using a plurality of mechanically coupled spring-mass systems, the sensitive direction of each system being different

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GPHYSICS G01Measuring instruments G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT

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G01P2015/0848using a plurality of mechanically coupled spring-mass systems, the sensitive direction of each system being different

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Patents Grantslast 30 patents

Information Patent Grant
MEMS accelerometer
- Patent number 12,013,414
- Issue date Jun 18, 2024
- AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD
- Shitao Yan
- G01 - MEASURING TESTING
Information Patent Grant
MEMS tri-axial accelerometer with one or more decoupling elements
- Patent number 11,650,221
- Issue date May 16, 2023
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- G01 - MEASURING TESTING
Information Patent Grant
Micromechanical component and method for manufacturing a micromecha...
- Patent number 11,584,634
- Issue date Feb 21, 2023
- Robert Bosch GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Single proof mass based three-axis accelerometer
- Patent number 11,493,533
- Issue date Nov 8, 2022
- MEMSIC Semiconductor (TIANJIN) Co., Ltd.
- Leyue Jiang
- G01 - MEASURING TESTING
Information Patent Grant
Low-noise multi-axis MEMS accelerometer
- Patent number 11,467,181
- Issue date Oct 11, 2022
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- G01 - MEASURING TESTING
Information Patent Grant
Sensor with fixed and movble components
- Patent number 11,460,482
- Issue date Oct 4, 2022
- Kabushiki Kaisha Toshiba
- Akira Fujimoto
- G01 - MEASURING TESTING
Information Patent Grant
MEMS inertial measurement apparatus having slanted electrodes for q...
- Patent number 11,280,612
- Issue date Mar 22, 2022
- Georgia Tech Research Corporation
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Grant
MEMS inertial measurement apparatus having slanted electrodes for q...
- Patent number 11,280,613
- Issue date Mar 22, 2022
- Georgia Tech Research Corporation
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Grant
Single proof mass based three-axis accelerometer
- Patent number 11,150,265
- Issue date Oct 19, 2021
- MEMSIC Semiconductor (TIANJIN) Co., Ltd.
- Leyue Jiang
- G01 - MEASURING TESTING
Information Patent Grant
Single axis inertial sensor with suppressed parasitic modes
- Patent number 10,809,277
- Issue date Oct 20, 2020
- NXP USA, INC.
- Jun Tang
- G01 - MEASURING TESTING
Information Patent Grant
MEMS tri-axial accelerometer with one or more decoupling elements
- Patent number 10,768,199
- Issue date Sep 8, 2020
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- G01 - MEASURING TESTING
Information Patent Grant
Multi-axis accelerometers with reduced cross-axis sensitivity
- Patent number 10,634,696
- Issue date Apr 28, 2020
- Khalifa University of Science and Technology
- Zakriya Mohammed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS inertial measurement apparatus having slanted electrodes for q...
- Patent number 10,634,499
- Issue date Apr 28, 2020
- Georgia Tech Research Corporation
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Grant
Microelectromechanical accelerometer device
- Patent number 10,281,486
- Issue date May 7, 2019
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- G01 - MEASURING TESTING
Information Patent Grant
Micromachined monolithic 3-axis gyroscope with single drive
- Patent number 10,050,155
- Issue date Aug 14, 2018
- FAIRCHILD SEMICONDUCTOR CORPORATION
- Cenk Acar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Chip level sensor with multiple degrees of freedom
- Patent number 9,638,524
- Issue date May 2, 2017
- Robert Bosch GmbH
- Ando Feyh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS proof mass with split Z-axis portions
- Patent number 9,599,472
- Issue date Mar 21, 2017
- Fairchild Semiconductor Corporation
- Cenk Acar
- G01 - MEASURING TESTING
Information Patent Grant
Sensor with moving sensitive element having mixed vibrating and pen...
- Patent number 9,519,004
- Issue date Dec 13, 2016
- Sagem Defense Securite
- Alain Jeanroy
- G01 - MEASURING TESTING
Information Patent Grant
Micromachined 3-axis accelerometer with a single proof-mass
- Patent number 9,455,354
- Issue date Sep 27, 2016
- Fairchild Semiconductor Corporation
- Cenk Acar
- G01 - MEASURING TESTING
Information Patent Grant
Optomechanical inertial sensor
- Patent number 9,285,391
- Issue date Mar 15, 2016
- Intel Corporation
- David N. Hutchison
- G01 - MEASURING TESTING
Information Patent Grant
MEMS-based dual and single proof-mass accelerometer methods and app...
- Patent number 9,246,017
- Issue date Jan 26, 2016
- MCube, Inc.
- Dolf van der Heide
- G01 - MEASURING TESTING
