TREA

Use in a chemical vapor deposition [CVD] process or in a similar process

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Industry

  • CPC
  • F04C2220/30
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Parent Industries

FMECHANICAL ENGINEERING LIGHTING HEATING WEAPONS BLASTING ENGINES OR PUMPS F04Liquid pumps F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS F04C2220/00Application

Current Industry

F04C2220/30Use in a chemical vapor deposition [CVD] process or in a similar process
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    VACUUM PUMPING
    • Publication number 20220090592
    • Publication date Mar 24, 2022
    • Edwards Limited
    • Gerald Robin Shelley
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    VACUUM EXHAUST SYSTEM AND CHANNEL-SWITCHING VALVE USED IN THIS VACU...
    • Publication number 20180003178
    • Publication date Jan 4, 2018
    • Edwards Limited
    • Nigel Paul Schofield
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    IMPROVEMENTS IN OR RELATING TO VACUUM PUMPING ARRANGEMENT
    • Publication number 20170350395
    • Publication date Dec 7, 2017
    • Edwards Limited
    • Nigel Paul SCHOFIELD
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    VACUUM PUMP WITH ABATEMENT FUNCTION
    • Publication number 20140295362
    • Publication date Oct 2, 2014
    • Kohtaro KAWAMURA
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    GAS EXHAUST PUMP SYSTEM AND GAS EXHAUST METHOD
    • Publication number 20140193283
    • Publication date Jul 10, 2014
    • TOHOKU UNIVERSITY
    • Kenji Ohyama
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    ROTATION MECHANISM FOR GAS EXHAUST PUMP, MANUFACTURING METHOD OF TH...
    • Publication number 20140186162
    • Publication date Jul 3, 2014
    • TOHOKU UNIVERSITY
    • Masamichi Iwaki
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    VACUUM PUMP
    • Publication number 20140112814
    • Publication date Apr 24, 2014
    • EBARA CORPORATION
    • Soichi Kudara
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    VACUUM PUMP
    • Publication number 20140112815
    • Publication date Apr 24, 2014
    • EBARA CORPORATION
    • Soichi Kudara
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    ROOTS PUMP AND EXHAUST METHOD
    • Publication number 20130336828
    • Publication date Dec 19, 2013
    • Kabushiki Kaisha Toshiba
    • Takashi OHTA
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Pump
    • Publication number 20130294957
    • Publication date Nov 7, 2013
    • Edwards Limited
    • Stephen Edward Downham
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    VACUUM PUMPING SYSTEM
    • Publication number 20130071274
    • Publication date Mar 21, 2013
    • EDWARDS LIMITED
    • Michael Andrew Galtry
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    RECLAIM FUNCTION FOR SEMICONDUCTOR PROCESSING SYSTEM
    • Publication number 20130028043
    • Publication date Jan 31, 2013
    • Air Liquide Electronics U.S. LP
    • Norbert FANJAT
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    SCROLL COMPRESSOR
    • Publication number 20130011288
    • Publication date Jan 10, 2013
    • EDWARDS LIMITED
    • Ian David Stones
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    ENERGY REDUCTION MODULE USING A DEPRESSURIZING VACUUM APPARATUS FOR...
    • Publication number 20120261011
    • Publication date Oct 18, 2012
    • YOUNG MAN CHO
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    VACUUM PUMP
    • Publication number 20120045322
    • Publication date Feb 23, 2012
    • EDWARDS LIMITED
    • Emmanuel Uzoma Okoroafor
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Method of Pumping Gas
    • Publication number 20090269231
    • Publication date Oct 29, 2009
    • EDWARDS LIMITED
    • Peter Hugh Birch
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Vacuum Pump
    • Publication number 20090214368
    • Publication date Aug 27, 2009
    • Nigel Paul Schofield
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Reclaim Function for Semiconductor Processing Systems
    • Publication number 20090141583
    • Publication date Jun 4, 2009
    • AIR LIQUIDE ELECTRONICS U.S. LP
    • Norbert Fanjat
    • G05 - CONTROLLING REGULATING
  • Information Patent Application

    Vacuum Apparatus
    • Publication number 20080206072
    • Publication date Aug 28, 2008
    • Foundation for Advancement of International Science
    • Tadahiro Ohmi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Composite dry vacuum pump having roots and screw rotor
    • Publication number 20080025858
    • Publication date Jan 31, 2008
    • LOT Vacuum Co., Ltd.
    • Tae-Kyong Hwang
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Vacuum pump
    • Publication number 20070172376
    • Publication date Jul 26, 2007
    • FOUNDATION FOR ADVANCEMENT OF INTERNATIONAL SCIENCE
    • Tadahiro Ohmi
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Systems and methods for reclaiming process fluids in a processing e...
    • Publication number 20070119816
    • Publication date May 31, 2007
    • Karl J. Urquhart
    • G05 - CONTROLLING REGULATING
  • Information Patent Application

    Fast enclosure pumping with power saving
    • Publication number 20070020111
    • Publication date Jan 25, 2007
    • ALCATEL
    • Jean-Luc Rival
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Rapidly pumping out an enclosure while limiting energy consumption
    • Publication number 20060222506
    • Publication date Oct 5, 2006
    • ALCATEL
    • Jean-Luc Rival
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Composite dry vacuum pump having roots rotor and screw rotor
    • Publication number 20060083651
    • Publication date Apr 20, 2006
    • Moon Gi Lim
    • F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
  • Information Patent Application

    Apparatus for controlling the pressure in a process chamber and met...
    • Publication number 20050217732
    • Publication date Oct 6, 2005
    • Martin Ernst Tollner
    • G05 - CONTROLLING REGULATING
  • Information Patent Application

    Manufacturing apparatus and method for predicting life of rotary ma...
    • Publication number 20050107984
    • Publication date May 19, 2005
    • Kabushiki Kaisha Toshiba
    • Shuichi Samata
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    Vacuum pumping system and method of controlling the same
    • Publication number 20040126244
    • Publication date Jul 1, 2004
    • The BOC Group plc
    • Derek Graeme Madgewick Savidge
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Fluid pump
    • Publication number 20040126255
    • Publication date Jul 1, 2004
    • Satoru Kuramoto
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
  • Information Patent Application

    Manufacturing apparatus and method for predicting life of rotary ma...
    • Publication number 20040064212
    • Publication date Apr 1, 2004
    • Shuichi Samata
    • F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...