using a combination of discharges covered by two or more of groups C23C16/503 - C23C16/515

Industry

CPC
C23C16/517

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/517using a combination of discharges covered by two or more of groups C23C16/503 - C23C16/515

Industries

Patents Grantslast 30 patents

Information Patent Grant
Coating apparatus and coating method
- Patent number 11,898,248
- Issue date Feb 13, 2024
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alkoxysilacyclic or acyloxysilacyclic compounds and methods for dep...
- Patent number 11,884,689
- Issue date Jan 30, 2024
- Robert Gordon Ridgeway
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing a carbon hardmask by high power pulsed low frequency RF
- Patent number 11,837,441
- Issue date Dec 5, 2023
- Lam Research Corporation
- Matthew Scott Weimer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,810,758
- Issue date Nov 7, 2023
- Tokyo Electron Limited
- Satoshi Itou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a layer comprising a condensing and a curing step
- Patent number 11,643,726
- Issue date May 9, 2023
- ASM IP Holding B.V.
- Marko Tuominen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing dielectric material
- Patent number 11,631,591
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Bhargav S. Citla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system with tandem source activation for CVD
- Patent number 11,434,567
- Issue date Sep 6, 2022
- Lam Research Corporation
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing dielectric material
- Patent number 11,114,306
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Bhargav Citla
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 11,056,345
- Issue date Jul 6, 2021
- ASM IP Holding B.V.
- Atsuki Fukazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming metal oxide layer, and plasma-enhanced chemical...
- Patent number 11,004,677
- Issue date May 11, 2021
- Samsung Display Co., Ltd.
- Dong Kyun Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode assembly
- Patent number 10,984,990
- Issue date Apr 20, 2021
- Applied Materials, Inc.
- Ramesh Bokka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for depositing a coating on a substrate at atm...
- Patent number 10,752,994
- Issue date Aug 25, 2020
- The Board of Trustees of the University of Illinois
- David N. Ruzic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tandem source activation for CVD of films
- Patent number 10,577,688
- Issue date Mar 3, 2020
- Lam Research Corporation
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus with shower plate having protrusion for...
- Patent number 10,443,130
- Issue date Oct 15, 2019
- Tokyo Electron Limited
- Taro Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Projected plasma source
- Patent number 10,225,919
- Issue date Mar 5, 2019
- AES Global Holdings, PTE. LTD
- Daniel J. Hoffman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 10,217,613
- Issue date Feb 26, 2019
- Hitachi High-Technologies Corporation
- Tetsuo Kawanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for depositing a coating on a substrate at atm...
- Patent number 10,167,556
- Issue date Jan 1, 2019
- The Board of Trustees of the University of Illinois
- David N. Ruzic
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Microwave plasma reactors
- Patent number 9,890,457
- Issue date Feb 13, 2018
- Board of Trustees of Michigan State University
- Jes Asmussen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treating particles
- Patent number 9,884,766
- Issue date Feb 6, 2018
- PERPETUUS RESEARCH & DEVELOPMENT, LTD.
- John Buckland
- B08 - CLEANING
Information Patent Grant
Hybrid layers for use in coatings on electronic devices or other ar...
- Patent number 9,882,167
- Issue date Jan 30, 2018
- The Trustees of Princeton University
- Prashant Mandlik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for multizone plasma generation
- Patent number 9,809,881
- Issue date Nov 7, 2017
- Applied Materials, Inc.
- Matthew Scott Rogers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Energetic negative ion impact ionization plasma
- Patent number 9,799,494
- Issue date Oct 24, 2017
- Tokyo Electron Limited
- Lee Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tandem source activation for CVD of films
- Patent number 9,738,972
- Issue date Aug 22, 2017
- Lam Research Corporation
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and methods to reduce deposition asymmetry
- Patent number 9,580,796
- Issue date Feb 28, 2017
- Applied Materials, Inc.
- Alan Ritchie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond producing method and DC plasma enhanced CVD apparatus
- Patent number 9,534,315
- Issue date Jan 3, 2017
- Shin-Etsu Chemical Co., Ltd.
- Hitoshi Noguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RPS assisted RF plasma source for semiconductor processing
- Patent number 9,502,218
- Issue date Nov 22, 2016
- Applied Materials, Inc.
- Xinglong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-assisted chemical gas separation method having increased pla...
- Patent number 9,490,121
- Issue date Nov 8, 2016
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Jacob Reynvaan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structure including thin primer film and method of producing said s...
- Patent number 9,469,097
- Issue date Oct 18, 2016
- TAIYO YUDEN CHEMICAL TECHNOLOGY CO., LTD.
- Kunihiko Shibusawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hybrid layers for use in coatings on electronic devices or other ar...
- Patent number 9,252,391
- Issue date Feb 2, 2016
- The Trustees of Princeton University
- Prashant Mandlik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for plasma doping microfeature workpieces
- Patent number 8,975,603
- Issue date Mar 10, 2015
- Micron Technology, Inc.
- Shu Qin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF
- Publication number 20240234091
- Publication date Jul 11, 2024
