using air tracks

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CPC
H01L21/67784

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67784using air tracks

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method
- Patent number 12,221,296
- Issue date Feb 11, 2025
- Semes Co., Ltd.
- Ho Chul Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer device, processing system, and transfer method
- Patent number 12,170,216
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Shinya Okano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser irradiation apparatus
- Patent number 12,148,644
- Issue date Nov 19, 2024
- JSW AKTINA SYSTEM CO., LTD.
- Yuki Suzuki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Flotation conveyance apparatus and laser processing apparatus
- Patent number 12,103,790
- Issue date Oct 1, 2024
- JSW AKTINA SYSTEM CO., LTD.
- Takahiro Fuji
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Guided transport path correction
- Patent number 12,028,991
- Issue date Jul 2, 2024
- Kateeva, Inc.
- Eliyahu Vronsky
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for load-locked printing
- Patent number 11,926,902
- Issue date Mar 12, 2024
- Kateeva, Inc.
- Sass Somekh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for load-locked printing
- Patent number 11,802,331
- Issue date Oct 31, 2023
- Kateeva, Inc.
- Sass Somekh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Laser irradiation apparatus
- Patent number 11,688,622
- Issue date Jun 27, 2023
- JSW AKTINA SYSTEM CO., LTD.
- Yuki Suzuki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Printing system assemblies and methods
- Patent number 11,626,311
- Issue date Apr 11, 2023
- Kateeva, Inc.
- Robert B. Lowrance
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Air conditioner, unit for floating conveying substrate with air con...
- Patent number 11,605,549
- Issue date Mar 14, 2023
- Shinwa Controls Co., Ltd.
- Shunji Yamaguchi
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Micro LED transfer system
- Patent number 11,581,210
- Issue date Feb 14, 2023
- POINT ENGINEERING CO., LTD.
- Bum Mo Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques for electronic device encapsulation
- Patent number 11,489,119
- Issue date Nov 1, 2022
- Kateeva, Inc.
- Alexander Sou-Kang Ko
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Laser irradiation apparatus, laser irradiation method, and method o...
- Patent number 11,446,762
- Issue date Sep 20, 2022
- JSW AKTINA SYSTEM CO., LTD.
- Takahiro Fuji
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser irradiation apparatus, laser irradiation method, and method o...
- Patent number 11,355,343
- Issue date Jun 7, 2022
- JSW AKTINA SYSTEM CO., LTD.
- Takahiro Mikami
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser irradiation apparatus, laser irradiation method, and method f...
- Patent number 11,348,787
- Issue date May 31, 2022
- JSW AKTINA SYSTEM CO., LTD.
- Yuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cushion apparatus and techniques for substrate coating
- Patent number 11,338,319
- Issue date May 24, 2022
- Kateeva, Inc.
- Alexander Sou-Kang Ko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Swirl-flow forming body
- Patent number 11,339,010
- Issue date May 24, 2022
- HARMOTEC CO., LTD.
- Hideyuki Tokunaga
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Atomic layer deposition apparatus and method for processing substra...
- Patent number 11,339,474
- Issue date May 24, 2022
- ASM International N.V.
- Ernst Hendrik August Granneman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece conveyance apparatus, semiconductor manufacturing apparat...
- Patent number 11,264,259
- Issue date Mar 1, 2022
- The Japan Steel Works, Ltd.
- Ryo Shimizu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Guided transport path correction
- Patent number 11,234,334
- Issue date Jan 25, 2022
- Kateeva, Inc.
- Eliyahu Vronsky
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Method and apparatus for load-locked printing
