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C23C16/45536
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Parent Industries
C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
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C23C16/45536
Use of plasma, radiation or electromagnetic fields
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Patents Grants
last 30 patents
Information
Patent Grant
Synthesis and use of precursors for ALD of molybdenum or tungsten c...
Patent number
12,365,981
Issue date
Jul 22, 2025
ASM IP Holding B.V.
Tiina McKee
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Methods for forming a boron nitride film by a plasma enhanced atomi...
Patent number
12,365,983
Issue date
Jul 22, 2025
ASM IP Holding B.V.
Atsuki Fukazawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
12,362,156
Issue date
Jul 15, 2025
Tokyo Electron Limited
Atsushi Kubo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing method and substrate processing apparatus
Patent number
12,362,142
Issue date
Jul 15, 2025
Tokyo Electron Limited
Takashi Chiba
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Hafnium aluminum oxide coatings deposited by atomic layer deposition
Patent number
12,351,910
Issue date
Jul 8, 2025
Applied Materials, Inc.
David Fenwick
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Hydrophobic low-dielectric-constant film and preparation method the...
Patent number
12,351,911
Issue date
Jul 8, 2025
JIANGSU FAVORED NANOTECHNOLOGY CO., LTD.
Jian Zong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming plasma coating
Patent number
12,347,652
Issue date
Jul 1, 2025
Applied Materials, Inc.
Lance A. Scudder
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of producing copper-containing layer
Patent number
12,344,931
Issue date
Jul 1, 2025
Adeka Corporation
Akihiro Nishida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor processing chamber for improved precursor flow
Patent number
12,340,979
Issue date
Jun 24, 2025
Applied Materials, Inc.
Tien Fak Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultraviolet radiation activated atomic layer deposition
Patent number
12,327,721
Issue date
Jun 10, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Christine Y. Ouyang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method
Patent number
12,325,915
Issue date
Jun 10, 2025
Picosun Oy
Timo Vähä-Ojala
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for processing substrate
Patent number
12,325,919
Issue date
Jun 10, 2025
Tokyo Electron Limited
Masahiro Tabata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Step coverage using an inhibitor molecule for high aspect ratio str...
Patent number
12,312,677
Issue date
May 27, 2025
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Wontae Noh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for depositing a tungsten or molybdenum layer in the presen...
Patent number
12,312,678
Issue date
May 27, 2025
Entegris, Inc.
Robert Wright
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Silylcyclodisilazane compound and method for manufacturing silicon-...
Patent number
12,304,924
Issue date
May 20, 2025
DNF Co., Ltd.
Se Jin Jang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Doped or undoped silicon carbide deposition and remote hydrogen pla...
Patent number
12,300,488
Issue date
May 13, 2025
Lam Research Corporation
Guangbi Yuan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method
Patent number
12,300,523
Issue date
May 13, 2025
Picosun Oy
Väinö Kilpi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Depositing coatings on and within housings, apparatus, or tools
Patent number
12,291,775
Issue date
May 6, 2025
Halliburton Energy Services, Inc.
James M. Price
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for film formation
Patent number
12,293,900
Issue date
May 6, 2025
Gallium Enterprises Pty Ltd.
Satyanarayan Barik
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Throughput improvement with interval conditioning purging
Patent number
12,291,777
Issue date
May 6, 2025
Lam Research Corporation
Chun-Hao Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for depositing gap filling fluids and related systems and d...
Patent number
12,293,942
Issue date
May 6, 2025
ASM IP Holding B.V.
Timothee Blanquart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device, substrate processing...
Patent number
12,288,683
Issue date
Apr 29, 2025
Kokusai Electric Corporation
Yasunobu Koshi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film deposition apparatus for fine pattern forming
Patent number
12,288,671
Issue date
Apr 29, 2025
Tokyo Electron Limited
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Modifying hydrophobicity of a wafer surface using an organosilicon...
Patent number
12,288,685
Issue date
Apr 29, 2025
Lam Research Corporation
Jeremy D. Fields
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing metal films
Patent number
12,281,387
Issue date
Apr 22, 2025
Applied Materials, Inc.
Feng Q. Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor deposition monitoring device
Patent number
12,283,497
Issue date
Apr 22, 2025
Samsung Electronics Co., Ltd.
Young Uk Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing method
Patent number
12,283,479
Issue date
Apr 22, 2025
ASM IP Holding B.V.
JaeOk Ko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cyclical deposition method and apparatus for filling a recess forme...
Patent number
12,272,593
Issue date
Apr 8, 2025
ASM IP Holding B.V.
Zecheng Liu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Formation of SiOC thin films
Patent number
12,272,546
Issue date
Apr 8, 2025
ASM IP Holding B.V.
Toshiya Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma-enhanced atomic layer deposition with radio-frequency power...
Patent number
12,270,103
Issue date
Apr 8, 2025
Lam Research Corporation
Jeremy David Fields
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20250236951
Publication date
Jul 24, 2025
TOKYO ELECTRON LIMITED
Yuta NAKANE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FILLING A GAP
Publication number
20250232974
Publication date
Jul 17, 2025
ASM IP HOLDING B.V.