Information Patent Grant
Micromachined monolithic 3-axis gyroscope with single drive
- Patent number 9,246,018
- Issue date Jan 26, 2016
- Fairchild Semiconductor Corporation
- Cenk Acar
- G01 - MEASURING TESTING
Information Patent Grant
MEMS proof mass with split z-axis portions
- Patent number 8,978,475
- Issue date Mar 17, 2015
- Fairchild Semiconductor Corporation
- Cenk Acar
- G01 - MEASURING TESTING
Information Patent Grant
Accelerometer
- Patent number 8,413,511
- Issue date Apr 9, 2013
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Zhou Ge
- G01 - MEASURING TESTING
Information Patent Grant
Vertically integrated MEMS acceleration transducer
- Patent number 8,186,221
- Issue date May 29, 2012
- FREESCALE SEMICONDUCTOR, INC.
- Yizhen Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Accelerometer
- Patent number 8,136,400
- Issue date Mar 20, 2012
- Physical Logic AG
- Noel Axelrod
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
- Publication number 20240300805
- Publication date Sep 12, 2024
- Murata Manufacturing Co., Ltd.
- Ville-Pekka RYTKÖNEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL AXIS ACCELEROMETER WITH COMPENSATION ELECTRODES
- Publication number 20240302405
- Publication date Sep 12, 2024
- InvenSense, Inc.
- Roberto Martini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR MANUFACTURING A MICROMECHA...
- Publication number 20220048758
- Publication date Feb 17, 2022
- ROBERT BOSCH GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SINGLE PROOF MASS BASED THREE-AXIS ACCELEROMETER
- Publication number 20210405084
- Publication date Dec 30, 2021
- MEMSIC Semiconductor (TIANJIN) Co., Ltd.
- Leyue Jiang
- G01 - MEASURING TESTING
Information Patent Application
LOW-NOISE MULTI-AXIS MEMS ACCELEROMETER
- Publication number 20210072280
- Publication date Mar 11, 2021
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- G01 - MEASURING TESTING
Information Patent Application
SENSOR
- Publication number 20210063432
- Publication date Mar 4, 2021
- Kabushiki Kaisha Toshiba
- Akira FUJIMOTO
- G01 - MEASURING TESTING
Information Patent Application
MEMS INERTIAL MEASUREMENT APPARATUS HAVING SLANTED ELECTRODES FOR Q...
- Publication number 20200225036
- Publication date Jul 16, 2020
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Application
MEMS INERTIAL MEASUREMENT APPARATUS HAVING SLANTED ELECTRODES FOR Q...
- Publication number 20200225037
- Publication date Jul 16, 2020
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Application
SINGLE AXIS INERTIAL SENSOR WITH SUPPRESSED PARASITIC MODES
- Publication number 20190187169
- Publication date Jun 20, 2019
- NXP USA, Inc.
- Jun Tang
- G01 - MEASURING TESTING
Information Patent Application
MEMS TRI-AXIAL ACCELEROMETER
- Publication number 20180120342
- Publication date May 3, 2018
- STMicroelectronics S.r.l.
- Alessandro TOCCHIO
- G01 - MEASURING TESTING
Information Patent Application
Chip Level Sensor with Multiple Degrees of Freedom
- Publication number 20140150552
- Publication date Jun 5, 2014
- ROBERT BOSCH GmbH
- Ando Feyh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMACHINED MONOLITHIC 3-AXIS GYROSCOPE WITH SINGLE DRIVE
- Publication number 20130328139
- Publication date Dec 12, 2013
- Fairchild Semiconductor Corporation
- Cenk Acar
- G01 - MEASURING TESTING
Information Patent Application
MICROMACHINED 3-AXIS ACCELEROMETER WITH A SINGLE PROOF-MASS
- Publication number 20130247666
- Publication date Sep 26, 2013
- Fairchild Semiconductor Corporation
- Cenk Acar
- G01 - MEASURING TESTING
Information Patent Application
MEMS-BASED DUAL AND SINGLE PROOF-MASS ACCELEROMETER METHODS AND APP...
- Publication number 20130214367
- Publication date Aug 22, 2013
- mCube, Incorporated
- Dolf van der Heide
- G01 - MEASURING TESTING
Information Patent Application
MEMS PROOF MASS WITH SPLIT Z-AXIS PORTIONS
- Publication number 20130192364
- Publication date Aug 1, 2013
- Cenk Acar
- G01 - MEASURING TESTING
Information Patent Application
INERTIA SENSING APPARATUS
- Publication number 20130042686
- Publication date Feb 21, 2013
- SITRONIX TECHNOLOGY CORP.
- CHIUNG-WEN LIN
- G01 - MEASURING TESTING
Information Patent Application
ACCELEROMETER
- Publication number 20110296916
- Publication date Dec 8, 2011
- Zhou Ge
- G01 - MEASURING TESTING
Information Patent Application
DUAL-AXIS ACCELERATION DETECTION ELEMENT
- Publication number 20110179870
- Publication date Jul 28, 2011
- Chun-Kai CHAN
- G01 - MEASURING TESTING
Information Patent Application
VERTICALLY INTEGRATED MEMS ACCELERATION TRANSDUCER
- Publication number 20100242600
- Publication date Sep 30, 2010
- FREESCALE SEMICONDUCTOR, INC.
- Yizhen Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Accelerometer
- Publication number 20090139331
- Publication date Jun 4, 2009
- Physical Logic AG
- Noel Axelrod
- G01 - MEASURING TESTING