- Patent number 11,230,757
- Issue date Jan 25, 2022
- Kateeva, Inc.
- Sass Somekh
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Swirl flow-forming body and suction device
- Patent number 11,008,180
- Issue date May 18, 2021
- HARMOTEC CO., LTD.
- Hitoshi Iwasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate coating apparatus for floating substrate and method
- Patent number 10,991,608
- Issue date Apr 27, 2021
- Tokyo Electron Limited
- Yousuke Mine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inclined air conveyor destacking apparatus
- Patent number 10,865,056
- Issue date Dec 15, 2020
- FIVES INTRALOGISTICS S.P.A. CON SOCIO UNICO
- Carmine Filella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for load-locked printing
- Patent number 10,851,450
- Issue date Dec 1, 2020
- Kateeva, Inc.
- Sass Somekh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for contactlessly advancing substrates
- Patent number 10,837,107
- Issue date Nov 17, 2020
- ASM International N.V.
- Ernst Hendrik August Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,738,382
- Issue date Aug 11, 2020
- ASM International N.V.
- Ernst Hendrik August Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Noncontact support platform with edge lifting
- Patent number 10,689,209
- Issue date Jun 23, 2020
- Core Flow Ltd.
- Ronen Lautman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for depositing atomic layers on a substrate
- Patent number 10,676,822
- Issue date Jun 9, 2020
- Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Adrianus Johannes Petrus Maria Vermeer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Laser irradiation apparatus, method for manufacturing semiconductor...
- Patent number 10,658,185
- Issue date May 19, 2020
- The Japan Steel Works, Ltd.
- Ryo Shimizu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
GUIDED TRANSPORT PATH CORRECTION
- Publication number 20240314941
- Publication date Sep 19, 2024
- Kateeva, Inc.
- Eliyahu Vronsky
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD AND APPARATUS FOR LOAD-LOCKED PRINTING
- Publication number 20240167143
- Publication date May 23, 2024
- Kateeva, Inc.
- Sass Somekh
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
CONVEYANCE APPARATUS, CONVEYANCE METHOD, AND METHOD FOR MANUFACTURI...
- Publication number 20240120198
- Publication date Apr 11, 2024
- JSW Aktina System Co., Ltd.
- Yoshihiro YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYNCHRONOUS SUBSTRATE TRANSPORT AND ELECTRICAL PROBING
- Publication number 20240112935
- Publication date Apr 4, 2024
- Photon Dynamics, Inc.
- Neil Dang Nguyen
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20240092591
- Publication date Mar 21, 2024
- SEMES CO., LTD.
- Ho Chul CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRINTING SYSTEM ASSEMBLIES AND METHODS
- Publication number 20230290667
- Publication date Sep 14, 2023
- Kateeva, Inc.
- Robert B. Lowrance
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER IRRADIATION APPARATUS
- Publication number 20230274964
- Publication date Aug 31, 2023
- JSW Aktina System Co., Ltd.
- Yuki SUZUKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
TRANSFER DEVICE, PROCESSING SYSTEM, AND TRANSFER METHOD
- Publication number 20230038276
- Publication date Feb 9, 2023
- TOKYO ELECTRON LIMITED
- Shinya OKANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGING SPINDLE ARMS TO PREVENT DEPOSITION AND WAFER SLIDING
- Publication number 20230005776
- Publication date Jan 5, 2023
- LAM RESEARCH CORPORATION
- Prasanna KULKARNI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES FOR ELECTRONIC DEVICE ENCAPSULATION
- Publication number 20220399499
- Publication date Dec 15, 2022
- Kateeva, Inc.
- Alexander Sou-Kang KO
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD AND APPARATUS FOR LOAD-LOCKED PRINTING
- Publication number 20220290286
- Publication date Sep 15, 2022
- Kateeva, Inc.
