using a load-lock chamber

Industry

CPC
C23C14/566

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/566using a load-lock chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Inverted cylindrical magnetron (ICM) system and methods of use
- Patent number 12,106,924
- Issue date Oct 1, 2024
- Vactronix Scientific, LLC.
- Tianzong Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,065,725
- Issue date Aug 20, 2024
- Kioxia Corporation
- Yuta Konno
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus and method for manufacturing metal gate structures
- Patent number 12,054,823
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chen-Yu Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method to evaporate an OLED layer stack in a vertical or...
- Patent number 11,972,964
- Issue date Apr 30, 2024
- Applied Materials, Inc.
- Sebastian Gunther Zang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply member with baffle
- Patent number 11,885,021
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Kartik Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum arrangement and method
- Patent number 11,887,867
- Issue date Jan 30, 2024
- VON ARDENNE Asset GmbH & Co. KG
- Torsten Dsaak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate flipping in vacuum for dual sided PVD sputtering
- Patent number 11,881,427
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- Harish Penmethsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-chamber substrate processing platform
- Patent number 11,860,528
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Ribhu Gautam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus methods for sequential workpiece coating
- Patent number 11,802,339
- Issue date Oct 31, 2023
- RTX Corporation
- James W. Neal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotating shaft sealing device and processing apparatus for semicond...
- Patent number 11,764,102
- Issue date Sep 19, 2023
- Sealink Corp.
- Hee Jang Rhee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-line coater for vacuum deposition of thin film coatings
- Patent number 11,732,349
- Issue date Aug 22, 2023
- OOO IZOVAK TEHNOLOGII
- Vladimir J. Shiripov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming system, magnetization characteristic measuring device,...
- Patent number 11,715,671
- Issue date Aug 1, 2023
- Tokyo Electron Limited
- Hiroaki Chihaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid system architecture for thin film deposition
- Patent number 11,694,913
- Issue date Jul 4, 2023
- Intevac, Inc.
- Terry Bluck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cleaning a vacuum system used in the manufacture of OLED...
- Patent number 11,673,170
- Issue date Jun 13, 2023
- Applied Materials, Inc.
- Jose Manuel Dieguez-Campo
- B08 - CLEANING
Information Patent Grant
Coating processes for vacuum chamber arrangements and apparatus the...
- Patent number 11,618,950
- Issue date Apr 4, 2023
- VON ARDENNE Asset GmbH & Co. KG
- Lutz Gottsmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum process apparatus and vacuum process method
- Patent number 11,600,295
- Issue date Mar 7, 2023
- Canon Anelva Corporation
- Hiroshi Yakushiji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for decreasing generation of surface oxide of alu...
- Patent number 11,597,999
- Issue date Mar 7, 2023
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Load lock device having optical measuring device for acquiring dist...
- Patent number 11,521,883
- Issue date Dec 6, 2022
- NANYA TECHNOLOGY CORPORATION
- Chia-Fu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System with dual-motion substrate carriers
- Patent number 11,414,748
- Issue date Aug 16, 2022
- Intevac, Inc.
- Terry Bluck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus, sputtering target, and method for forming sem...
- Patent number 11,309,181
- Issue date Apr 19, 2022
- Semiconductor Energy Laboratory Co., Ltd.
- Masahiro Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Iron nitride magnetic material including coated nanoparticles
- Patent number 11,195,644
- Issue date Dec 7, 2021
- Regents of The University of Minnesota
- Jian-Ping Wang
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Thin film coating method and the manufacturing line for its impleme...
- Patent number 11,174,548
- Issue date Nov 16, 2021
- THE BATTERIES SP. Z.O.O.
- Ayrat Khamitovich Khisamov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate positioning apparatus and methods
- Patent number 11,162,168
- Issue date Nov 2, 2021
- Applied Materials, Inc.
- Ala Moradian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply member with baffle
- Patent number 11,124,878
- Issue date Sep 21, 2021
- Applied Materials, Inc.
- Kartik Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inverted cylindrical magnetron (ICM) system and methods of use
- Patent number 11,004,644
- Issue date May 11, 2021
- VACTRONIX SCIENTIFIC, LLC
- Tianzong Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition apparatus and physical vapor deposition chamber
- Patent number 10,984,994
- Issue date Apr 20, 2021
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jun Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and use methods
- Patent number 10,889,895
- Issue date Jan 12, 2021
- Raytheon Technologies Corporation
- James W. Neal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ferroelectric ceramics, electronic component and manufacturing meth...
- Patent number 10,854,808
- Issue date Dec 1, 2020
- ADVANCED MATERIAL TECHNOLOGIES, INC.
- Takeshi Kijima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System architecture for combined static and pass-by processing
- Patent number 10,752,987
- Issue date Aug 25, 2020
- Intevac, Inc.
- Patrick Leahey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus
- Patent number 10,738,380
- Issue date Aug 11, 2020
- Canon Anelva Corporation