Sungdae Woo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SELECTIVE CONTROL OF MULTI-STATION PROCESSING CHAMBER COMPONENTS
Publication number
20250230546
Publication date
Jul 17, 2025
LAM RESEARCH CORPORATION
Douglas Walter Agnew
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR FILM FORMATION
Publication number
20250232958
Publication date
Jul 17, 2025
Gallium Enterprises Pty Ltd
Satyanarayan Barik
C01 - INORGANIC CHEMISTRY
Information
Patent Application
SEAM PERFORMANCE IMPROVEMENT FOR LARGE AREA GAPFILL
Publication number
20250230540
Publication date
Jul 17, 2025
Applied Materials, Inc.
Supriya Ghosh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING
Publication number
20250226177
Publication date
Jul 10, 2025
TOKYO ELECTRON LIMITED
Kazuhide HASEBE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
Publication number
20250226207
Publication date
Jul 10, 2025
Kokusai Electric Corporation
Yasunobu KOSHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUSES FOR FILLING A GAP
Publication number
20250226214
Publication date
Jul 10, 2025
ASM IP HOLDING B.V.
Ranjit Borude
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20250218782
Publication date
Jul 3, 2025
SAMSUNG ELECTRONICS CO,. LTD.
Eunhyoung CHO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM-BASED THIN FILM MODIFIER, THIN FILM MODIFICATION COMPOSITION...
Publication number
20250207251
Publication date
Jun 26, 2025
Soulbrain Co., LTD
Chang Bong YEON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...
Publication number
20250210345
Publication date
Jun 26, 2025
Kokusai Electric Corporation
Kimihiko NAKATANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW-K DIELECTRIC PROTECTION DURING PLASMA DEPOSITION OF SILICON NIT...
Publication number
20250197996
Publication date
Jun 19, 2025
LAM RESEARCH CORPORATION
Awnish Gupta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA-ENHANCED ATOMIC LAYER DEPOSITION WITH RADIO-FREQUENCY POWER...
Publication number
20250197995
Publication date
Jun 19, 2025
LAM RESEARCH CORPORATION
Jeremy David Fields
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEAM-FREE AND CRACK-FREE DEPOSITION
Publication number
20250188609
Publication date
Jun 12, 2025
LAM RESEARCH CORPORATION
Awnish Gupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Device for Performing Plasma Treatment, and Method for Performing P...
Publication number
20250188610
Publication date
Jun 12, 2025
TOKYO ELECTRON LIMITED
Jianming HAO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SURFACE INHIBITION ATOMIC LAYER DEPOSITION
Publication number
20250179632
Publication date
Jun 5, 2025
LAM RESEARCH CORPORATION
Tao ZHANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
A SUBSTRATE PROCESSING APPARATUS AND A METHOD
Publication number
20250163580
Publication date
May 22, 2025
Picosun Oy
Antti KUITUNEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA SHOWERHEAD ASSEMBLY AND METHOD OF REDUCING DEFECTS
Publication number
20250163578
Publication date
May 22, 2025
Applied Materials, Inc.
Hanhong Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRECURSOR FOR FORMING METAL THIN FILM, MANUFACTURING METHOD USING T...
Publication number
20250154648
Publication date
May 15, 2025
Samsung Electronics Co., Ltd.
Hyunwoo KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH PRESSURE INERT OXIDATION AND IN-SITU ANNEALING PROCESS TO IMPR...
Publication number
20250154644
Publication date
May 15, 2025
LAM RESEARCH CORPORATION
Eli Jeon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR ETCHING FEATURES USING A TARGETED DEPOSITION FOR SELECTI...
Publication number
20250149330
Publication date
May 8, 2025
LAM RESEARCH CORPORATION
Wenchi LIU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS OF CONTROL FOR PLASMA PROCESSING
Publication number
20250149295
Publication date
May 8, 2025
TOKYO ELECTRON LIMITED
Alok Ranjan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
AREA SELECTIVE DEPOSITION OF HARDMASKS FOR VACUUM GAP FORMATION
Publication number
20250140550
Publication date
May 1, 2025
Noel Arellano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR TREATMENT OF HIGH-K MATERIALS TO REDUCE LEAKAGE CURRENT...
Publication number
20250132147
Publication date
Apr 24, 2025
Applied Materials, Inc.
Jae Young PARK
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HYDROGEN BARRIERS AND RELATED STRUCTURES, SYSTEMS, AND METHODS
Publication number
20250132149
Publication date
Apr 24, 2025
ASM IP HOLDING B.V.
Aditya Chauhan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PRECURSOR FOR FORMING YTTRIUM- OR SCANDIUM-CONTAINING THIN FILM, ME...
Publication number
20250122619
Publication date
Apr 17, 2025
SK TRI CHEM CO., LTD.
Han Sol OH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20250122617
Publication date
Apr 17, 2025
ASM IP HOLDING B.V.
Seungju Chun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PRECURSOR FOR FORMING LANTHANIDE METAL-CONTAINING THIN FILM, METHOD...
Publication number
20250122620
Publication date
Apr 17, 2025
SK TRI CHEM CO., LTD.
Han Sol OH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONTROL METHOD OF SUBSTRATE PROCESSING APPARATUS INCLUDING PARTIALL...
Publication number
20250125130
Publication date
Apr 17, 2025
TOKYO ELECTRON LIMITED
Sho KUMAKURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESSING CHAMBER WITH RF RETURN PATH
Publication number
20250118593
Publication date
Apr 10, 2025
Applied Materials, Inc.
Vellaichamy NAGAPPAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...