the buff pad 6-502 to be uniformly conditioned. For example, this conditioning operation can be performed while the buff-processed wafer W is replaced with a wafer W to be buff-processed next.
The buff process module 6-300A described above performs the buff process as a postprocess for the chemical-mechanical-polished wafer W, thereby allowing final polishing to be performed while reducing the damage (defect) to the wafer W, and allowing the damage caused by the chemical mechanical polishing process to be removed. Furthermore, this module can more effectively clean and remove highly adhesive foreign substances than the conventional roll cleaning and pen cleaning can.
In the grooves 6-825 (i.e., on the base plate 6-810), multiple jet nozzles 6-830 are provided at intervals. Alternatively, the number of jet nozzles 6-830 may be one. These jet nozzles 6-830 are disposed such that the tops of the jet nozzles 6-830 are at positions retracted below from the upper surface of the dresser 6-820. That is, when the buff pad 6-502 is in contact with the upper surface of the dresser 6-820, the jet nozzles 6-830 are not in contact with the buff pad 6-502.
In the base plate 6-810, a water jacket 6-811 is formed. The water jacket 6-811 communicates with each of the pure water supply source 6-714 (see
When the conditioner 6-800 conditions the buff pad 6-502, the buff pad 6-502 attached to the buff head 6-500 is disposed above the dresser 6-820 and the jet nozzles 6-830 by swing of the buff arm 6-600. Furthermore, the buff head 6-500 moves downward, thereby lowering the buff pad 6-502 to be in contact with the upper surface of the dresser 6-820. Consequently, the buff pad 6-502 can be pressed against the dresser 6-820 at a predetermined pressure. The rotation of the buff head 6-500 rotates the buff pad 6-502 while the rotation of the base plate 6-810 rotates the dresser 6-820 and the jet nozzles 6-830, and the pure water is jetted from the jet nozzles 6-830, thereby allowing the buff pad 6-502 to be conditioned. At this time, in first areas A1 (see
This conditioner 6-800 can perform two types of conditioning (dressing and cleaning) using the dresser 6-820 and the jet nozzles 6-830. Consequently, the buff pad 6-502 can be effectively conditioned. For example, in the case where grooves are formed on the buff pad 6-502, the areas on the buff pad 6-502 where no groove is formed is dressed while particles entering in the grooves (e.g., the slurry used for polishing, substrate polishing dust, etc.) can be removed by pure water jet. Furthermore, the installation space for the conditioner 6-800 can be reduced in comparison with the case of installing multiple conditioners each having a single type of conditioning function (e.g., a conditioner for dressing and a conditioner for cleaning). Furthermore, in the case of applying multiple types of conditioning to the buff pad 6-502, there is no need to move the buff pad 6-502 between the multiple conditioners. Consequently, the time required for conditioning the buff pad 6-502 can be reduced by a time for the movement.
On the upper surface of the dresser 6-820b, multiple grooves 6-826b are formed. Each groove 826b extends from the center of the dresser 6-820b to the periphery in a radial direction, and is thus radially formed. This conditioner 6-800b facilitates discharging the pure water supplied from the jet nozzles 6-830 during conditioning, to the outside of the dresser 6-820b through the grooves 6-826b. As a result, adhering objects removed by the pure water jet are easily discharged to the outside together with the pure water.
After rinsing of the wafer W is finished on the buff table 6-400, this wafer W is conveyed from the buff table 6-400 (step S6-30). The pure water is supplied from the pure water external nozzle 6-710 to the buff table 6-400 from which the wafer W has been conveyed, and the buff table 6-400 is rinsed (step S6-40). During steps S6-30 and S6-40, the buff arm 6-600 is still disposed on the side of the conditioner 6-800. In the conditioner 6-800, during steps S6-30 and S6-40, the buff pad 6-502 is conditioned. In this exemplary embodiment, dressing and cleaning are performed as conditioning at the same time (step S6-80). The configuration of the conditioner 6-800 for performing such conditioning is described later.
Meanwhile, on the buff table 6-400, after completion of rinsing of the buff table 6-400, a wafer W to be subjected to the buff-cleaning process next is conveyed onto the buff table 6-400 (step S6-50). After the wafer W is mounted on the buff table 6-400, the buff arm 6-600 is moved toward the buff table 6-400. As with the aforementioned step S6-10, the buff-cleaning process is applied to the newly conveyed wafer W (step S6-60). During step S6-60, in the conditioner 6-800, the dresser 6-820 is rinsed (step S6-90). More specifically, the pure water is jetted obliquely downward toward the dresser 6-820 from the external nozzle provided outside of the dresser 6-820, thereby rinsing the dresser 6-820. During rinsing, the dresser 6-820 may be rotated as with the aforementioned step S6-70, or stopped. Step S6-90 can be started immediately after step S6-80. Alternatively, step S6-90 may be performed after step S6-80 is finished and the buff arm 6-600 is moved to the side of the buff table 6-400.
The jet nozzles 6-830 may be through-holes that penetrate the dresser 6-820 between the front and rear surfaces. That is, the through-holes may function as the jet nozzles. This configuration can simplify the configuration of the conditioner 6-800. Also in this case, a water jacket that communicates with each through-hole may be formed in the base plate 6-810.
