using a magnetic field in close vicinity to the substrate

Industry

CPC
C23C14/351

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/351using a magnetic field in close vicinity to the substrate

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Methods for shaping magnetic fields during semiconductor processing
- Patent number 12,203,163
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Goichi Yoshidome
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering device with microwave heating mechanism
- Patent number 12,195,842
- Issue date Jan 14, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Molin Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition of piezoelectric films
- Patent number 12,201,025
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Abhijeet Laxman Sangle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system and method
- Patent number 12,176,253
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition apparatus and method thereof
- Patent number 12,094,698
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 12,094,699
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and deposition method using the same
- Patent number 12,051,569
- Issue date Jul 30, 2024
- Samsung Display Co., Ltd.
- Kwan Yong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition method of a metallic layer on a substrate of a resonator...
- Patent number 12,043,891
- Issue date Jul 23, 2024
- SPTS Technologies Limited
- Scott Haymore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 12,000,036
- Issue date Jun 4, 2024
- SCREEN Holdings Co., Ltd.
- Hirofumi Tonai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,961,722
- Issue date Apr 16, 2024
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromagnet pulsing effect on PVD step coverage
- Patent number 11,952,655
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Kevin Kashefi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tilted PVD source with rotating pedestal
- Patent number 11,948,784
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Harish Penmethsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering system with a plurality of cathode assemblies
- Patent number 11,932,932
- Issue date Mar 19, 2024
- Alluxa, Inc.
- Michael A. Scobey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and a method of controlling thickness variation in a mate...
- Patent number 11,913,109
- Issue date Feb 27, 2024
- SPTS Technologies Limited
- Tony Wilby
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for generating magnetic fields during semiconductor proce...
- Patent number 11,915,915
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Suhas Bangalore Umesh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing a material
- Patent number 11,875,980
- Issue date Jan 16, 2024
- Stephen R Burgess
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for extended chamber for through silicon via...
- Patent number 11,846,013
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- David Gunther
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 11,810,770
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 11,784,033
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Mengxue Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system and method
- Patent number 11,728,226
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition apparatus and method thereof
- Patent number 11,688,591
- Issue date Jun 27, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for depositing aluminum by physical vapor dep...
- Patent number 11,670,485
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Siew Kit Hoi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with a multi-cathode
- Patent number 11,668,003
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Vibhu Jindal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and deposition method using the same
- Patent number 11,637,001
- Issue date Apr 25, 2023
- Samsung Display Co., Ltd.
- Kwan Yong Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Convertible magnetics for rotary cathode
- Patent number 11,629,399
- Issue date Apr 18, 2023
- Vapor Technologies, Inc.
- Sterling Walker Myers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus
- Patent number 11,608,555
- Issue date Mar 21, 2023
- Tokyo Electron Limited
- Manabu Nakagawasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron sputtering source and coating system arrangement
- Patent number 11,594,402
- Issue date Feb 28, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Othmar Züger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,521,840
- Issue date Dec 6, 2022
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical vapor deposition of piezoelectric films
- Patent number 11,489,105
- Issue date Nov 1, 2022
- Applied Materials, Inc.
- Abhijeet Laxman Sangle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering system with a plurality of cathode assemblies
- Patent number 11,479,847
- Issue date Oct 25, 2022
- Alluxa, Inc.
- Michael A. Scobey
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SPUTTERING MACHINES, SUBSTRATE HOLDERS, AND SPUTTERING PROCESSES WI...
- Publication number 20240337009
- Publication date Oct 10, 2024
- Virginia Commonwealth University
- Santiago Vargas GIRALDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER DEPOSITION SOURCE, MAGNETRON SPUTTER CATHODE, AND METHOD OF...
- Publication number 20240301546
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Thomas Werner Zilbauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20240279792
- Publication date Aug 22, 2024
- SCREEN Holdings Co., Ltd.
- Hirofumi TONAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and a Method of Controlling Thickness Variation in a Mate...
- Publication number 20240014018
- Publication date Jan 11, 2024
- SPTS TECHNOLOGIES LIMITED
- Tony WILBY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20230402271
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20230352350
- Publication date Nov 2, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Hao CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION DEVICE HAVING CONTACT STRUCTURE AND DEPOSITION SYSTEM HA...
- Publication number 20230340659
- Publication date Oct 26, 2023
- JOINSOLUTION CO., LTD.
- Sang Bin LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF
- Publication number 20230307218
- Publication date Sep 28, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER MAGNETRON FOR OPERATING WITH OTHER PLASMA SOURCES
- Publication number 20230282466
- Publication date Sep 7, 2023
- SCION PLASMA LLC
- LI QIN ZHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME
- Publication number 20230253190
- Publication date Aug 10, 2023
- SAMSUNG DISPLAY CO., LTD.
- Kwan Yong LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230175112
- Publication date Jun 8, 2023
- TOKYO ELECTRON LIMITED
- Shota ISHIBASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS
- Publication number 20230175113
- Publication date Jun 8, 2023
- Samsung Electronics Co., Ltd.
- Jaesuk KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering System with a Plurality of Cathode Assemblies
- Publication number 20230133160
- Publication date May 4, 2023
- Alluxa, Inc.
- Michael A. Scobey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TILTED PVD SOURCE WITH ROTATING PEDESTAL
- Publication number 20230130947
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Harish PENMETHSA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Controlling Stress Variation in a Material...
- Publication number 20230094699
- Publication date Mar 30, 2023
- SPTS Technologies Ltd.
- Anthony WILBY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE AND METHOD FOR PRODUCING LAYERS WITH IMPROVED UNIFORMITY IN...
- Publication number 20230067917
- Publication date Mar 2, 2023
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Michael VERGÖHL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION OF PIEZOELECTRIC FILMS
- Publication number 20230032638
- Publication date Feb 2, 2023
- Applied Materials, Inc.
- Abhijeet Laxman Sangle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER DEPOSITION
- Publication number 20220399195
- Publication date Dec 15, 2022
- Dyson Technology Limited
- Michael Edward RENDALL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR SHAPING MAGNETIC FIELDS DURING SEMICONDUCTOR PROCESSING
- Publication number 20220380888
- Publication date Dec 1, 2022
- Goichi YOSHIDOME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220384165
- Publication date Dec 1, 2022
- Mengxue WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF
- Publication number 20220367161
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR PHYSICAL VAPOR DEPOSITION
- Publication number 20220359174
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Yu-Young WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20220319819
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Koji MAEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FABRICATING SUPERCONDUCTING WIRE
- Publication number 20220319740
- Publication date Oct 6, 2022
- SuperOx Japan LLC
- Valery PETRYKIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CATHODIC ARC SOURCE
- Publication number 20220307125
- Publication date Sep 29, 2022
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Siegfried Krassnitzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING DEVICE
- Publication number 20220267893
- Publication date Aug 25, 2022
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Molin LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BIAS MAGNETIC FIELD CONTROL METHOD, MAGNETIC THIN FILM DEPOSITION M...
- Publication number 20220228253
- Publication date Jul 21, 2022
- Yujie GENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20220170147
- Publication date Jun 2, 2022
- SCREEN Holdings Co., Ltd.
- Hirofumi TONAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering System with a Plurality of Cathode Assemblies
- Publication number 20220112593
- Publication date Apr 14, 2022
- Alluxa, Inc.
- Michael A. Scobey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM WITH A MULTI-CATHODE
- Publication number 20220106679
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Vibhu Jindal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using a magnetic field in close vicinity to the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods for shaping magnetic fields during semiconductor processing

