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Industry
CPC
F04C2220/00
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
F
MECHANICAL ENGINEERING LIGHTING HEATING WEAPONS BLASTING ENGINES OR PUMPS
F04
Liquid pumps
F04C
ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
Current Industry
F04C2220/00
Application
Sub Industries
F04C2220/10
Vacuum
F04C2220/12
Dry running
F04C2220/20
Pumps with means for separating and evacuating the gaseous phase
F04C2220/22
for very low temperatures
F04C2220/24
for metering throughflow
F04C2220/26
for step-by-step output movement
F04C2220/28
for pulsed fluid flow
F04C2220/30
Use in a chemical vapor deposition [CVD] process or in a similar process
F04C2220/40
Pumps with means for venting areas other than the working chamber
F04C2220/50
Pumps with means for introducing gas under pressure for ballasting
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