The above exemplary embodiment describes the configuration of performing two types of conditioning at the same time. Alternatively, the two types of conditioning may be sequentially performed. For example, conditioning by the dresser 6-820 may be performed first, and subsequently conditioning by the jet nozzles 6-830 may be performed. More specifically, first, without jetting pure water from the jet nozzles 6-830, the dresser 6-820 and the buff pad 6-502 may be caused to be in contact with each other, and the first conditioning may be performed. Subsequently, in a state where the buff head 6-500 is raised (i.e., the distance between the base plate 6-810 and the buff pad 6-502 is larger than that in the case of the first conditioning, in other words, the state where the dresser 6-820 and the buff pad 6-502 are not in contact with each other), the pure water may be jetted from the jet nozzles 6-830, and the second conditioning may be performed. According to the procedures, the pure water is jetted from the jet nozzles 6-830 in the state where a gap is formed between the buff pad 6-502 and the dresser 6-820. Consequently, conditioning dust generated by the first conditioning is easily discharged outside in the second conditioning. Note that the first conditioning may be performed after the second conditioning is performed.
Thus, in the case where control of jetting the pure water from the jet nozzles 6-830 in the state where the buff pad 6-502 and the dresser 6-820 are apart from each other is performed, the jet nozzles 6-830 may be configured such that the respective jetting areas of jet nozzles 6-830 do not overlap with each other during conditioning. Control of preventing the jetting areas from overlapping with each other is facilitated by disposition of the jet nozzles 6-830 in a manner where the positions of these nozzles in the radial direction are different from each other. This configuration can prevent the jets of pure water emitted by the respective jet nozzles 6-830 from colliding with each other, which in turn can prevent the pressure applied by the pure water to the buff pad 6-502 from being reduced. Consequently, the conditioning performance due to the collision can be prevented from being reduced.
The dresser 6-820 is not necessarily made of diamond. Alternatively, this dresser may be made of any material capable of conditioning the buff pad 6-502 by being in contact with the buff pad 6-502 and relatively moving against the buff pad 6-502. For example, the dresser 6-820 may be made of a ceramic material. Alternatively, the dresser 6-820 may be a brush. Thus, the conditioner 6-800 may be achieved by freely combining contact type conditioning means, and fluid jetting type conditioning means.
Furthermore, the conditioner 6-800 may be achieved by combining first contact type conditioning means with second contact type conditioning means. For example, the first contact type conditioning means may be any one of a brush, diamond and ceramic. The second contact type conditioning means may be any one of a brush, diamond and ceramic that have conditioning characteristics different from those of the first contact type conditioning means. More specifically, each of the first contact type conditioning means and the second contact type conditioning means may be a brush. In this case, the first contact type conditioning means and the second contact type conditioning means may adopt brushes that have length and hardness different from each other. In the case where the conditioner 6-800 does not include the jet nozzles 6-830, the conditioning liquid may be supplied from the internal supply line 6-506. It is a matter of course that the conditioner 6-800 may include three or more types of conditioning means. For example, the jet nozzles 6-830 and the brushes may be disposed in the grooves 6-825 shown in
In the case where the multiple jet nozzles 6-830c are disposed at different positions in the radial direction from each other as shown in
Instead of the configuration where the buff head 6-500 moves from the buff table 6-400 in the horizontal direction (a direction orthogonal to the direction of gravitational force) to a position below the conditioner 6-800, a configuration may be adopted where the conditioner 6-800 moves in the horizontal direction to a position below the buff head 6-500. In this case, it is preferred that conditioning be performed after the wafer W be conveyed from the buff table 6-400, in order to prevent substances removed by the conditioner from being dispersed on the wafer W. Alternatively, a configuration may be adopted where both the buff head 6-500 and the conditioner 6-800 move to predetermined conditioning positions. In this case, it is preferred that the conditioning positions be outside of the buff table 6-400.
The buff table 6-400 may be configured so as to hold the wafer W to face any direction. For example, the buff table 6-400 may be configured so as to hold the wafer W to face the direction opposite to that of the above exemplary embodiment. That is, instead of the configuration where the buff table 6-400 holds the wafer W such that the normal of the processing target surface of the wafer W extending from this processing target surface in the direction away from the buff table 6-400 is oriented upward in the direction of gravitational force, a configuration may be adopted where the buff table 6-400 holds the wafer W such that the normal is oriented downward in the vertical direction. Alternatively, the buff table 6-400 may be configured such that the normal of the processing target surface of the wafer W extending from this the processing target surface in the direction away from the buff table 6-400 is oriented in the horizontal direction (a direction orthogonal to the direction of gravitational force). In these cases, the conditioner 6-800 may be oriented such that the processing surface of the conditioner 6-800 is oriented in the direction facing the processing surface of the buff pad 6-502.
The buff process modules 6-300A and 6-300B do not necessarily have the configuration included in the cleaning unit 6-4. Alternatively, these modules may be included in the polishing unit 6-3.
The embodiments of the present invention have been described above on the basis of the exemplary embodiments with reference to
| Number | Date | Country | Kind |
|---|---|---|---|
| 2014-171837 | Aug 2014 | JP | national |
| 2014-171841 | Aug 2014 | JP | national |
| 2014-185489 | Sep 2014 | JP | national |
| 2014-185508 | Sep 2014 | JP | national |
| 2014-195584 | Sep 2014 | JP | national |
| 2014-257563 | Dec 2014 | JP | national |
This application is a divisional of U.S. patent application Ser. No. 14/832,767 filed on Aug. 21, 2015; the entire contents are incorporated herein by reference.
| Number | Date | Country | |
|---|---|---|---|
| Parent | 14832767 | Aug 2015 | US |
| Child | 15604328 | US |