Sputtering device with microwave heating mechanism

Physical vapor deposition of piezoelectric films

Deposition system and method

Physical vapor deposition apparatus and method thereof

Methods and apparatus for controlling ion fraction in physical vapo...

Deposition apparatus and deposition method using the same

Deposition method of a metallic layer on a substrate of a resonator...

Substrate treating apparatus and substrate treating method

Method and apparatus for controlling stress variation in a material...

Electromagnet pulsing effect on PVD step coverage

Tilted PVD source with rotating pedestal

Sputtering system with a plurality of cathode assemblies

Apparatus and a method of controlling thickness variation in a mate...

Apparatus for generating magnetic fields during semiconductor proce...

Method and apparatus for depositing a material

Methods and apparatus for extended chamber for through silicon via...

Methods and apparatus for controlling ion fraction in physical vapo...

Methods and apparatus for processing a substrate

Deposition system and method

Physical vapor deposition apparatus and method thereof

Methods and apparatus for depositing aluminum by physical vapor dep...

Deposition system with a multi-cathode

Deposition apparatus and deposition method using the same

Convertible magnetics for rotary cathode

Sputtering apparatus

Magnetron sputtering source and coating system arrangement

Method and apparatus for controlling stress variation in a material...

Physical vapor deposition of piezoelectric films

Sputtering system with a plurality of cathode assemblies

Patents Applicationslast 30 patents

SPUTTERING MACHINES, SUBSTRATE HOLDERS, AND SPUTTERING PROCESSES WI...

SPUTTER DEPOSITION SOURCE, MAGNETRON SPUTTER CATHODE, AND METHOD OF...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

Apparatus and a Method of Controlling Thickness Variation in a Mate...

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...

DEPOSITION SYSTEM AND METHOD

DEPOSITION DEVICE HAVING CONTACT STRUCTURE AND DEPOSITION SYSTEM HA...

PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF

SPUTTER MAGNETRON FOR OPERATING WITH OTHER PLASMA SOURCES

DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME

FILM FORMING METHOD AND FILM FORMING APPARATUS

PHYSICAL VAPOR DEPOSITION APPARATUS

Sputtering System with a Plurality of Cathode Assemblies

TILTED PVD SOURCE WITH ROTATING PEDESTAL

Method and Apparatus for Controlling Stress Variation in a Material...

DEVICE AND METHOD FOR PRODUCING LAYERS WITH IMPROVED UNIFORMITY IN...

PHYSICAL VAPOR DEPOSITION OF PIEZOELECTRIC FILMS

SPUTTER DEPOSITION

METHODS FOR SHAPING MAGNETIC FIELDS DURING SEMICONDUCTOR PROCESSING

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF

APPARATUS AND METHOD FOR PHYSICAL VAPOR DEPOSITION

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

METHOD OF FABRICATING SUPERCONDUCTING WIRE

CATHODIC ARC SOURCE

SPUTTERING DEVICE

BIAS MAGNETIC FIELD CONTROL METHOD, MAGNETIC THIN FILM DEPOSITION M...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

Sputtering System with a Plurality of Cathode Assemblies

DEPOSITION SYSTEM WITH A MULTI-CATHODE