using a plurality of mechanically coupled spring-mass systems, the sensitive direction of each system being different

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS accelerometer

MEMS tri-axial accelerometer with one or more decoupling elements

Micromechanical component and method for manufacturing a micromecha...

Single proof mass based three-axis accelerometer

Low-noise multi-axis MEMS accelerometer

Sensor with fixed and movble components

MEMS inertial measurement apparatus having slanted electrodes for q...

MEMS inertial measurement apparatus having slanted electrodes for q...

Single proof mass based three-axis accelerometer

Single axis inertial sensor with suppressed parasitic modes

MEMS tri-axial accelerometer with one or more decoupling elements

Multi-axis accelerometers with reduced cross-axis sensitivity

MEMS inertial measurement apparatus having slanted electrodes for q...

Microelectromechanical accelerometer device

Micromachined monolithic 3-axis gyroscope with single drive

Chip level sensor with multiple degrees of freedom

MEMS proof mass with split Z-axis portions

Sensor with moving sensitive element having mixed vibrating and pen...

Micromachined 3-axis accelerometer with a single proof-mass

Optomechanical inertial sensor

MEMS-based dual and single proof-mass accelerometer methods and app...

Micromachined monolithic 3-axis gyroscope with single drive

MEMS proof mass with split z-axis portions

Accelerometer

Vertically integrated MEMS acceleration transducer

Accelerometer

Patents Applicationslast 30 patents

IN-PLANE AND OUT-OF-PLANE ACCELEROMETER

DUAL AXIS ACCELEROMETER WITH COMPENSATION ELECTRODES

MICROMECHANICAL COMPONENT AND METHOD FOR MANUFACTURING A MICROMECHA...

SINGLE PROOF MASS BASED THREE-AXIS ACCELEROMETER

LOW-NOISE MULTI-AXIS MEMS ACCELEROMETER

SENSOR

MEMS INERTIAL MEASUREMENT APPARATUS HAVING SLANTED ELECTRODES FOR Q...

MEMS INERTIAL MEASUREMENT APPARATUS HAVING SLANTED ELECTRODES FOR Q...

SINGLE AXIS INERTIAL SENSOR WITH SUPPRESSED PARASITIC MODES

MEMS TRI-AXIAL ACCELEROMETER

Chip Level Sensor with Multiple Degrees of Freedom

MICROMACHINED MONOLITHIC 3-AXIS GYROSCOPE WITH SINGLE DRIVE

MICROMACHINED 3-AXIS ACCELEROMETER WITH A SINGLE PROOF-MASS

MEMS-BASED DUAL AND SINGLE PROOF-MASS ACCELEROMETER METHODS AND APP...

MEMS PROOF MASS WITH SPLIT Z-AXIS PORTIONS

INERTIA SENSING APPARATUS

ACCELEROMETER

DUAL-AXIS ACCELERATION DETECTION ELEMENT

VERTICALLY INTEGRATED MEMS ACCELERATION TRANSDUCER

Accelerometer