- Sass Somekh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYNCHRONOUS SUBSTRATE TRANSPORT AND ELECTRICAL PROBING
- Publication number 20220208579
- Publication date Jun 30, 2022
- Photon Dynamics, Inc.
- Neil Dang Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR LOAD-LOCKED PRINTING
- Publication number 20210040595
- Publication date Feb 11, 2021
- Kateeva, Inc.
- Sass Somekh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION APPARATUS AND METHOD FOR PROCESSING SUBSTRA...
- Publication number 20200263300
- Publication date Aug 20, 2020
- ASM INTERNATIONAL N.V.
- Ernst Hendrik August Granneman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER IRRADIATION APPARATUS, LASER IRRADIATION METHOD, AND METHOD F...
- Publication number 20200219724
- Publication date Jul 9, 2020
- THE JAPAN STEEL WORKS, LTD
- Yuki SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SWIRL FLOW-FORMING BODY AND SUCTION DEVICE
- Publication number 20200140211
- Publication date May 7, 2020
- HARMOTEC CO., LTD.
- Hitoshi IWASAKA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
AIR CONDITIONER, UNIT FOR FLOATING CONVEYING SUBSTRATE WITH AIR CON...
- Publication number 20200126834
- Publication date Apr 23, 2020
- Shinwa Controls Co., Ltd
- SHUNJI YAMAGUCHI
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
HOT AIR SUPPLYING HEAD FOR TRANSFERRING MICRO LED AND MICRO LED TRA...
- Publication number 20200043771
- Publication date Feb 6, 2020
- POINT ENGINEERING CO., LTD.
- Bum Mo AHN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES FOR ELECTRONIC DEVICE ENCAPSULATION
- Publication number 20200009597
- Publication date Jan 9, 2020
- Kateeva, Inc.
- Alexander Sou-Kang KO
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
GAS CUSHION APPARATUS AND TECHNIQUES FOR SUBSTRATE COATING
- Publication number 20190388928
- Publication date Dec 26, 2019
- Kateeva, Inc.
- Alexander Sou-Kang KO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LASER IRRADIATION APPARATUS
- Publication number 20190164798
- Publication date May 30, 2019
- THE JAPAN STEEL WORKS, LTD
- Yuki SUZUKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
GRIP APPARATUS AND SUBSTRATE INSPECTION SYSTEM INCLUDING THE SAME,...
- Publication number 20190092580
- Publication date Mar 28, 2019
- Samsung Electronics Co., Ltd.
- KUIHYUN YOON
- G01 - MEASURING TESTING
Information Patent Application
ENVIRONMENTALLY CONTROLLED COATING SYSTEMS
- Publication number 20190019695
- Publication date Jan 17, 2019
- Kateeva, Inc.
- Conor F. Madigan
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
NONCONTACT CONVEYING APPARATUS AND NONCONTACT CONVEYING SYSTEM
- Publication number 20190013228
- Publication date Jan 10, 2019
- NANO TEM CO., LTD.
- Atsushi TAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE CONVEYANCE APPARATUS, SEMICONDUCTOR MANUFACTURING APPARAT...
- Publication number 20180315633
- Publication date Nov 1, 2018
- THE JAPAN STEEL WORKS, LTD
- Ryo SHIMIZU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITING ATOMIC LAYERS ON A SUBSTRATE
- Publication number 20180037994
- Publication date Feb 8, 2018
- NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Adrianus Johannes Petrus Maria VERMEER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WORKPIECE LOADER FOR A WET PROCESSING SYSTEM
- Publication number 20170372938
- Publication date Dec 28, 2017
- TEL NEXX, Inc.
- Arthur Keigler
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SEMICONDUCTOR DEVICE PROCESSING METHOD FOR MATERIAL REMOVAL
- Publication number 20170221719
- Publication date Aug 3, 2017
- DECA TECHNOLOGIES INC
- Timothy L. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION APPARATUS AND METHOD FOR PROCESSING SUBSTRA...
- Publication number 20170167020
- Publication date Jun 15, 2017
- ASM INTERNATIONAL N.V.
- Ernst Hendrik August Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160281233
- Publication date Sep 29, 2016
- ASM INTERNATIONAL N.V.
- Ernst Hendrik August Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