- Naoyuki Nozawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING LINE FOR DEPOSITING THIN-FILM COATINGS
- Publication number 20250011919
- Publication date Jan 9, 2025
- The Batteries Sp. Z.O.O.
- Ayrat K. KHISAMOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT
- Publication number 20240395514
- Publication date Nov 28, 2024
- Prashant AGARWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR MANUFACTURING METAL GATE STRUCTURES
- Publication number 20240337012
- Publication date Oct 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Yu Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE TREATMENT APPARATUS
- Publication number 20240318303
- Publication date Sep 26, 2024
- SHIBAURA MACHINE CO., LTD.
- Kazuhiro FUKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRESSING TOOL AND METHOD FOR PRODUCING A PRESS PLATE
- Publication number 20240278523
- Publication date Aug 22, 2024
- Hueck Rheinische GmbH
- Ali KAOUK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING DEVICE OF DISPLAY DEVICE
- Publication number 20240206307
- Publication date Jun 20, 2024
- Japan Display Inc.
- Takanobu TAKENAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS EQUIPMENT
- Publication number 20240153803
- Publication date May 9, 2024
- Applied Materials, Inc.
- Bhaskar PRASAD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VOLUME FILLING CASSETTE FOR LOAD LOCK
- Publication number 20240153733
- Publication date May 9, 2024
- Applied Materials, Inc.
- Michael Mason Carrell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS, VACUUM SYSTEM, GAS PARTIAL PRESSURE CO...
- Publication number 20240102154
- Publication date Mar 28, 2024
- Chun Cheng CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE
- Publication number 20240107865
- Publication date Mar 28, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shingo EGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE FLIPPING IN VACUUM FOR DUAL SIDED PVD SPUTTERING
- Publication number 20240096687
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Harish V PENMETHSA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOLECULAR BEAM EPITAXY THIN FILM GROWTH APPARATUS
- Publication number 20240084442
- Publication date Mar 14, 2024
- University of Ulsan Foundation for Industry Cooperation
- Eun Jung PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-chamber Configuration
- Publication number 20240087924
- Publication date Mar 14, 2024
- HINE AUTOMATION, LLC
- Joseph Arthur Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition Apparatus and Methods for Sequential Coating
- Publication number 20240068102
- Publication date Feb 29, 2024
- RTX Corporation
- James W. Neal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE
- Publication number 20240057464
- Publication date Feb 15, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shingo EGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VACUUM SYSTEM CLUSTER TOOL
- Publication number 20240026534
- Publication date Jan 25, 2024
- EMPA EIDGENOSSISCHE MATERIALPRUFUNGS- UND FORSCHUNGSANSTALT
- Carlos GUERRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230349036
- Publication date Nov 2, 2023
- TOKYO ELECTRON LIMITED
- Masato SHINADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR MULTI-CHAMBER PROCESSING TOOL HAVING LINK CHAMBER FOR ULTRA...
- Publication number 20230317478
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Robert Irwin DECOTTIGNIES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING INSTALLATION, CLAMPING RING AND MAGAZINE FOR SPECTACLE LENS...
- Publication number 20230279537
- Publication date Sep 7, 2023
- SCHNEIDER GMBH & CO. KG
- Gunter SCHNEIDER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING TH...
- Publication number 20230257869
- Publication date Aug 17, 2023
- QORVO BIOTECHNOLOGIES, LLC
- Derya Deniz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING A VACUUM SYSTEM USED IN THE MANUFACTURE OF OLED...
- Publication number 20230256483
- Publication date Aug 17, 2023
- Applied Materials, Inc.
- Jose Manuel DIEGUEZ-CAMPO
- B08 - CLEANING
Information Patent Application
METHOD OF OPERATING A PVD APPARATUS
- Publication number 20230212736
- Publication date Jul 6, 2023
- SPTS TECHNOLOGIES LIMITED
- Scott HAYMORE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE FLIPPING IN VACUUM FOR DUAL SIDED PVD SPUTTERING
- Publication number 20230103481
- Publication date Apr 6, 2023
- Applied Materials, Inc.
- Harish Penmethsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD OF TEACHING TRANSFER DEVICE
- Publication number 20230095452
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Tomoyuki OSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Load Lock Device Having Optical Measuring Device for Acquiring Dist...
- Publication number 20220285195
- Publication date Sep 8, 2022
- NANYA TECHNOLOGY CORPORATION
- CHIA-FU CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD TO EVAPORATE AN OLED LAYER STACK IN A VERTICAL OR...
- Publication number 20220254669
- Publication date Aug 11, 2022
- Applied Materials, Inc.
- Sebastian Gunther ZANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-Chamber Substrate Processing Platform
- Publication number 20220197128
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Ribhu Gautam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING LINE FOR DEPOSITING THIN-FILM COATINGS
- Publication number 20220145450
- Publication date May 12, 2022
- Ayrat K. KHISAMOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR SEALING A VACUUM CHAMBER, VACUUM PROCESSING SYSTEM, AND...
- Publication number 20220112594
- Publication date Apr 14, 2022
- Applied Materials, Inc.
- Mathew Dean ALLISON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR MANUFACTURING METAL GATE STRUCTURES
- Publication number 20220081759
- Publication date Mar 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Yu Lee
- H01 - BASIC ELECTRIC ELEMENTS