- LAM RESEARCH CORPORATION
- Matthew Scott Weimer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALKOXYSILACYCLIC OR ACYLOXYSILACYCLIC COMPOUNDS AND METHODS FOR DEP...
- Publication number 20240182499
- Publication date Jun 6, 2024
- VERSUM MATERIALS US, LLC
- ROBERT GORDON RIDGEWAY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF
- Publication number 20240136153
- Publication date Apr 25, 2024
- LAM RESEARCH CORPORATION
- Matthew Scott Weimer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR DEPOSITING A LAYER
- Publication number 20230243036
- Publication date Aug 3, 2023
- ASM IP HOLDING B.V.
- Marko Tuominen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20230167554
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Tatsuo MATSUDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING APPARATUS
- Publication number 20230162996
- Publication date May 25, 2023
- Applied Materials, Inc.
- Yang YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DLC PREPARATION APPARATUS AND PREPARATION METHOD
- Publication number 20220380902
- Publication date Dec 1, 2022
- Jiangsu Favored Nanotechnology Co., Ltd.
- Jian ZONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING TOOL CAPABLE FOR FORMING CARBON LAYERS ON SUBSTRATES
- Publication number 20220246428
- Publication date Aug 4, 2022
- LAM RESEARCH CORPORATION
- Karl Frederick LEESER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR DEPOSITING A LAYER
- Publication number 20220235460
- Publication date Jul 28, 2022
- ASM IP HOLDING B.V.
- Marko Tuominen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN DIAMOND-LIKE CARBON...
- Publication number 20220216037
- Publication date Jul 7, 2022
- LAM RESEARCH CORPORATION
- Matthew Scott Weimer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING TOOL CAPABLE OF MODULATING ONE OR MORE PLASMA...
- Publication number 20220119954
- Publication date Apr 21, 2022
- Lee CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING DIELECTRIC MATERIAL
- Publication number 20210384040
- Publication date Dec 9, 2021
- Bhargav S. CITLA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating Apparatus and Coating Method
- Publication number 20210189567
- Publication date Jun 24, 2021
- Jiangsu Favored Nanotechnology Co., Ltd.
- Jian ZONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS AND DEVICE FOR DIAMOND SYNTHESIS BY CVD
- Publication number 20210172060
- Publication date Jun 10, 2021
- DIAROTECH
- Horacio TELLEZ OLIVA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALKOXYSILACYCLIC OR ACYLOXYSILACYCLIC COMPOUNDS AND METHODS FOR DEP...
- Publication number 20200354386
- Publication date Nov 12, 2020
- VERSUM MATERIALS US, LLC
- Robert Gordon Ridgeway
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM WITH TANDEM SOURCE ACTIVATION FOR CVD
- Publication number 20200199747
- Publication date Jun 25, 2020
- LAM RESEARCH CORPORATION
- Adrien LAVOIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING APPARATUS
- Publication number 20190393053
- Publication date Dec 26, 2019
- Applied Materials, Inc.
- Yang YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190131108
- Publication date May 2, 2019
- TOKYO ELECTRON LIMITED
- Satoshi ITOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR DEPOSITING A COATING ON A SUBSTRATE AT ATM...
- Publication number 20190093229
- Publication date Mar 28, 2019
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- David N. Ruzic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPLYING EQUALIZED PLASMA COUPLING DESIGN FOR MURA FREE SUSCEPTOR
- Publication number 20180218905
- Publication date Aug 2, 2018
- Applied Materials, Inc.
- Beom Soo PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
A METHOD AND A DEVICE FOR COATING AN ENDOPROSTHESIS HAVING A BASE BODY
- Publication number 20180135165
- Publication date May 17, 2018
- BIOTRONIK AG
- Christian Schwarz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Treating Particles
- Publication number 20180127274
- Publication date May 10, 2018
- PERPETUUS RESEARCH & DEVELOPMENT LIMITED
- John Buckland
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TANDEM SOURCE ACTIVATION FOR CVD OF FILMS
- Publication number 20170327947
- Publication date Nov 16, 2017
- LAM RESEARCH CORPORATION
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAMOND PRODUCING METHOD AND DC PLASMA ENHANCED CVD APPARATUS
- Publication number 20170073836
- Publication date Mar 16, 2017
- Shin-Etsu Chemical Co., Ltd.
- Hitoshi NOGUCHI
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS AND METHOD FOR DEPOSITING A COATING ON A SUBSTRATE AT ATM...
- Publication number 20150259802
- Publication date Sep 17, 2015
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- David N. Ruzic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Forming Ti-Containing Film by PEALD using TDMAT or TDEAT
- Publication number 20150099072
- Publication date Apr 9, 2015
- ASM IP HOLDING B.V.
- Noboru Takamure
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE PLASMA REACTORS
- Publication number 20140220261
- Publication date Aug 7, 2014
- Board of Trustees of Michigan State University
- Jes Asmussen
- C30 - CRYSTAL GROWTH
Information Patent Application
STRUCTURE INCLUDING THIN PRIMER FILM AND METHOD OF PRODUCING SAID S...
- Publication number 20140208968
- Publication date Jul 31, 2014
- Taiyo Chemical Industry Co., Ltd.
- Kunihiko Shibusawa
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
SYSTEMS AND METHODS FOR PLASMA DOPING MICROFEATURE WORKPIECES
- Publication number 20140144379
- Publication date May 29, 2014
- Micron Technology, Inc.
- Shu Qin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYBRID LAYERS FOR USE IN COATINGS ON ELECTRONIC DEVICES OR OTHER AR...
- Publication number 20140054574
- Publication date Feb 27, 2014
- UNIVERSAL DISPLAY CORPORATION
- Prashant MANDLIK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using a combination of discharges covered by two or more of groups C23C16/503 - C23C16/515