using air tracks

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus and method

Transfer device, processing system, and transfer method

Laser irradiation apparatus

Flotation conveyance apparatus and laser processing apparatus

Guided transport path correction

Method and apparatus for load-locked printing

Method and apparatus for load-locked printing

Laser irradiation apparatus

Printing system assemblies and methods

Air conditioner, unit for floating conveying substrate with air con...

Micro LED transfer system

Apparatus and techniques for electronic device encapsulation

Laser irradiation apparatus, laser irradiation method, and method o...

Laser irradiation apparatus, laser irradiation method, and method o...

Laser irradiation apparatus, laser irradiation method, and method f...

Gas cushion apparatus and techniques for substrate coating

Swirl-flow forming body

Atomic layer deposition apparatus and method for processing substra...

Workpiece conveyance apparatus, semiconductor manufacturing apparat...

Guided transport path correction

Method and apparatus for load-locked printing

Swirl flow-forming body and suction device

Substrate coating apparatus for floating substrate and method

Inclined air conveyor destacking apparatus

Method and apparatus for load-locked printing

Method and apparatus for contactlessly advancing substrates

Substrate processing apparatus

Noncontact support platform with edge lifting

Method and apparatus for depositing atomic layers on a substrate

Laser irradiation apparatus, method for manufacturing semiconductor...

Patents Applicationslast 30 patents

GUIDED TRANSPORT PATH CORRECTION

METHOD AND APPARATUS FOR LOAD-LOCKED PRINTING

CONVEYANCE APPARATUS, CONVEYANCE METHOD, AND METHOD FOR MANUFACTURI...

SYNCHRONOUS SUBSTRATE TRANSPORT AND ELECTRICAL PROBING

SUBSTRATE PROCESSING APPARATUS AND METHOD

PRINTING SYSTEM ASSEMBLIES AND METHODS

LASER IRRADIATION APPARATUS

TRANSFER DEVICE, PROCESSING SYSTEM, AND TRANSFER METHOD

PURGING SPINDLE ARMS TO PREVENT DEPOSITION AND WAFER SLIDING

APPARATUS AND TECHNIQUES FOR ELECTRONIC DEVICE ENCAPSULATION

METHOD AND APPARATUS FOR LOAD-LOCKED PRINTING

SYNCHRONOUS SUBSTRATE TRANSPORT AND ELECTRICAL PROBING

METHOD AND APPARATUS FOR LOAD-LOCKED PRINTING

ATOMIC LAYER DEPOSITION APPARATUS AND METHOD FOR PROCESSING SUBSTRA...

LASER IRRADIATION APPARATUS, LASER IRRADIATION METHOD, AND METHOD F...

SWIRL FLOW-FORMING BODY AND SUCTION DEVICE

AIR CONDITIONER, UNIT FOR FLOATING CONVEYING SUBSTRATE WITH AIR CON...

HOT AIR SUPPLYING HEAD FOR TRANSFERRING MICRO LED AND MICRO LED TRA...

APPARATUS AND TECHNIQUES FOR ELECTRONIC DEVICE ENCAPSULATION

GAS CUSHION APPARATUS AND TECHNIQUES FOR SUBSTRATE COATING

LASER IRRADIATION APPARATUS

GRIP APPARATUS AND SUBSTRATE INSPECTION SYSTEM INCLUDING THE SAME,...

ENVIRONMENTALLY CONTROLLED COATING SYSTEMS

NONCONTACT CONVEYING APPARATUS AND NONCONTACT CONVEYING SYSTEM

WORKPIECE CONVEYANCE APPARATUS, SEMICONDUCTOR MANUFACTURING APPARAT...

METHOD AND APPARATUS FOR DEPOSITING ATOMIC LAYERS ON A SUBSTRATE

WORKPIECE LOADER FOR A WET PROCESSING SYSTEM

SEMICONDUCTOR DEVICE PROCESSING METHOD FOR MATERIAL REMOVAL

ATOMIC LAYER DEPOSITION APPARATUS AND METHOD FOR PROCESSING SUBSTRA...

SUBSTRATE PROCESSING APPARATUS