using a load-lock chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Inverted cylindrical magnetron (ICM) system and methods of use

Film forming apparatus and film forming method

Apparatus and method for manufacturing metal gate structures

System and method to evaporate an OLED layer stack in a vertical or...

Gas supply member with baffle

Vacuum arrangement and method

Substrate flipping in vacuum for dual sided PVD sputtering

Multi-chamber substrate processing platform

Deposition apparatus methods for sequential workpiece coating

Rotating shaft sealing device and processing apparatus for semicond...

In-line coater for vacuum deposition of thin film coatings

Film forming system, magnetization characteristic measuring device,...

Hybrid system architecture for thin film deposition

Method for cleaning a vacuum system used in the manufacture of OLED...

Coating processes for vacuum chamber arrangements and apparatus the...

Vacuum process apparatus and vacuum process method

Method and device for decreasing generation of surface oxide of alu...

Load lock device having optical measuring device for acquiring dist...

System with dual-motion substrate carriers

Sputtering apparatus, sputtering target, and method for forming sem...

Iron nitride magnetic material including coated nanoparticles

Thin film coating method and the manufacturing line for its impleme...

Substrate positioning apparatus and methods

Gas supply member with baffle

Inverted cylindrical magnetron (ICM) system and methods of use

Deposition apparatus and physical vapor deposition chamber

Deposition apparatus and use methods

Ferroelectric ceramics, electronic component and manufacturing meth...

System architecture for combined static and pass-by processing

Deposition apparatus

Patents Applicationslast 30 patents

PROCESSING LINE FOR DEPOSITING THIN-FILM COATINGS

MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT

APPARATUS AND METHOD FOR MANUFACTURING METAL GATE STRUCTURES

SURFACE TREATMENT APPARATUS

PRESSING TOOL AND METHOD FOR PRODUCING A PRESS PLATE

MANUFACTURING DEVICE OF DISPLAY DEVICE

SEMICONDUCTOR PROCESS EQUIPMENT

VOLUME FILLING CASSETTE FOR LOAD LOCK

VACUUM PROCESSING APPARATUS, VACUUM SYSTEM, GAS PARTIAL PRESSURE CO...

MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE

SUBSTRATE FLIPPING IN VACUUM FOR DUAL SIDED PVD SPUTTERING

MOLECULAR BEAM EPITAXY THIN FILM GROWTH APPARATUS

Multi-chamber Configuration

Deposition Apparatus and Methods for Sequential Coating

MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE

VACUUM SYSTEM CLUSTER TOOL

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

MODULAR MULTI-CHAMBER PROCESSING TOOL HAVING LINK CHAMBER FOR ULTRA...

COATING INSTALLATION, CLAMPING RING AND MAGAZINE FOR SPECTACLE LENS...

SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING TH...

METHOD FOR CLEANING A VACUUM SYSTEM USED IN THE MANUFACTURE OF OLED...

METHOD OF OPERATING A PVD APPARATUS

SUBSTRATE FLIPPING IN VACUUM FOR DUAL SIDED PVD SPUTTERING

SUBSTRATE PROCESSING SYSTEM AND METHOD OF TEACHING TRANSFER DEVICE

Load Lock Device Having Optical Measuring Device for Acquiring Dist...

SYSTEM AND METHOD TO EVAPORATE AN OLED LAYER STACK IN A VERTICAL OR...

Multi-Chamber Substrate Processing Platform

PROCESSING LINE FOR DEPOSITING THIN-FILM COATINGS

DEVICE FOR SEALING A VACUUM CHAMBER, VACUUM PROCESSING SYSTEM, AND...

APPARATUS AND METHOD FOR MANUFACTURING METAL GATE STRUCTURES