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Coating apparatus and coating method

Alkoxysilacyclic or acyloxysilacyclic compounds and methods for dep...

Depositing a carbon hardmask by high power pulsed low frequency RF

Plasma processing apparatus

Methods for forming a layer comprising a condensing and a curing step

Methods for depositing dielectric material

Substrate processing system with tandem source activation for CVD

Methods for depositing dielectric material

Method for manufacturing semiconductor device

Method for forming metal oxide layer, and plasma-enhanced chemical...

Electrode assembly

Apparatus and method for depositing a coating on a substrate at atm...

Tandem source activation for CVD of films

Plasma processing apparatus with shower plate having protrusion for...

Projected plasma source

Plasma processing apparatus

Apparatus and method for depositing a coating on a substrate at atm...

Microwave plasma reactors

Treating particles

Hybrid layers for use in coatings on electronic devices or other ar...

Method and apparatus for multizone plasma generation

Energetic negative ion impact ionization plasma

Tandem source activation for CVD of films

Deposition apparatus and methods to reduce deposition asymmetry

Diamond producing method and DC plasma enhanced CVD apparatus

RPS assisted RF plasma source for semiconductor processing

Plasma-assisted chemical gas separation method having increased pla...

Structure including thin primer film and method of producing said s...

Hybrid layers for use in coatings on electronic devices or other ar...

Systems and methods for plasma doping microfeature workpieces

Patents Applicationslast 30 patents

DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF

ALKOXYSILACYCLIC OR ACYLOXYSILACYCLIC COMPOUNDS AND METHODS FOR DEP...

DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF

METHODS AND SYSTEMS FOR DEPOSITING A LAYER

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

ETCHING APPARATUS

DLC PREPARATION APPARATUS AND PREPARATION METHOD

PROCESSING TOOL CAPABLE FOR FORMING CARBON LAYERS ON SUBSTRATES

METHODS AND SYSTEMS FOR DEPOSITING A LAYER

HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN DIAMOND-LIKE CARBON...

SUBSTRATE PROCESSING TOOL CAPABLE OF MODULATING ONE OR MORE PLASMA...

METHODS FOR DEPOSITING DIELECTRIC MATERIAL

Coating Apparatus and Coating Method

PROCESS AND DEVICE FOR DIAMOND SYNTHESIS BY CVD

ALKOXYSILACYCLIC OR ACYLOXYSILACYCLIC COMPOUNDS AND METHODS FOR DEP...

SUBSTRATE PROCESSING SYSTEM WITH TANDEM SOURCE ACTIVATION FOR CVD

ETCHING APPARATUS

PLASMA PROCESSING APPARATUS

APPARATUS AND METHOD FOR DEPOSITING A COATING ON A SUBSTRATE AT ATM...

APPLYING EQUALIZED PLASMA COUPLING DESIGN FOR MURA FREE SUSCEPTOR

A METHOD AND A DEVICE FOR COATING AN ENDOPROSTHESIS HAVING A BASE BODY

Treating Particles

TANDEM SOURCE ACTIVATION FOR CVD OF FILMS

DIAMOND PRODUCING METHOD AND DC PLASMA ENHANCED CVD APPARATUS

APPARATUS AND METHOD FOR DEPOSITING A COATING ON A SUBSTRATE AT ATM...

Method for Forming Ti-Containing Film by PEALD using TDMAT or TDEAT

MICROWAVE PLASMA REACTORS

STRUCTURE INCLUDING THIN PRIMER FILM AND METHOD OF PRODUCING SAID S...

SYSTEMS AND METHODS FOR PLASMA DOPING MICROFEATURE WORKPIECES

HYBRID LAYERS FOR USE IN COATINGS ON ELECTRONIC DEVICES OR OTHER AR...